摘要:
When a special operation mode is instructed, a test oscillation circuit operating at a cycle shorter than a refresh oscillation circuit specifying the cycle of self refresh is activated according to an external row address strobe signal. The internal row address strobe signal is provided to row related control circuitry via a selector. An internal row address strobe signal can be rendered active at a cycle shorter than the cycle of the external row address strobe signal, to carry out row selection. A row is selected at a cycle shorter than the transition cycle of an external signal.
摘要:
An object of the present invention is to efficiently improve uniformity of energy lines to be irradiated. A method of determining nuclear fusion irradiation coordinates according to the present invention is a method of calculating irradiation coordinates when energy lines are irradiated onto a nuclear fusion target, and comprises an initial arrangement step S202 of virtually arranging electric charges Qi at initial coordinates of the number of irradiation coordinates NB on a spherical surface S0 set by using random numbers, a coordinate analysis step S203 of analyzing coordinates ri of the electric charges Qi in time series based on coulomb forces acting among the electric charges Qi by constraining the coordinates ri onto the spherical surface S0, potential evaluation steps S205 and S206 of determining a timing at which potential energies of the electric charges Qi were stabilized based on the coordinates ri, and an irradiation coordinate deriving step S207 of deriving coordinates ri at the timing at which potential energies were stabilized as irradiation coordinates of energy lines in a case where a nuclear fusion target is arranged at the center of the spherical surface S0.
摘要:
An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.
摘要:
An object of the present invention is to efficiently improve uniformity of energy lines to be irradiated. A method of determining nuclear fusion irradiation coordinates according to the present invention is a method of calculating irradiation coordinates when energy lines are irradiated onto a nuclear fusion target, and comprises an initial arrangement step S202 of virtually arranging electric charges Qi at initial coordinates of the number of irradiation coordinates NB on a spherical surface S0 set by using random numbers, a coordinate analysis step S203 of analyzing coordinates ri of the electric charges Qi in time series based on coulomb forces acting among the electric charges Qi by constraining the coordinates ri onto the spherical surface S0, potential evaluation steps S205 and S206 of determining a timing at which potential energies of the electric charges Qi were stabilized based on the coordinates ri, and an irradiation coordinate deriving step S207 of deriving coordinates ri at the timing at which potential energies were stabilized as irradiation coordinates of energy lines in a case where a nuclear fusion target is arranged at the center of the spherical surface S0.
摘要:
An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.