摘要:
An electron beam irradiation apparatus, includes a support section for supporting an electron beam irradiation subject to be irradiated with an electron beam, and an electron beam irradiation head opposed to the electron beam irradiation subject via a minute space, the electron beam irradiation head having an electron beam emission hole for irradiating the electron beam irradiation subject with the electron beam. In the electron beam irradiation head, an electron beam path communicating with the electron beam emission hole is provided, and in addition one or more ring shaped gas suction grooves opened from a surface of the electron beam irradiation head facing the electron beam irradiation subject is formed around the electron beam emission hole. Vacuum pumps are coupled to the electron beam path and the ring shaped gas suction grooves, and the electron beam path is held in a high vacuum state.
摘要:
A master recording apparatus includes a revolving base (31) for revolving a substrate (1) coated with resist thereon, an irradiating mechanism (32), an elevator mechanism (33) for making the irradiating mechanism (32) capable of moving in a vertical direction and in a surface direction which is perpendicular to the vertical direction relative to the revolving base (31) and a height position displacement mechanism (35) interposing between the irradiating mechanism (32) and the elevator mechanism (33), and in which the irradiating mechanism (32) is connected with the elevator mechanism (33) through the height position displacement mechanism (35) and the irradiating mechanism (32) has such a structure in which at least a converging lens system (36) and a displacement driving mechanism (37) for adjusting a focus are supported by a gas static pressure pad housing (38), in the gas static pressure pad housing (38) a gas feeding pad (39) is disposed facing a bottom surface opposing the substrate and gas is made to be fed between the irradiating mechanism (32) and the said substrate (1) through the gas feeding pad (39), whereby the contact between the substrate and the irradiating mechanism is avoided at a time of carrying out a recording of a predetermined pattern by irradiating a beam.
摘要:
A liquid drop discharger includes a coil for generating a magnetic field based on an electric current that is applied; a moving section, removably disposed with respect to the coil so as to be movable in a central axial direction of the coil, for generating an induced current by the magnetic field generated by the coil; device for vertically applying a magnetic field to a peripheral surface of a peripheral member, where the induced current is generated, of the moving section; and a discharge opening, which moves together with the moving section, for discharging a liquid by changing the volume of a liquid chamber containing the liquid as a result of the movement of the moving section.
摘要:
Provided is a semiconductor integrated device that selects one or more of a plurality of functional blocks and resets the selected functional block, and a control method of the semiconductor integrated device. The semiconductor integrated circuit includes a functional block that is reset when a clock signal and a reset signal are supplied, a reset signal output unit that outputs the reset signal for resetting the functional block, a clock mask circuit that stops the clock signal to be supplied to the functional block, and a clock mask control circuit that controls the clock mask circuit.
摘要:
A memory control circuit according to an embodiment of the present invention includes: a writable/readable memory; a comparison unit comparing write data to write in the memory with read data that is read from a memory address where the write data is written; a comparison result storage unit storing a comparison result compared by the comparison unit in association with the memory address; and a control unit controlling retry processing of rewriting the write data to the memory address determined to be unverified based on the stored comparison result.
摘要:
A boiling water type nuclear reactor core, in which a plurality of fuel assemblies, each enclosed in a channel box, are loaded and a plurality of control rods, each having control blades, are arranged between the channel boxes. Latitudinal long blade control rods, each having control rod blades which extend latitudinally in four directions, are arranged between channel boxes on diagonals of square bundle regions each formed by a plurality of fuel assemblies, and latitudinal short blade control rods, each having control rod blades which extend latitudinally in four directions with each control rod blade having a latitudinal length of about half of the width of one of the square bundle regions, are arranged between the channel boxes in the center of each of the square bundle regions. The long blade control rods have a latitudinal blade length which is about twice as long as the latitudinal blade length of the short blade control rods.
摘要:
A process for producing acetic anhydride which comprises reacting methyl acetate or dimethyl ether with carbon monoxide in the presence of a catalyst comprising (a) nickel or a nickel compound and (b) at least one halide selected from the group consisting of bromides, iodides and mixtures thereof, and together with a specific co-catalyst which is disclosed. According to this invention acetic anhydride is produced by using highly active non-expensive catalyst and co-catalyst.
摘要:
IO buffers that operate with an IO power supply system and cut cells that isolate the IO buffers from each other are disposed on the periphery of an always-on power supply area and a power supply cut-off available area. A signal indicating the holding of an IO output(s) output from the always-on power supply area is wired so as to go round the IO buffers and the cut cells. The cut cell includes a level shifter that operates with an IO power supply system. The cut cell shifts the level of signal indicating the holding of IO output so that the signal level conforms to the power supply system of IO buffers, and outputs the resultant signal to the IO buffers.
摘要:
An integrated circuit device contains a flash memory, a flash control unit for controlling the rewriting and reading on the flash memory, and a processor unit. The processor unit includes a normal mode and a fail-safe mode as the operating states. In normal mode, when a defect is detected during the verify operation after writing data onto the flash memory then any further use of the flash memory is stopped. In fail-safe-mode, when a defect is detected during the verify operation after writing data onto the flash memory, the error is corrected and flash memory usage continues. The operating state is normal mode, and when the verify operation detects a defect after normal mode erase operation, the operation shifts to fail-safe mode.
摘要:
A solid immersion lens (SIL) is provided. The SIL includes a spherical part, a cone-shaped part, a tip part, and an edge part between the cone-shaped part and the tip part. The edge part includes a curved surface.