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    Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one direction
    4.
    发明授权
    Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one direction 有权

    公开(公告)号：US10288489B2

    公开(公告)日：2019-05-14

    申请号：US14401860

    申请日：2013-05-29

    申请人： NIKON CORPORATION

    发明人： Katsura Otaki ,  Katsumi Sugisaki ,  Takashi Gemma

    IPC分类号： G01J9/02 ,  G01M11/02 ,  G03F7/20 ,  G02B27/50

    摘要： There is provided a wavefront measuring method for obtaining wavefront information of an optical system. The method including: irradiating the optical system with a light beam; allowing the light beam passed via the optical system to come into a diffraction grating having periodicity in a first direction; and obtaining the wavefront information based on an interference fringe formed by light beams generated from the diffraction grating. The diffraction grating including: first portions which allow light to pass therethrough; and second portions which shield light, each of the second portions being provided between two of the first portions. A ratio between a width of one of the first portions in the first direction and a width of one of the second portions in the first direction is changed in the first direction, the one of the first portions and the one of the second portions being adjacent to each other.

    Combined wavefront coding and amplitude contrast imaging systems
    6.
    发明授权
    Combined wavefront coding and amplitude contrast imaging systems 有权
    组合波前编码和振幅对比成像系统

    公开(公告)号：US06873733B2

    公开(公告)日：2005-03-29

    申请号：US09766325

    申请日：2001-01-19

    申请人： Edward Raymond Dowski, Jr.

    发明人： Edward Raymond Dowski, Jr.

    IPC分类号： G02B27/00 ,  G02B27/50 ,  G06K9/36

    CPC分类号： G02B27/0025 ,  G02B27/50

    摘要： The present invention provides extended depth of field or focus to conventional Amplitude Contrast imaging systems. This is accomplished by including a Wavefront Coding mask in the system to apply phase variations to the wavefront transmitted by the Phase Object being imaged. The phase variations induced by the Wavefront Coding mask code the wavefront and cause the optical transfer function to remain essentially constant within some range away from the in-focus position. This provides a coded image at the detector. Post processing decodes this coded image, resulting in an in-focus image over an increased depth of field.

    摘要翻译： 本发明将扩展的景深或焦点提供给传统的幅度对比度成像系统。 这是通过在系统中包括波前编码掩码来实现的，以将相位变化应用于正被成像的相位对象传输的波前。 由波前编码掩模引起的相位变化对波前进行编码，并使光学传递函数在远离对焦位置的某个范围内保持基本恒定。 这在检测器处提供了编码图像。 后处理解码该编码图像，导致在增加的景深上的对焦图像。

    Device for scanning an object with a light beam
    7.
    发明授权
    Device for scanning an object with a light beam 失效
    用光束扫描物体的装置

    公开(公告)号：US4165149A

    公开(公告)日：1979-08-21

    申请号：US870081

    申请日：1978-01-17

    申请人： Akiyoshi Suzki ,  Yoichi Hirabayashi

    发明人： Akiyoshi Suzki ,  Yoichi Hirabayashi

    IPC分类号： H04N3/02 ,  G01B11/00 ,  G02B26/10 ,  G02B27/46 ,  G02B27/50 ,  G03F9/00 ,  G06T1/00 ,  G02B27/17

    CPC分类号： G03F9/7088

    摘要： Disclosed in this specification is a scanning device which scans an object having a flat reflection surface and an inclined reflection surface with an inclination relative to the flat reflection surface such as, for example, a mask and a wafer to be used in manufacturing IC, LSI, etc., with light beam, and detects only the reflected light from the inclined reflection surface with a light detector. In order to make it possible to detect only the reflected light from the inclined reflection surface with the light detector, a telecentric objective lens is used as the scanning lens in this scanning device, and the original point of deflection of the above-mentioned scanning light beam coincides with the center of the pupil of this telecentric objective lens. In addition, a filter is disposed on the pupil surface to intercept light from the flat reflection surface. An optical system between the scanning device and the object is of f-.theta.lens characteristics in order to compensate the non-linearity of the scanning beam caused by uniform angular velocity movement of the scanning device or the like.

    摘要翻译： 在本说明书中公开了一种扫描装置，其扫描具有平坦反射面的物体和相对于平坦反射面倾斜的倾斜反射面，例如用于制造IC，LSI的掩模和晶片 等，并用光检测器仅检测来自倾斜反射面的反射光。 为了能够利用光检测器仅检测来自倾斜反射面的反射光，在该扫描装置中使用远心物镜作为扫描透镜，并且将上述扫描光的原始偏转点 光束与该远心物镜的光瞳的中心重合。 此外，滤光器设置在瞳孔表面上以拦截来自平坦反射表面的光。 扫描装置和物体之间的光学系统具有f-θ透镜特性，以便补偿由扫描装置等的均匀角速度移动引起的扫描光束的非线性。

    Apparatus for transducing infrared images into visible images utilizing a liquid light control layer
    9.
    发明授权
    Apparatus for transducing infrared images into visible images utilizing a liquid light control layer 失效
    将红外图像转换成利用液体光控制层的可见图像的装置

    公开(公告)号：US3603794A

    公开(公告)日：1971-09-07

    申请号：US3603794D

    申请日：1970-07-10

    申请人： CIBA LTD

    发明人： MAST FRED

    IPC分类号： H04N5/74 ,  G02B27/50

    CPC分类号： G02B27/50

    摘要： Apparatus for making incoming infrared rays visible includes an infrared optical system which serves to focus the rays through an optical grating onto the surface of a deformable liquid film deposited on a plane face of a transparent prism, the prism being so disposed in the path of a Schlieren-optical system that a beam of visible light produced by a source enters the liquid film from the baCk, is totally internally reflected at its surface adjacent the grating onto a concave mirrored surface of the prism which returns the beam to the liquid where it is again totally internally reflected by the liquid surface and then imaged on the bar-and-slot system of the schlieren-optics. In the absence of incoming infrared rays, the surface of the liquid film remains undeformed and the beam of visible light is turned back into its source. Upon deformation of the liquid surface by incoming infrared rays, visible light returning from the prism passes through the slots of the bar-and-slot system to establish an observable image of the deformation.