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1.发明授权Semiconductor memory device which can be tested while selecting word lines successively at high speed 失效半导体存储器件，可以在高速连续选择字线的同时进行测试
公开(公告)号：US5943280A
公开(公告)日：1999-08-24
申请号：US10827
申请日：1998-01-22
申请人： Yukihiro Tsukamoto , Koji Kimura , Masaki Nishimoto , Masayuki Kasamoto , Naotaka Okada , Kazuhisa Uetsuki , Masakatsu Murakami , Shigekazu Aoki , Zengcheng Tian , Shin Sekiya , Akihiro Shirai
发明人： Yukihiro Tsukamoto , Koji Kimura , Masaki Nishimoto , Masayuki Kasamoto , Naotaka Okada , Kazuhisa Uetsuki , Masakatsu Murakami , Shigekazu Aoki , Zengcheng Tian , Shin Sekiya , Akihiro Shirai
IPC分类号： G11C11/406 , G11C11/401 , G11C11/403 , G11C29/12 , G11C29/50 , G11C7/00
CPC分类号： G11C29/50 , G11C11/401
摘要： When a special operation mode is instructed, a test oscillation circuit operating at a cycle shorter than a refresh oscillation circuit specifying the cycle of self refresh is activated according to an external row address strobe signal. The internal row address strobe signal is provided to row related control circuitry via a selector. An internal row address strobe signal can be rendered active at a cycle shorter than the cycle of the external row address strobe signal, to carry out row selection. A row is selected at a cycle shorter than the transition cycle of an external signal.
摘要翻译： 当指示特殊操作模式时，根据外部行地址选通信号激活以比指定自刷新周期的刷新振荡电路短的周期工作的测试振荡电路。 内部行地址选通信号通过选择器提供给行相关的控制电路。 可以以比外部行地址选通信号的周期短的周期使内部行地址选通信号激活，以执行行选择。 以比外部信号的转换周期短的周期来选择一行。
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2.发明授权公开(公告)号：US09230694B2
公开(公告)日：2016-01-05
申请号：US13388500
申请日：2010-07-20
申请人： Masakatsu Murakami , Nobuhiko Sarukura , Hiroshi Azechi , Ryo Yasuhara , Toshiyuki Kawashima , Hirofumi Kan
发明人： Masakatsu Murakami , Nobuhiko Sarukura , Hiroshi Azechi , Ryo Yasuhara , Toshiyuki Kawashima , Hirofumi Kan
摘要： An object of the present invention is to efficiently improve uniformity of energy lines to be irradiated. A method of determining nuclear fusion irradiation coordinates according to the present invention is a method of calculating irradiation coordinates when energy lines are irradiated onto a nuclear fusion target, and comprises an initial arrangement step S202 of virtually arranging electric charges Qi at initial coordinates of the number of irradiation coordinates NB on a spherical surface S0 set by using random numbers, a coordinate analysis step S203 of analyzing coordinates ri of the electric charges Qi in time series based on coulomb forces acting among the electric charges Qi by constraining the coordinates ri onto the spherical surface S0, potential evaluation steps S205 and S206 of determining a timing at which potential energies of the electric charges Qi were stabilized based on the coordinates ri, and an irradiation coordinate deriving step S207 of deriving coordinates ri at the timing at which potential energies were stabilized as irradiation coordinates of energy lines in a case where a nuclear fusion target is arranged at the center of the spherical surface S0.
摘要翻译： 本发明的目的在于有效地提高被照射的能量线的均匀性。 根据本发明的确定核聚变照射坐标的方法是当将能量线照射到核聚变靶上时计算辐射坐标的方法，包括在数字的初始坐标处虚拟地布置电荷Qi的初始布置步骤S202 在通过使用随机数设置的球面S0上的照射坐标NB的坐标分析步骤S203，其基于通过将坐标ri约束到球面上来分析基于通过电荷Qi之间的库仑力的时间序列的电荷Qi的坐标ri 表面S0，基于坐标ri确定电荷Qi的势能的定时的电位评估步骤S205和S206以及在势能稳定的定时导出坐标ri的照射坐标导出步骤S207 作为能量线的照射坐标 将核聚变靶设置在球面S0的中央的情况。
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3.发明申请公开(公告)号：US20060133574A1
公开(公告)日：2006-06-22
申请号：US10550800
申请日：2003-12-26
申请人： Keiji Nagai , Hiroaki Nishimura , Takayoshi Norimatsu , Katsunobu Nishihara , Noriaki Miyanaga , Masahiro Nakatsuka , Yasukazu Izawa , Tatsuhiko Yamanaka , Mitsuo Nakai , Keisuke Shigemori , Masakatsu Murakami , Yoshinori Shimada , Shigeaki Uchida , Atsushi Sunahara , Vasilli Zhakhovski , Ryouji Matsui , Takahiro Hibino , Tomoharu Okuno
发明人： Keiji Nagai , Hiroaki Nishimura , Takayoshi Norimatsu , Katsunobu Nishihara , Noriaki Miyanaga , Masahiro Nakatsuka , Yasukazu Izawa , Tatsuhiko Yamanaka , Mitsuo Nakai , Keisuke Shigemori , Masakatsu Murakami , Yoshinori Shimada , Shigeaki Uchida , Atsushi Sunahara , Vasilli Zhakhovski , Ryouji Matsui , Takahiro Hibino , Tomoharu Okuno
CPC分类号： H05G2/001 , B82Y10/00 , G03F7/70033
摘要： An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.
