Electron beam irradiation apparatus, electron beam irradiation method, original disk, stamper, and recording medium
    1.
    发明授权
    Electron beam irradiation apparatus, electron beam irradiation method, original disk, stamper, and recording medium 失效
    电子束照射装置,电子束照射方法,原盘,压模和记录介质

    公开(公告)号:US07034319B2

    公开(公告)日:2006-04-25

    申请号:US09789943

    申请日:2001-02-28

    IPC分类号: C23F1/00

    摘要: An electron beam irradiation apparatus, includes a support section for supporting an electron beam irradiation subject to be irradiated with an electron beam, and an electron beam irradiation head opposed to the electron beam irradiation subject via a minute space, the electron beam irradiation head having an electron beam emission hole for irradiating the electron beam irradiation subject with the electron beam. In the electron beam irradiation head, an electron beam path communicating with the electron beam emission hole is provided, and in addition one or more ring shaped gas suction grooves opened from a surface of the electron beam irradiation head facing the electron beam irradiation subject is formed around the electron beam emission hole. Vacuum pumps are coupled to the electron beam path and the ring shaped gas suction grooves, and the electron beam path is held in a high vacuum state.

    摘要翻译: 一种电子束照射装置,包括用于支撑电子束照射对象被照射电子束的支撑部分和经由微小空间与电子束照射物体相对的电子束照射头,该电子束照射头具有 用于用电子束照射电子束照射对象的电子束发射孔。 在电子束照射头中,设置与电子束发射孔连通的电子束路径,并且形成从面向电子束照射对象的电子束照射头的表面开口的一个或多个环形气体吸引槽 围绕电子束发射孔。 真空泵耦合到电子束路径和环形气体吸入槽,并且电子束路径保持在高真空状态。

    Optical recording medium manufacturing master recording apparatus
    2.
    发明授权
    Optical recording medium manufacturing master recording apparatus 失效
    光记录介质制造主记录装置

    公开(公告)号:US06438074B1

    公开(公告)日:2002-08-20

    申请号:US09375658

    申请日:1999-08-17

    IPC分类号: G11B1100

    CPC分类号: G11B7/261

    摘要: A master recording apparatus includes a revolving base (31) for revolving a substrate (1) coated with resist thereon, an irradiating mechanism (32), an elevator mechanism (33) for making the irradiating mechanism (32) capable of moving in a vertical direction and in a surface direction which is perpendicular to the vertical direction relative to the revolving base (31) and a height position displacement mechanism (35) interposing between the irradiating mechanism (32) and the elevator mechanism (33), and in which the irradiating mechanism (32) is connected with the elevator mechanism (33) through the height position displacement mechanism (35) and the irradiating mechanism (32) has such a structure in which at least a converging lens system (36) and a displacement driving mechanism (37) for adjusting a focus are supported by a gas static pressure pad housing (38), in the gas static pressure pad housing (38) a gas feeding pad (39) is disposed facing a bottom surface opposing the substrate and gas is made to be fed between the irradiating mechanism (32) and the said substrate (1) through the gas feeding pad (39), whereby the contact between the substrate and the irradiating mechanism is avoided at a time of carrying out a recording of a predetermined pattern by irradiating a beam.

    摘要翻译: 主记录装置包括用于旋转涂覆有抗蚀剂的基板(1)的旋转基座(31),照射机构(32),用于使照射机构(32)能够垂直移动的升降机构(33) 方向和相对于旋转基座31垂直于垂直方向的表面方向和位于照射机构32和升降机构33之间的高度位置偏移机构35,其中, 照射机构(32)通过高度位置移动机构(35)与升降机构(33)连接,照射机构(32)具有至少会聚透镜系统(36)和位移驱动机构 用于调节焦点的调色剂(37)由气体静压垫壳体(38)支撑,在气体静压垫壳体(38)中,气体供给垫(39)被设置为面向与基体 te和气体通过气体供给垫(39)被供给到照射机构(32)和所述基板(1)之间,从而在执行基板和照射机构时避免基板和照射机构之间的接触 通过照射光束来记录预定图案。

    Recording medium master production method and recording medium
    3.
    发明授权
    Recording medium master production method and recording medium 失效
    记录介质主生产方法和记录介质

