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公开(公告)号:US20180128851A1
公开(公告)日:2018-05-10
申请号:US15782982
申请日:2017-10-13
发明人: Alan MALVERN
IPC分类号: G01P15/11 , G01P15/13 , G01P15/125
摘要: An accelerometer closed loop control system comprising: a capacitive accelerometer comprising a proof mass moveable relative to first and second fixed capacitor electrodes; a PWM generator to generate in-phase and anti-phase PWM drive signals with an adjustable mark/space ratio, wherein said drive signals are applied to the first and second electrodes such that they are charged alternately; an output signal detector to detect a pick-off signal from the accelerometer representing a displacement of the proof mass from a null position to provide an error signal, wherein the null position is the position of the proof mass relative to the fixed electrodes when no acceleration is applied; a PWM servo operating in closed loop to vary the mark/space ratio of said PWM drive signals in response to the error signal so that mechanical inertial forces are balanced by electrostatic forces.
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公开(公告)号:US09618532B2
公开(公告)日:2017-04-11
申请号:US15081507
申请日:2016-03-25
IPC分类号: G01P15/11 , G01P15/105 , G01P15/08 , B81B7/00 , B81C1/00 , G01C19/5783 , G01P15/097
CPC分类号: G01P15/11 , B81B7/008 , B81B2201/025 , B81B2207/012 , B81C1/0023 , G01C19/5783 , G01P15/0802 , G01P15/097 , G01P15/105 , H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2924/00014
摘要: An inertial sensor having a body with an excitation coil and a first sensing coil extending along a first axis. A suspended mass includes a magnetic-field concentrator, in a position corresponding to the excitation coil, and configured for displacing by inertia in a plane along the first axis. A supply and sensing circuit is electrically coupled to the excitation coil and to the first sensing coil, and is configured for generating a time-variable flow of electric current that flows in the excitation coil so as to generate a magnetic field that interacts with the magnetic-field concentrator to induce a voltage/current in the sensing coil. The integrated circuit is configured for measuring a value of the voltage/current induced in the first sensing coil so as to detect a quantity associated to the displacement of the suspended mass along the first axis.
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公开(公告)号:US20170023605A1
公开(公告)日:2017-01-26
申请号:US14809006
申请日:2015-07-24
发明人: Alexander Spivak
CPC分类号: G01P15/11 , G01P15/0802 , G01P15/18 , G01P2015/082
摘要: An accelerometer as disclosed herein includes a support wafer, a bottom wafer, a top wafer, and an inductive pick-off. The support wafer may define a plane and may comprise a first side, a second side, and a proof mass. The proof mass may be configured to move in the plane defined by the support wafer. The bottom wafer may comprise a first side and a second side, and the first side may be positioned over the first side of the support wafer. The top wafer may comprise a first side and a second side, and the first side may be positioned over the second side of the support wafer. The inductive pick-off may comprise a near field resonant conductive coupling mechanism and may be configured to output a signal indicative of an amount of displacement of the proof mass to electronics.
摘要翻译: 如本文公开的加速度计包括支撑晶片,底部晶片,顶部晶片和感应传感器。 支撑晶片可以限定一个平面,并且可以包括第一侧面,第二侧面和检验质量块。 检测质量可以被配置为在由支撑晶片限定的平面内移动。 底部晶片可以包括第一侧和第二侧,并且第一侧可以位于支撑晶片的第一侧上方。 顶部晶片可以包括第一侧和第二侧,并且第一侧可以位于支撑晶片的第二侧上方。 感应传感器可以包括近场谐振导电耦合机构,并且可以被配置为输出指示检测质量块到电子器件的位移量的信号。
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公开(公告)号:US20160209440A1
公开(公告)日:2016-07-21
申请号:US15081507
申请日:2016-03-25
IPC分类号: G01P15/11 , G01P15/097 , G01C19/5783
CPC分类号: G01P15/11 , B81B7/008 , B81B2201/025 , B81B2207/012 , B81C1/0023 , G01C19/5783 , G01P15/0802 , G01P15/097 , G01P15/105 , H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2924/00014
摘要: An inertial sensor having a body with an excitation coil and a first sensing coil extending along a first axis. A suspended mass includes a magnetic-field concentrator, in a position corresponding to the excitation coil, and configured for displacing by inertia in a plane along the first axis. A supply and sensing circuit is electrically coupled to the excitation coil and to the first sensing coil, and is configured for generating a time-variable flow of electric current that flows in the excitation coil so as to generate a magnetic field that interacts with the magnetic-field concentrator to induce a voltage/current in the sensing coil. The integrated circuit is configured for measuring a value of the voltage/current induced in the first sensing coil so as to detect a quantity associated to the displacement of the suspended mass along the first axis.
