公开(公告)号：US07724411B2

公开(公告)日：2010-05-25

申请号：US12045722

申请日：2008-03-11

申请人： Young-chul Ko ,  Jun-o Kim ,  Jin-woo Cho ,  Hee-moon Jeong ,  Woo-hyek Choi

发明人： Young-chul Ko ,  Jun-o Kim ,  Jin-woo Cho ,  Hee-moon Jeong ,  Woo-hyek Choi

IPC分类号： G02B26/08

CPC分类号： G02B26/085 ,  G02B26/101

摘要： A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.

摘要翻译： 提供具有将反射镜与驱动单元分离并直接驱动的结构的2轴驱动电磁扫描器。 电磁扫描器包括：能够围绕第一轴线旋转的外部驱动单元; 内部驱动单元，其从所述外部驱动单元悬挂以围绕垂直于所述第一轴线的第二轴线旋转; 以及位于内驱动单元的上表面上以与内驱动单元一起旋转的台。 在电磁扫描器中，通过从台的下表面的中心突出的连杆单元将台连接到内驱动单元。

公开(公告)号：US20090080049A1

公开(公告)日：2009-03-26

申请号：US12045722

申请日：2008-03-11

申请人： Young-chul KO ,  Jun-o Kim ,  Jin-woo Cho ,  Hee-moon Jeong ,  Woo-hyek Choi

发明人： Young-chul KO ,  Jun-o Kim ,  Jin-woo Cho ,  Hee-moon Jeong ,  Woo-hyek Choi

IPC分类号： G02B26/08

CPC分类号： G02B26/085 ,  G02B26/101

摘要： A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.

摘要翻译： 提供具有将反射镜与驱动单元分离并直接驱动的结构的2轴驱动电磁扫描器。 电磁扫描器包括：能够围绕第一轴线旋转的外部驱动单元; 内部驱动单元，其从所述外部驱动单元悬挂以围绕垂直于所述第一轴线的第二轴线旋转; 以及位于内驱动单元的上表面上以与内驱动单元一起旋转的台。 在电磁扫描器中，通过从台的下表面的中心突出的连杆单元将台连接到内驱动单元。

公开(公告)号：US07880571B2

公开(公告)日：2011-02-01

申请号：US11862233

申请日：2007-09-27

申请人： Young-chul Ko ,  Jin-woo Cho ,  Woo-hyek Choi ,  Hee-moon Jung

发明人： Young-chul Ko ,  Jin-woo Cho ,  Woo-hyek Choi ,  Hee-moon Jung

IPC分类号： H01H51/22 ,  H04R25/00 ,  G02B26/08 ,  G02B26/10 ,  G02B26/12

CPC分类号： G02B26/085 ,  G02B26/101 ,  H01F7/08 ,  H01F7/122 ,  H01F7/14 ,  H01F2007/068 ,  H01F2007/1692 ,  H02K16/04 ,  H02K41/0354 ,  H02K2201/18

摘要： Provided is a two-axis driving electromagnetic actuator that includes a stage that is operative to be actuated about a first axis; an inner frame that that is disposed outside the stage and supports the stage by the first axis; an external frame that is disposed outside the inner frame and supports the inner frame by a second axis which is perpendicular to the first axis; a magnet that provides an electric field between the first axis and the second axis; a first driving coil that is formed on the inner frame and to which a first signal that actuates the stage in a direction of the second axis is applied; and a second driving coil that is formed on the inner frame and to which a second signal that actuates the stage and the inner frame in a direction of the first axis is applied, wherein the first driving coil and the second driving coil are electrically separated from each other.