摘要翻译： 本发明的目的是提供一种能够发射具有高发射效率的极紫外光的极紫外光源靶。 使用由重金属或重金属化合物制成的具有密度为晶体密度的0.5〜80％的固体靶。 当用激光束照射靶时，产生包含在靶中的重金属的等离子体，并且从等离子体发射具有对应于重金属的种类的预定波长的极紫外光。 当如上所述使靶的密度小于晶体密度时，可以控制产生的等离子体的密度的空间分布，并且等离子体吸收激光束的能量的区域与其中的 等离子体发出极紫外光。 因此，可以提高排放效率，防止能量损失。 例如，在使用具有密度为结晶密度的24％的SnO 2 N靶的情况下，波长13.5nm左右的发光效率高于Sn晶体靶为 用过的。
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4.发明申请公开(公告)号：US20120155590A1
公开(公告)日：2012-06-21
申请号：US13388500
申请日：2010-07-20
申请人： Masakatsu Murakami , Nobuhiko Sarukura , Hiroshi Azechi , Ryo Yasuhara , Toshiyuki Kawashima , Hirofumi Kan
发明人： Masakatsu Murakami , Nobuhiko Sarukura , Hiroshi Azechi , Ryo Yasuhara , Toshiyuki Kawashima , Hirofumi Kan
摘要： An object of the present invention is to efficiently improve uniformity of energy lines to be irradiated. A method of determining nuclear fusion irradiation coordinates according to the present invention is a method of calculating irradiation coordinates when energy lines are irradiated onto a nuclear fusion target, and comprises an initial arrangement step S202 of virtually arranging electric charges Qi at initial coordinates of the number of irradiation coordinates NB on a spherical surface S0 set by using random numbers, a coordinate analysis step S203 of analyzing coordinates ri of the electric charges Qi in time series based on coulomb forces acting among the electric charges Qi by constraining the coordinates ri onto the spherical surface S0, potential evaluation steps S205 and S206 of determining a timing at which potential energies of the electric charges Qi were stabilized based on the coordinates ri, and an irradiation coordinate deriving step S207 of deriving coordinates ri at the timing at which potential energies were stabilized as irradiation coordinates of energy lines in a case where a nuclear fusion target is arranged at the center of the spherical surface S0.
摘要翻译： 本发明的目的在于有效地提高被照射的能量线的均匀性。 根据本发明的确定核聚变照射坐标的方法是当将能量线照射到核聚变靶上时计算辐射坐标的方法，包括在数字的初始坐标处虚拟地布置电荷Qi的初始布置步骤S202 在通过使用随机数设置的球面S0上的照射坐标NB的坐标分析步骤S203，其基于通过将坐标ri约束到球面上来分析基于通过电荷Qi之间的库仑力的时间序列的电荷Qi的坐标ri 表面S0，基于坐标ri确定电荷Qi的势能的定时的电位评估步骤S205和S206以及在势能稳定的定时导出坐标ri的照射坐标导出步骤S207 作为能量线的照射坐标 将核聚变靶设置在球面S0的中央的情况。
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5.发明授权公开(公告)号：US07521702B2
公开(公告)日：2009-04-21
申请号：US10550800
申请日：2003-12-26
申请人： Keiji Nagai , Hiroaki Nishimura , Takayoshi Norimatsu , Katsunobu Nishihara , Noriaki Miyanaga , Masahiro Nakatsuka , Yasukazu Izawa , Tatsuhiko Yamanaka , Mitsuo Nakai , Keisuke Shigemori , Masakatsu Murakami , Yoshinori Shimada , Shigeaki Uchida , Hiroyuki Furukawa , Atsushi Sunahara , Vasilli Zhakhovski , Ryouji Matsui , Takahiro Hibino , Tomoharu Okuno
发明人： Keiji Nagai , Hiroaki Nishimura , Takayoshi Norimatsu , Katsunobu Nishihara , Noriaki Miyanaga , Masahiro Nakatsuka , Yasukazu Izawa , Tatsuhiko Yamanaka , Mitsuo Nakai , Keisuke Shigemori , Masakatsu Murakami , Yoshinori Shimada , Shigeaki Uchida , Hiroyuki Furukawa , Atsushi Sunahara , Vasilli Zhakhovski , Ryouji Matsui , Takahiro Hibino , Tomoharu Okuno
CPC分类号： H05G2/001 , B82Y10/00 , G03F7/70033
摘要： An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.
摘要翻译： 本发明的目的是提供一种能够发射具有高发射效率的极紫外光的极紫外光源靶。 使用由重金属或重金属化合物制成的具有密度为晶体密度的0.5〜80％的固体靶。 当用激光束照射靶时，产生包含在靶中的重金属的等离子体，并且从等离子体发射具有对应于重金属的种类的预定波长的极紫外光。 当如上所述使靶的密度小于晶体密度时，可以控制产生的等离子体的密度的空间分布，并且等离子体吸收激光束的能量的区域与 等离子体发出极紫外光。 因此，可以提高排放效率，防止能量损失。 例如，在使用密度为结晶密度的24％的SnO 2靶的情况下，波长13.5nm左右的发光效率高于使用Sn晶体靶的情况。
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