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公开(公告)号：US4165149A
公开(公告)日：1979-08-21
申请号：US870081
申请日：1978-01-17
申请人： Akiyoshi Suzki , Yoichi Hirabayashi
发明人： Akiyoshi Suzki , Yoichi Hirabayashi
CPC分类号： G03F9/7088
摘要： Disclosed in this specification is a scanning device which scans an object having a flat reflection surface and an inclined reflection surface with an inclination relative to the flat reflection surface such as, for example, a mask and a wafer to be used in manufacturing IC, LSI, etc., with light beam, and detects only the reflected light from the inclined reflection surface with a light detector. In order to make it possible to detect only the reflected light from the inclined reflection surface with the light detector, a telecentric objective lens is used as the scanning lens in this scanning device, and the original point of deflection of the above-mentioned scanning light beam coincides with the center of the pupil of this telecentric objective lens. In addition, a filter is disposed on the pupil surface to intercept light from the flat reflection surface. An optical system between the scanning device and the object is of f-.theta.lens characteristics in order to compensate the non-linearity of the scanning beam caused by uniform angular velocity movement of the scanning device or the like.
摘要翻译： 在本说明书中公开了一种扫描装置，其扫描具有平坦反射面的物体和相对于平坦反射面倾斜的倾斜反射面，例如用于制造IC，LSI的掩模和晶片 等，并用光检测器仅检测来自倾斜反射面的反射光。 为了能够利用光检测器仅检测来自倾斜反射面的反射光，在该扫描装置中使用远心物镜作为扫描透镜，并且将上述扫描光的原始偏转点 光束与该远心物镜的光瞳的中心重合。 此外，滤光器设置在瞳孔表面上以拦截来自平坦反射表面的光。 扫描装置和物体之间的光学系统具有f-θ透镜特性，以便补偿由扫描装置等的均匀角速度移动引起的扫描光束的非线性。
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公开(公告)号：US4199219A
公开(公告)日：1980-04-22
申请号：US790072
申请日：1977-04-22
申请人： Akiyoshi Suzki , Yoichi Hirabayashi
发明人： Akiyoshi Suzki , Yoichi Hirabayashi
CPC分类号： G03F9/70 , G02B26/108
摘要： Disclosed in this specification is a scanning device which scans an object having a flat reflection surface and an inclined reflection surface with an inclination relative to the flat reflection surface such as, for example, a mask and a wafer to be used in manufacturing IC, LSI, etc., with light beam, and detects only the reflected light from the inclined reflection surface with a light detector. In order to make it possible to detect only the reflected light from the inclined reflection surface with the light detector, a telecentric lens is used as the scanning lens in this scanning device, and the original point of deflection of the above-mentioned light beam coincides with the center of the pupil of this telecentric lens. In addition, a filter is disposed on the pupil surface to intercept light from the flat reflection surface.
摘要翻译： 在本说明书中公开了一种扫描装置，其扫描具有平坦反射面的物体和相对于平坦反射面倾斜的倾斜反射面，例如用于制造IC，LSI的掩模和晶片 等，并用光检测器仅检测来自倾斜反射面的反射光。 为了能够利用光检测器仅检测来自倾斜反射面的反射光，在该扫描装置中使用远心透镜作为扫描透镜，并且上述光束的原始偏转点一致 与这个远心镜头的瞳孔的中心。 此外，滤光器设置在瞳孔表面上以拦截来自平坦反射表面的光。
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3.发明授权
公开(公告)号：US4367009A
公开(公告)日：1983-01-04
申请号：US230502
申请日：1981-02-02
申请人： Akiyoshi Suzki
发明人： Akiyoshi Suzki
IPC分类号： H04N3/02 , B41J2/44 , G02B13/00 , G02B26/10 , G02B26/12 , G02B27/10 , G03F9/00 , H04N1/04 , G02B27/17
CPC分类号： G02B27/108 , B41J2/325 , B41J2/355 , G02B26/123 , G02B27/12 , G02B27/123 , G02B27/143 , G02B27/144 , H04N1/113
摘要： A scanning apparatus for obtaining plural scanning beams, wherein plural stationary light beams are incident upon a deflecting reflection surface in different directions, but they are superposed with each other on the reflection surface. Plural scanning beams are provided from the deflecting reflection surface. Since the plural beams are superposed on the reflection surface, the center of deflection is the same for all of the light beams, so that the scanning beams are easily processed by a single optical system.
摘要翻译： 一种用于获得多个扫描光束的扫描装置，其中多个固定光束以不同方向入射到偏转反射表面上，但是它们在反射表面上彼此重叠。 从偏转反射面设置多个扫描光束。 由于多个光束叠加在反射面上，偏转中心对于所有光束都是相同的，所以扫描光束可以容易地被单个光学系统处理。
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公开(公告)号：US4251129A
公开(公告)日：1981-02-17
申请号：US948776
申请日：1978-10-05
申请人： Akiyoshi Suzki , Ichiro Kano
发明人： Akiyoshi Suzki , Ichiro Kano
CPC分类号： G03F9/7065 , G02B26/12 , G02B27/28
摘要： A photoelectric detecting device in which a photoelectric detecting system for scanning a surface to be inspected by a light beam and for receiving the light from the inspected surface by a photoelectric detector is partly common to an observation optical system for illuminating the inspected surface with an illuminating light and for observing the inspected surface. The device has a dichroic mirror and a polarizing beam splitter, whereby photoelectric detection is effected without loss of light and without adverse effect of the illuminating light.