    公开(公告)号:US6118756A

    公开(公告)日:2000-09-12

    申请号:US19706

    申请日:1998-02-06

    摘要: A recording medium of one-side address method capable of easily detecting a synchronous signal and production method of recording medium master used for such a recording medium. The recording medium master production method includes a photo-sensitive layer exposure step using a first beam and a second beam for exposure of walls of a groove in a straight line, wherein for exposure of an area where a synchronous signal is to be recorded, the second beam alone is used while being wobbled according to the synchronous signal. Moreover, the recording medium according to the present invention has at least a groove formed on a recording plane including: an area having no synchronous signal recorded where one of the walls of the groove is formed straight and the other wall of the groove is at least partially meandered according to an address signal; and an area having a synchronous signal recorded where both of the walls of the groove are meandered according to the synchronous signal.

    摘要翻译: 一种能够容易地检测同步信号的单面寻址方法的记录介质和用于这种记录介质的记录介质母盘的制造方法。 记录介质主制造方法包括使用第一光束的光敏层曝光步骤和用于在直线上暴露凹槽的壁的第二光束,其中为了曝光要记录同步信号的区域, 根据同步信号,使用第二光束同时摆动。 此外,根据本发明的记录介质具有形成在记录平面上的至少一个凹槽,包括:没有记录同步信号的区域,其中一个壁形成为直线,并且凹槽的另一壁至少为 根据地址信号部分曲折; 并且记录有同步信号的区域,其中槽的两个壁根据同步信号被蜿蜒。

    Recording medium master production method and recording medium
    4.
    发明授权
    Recording medium master production method and recording medium 失效
    记录介质主生产方法和记录介质

    公开(公告)号:US06414935B1

    公开(公告)日:2002-07-02

    申请号:US09624145

    申请日:2000-07-21

    IPC分类号: G11B724

    CPC分类号: G11B7/261 G11B7/24082

    摘要: The present invention provides a recording medium of one-side address method capable of easily detecting a synchronous signal and production method of recording medium master used for such a recording medium. The recording medium master production method according to the present invention includes a photo-sensitive layer exposure step using a first beam and a second beam for exposure of walls of a groove in a straight line, wherein for exposure of an area where a synchronous signal is to be recorded, the second beam alone is used while being wobbled according to the synchronous signal. Moreover, the recording medium according to the present invention has at least a groove formed on a recording plane including: an area having no synchronous signal recorded where one of the walls of the groove is formed straight and the other wall of the groove is at least partially meandered according to an address signal; and an area having a synchronous signal recorded where both of the walls of the groove are meandered according to the synchronous signal.

    摘要翻译: 本发明提供一种能够容易地检测同步信号的单面寻址方法的记录介质和用于这种记录介质的记录介质母盘的制造方法。 根据本发明的记录介质主制造方法包括使用第一光束和第二光束的感光层曝光步骤,用于暴露直线上的凹槽的壁,其中为了曝光同步信号为 要被记录,在根据同步信号摆动的同时使用第二光束。 此外,根据本发明的记录介质具有形成在记录平面上的至少一个凹槽,包括:没有记录同步信号的区域,其中一个壁形成为直线,并且凹槽的另一壁至少为 根据地址信号部分曲折; 并且记录有同步信号的区域,其中槽的两个壁根据同步信号被蜿蜒。

    OPTICAL MODELING APPARATUS
    5.
    发明申请
    OPTICAL MODELING APPARATUS 有权
    光学建模设备

    公开(公告)号:US20080169587A1

    公开(公告)日:2008-07-17

    申请号:US11963058

    申请日:2007-12-21

    IPC分类号: G01B11/00 B29C35/08

    摘要: There is provided an optical modeling apparatus that forms a model of a desired shape by sequentially forming hardened layers by irradiating a light-curable resin with light. The apparatus includes a first light source that emits a light beam for plotting on the resin, a scanning device that scans the light beam from the first light source over the resin, a second light source that emits light that irradiates one fixed region of the resin at a time, and a spatial light modulator that spatially modulates the light from the second light source to blanket-expose a specified region of the resin. The light beam from the scanning device and the light from the spatial light modulator form each hardened layer.