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公开(公告)号:US20160209439A1
公开(公告)日:2016-07-21
申请号:US15003236
申请日:2016-01-21
发明人: Gregory H. Ames
摘要: A single sensing unit having two electrodes with a common thermal reference is positioned near the centroid of the inertial mass of a differential inductive accelerometer. As the mass is displaced a first sensor detects an increase in inductance while a second sensor detects a decrease in inductance. Significantly, the first and second sensors share a common thermal reference eliminating any thermal differential. As the sensor system is closely aligned with the centroid of the inertial mass the sensor system of the present invention reduces or eliminates any systemic error.
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公开(公告)号:US20160178655A1
公开(公告)日:2016-06-23
申请号:US15056362
申请日:2016-02-29
发明人: In-seon Kim
IPC分类号: G01P15/105 , H01F6/06 , H01F6/04 , G01P15/11
CPC分类号: G01P15/105 , G01P15/11 , H01F6/04 , H01F6/06
摘要: An acceleration measuring apparatus, a SQUID sensor module, and a fabrication method of the SQUID sensor module. The acceleration measuring apparatus includes a test mass structure with a superconducting thin film on its one surface and providing elasticity, a superconducting coil for measurement disposed on the substrate to be opposite to the one surface of the test mass structure and magnetically coupled to the test mass structure, a transformer disposed on the substrate and including a primary superconducting coil connected to the superconducting coil and a secondary superconducting coil magnetically coupled to the primary superconducting coil, an input coil disposed on the substrate and connected to the secondary superconducting coil, and a superconducting quantum interference device (SQUID) disposed on the substrate and magnetically coupled to the input coil.
摘要翻译: SQUID传感器模块的加速度测量装置,SQUID传感器模块和制造方法。 加速度测量装置包括在其一个表面上具有超导薄膜并提供弹性的测试质量结构,用于测量的超导线圈,设置在基板上以与测试质量结构的一个表面相对并且磁耦合到测试质量 结构,设置在所述衬底上并包括连接到所述超导线圈的初级超导线圈和磁耦合到所述初级超导线圈的次级超导线圈的变压器,设置在所述衬底上并连接到所述次级超导线圈的输入线圈,以及超导 量子干涉装置(SQUID),其设置在基板上并与输入线圈磁耦合。
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公开(公告)号:US09354125B2
公开(公告)日:2016-05-31
申请号:US13936192
申请日:2013-07-07
CPC分类号: G01K7/34 , G01H11/00 , G01K1/024 , G01K13/08 , G01M13/045 , G01P15/097 , G01P15/11
摘要: A sensor arrangement for wirelessly measuring temperature and vibration is disclosed. The sensor arrangement includes a sensor element and a sensor coil affixed on the device. A readout coil is configured to be magnetically coupled to the sensor coil configured to energize the sensor coil with an energizing signal, configured to provide the natural frequency of the sensor element, the sensor coil, and the readout coil, and configured to provide amplitude modulations of the energizing signal, the amplitude modulations being induced by changes in the coupling factor of the readout coil and the sensor coil. An energizing circuit is configured to energize the readout coil with the energizing signal. A readout circuit is configured to store or display information regarding the natural frequency and the amplitude modulations.