摘要翻译： 一种光电检测装置，其中用于通过光束扫描待检查的表面并且用于通过光电检测器接收来自被检查表面的光的光电检测系统对于用照明被检查表面的照明的观察光学系统是部分常见的 光和观察被检查的表面。 该装置具有二向色镜和偏振光束分离器，由此光电检测在不损失光的同时不产生照明光的不利影响。
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公开(公告)号：US4202627A
公开(公告)日：1980-05-13
申请号：US900856
申请日：1978-04-28
申请人： Akiyoshi Suzki , Ichiro Kano , Hideki Yoshinari , Masao Tozuka , Ryozo Hiraga , Yuzo Kato , Yasuo Ogino
发明人： Akiyoshi Suzki , Ichiro Kano , Hideki Yoshinari , Masao Tozuka , Ryozo Hiraga , Yuzo Kato , Yasuo Ogino
摘要： An improved photoelectric detecting apparatus is disclosed in which a subject surface containing a pattern which diffracts light in a predetermined direction is scanned with spotlight and the diffracted light coming from the pattern is detected by means of photoelectric element so as to read out information of the pattern. The apparatus comprises a first photoelectric element for detecting the light diffracted in the predetermined direction, a second photoelectric element adapted for detecting light diffracted in directions other than the predetermined direction and an operational circuit for operating the signal derived from the first photoelectric element and that derived from the second one. Thus, when there is any diffractive matter such as flaw, dust and the like on the subject surface, diffracted light from the diffractive matter is detected by both the first and second photoelectric elements whereas diffracted light from the pattern is detected only by the first photoelectric element. By operating the outputs of the two photoelectric elements only the necessary information of the pattern can be read out.
摘要翻译： 公开了一种改进的光电检测装置，其中包含以预定方向衍射光的图案的被摄体表面用聚光灯扫描，并且通过光电元件检测来自图案的衍射光，以便读出图案的信息 。 该装置包括用于检测沿预定方向衍射的光的第一光电元件，适用于检测沿除了预定方向以外的方向衍射的光的第二光电元件和用于操作从第一光电元件导出的信号的操作电路， 从第二个。 因此，当在物体表面上存在诸如缺陷，灰尘等的衍射物质时，来自衍射物质的衍射光由第一和第二光电元件都被检测，而来自图案的衍射光仅由第一光电 元件。 通过操作两个光电元件的输出，只能读出图案的必要信息。
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公开(公告)号：US4167677A
公开(公告)日：1979-09-11
申请号：US870089
申请日：1978-01-17
申请人： Akiyoshi Suzki
发明人： Akiyoshi Suzki
CPC分类号： G03F9/70 , G02B26/123
摘要： This invention provides an optical device for detecting the position of a second mark relative to a first mark by optically scanning the first and second marks on a scanning surface. The first and second marks are scanned by a scanning spot light and the reflecting lights from the first and second marks are detected by a photoelectric detector. The relative positions of the first and second marks are computed on the basis of the detected signals.
摘要翻译： 本发明提供了一种用于通过在扫描表面上光学扫描第一和第二标记来检测第二标记相对于第一标记的位置的光学装置。 第一和第二标记被扫描点光扫描，并且来自第一和第二标记的反射光由光电检测器检测。 基于检测到的信号计算第一和第二标记的相对位置。
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公开(公告)号：US4262208A
公开(公告)日：1981-04-14
申请号：US49980
申请日：1979-06-19
申请人： Akiyoshi Suzki , Ichiro Kano , Hideki Yoshinari , Masao Tozuka , Ryozo Hiraga , Yuzo Kato , Yasuo Ogino
发明人： Akiyoshi Suzki , Ichiro Kano , Hideki Yoshinari , Masao Tozuka , Ryozo Hiraga , Yuzo Kato , Yasuo Ogino
IPC分类号： G01B11/00 , G02B21/08 , G02B21/10 , G02B27/00 , G03F9/00 , H01L21/00 , H01L21/027 , H01L21/30 , G02B21/06
CPC分类号： G03F9/7069 , G02B21/082 , G02B21/10
摘要： This invention relates to a photo-electrical detecting apparatus for forming a dark-field image of an object on a one-dimensional image sensor and reading said image photo-electrically. The apparatus includes a telecentric objective lens, and a light source image is formed on the clear aperture plane of said lens, said image being in focus in a direction on said plane and out of focus in a perpendicular direction. A line- or band-shaped area of the object is illuminated by the light from said light source image. Thus a dark-field image of the object is formed on said one-dimensional image sensor by providing, on a plane equivalent to said aperture plane, a filter which intercepts the normal reflected light from said object and transmits the scattered light therefrom.
摘要翻译： 本发明涉及一种用于在一维图像传感器上形成物体的暗视场图像和光电读取的光电检测装置。 该装置包括远心物镜，并且在所述透镜的透明孔径平面上形成光源图像，所述图像在所述平面上的方向上聚焦，并且在垂直方向上聚焦。 物体的线条或带状区域被来自所述光源图像的光照射。 因此，在所述一维图像传感器上，通过在与所述孔径平面相当的平面上设置一个截取来自所述物体的法线反射光并从其透射散射光的滤光器，形成所述物体的暗视场图像。
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