    摘要翻译: 提供了一种通过用光照射光固化树脂依次形成硬化层来形成所需形状的模型的光学建模装置。 该装置包括:第一光源,其发射用于在树脂上绘制的光束;扫描装置,其从树脂上扫描来自第一光源的光束;第二光源,发射照射树脂的一个固定区域的光; 以及空间光调制器,其空间调制来自第二光源的光,以覆盖 - 暴露树脂的指定区域。 来自扫描装置的光束和来自空间光调制器的光形成每个硬化层。

    Optical modeling apparatus
    6.
    发明授权
    Optical modeling apparatus 有权
    光学造型装置

    公开(公告)号:US07833000B2

    公开(公告)日:2010-11-16

    申请号:US11963058

    申请日:2007-12-21

    IPC分类号: H05B6/00

    摘要: There is provided an optical modeling apparatus that forms a model of a desired shape by sequentially forming hardened layers by irradiating a light-curable resin with light. The apparatus includes a first light source that emits a light beam for plotting on the resin, a scanning device that scans the light beam from the first light source over the resin, a second light source that emits light that irradiates one fixed region of the resin at a time, and a spatial light modulator that spatially modulates the light from the second light source to blanket-expose a specified region of the resin. The light beam from the scanning device and the light from the spatial light modulator form each hardened layer.

    摘要翻译: 提供了一种通过用光照射光固化树脂依次形成硬化层来形成所需形状的模型的光学建模装置。 该装置包括:第一光源,其发射用于在树脂上绘制的光束;扫描装置,其从树脂上扫描来自第一光源的光束;第二光源,发射照射树脂的一个固定区域的光; 以及空间光调制器,其空间调制来自第二光源的光,以覆盖 - 暴露树脂的指定区域。 来自扫描装置的光束和来自空间光调制器的光形成每个硬化层。

    Electron beam irradiation apparatus and electron beam irradiating method
    7.
    发明授权
    Electron beam irradiation apparatus and electron beam irradiating method 失效
    电子束照射装置和电子束照射法

    公开(公告)号:US06737660B2

    公开(公告)日:2004-05-18

    申请号:US10372419

    申请日:2003-02-24

    IPC分类号: G11B910

    摘要: An electron beam irradiation apparatus in a partial vacuum method is structured with a static pressure floating pad 18 connected to a vacuum chamber 14 containing an electron beam column 15 and in a condition that the static pressure floating pad 18 is attached to a subject 1 to be irradiated without contacting, and an electron beam irradiating the subject 1 to be irradiated through an electron beam path 19 of the static pressure floating pad 18, whereby the vacuum chamber and the electron beam column can be maintained in the required degree of vacuum even in a condition that the static pressure floating pad 18 is separated from the subject 1 to be irradiated. A vacuum seal valve 30 including a piston to open and close the electron beam path 19 is provided within the static pressure floating pad 18. When the static pressure floating pad 18 is separated from the subject 1, the vacuum seal valve 30 is structured to be activated to close the electron beam path 19 so as to prevent the air from flowing into the vacuum chamber 14. In this structure, the vacuum seal valve 30 is formed with a round shaped cross section and in a tapered shape with a narrow tip so as to accomplish high vacuum seal without a gap, so that the degree of vacuum in the vacuum chamber and the electron beam column can surely be maintained.

    摘要翻译: 部分真空法中的电子束照射装置由连接到包含电子束柱15的真空室14的静压浮动垫18构成,并且在将静压浮动垫18附着到被检体1的状态下 照射不经接触的电子束,以及通过静压浮动垫18的电子束路径19照射待被检体1的电子束,由此即使在真空室和电子束柱中也可以将真空室和电子束柱保持在所需的真空度 条件是静压浮动垫18与待照射的被检体1分离。 在静压浮动垫18内设置包括打开和关闭电子束通道19的活塞的真空密封阀30.当静压浮动垫18与被检体1分离时,真空密封阀30构成为 激活以闭合电子束路径19,以防止空气流入真空室14.在该结构中,真空密封阀30形成为圆形截面并具有窄尖端的锥形形状,以便 实现高真空密封而没有间隙,从而可以确保真空室和电子束柱中的真空度。