摘要翻译: 公开了一种用于无线测量温度和振动的传感器装置。 传感器装置包括固定在装置上的传感器元件和传感器线圈。 读出线圈被配置为磁耦合到传感器线圈,所述传感器线圈被配置成用激励信号激励传感器线圈,该激励信号被配置为提供传感器元件,传感器线圈和读出线圈的固有频率,并且被配置为提供幅度调制 的激励信号,由读出线圈和传感器线圈的耦合因子的变化引起振幅调制。 激励电路被配置为用激励信号使读出线圈通电。 读出电路被配置为存储或显示关于固有频率和幅度调制的信息。
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公开(公告)号:US08928162B2
公开(公告)日:2015-01-06
申请号:US14229068
申请日:2014-03-28
发明人: Tien-Kan Chung , Wen-Chuan Tai , Yao-Te Huang , Hsin-Ting Huang , Shang-Ying Tsai , Chang-Yi Yang , Chia-Ming Hung
CPC分类号: H02K35/04 , B81B7/02 , G01P15/11 , H01F5/003 , H02K15/00 , H02M7/04 , H02N1/006 , Y10T29/49009
摘要: A method of fabricating a device includes forming a moveable plate over a substrate, and forming an energy harvesting coil in the moveable plate. The method further includes forming at least one connector connecting the movable plate with the energy harvesting coil, wherein a portion of the energy harvesting coil extends along the at least one connector. The method further includes forming electrodes around the moveable plate, the electrodes adapted to sense motion of the moveable plate.
摘要翻译: 一种制造器件的方法包括在衬底上形成可移动板,并在可移动板中形成能量收集线圈。 该方法还包括形成连接可移动板与能量收集线圈的至少一个连接器,其中能量收集线圈的一部分沿着至少一个连接器延伸。 该方法还包括在可移动板周围形成电极,电极适于感测可移动板的运动。
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9.
公开(公告)号:US20140026663A1
公开(公告)日:2014-01-30
申请号:US14008637
申请日:2011-05-30
申请人: Yves Clarissou
发明人: Yves Clarissou
IPC分类号: G01P15/03 , G01P15/11 , G01P15/093
CPC分类号: G01P15/032 , B60T8/172 , G01P15/036 , G01P15/093 , G01P15/11
摘要: A device and method measure an acceleration of a moving body. The device contains a solid body having a moving part and an internal cavity capable of allowing for a free movement of the moving part. The internal cavity has at least one wall forming a sloping track, the sloping track having a surface allowing for the free movement of the moving part on the sloping track between an initial position at rest and a distant position spaced from the initial position situated at an end of the internal cavity and reachable by the moving part during a variation in acceleration. The moving part moving from the initial position to the distant position in the internal cavity under an effect of the acceleration of the moving body. At least one detector is provide and is capable of detecting a presence of the moving part at the distant position.
摘要翻译: 装置和方法测量移动体的加速度。 该装置包括具有移动部件和能够允许移动部件的自由运动的内部空腔的实体。 内腔具有形成倾斜轨道的至少一个壁,倾斜轨道具有允许移动部分在倾斜轨道上的自由运动,该静止位置处于静止的初始位置和与位于 内部腔体的端部,并且在加速度变化期间可由移动部件到达。 移动部件在移动体的加速度的作用下从初始位置移动到内部空腔中的远方位置。 提供至少一个检测器,并且能够检测在远处位置处的运动部件的存在。
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公开(公告)号:US08453505B2
公开(公告)日:2013-06-04
申请号:US12960152
申请日:2010-12-03
申请人: Gilbert Erdler , Joerg Franke
发明人: Gilbert Erdler , Joerg Franke
CPC分类号: G01P15/105
摘要: Acceleration and/or tilt sensor having a ferromagnetic fluid that is located in a receptacle, and the receptacle constitutes a neutral position for the fluid, and the fluid is permanently magnetized, and a magnetic field detector arrangement is located at the receptacle to detect a displacement of the fluid, wherein a portion of the fluid can be displaced relative to the receptacle from the neutral position to an operating position by an external force while maintaining a continuous surface with the portion of the fluid remaining in the neutral position, and the fluid returns to the neutral position after removal of the external force.
摘要翻译: 具有位于容器中的铁磁流体的加速度和/或倾斜传感器,并且容器构成用于流体的中性位置,并且流体被永久磁化,并且磁场检测器装置位于容器处以检测位移 的流体,其中流体的一部分可以通过外力从中性位置移动到操作位置,同时保持与部分流体保持在中立位置的连续表面,并且流体返回 去除外力后到中立位置。
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