摘要:
An electron beam irradiation apparatus, includes a support section for supporting an electron beam irradiation subject to be irradiated with an electron beam, and an electron beam irradiation head opposed to the electron beam irradiation subject via a minute space, the electron beam irradiation head having an electron beam emission hole for irradiating the electron beam irradiation subject with the electron beam. In the electron beam irradiation head, an electron beam path communicating with the electron beam emission hole is provided, and in addition one or more ring shaped gas suction grooves opened from a surface of the electron beam irradiation head facing the electron beam irradiation subject is formed around the electron beam emission hole. Vacuum pumps are coupled to the electron beam path and the ring shaped gas suction grooves, and the electron beam path is held in a high vacuum state.
摘要:
A master recording apparatus includes a revolving base (31) for revolving a substrate (1) coated with resist thereon, an irradiating mechanism (32), an elevator mechanism (33) for making the irradiating mechanism (32) capable of moving in a vertical direction and in a surface direction which is perpendicular to the vertical direction relative to the revolving base (31) and a height position displacement mechanism (35) interposing between the irradiating mechanism (32) and the elevator mechanism (33), and in which the irradiating mechanism (32) is connected with the elevator mechanism (33) through the height position displacement mechanism (35) and the irradiating mechanism (32) has such a structure in which at least a converging lens system (36) and a displacement driving mechanism (37) for adjusting a focus are supported by a gas static pressure pad housing (38), in the gas static pressure pad housing (38) a gas feeding pad (39) is disposed facing a bottom surface opposing the substrate and gas is made to be fed between the irradiating mechanism (32) and the said substrate (1) through the gas feeding pad (39), whereby the contact between the substrate and the irradiating mechanism is avoided at a time of carrying out a recording of a predetermined pattern by irradiating a beam.
摘要:
A recording medium of one-side address method capable of easily detecting a synchronous signal and production method of recording medium master used for such a recording medium. The recording medium master production method includes a photo-sensitive layer exposure step using a first beam and a second beam for exposure of walls of a groove in a straight line, wherein for exposure of an area where a synchronous signal is to be recorded, the second beam alone is used while being wobbled according to the synchronous signal. Moreover, the recording medium according to the present invention has at least a groove formed on a recording plane including: an area having no synchronous signal recorded where one of the walls of the groove is formed straight and the other wall of the groove is at least partially meandered according to an address signal; and an area having a synchronous signal recorded where both of the walls of the groove are meandered according to the synchronous signal.
摘要:
The present invention provides a recording medium of one-side address method capable of easily detecting a synchronous signal and production method of recording medium master used for such a recording medium. The recording medium master production method according to the present invention includes a photo-sensitive layer exposure step using a first beam and a second beam for exposure of walls of a groove in a straight line, wherein for exposure of an area where a synchronous signal is to be recorded, the second beam alone is used while being wobbled according to the synchronous signal. Moreover, the recording medium according to the present invention has at least a groove formed on a recording plane including: an area having no synchronous signal recorded where one of the walls of the groove is formed straight and the other wall of the groove is at least partially meandered according to an address signal; and an area having a synchronous signal recorded where both of the walls of the groove are meandered according to the synchronous signal.
摘要:
There is provided an optical modeling apparatus that forms a model of a desired shape by sequentially forming hardened layers by irradiating a light-curable resin with light. The apparatus includes a first light source that emits a light beam for plotting on the resin, a scanning device that scans the light beam from the first light source over the resin, a second light source that emits light that irradiates one fixed region of the resin at a time, and a spatial light modulator that spatially modulates the light from the second light source to blanket-expose a specified region of the resin. The light beam from the scanning device and the light from the spatial light modulator form each hardened layer.
摘要:
There is provided an optical modeling apparatus that forms a model of a desired shape by sequentially forming hardened layers by irradiating a light-curable resin with light. The apparatus includes a first light source that emits a light beam for plotting on the resin, a scanning device that scans the light beam from the first light source over the resin, a second light source that emits light that irradiates one fixed region of the resin at a time, and a spatial light modulator that spatially modulates the light from the second light source to blanket-expose a specified region of the resin. The light beam from the scanning device and the light from the spatial light modulator form each hardened layer.
摘要:
An electron beam irradiation apparatus in a partial vacuum method is structured with a static pressure floating pad 18 connected to a vacuum chamber 14 containing an electron beam column 15 and in a condition that the static pressure floating pad 18 is attached to a subject 1 to be irradiated without contacting, and an electron beam irradiating the subject 1 to be irradiated through an electron beam path 19 of the static pressure floating pad 18, whereby the vacuum chamber and the electron beam column can be maintained in the required degree of vacuum even in a condition that the static pressure floating pad 18 is separated from the subject 1 to be irradiated. A vacuum seal valve 30 including a piston to open and close the electron beam path 19 is provided within the static pressure floating pad 18. When the static pressure floating pad 18 is separated from the subject 1, the vacuum seal valve 30 is structured to be activated to close the electron beam path 19 so as to prevent the air from flowing into the vacuum chamber 14. In this structure, the vacuum seal valve 30 is formed with a round shaped cross section and in a tapered shape with a narrow tip so as to accomplish high vacuum seal without a gap, so that the degree of vacuum in the vacuum chamber and the electron beam column can surely be maintained.
摘要:
An optical disk (10) of the present invention has a substrate (11) included a resin-impregnated paper, in which resin is impregnated into paper, or resin-coated paper, in which the paper surface is coated with a resin, and a recording layer (13) formed on at least one side of the substrate (11). This type of optical disk (10) has performance equal to that of conventional optical disks and has a minimal effect on the environment during disposal. In addition, a manufacturing method of an optical disk of the present invention has a recording layer sheet fabrication step in which a recording layer sheet is fabricated by forming tracks on a recording layer base material, and a recording layer sheet lamination step in which a recording layer (13) included the recording layer sheet is provided on a substrate (11) included resin-impregnated paper or resin-coated paper by laminating the recording layer sheet with the resin-impregnated paper in which a resin is impregnated into paper or the resin-coated paper in which the surface of the paper is coated with a resin. This type of manufacturing method of an optical disk allows optical disk (10) to be produced inexpensively.
摘要:
An optical disk (10) of the present invention has a substrate (11) included a resin-impregnated paper, in which resin is impregnated into paper, or resin-coated paper, in which the paper surface is coated with a resin, and a recording layer (13) formed on at least one side of the substrate (11). This type of optical disk (10) has performance equal to that of conventional optical disks and has a minimal effect on the environment during disposal. In addition, a manufacturing method of an optical disk of the present invention has a recording layer sheet fabrication step in which a recording layer sheet is fabricated by forming tracks on a recording layer base material, and a recording layer sheet lamination step in which a recording layer (13) included the recording layer sheet is provided on a substrate (11) included resin-impregnated paper or resin-coated paper by laminating the recording layer sheet with the resin-impregnated paper in which a resin is impregnated into paper or the resin-coated paper in which the surface of the paper is coated with a resin. This type of manufacturing method of an optical disk allows optical disk (10) to be produced inexpensively.
摘要:
An optical recording medium, in which a signal is recorded in both of a groove and a land, has a disconnected portion of a predetermined interval in the groove and the land so that a control signal is detected by this disconnected portion.