摘要翻译： 提供了一种双轴驱动电磁致动器，其包括可围绕第一轴线致动的台架; 内框架，其设置在所述台架之外并且通过所述第一轴线支撑所述台架; 外部框架，其设置在所述内框架的外部并且通过垂直于所述第一轴线的第二轴线支撑所述内框架; 磁体，其在所述第一轴线和所述第二轴线之间提供电场; 第一驱动线圈，其形成在所述内框上，并且施加沿所述第二轴的方向致动所述台的第一信号; 以及第二驱动线圈，其形成在所述内框上，并且施加在所述第一轴的方向上致动所述台和所述内框架的第二信号，其中所述第一驱动线圈和所述第二驱动线圈与 彼此。

公开(公告)号：US20080007376A1

公开(公告)日：2008-01-10

申请号：US11711057

申请日：2007-02-27

申请人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul KO ,  Hyun-ku Jeong

发明人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul KO ,  Hyun-ku Jeong

IPC分类号： H01F7/08 ,  G01R27/26

CPC分类号： G02B26/085 ,  H01F7/066 ,  H01F2007/068

摘要： A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

摘要翻译： 提供了微机电系统（MEMS）装置。 MEMS器件包括：以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括：从该台延伸的感测臂; 驱动梳子，其从感测臂延伸并与舞台一起旋转; 固定梳子，其被固定地支撑以与驱动梳状物接合，固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部，其检测驱动梳和固定梳的电容变化。 因此，MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

公开(公告)号：US07616365B2

公开(公告)日：2009-11-10

申请号：US11710432

申请日：2007-02-26

申请人： Young-chul Ko ,  Jin-woo Cho ,  Hee-moon Jeong

发明人： Young-chul Ko ,  Jin-woo Cho ,  Hee-moon Jeong

IPC分类号： G02B26/10 ,  B81B3/00 ,  B81B1/00

CPC分类号： G02B26/085 ,  G02B26/101

摘要： A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.

摘要翻译： 微型致动器和微型致动器的制造方法。 微型致动器包括基架，第一可移动部件，第二可动部件，至少一对永磁体，线圈部件和变形抑制部分。 第一可移动部分可旋转地连接到基架。 第二可移动部分可旋转地连接到第一可移动部分并且包括改变光路的反射镜。 线圈部分包括从第一和第二可移动部分的顶表面突出的多个线圈部分。 变形抑制部包括形成在线圈部之间的第一和第二可动部中的多个槽。 变形抑制部抑制向线圈部施加电流时发生的热变形，以减少第一和第二可动部的变形。

公开(公告)号：US20080054732A1

公开(公告)日：2008-03-06

申请号：US11710432

申请日：2007-02-26

申请人： Young-chul Ko ,  Jin-woo Cho ,  Hee-moon Jeong

发明人： Young-chul Ko ,  Jin-woo Cho ,  Hee-moon Jeong

IPC分类号： H02K33/00 ,  G02B26/08

CPC分类号： G02B26/085 ,  G02B26/101

摘要： A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.

摘要翻译： 微型致动器和微型致动器的制造方法。 微型致动器包括基架，第一可移动部件，第二可动部件，至少一对永磁体，线圈部件和变形抑制部分。 第一可移动部分可旋转地连接到基架。 第二可移动部分可旋转地连接到第一可移动部分并且包括改变光路的反射镜。 线圈部分包括从第一和第二可移动部分的顶表面突出的多个线圈部分。 变形抑制部包括形成在线圈部之间的第一和第二可动部中的多个槽。 变形抑制部抑制向线圈部施加电流时发生的热变形，以减少第一和第二可动部的变形。

公开(公告)号：US20070296532A1

公开(公告)日：2007-12-27

申请号：US11709854

申请日：2007-02-23

申请人： Young-chul Ko ,  Jin-woo Cho ,  Yong-hwa Park ,  Hee-moon Jeong

发明人： Young-chul Ko ,  Jin-woo Cho ,  Yong-hwa Park ,  Hee-moon Jeong

IPC分类号： H01F7/00

CPC分类号： B81B3/0062 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/085 ,  H02K33/18

摘要： A two-axis micro-electro mechanical system (MEMS) device includes a moving plate, a stage, a driving coil, a pair of magnets, and a yoke magnetic body. The moving plate is supported coaxially on a first axis to move pivotably about the first axis. The stage is supported coaxially on the second axis in an inner region of the moving plate. The driving coil includes a coaxial coil portion arranged along the first axis of the driving plate and divided at a center by the stage, and a first connecting coil portion and a second connecting coil portion. The yoke magnetic body is disposed between the pair of magnets in a region above or below the magnets and is formed of a material capable of being magnetized by the magnets in order to suddenly change a magnetic flux density according to a distance between the pair of magnets.

