公开(公告)号：US06476553B1

公开(公告)日：2002-11-05

申请号：US09614262

申请日：2000-07-12

Applicant: Shiro Iida ,  Takeshi Matsumura

Inventor： Shiro Iida ,  Takeshi Matsumura

IPC: H01J1726

CPC classification number: H01J61/325 ,  H01J61/28 ,  H01J61/72 ,  Y02B20/19

Abstract: A small fluorescent discharge tube and a bulb-shaped fluorescent lamp using the same with improved rise characteristics with respect to luminous flux in the case of a relatively short non-operation time of one to six hours after a stop of operation are provided. The fluorescent discharge tube includes at least three U-shaped glass tubes joined to form one body, electrodes provided at the ends thereof, and one discharge path formed therein. The fluorescent discharge tube further includes first auxiliary amalgams in vicinities of the electrodes, main amalgams placed at least in two locations in the discharge path between the electrodes, and a second auxiliary amalgam placed at least in one location between the main amalgams.

Abstract translation: 提供了一种小型荧光放电管和灯泡型荧光灯，其在停止操作后1至6小时的相对较短的非操作时间的情况下，使用其具有相对于光通量具有改善的上升特性的灯泡状荧光灯。 荧光放电管包括至少三个连接以形成一体的U形玻璃管，设置在其端部的电极和形成在其中的一个放电路径。 荧光放电管还包括在电极附近的第一辅助汞齐，至少放置在电极之间的放电路径中的两个位置的主汞齐和至少放置在主汞齐之间的一个位置的第二辅助汞齐。

公开(公告)号：US06452315B1

公开(公告)日：2002-09-17

申请号：US09499909

申请日：2000-02-08

Applicant: Ronald A. Vane

Inventor： Ronald A. Vane

IPC: H01J1726

CPC classification number: H01J37/32082 ,  H01J2237/16

Abstract: An improved apparatus is provided for in-situ cleaning of electron microscopes and other vacuum chambers. A special RF plasma electrode is housed in a compact cylinder constructed of standard vacuum components and a electrical feedthrough. The device allows oxygen radicals to be generated from air by a low powered RF plasma. The oxygen radical flow by convection into the electron microscope or vacuum chamber to be cleaned and react with hydrocarbons to form CO and H2O vapor which is pumped away.

Abstract translation: 提供改进的设备用于电子显微镜和其它真空室的原位清洗。 特殊的RF等离子体电极被容纳在由标准真空组件和电馈通构成的小型气缸中。 该装置允许通过低功率RF等离子体从空气产生氧自由基。 通过对流进入电子显微镜或真空室中的氧自由基流被清洗，与烃反应形成被泵送的CO和H 2 O蒸气。

公开(公告)号：US06224446B1

公开(公告)日：2001-05-01

申请号：US09200563

申请日：1998-11-27

Applicant: David Key Dietrich ,  Donald Franklin Foust ,  Deborah Ann Haitko

Inventor： David Key Dietrich ,  Donald Franklin Foust ,  Deborah Ann Haitko

IPC: H01J1726

CPC classification number: H01J61/02 ,  H01J61/20

Abstract: The formation of leachable mercury upon disposal or during TCLP testing of mercury vapor discharge lamps is substantially prevented by adding soluble copper salts which are capable of being reduced to elemental copper which deposits on aluminum and other metal surfaces thereby inhibiting formation of oxidized forms of mercury by chemical reaction or amalgamation.

Abstract translation: 通过加入可沉淀在铝和其他金属表面上的能够还原成元素铜的可溶性铜盐，可以大大地防止在处理或在TCLP汞蒸气放电灯中处理或TCLP试验期间形成可浸出汞，从而通过以下方式抑制氧化形式的汞的形成： 化学反应或合并。

公开(公告)号：US06486593B1

公开(公告)日：2002-11-26

申请号：US09672045

申请日：2000-09-29

Applicant: Zhehui Wang ,  Cris W. Barnes

Inventor： Zhehui Wang ,  Cris W. Barnes

IPC: H01J1726

CPC classification number: H01J37/32623 ,  F03H1/0056 ,  H01J37/32357 ,  H05H1/54

Abstract: There has been invented an apparatus for acceleration of a plasma having coaxially positioned, constant diameter, cylindrical electrodes which are modified to converge (for a positive polarity inner electrode and a negatively charged outer electrode) at the plasma output end of the annulus between the electrodes to achieve improved particle flux per unit of power.

Abstract translation: 已经发明了一种用于加速等离子体的装置，其具有同轴位置恒定直径的圆柱形电极，其被修改为在电极之间的环形空间的等离子体输出端会聚（用于正极性内部电极和带负电荷的外部电极） 以实现每单位功率的改善的颗粒通量。

公开(公告)号：US06376972B1

公开(公告)日：2002-04-23

申请号：US09442995

申请日：1999-11-18

Applicant: Victor F. Tarasenko ,  Aleksey N. Panchenko ,  Victor S. Skakun ,  Edward A. Sosnin ,  Francis T. Wang ,  Booth R. Myers ,  Martyn G. Adamson

Inventor： Victor F. Tarasenko ,  Aleksey N. Panchenko ,  Victor S. Skakun ,  Edward A. Sosnin ,  Francis T. Wang ,  Booth R. Myers ,  Martyn G. Adamson

IPC: H01J1726

CPC classification number: H01J61/52 ,  H01J61/34 ,  H01J61/70 ,  H01S3/092

Abstract: A powerful glow discharge lamp comprising two coaxial tubes, the outer tube being optically transparent, with a cathode and anode placed at opposite ends of the tubes, the space between the tubes being filled with working gas. The electrodes are made as cylindrical tumblers placed in line to one other in such a way that one end of the cathode is inserted into the inner tube, one end of the anode coaxially covers the end of the outer tube, the inner tube penetrating and extending through the anode. The increased electrodes' surface area increases glow discharge electron current and, correspondingly, average radiation power of discharge plasma. The inner tube contains at least one cooling liquid tube placed along the axis of the inner tube along the entire lamp length to provide cathode cooling. The anode has a circumferential heat extracting radiator which removes heat from the anode. The invention is related to lighting engineering and can be applied for realization of photostimulated processes under the action of powerful radiation in required spectral range.