    Optical disk and its manufacturing method
    8.
    发明授权
    Optical disk and its manufacturing method 失效
    光盘及其制造方法

    公开(公告)号:US07706240B2

    公开(公告)日:2010-04-27

    申请号:US10543140

    申请日:2004-01-30

    IPC分类号: G11B7/24

    摘要: An optical disk (10) of the present invention has a substrate (11) included a resin-impregnated paper, in which resin is impregnated into paper, or resin-coated paper, in which the paper surface is coated with a resin, and a recording layer (13) formed on at least one side of the substrate (11). This type of optical disk (10) has performance equal to that of conventional optical disks and has a minimal effect on the environment during disposal. In addition, a manufacturing method of an optical disk of the present invention has a recording layer sheet fabrication step in which a recording layer sheet is fabricated by forming tracks on a recording layer base material, and a recording layer sheet lamination step in which a recording layer (13) included the recording layer sheet is provided on a substrate (11) included resin-impregnated paper or resin-coated paper by laminating the recording layer sheet with the resin-impregnated paper in which a resin is impregnated into paper or the resin-coated paper in which the surface of the paper is coated with a resin. This type of manufacturing method of an optical disk allows optical disk (10) to be produced inexpensively.

    摘要翻译: 本发明的光盘(10)具有:基材(11),其中树脂被浸渍到纸中的树脂浸渍纸或其中纸表面涂覆有树脂的树脂涂布纸,以及 记录层(13)形成在所述基板(11)的至少一侧上。 这种类型的光盘(10)具有与常规光盘相同的性能,并且在处理期间对环境的影响最小。 此外,本发明的光盘的制造方法具有记录层片材制造步骤,其中通过在记录层基材上形成轨迹来制造记录层片材,以及记录层片材层压步骤,其中记录 包括记录层片的层(13)通过将记录层片材与浸渍有树脂的树脂浸渍纸层压在纸或树脂上而设置在包含树脂浸渍纸或树脂涂布纸的基材(11)上 涂布纸,其中纸的表面涂覆有树脂。 这种光盘的制造方法允许廉价地生产光盘(10)。

    Optical disk and its manufacturing method
    9.
    发明申请
    Optical disk and its manufacturing method 失效
    光盘及其制造方法

    公开(公告)号:US20060133256A1

    公开(公告)日:2006-06-22

    申请号:US10543140

    申请日:2004-01-30

    IPC分类号: G11B7/00

    摘要: An optical disk (10) of the present invention has a substrate (11) included a resin-impregnated paper, in which resin is impregnated into paper, or resin-coated paper, in which the paper surface is coated with a resin, and a recording layer (13) formed on at least one side of the substrate (11). This type of optical disk (10) has performance equal to that of conventional optical disks and has a minimal effect on the environment during disposal. In addition, a manufacturing method of an optical disk of the present invention has a recording layer sheet fabrication step in which a recording layer sheet is fabricated by forming tracks on a recording layer base material, and a recording layer sheet lamination step in which a recording layer (13) included the recording layer sheet is provided on a substrate (11) included resin-impregnated paper or resin-coated paper by laminating the recording layer sheet with the resin-impregnated paper in which a resin is impregnated into paper or the resin-coated paper in which the surface of the paper is coated with a resin. This type of manufacturing method of an optical disk allows optical disk (10) to be produced inexpensively.

    摘要翻译: 本发明的光盘(10)具有:基材(11),其中树脂被浸渍到纸中的树脂浸渍纸或其中纸表面涂覆有树脂的树脂涂布纸,以及 记录层(13)形成在所述基板(11)的至少一侧上。 这种类型的光盘(10)具有与常规光盘相同的性能,并且在处理期间对环境的影响最小。 此外,本发明的光盘的制造方法具有记录层片材制造步骤,其中通过在记录层基材上形成轨迹来制造记录层片材,以及记录层片材层压步骤,其中记录 包括记录层片的层(13)通过将记录层片材与浸渍有树脂的树脂浸渍纸层压在纸或树脂上而设置在包含树脂浸渍纸或树脂涂布纸的基板(11)上 涂布纸,其中纸的表面涂覆有树脂。 这种光盘的制造方法允许廉价地生产光盘(10)。