摘要翻译： 双轴微电子机械系统（MEMS）装置包括移动板，台，驱动线圈，一对磁体和轭磁体。 移动板同轴地支撑在第一轴线上，以围绕第一轴线可枢转地运动。 舞台在移动板的内部区域中同轴地支撑在第二轴上。 驱动线圈包括沿着驱动板的第一轴线布置并在台架的中心被分割的同轴线圈部分，以及第一连接线圈部分和第二连接线圈部分。 轭磁体设置在磁体上方或下方的区域中的一对磁体之间，并且由能够被磁体磁化的材料形成，以便根据一对磁体之间的距离突然改变磁通密度 。

公开(公告)号：US07750767B2

公开(公告)日：2010-07-06

申请号：US11711057

申请日：2007-02-27

申请人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul Ko ,  Hyun-ku Jeong

发明人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul Ko ,  Hyun-ku Jeong

IPC分类号： H01H51/22

CPC分类号： G02B26/085 ,  H01F7/066 ,  H01F2007/068

摘要： A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

摘要翻译： 提供了微机电系统（MEMS）装置。 MEMS器件包括：以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括：从该台延伸的感测臂; 驱动梳子，其从感测臂延伸并与舞台一起旋转; 固定梳子，其被固定地支撑以与驱动梳状物接合，固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部，其检测驱动梳和固定梳的电容变化。 因此，MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

公开(公告)号：US20070268099A1

公开(公告)日：2007-11-22

申请号：US11654582

申请日：2007-01-18

申请人： Hee-moon Jeong ,  Seong-ho Shin ,  Jin-ho Lee ,  Jin-woo Cho ,  Young-chul Ko

发明人： Hee-moon Jeong ,  Seong-ho Shin ,  Jin-ho Lee ,  Jin-woo Cho ,  Young-chul Ko

IPC分类号： H01H51/22

CPC分类号： H02K33/18 ,  G02B26/085 ,  G02B26/101

摘要： An actuator and a two dimensional scanner. The actuator and the two dimensional scanner include a base plate, a movable plate pivoted around at least one of a first imaginary axis or a second imaginary axis which are perpendicular to each other, a magnetic field-producing portion forming a magnetic force which acts in a direction parallel to the second axis and has a minimum size at a position of the first axis, a support member disposed coaxially with at least one of the first axis and the second axis, connecting the base plate and the movable plate, and forming a pivoting axis of the movable plate, and a driving coil portion to which a driving power of the movable plate is applied and disposed on the movable plate so as to have a point symmetry shape with respect to an intersecting point of the first axis and the second axis.

摘要翻译： 执行器和二维扫描仪。 致动器和二维扫描仪包括基板，围绕彼此垂直的第一假想轴或第二假想轴中的至少一个枢转的可动板，形成磁力的磁场产生部分，其作用在 与第二轴平行的方向，在第一轴的位置具有最小尺寸，与第一轴和第二轴的至少一个同轴设置的支撑构件，连接基板和可动板，并形成 可移动板的枢转轴线和驱动线圈部分，可动板的驱动力被施加到可动板上，以便相对于第一轴线和第二轴线的交叉点具有点对称形状 轴。

公开(公告)号：US20100304517A1

公开(公告)日：2010-12-02

申请号：US12856308

申请日：2010-08-13

申请人： Hee-moon Jeong ,  Jin-woo Cho ,  Yong-hwa Park ,  Jun-o Kim ,  Seok-mo Chang

发明人： Hee-moon Jeong ,  Jin-woo Cho ,  Yong-hwa Park ,  Jun-o Kim ,  Seok-mo Chang

IPC分类号： H01L21/00

CPC分类号： B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/085 ,  G02B26/101 ,  G02B26/105

摘要： A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.

摘要翻译： 微机电系统（MEMS）装置包括框架，致动器，其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器 致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底，通过部分去除第一衬底而形成框架和致动器，并且通过部分去除第二衬底来形成至少一个止动器来制造。