Abstract translation: 一个强大的辉光放电灯，包括两个同轴管，外管是光学透明的，阴极和阳极放置在管的相对端，管之间的空间充满了工作气体。 电极被制成圆柱形的翻转开关，以使得阴极的一端插入到内管中，阳极的一端同轴地覆盖外管的端部，内管穿透和延伸 通过阳极。 增加的电极表面积增加辉光放电电子电流，相应地增加放电等离子体的平均辐射功率。 内管包含至少一个沿整个灯长度沿着内管的轴线放置的冷却液管，以提供阴极冷却。 阳极具有从阳极移除热量的周向散热器。 本发明涉及照明工程，并且可以用于在所需光谱范围内强力辐射的作用下实现光刺激过程。

公开(公告)号：US06369493B1

公开(公告)日：2002-04-09

申请号：US09300182

申请日：1999-04-27

Applicant: Dmitry Lubomirsky ,  Harald Herchen ,  Simon Yavelberg ,  David Palagashvili ,  Donald J. Olgado

Inventor： Dmitry Lubomirsky ,  Harald Herchen ,  Simon Yavelberg ,  David Palagashvili ,  Donald J. Olgado

IPC: H01J1726

CPC classification number: G03F7/70016 ,  H01J37/32192 ,  H01J37/32522

Abstract: A plasma applicator having a tube that is surrounded by a cooling jacket such that a volume is defined proximate the tube. The volume is filled with a thermal transfer medium to couple heat from the tube to the cooling jacket. The cooling jacket contains an aperture through which energy is transmitted to a process gas contained in the tube. As such, the process gas is infused with energy and a plasma is formed in the tube.

Abstract translation: 一种等离子体施加器，其具有由冷却套包围的管，使得容积限定在管附近。 体积填充有热传递介质，以将热量从管耦合到冷却套管。 冷却套包含孔，通过该孔将能量传递到管中包含的处理气体。 因此，工艺气体注入能量，并且在管中形成等离子体。

公开(公告)号：US06307308B1

公开(公告)日：2001-10-23

申请号：US09319901

申请日：1999-08-13

Applicant: Jörg Teichmann ,  Michael Römheld

Inventor： Jörg Teichmann ,  Michael Römheld

IPC: H01J1726

CPC classification number: H01J17/14 ,  H01J17/40

Abstract: At least main electrodes for a low pressure gas discharge arranged at a distance from each other are present in such switches, the main electrodes forming a cathode and an anode of a discharge path in an interrupter chamber for the gas discharge which is fired by increasing electron density in a cathode cavity. For this purpose, at least the cathodes have at least one opening, preferably the cathode and anode, having opposite aligned openings for triggering the discharge. In such an arrangement, an arrangement for the generation of a magnetic field superimposed on the discharge may be present. At least one slot is present in at least one of the main planar electrodes for generating a radial magnetic field. A single slot maybe provided which runs in the form of a spiral from the area of the electrode center to the area of the electrode edge.

Abstract translation: 在这样的开关中存在至少在彼此间隔一定距离的低压气体放电的主电极，主电极在用于气体放电的断续室中形成放电路径的阴极和阳极，其通过增加电子 阴极腔中的密度。 为此，至少阴极具有至少一个开口，优选阴极和阳极具有用于触发放电的相对对齐的开口。 在这种布置中，可以存在用于产生叠加在放电上的磁场的布置。 至少一个主平面电极中存在至少一个槽，用于产生径向磁场。 可以提供单个槽，其从电极中心的区域到电极边缘的区域以螺旋形式运行。

公开(公告)号：US06670741B2

公开(公告)日：2003-12-30

申请号：US09796591

申请日：2001-03-02

Applicant: Nobuo Ishii

Inventor： Nobuo Ishii

IPC: H01J1726

CPC classification number: H01J37/32229 ,  H01J37/32192

Abstract: A plasma processing apparatus includes a processing container 53, a mounting table 61 for supporting a semiconductor wafer W arranged in the processing container 53, an endless-and-annular antenna 73 attached to a sealing plate 55 opposing the wafer W to introduce a microwave into the container 53 through the plate 55, a propagation waveguide 81 connected to the annular antenna 73 to supply the microwave to the antenna 73, and a microwave supplier 83 connected to the propagation waveguide 81 to supply the microwave to the waveguide 81. In arrangement, the annular antenna 73 is arranged so that its part along the sealing plate 55 accords with an antinode of a standing wave of the microwave, producing an uniform plasma in the processing container 53.

Abstract translation: 等离子体处理装置包括处理容器53，用于支撑布置在处理容器53中的半导体晶片W的安装台61，安装在与晶片W相对的密封板55上的环形和环形天线73，以将微波引入 通过板55的容器53，连接到环形天线73以将微波提供给天线73的传播波导81和连接到传播波导81以将微波提供给波导81的微波供应器83.在布置中， 环形天线73被布置成使得其沿着密封板55的部分与微波驻波的波腹一致，在处理容器53中产生均匀的等离子体。

公开(公告)号：US06621199B1

公开(公告)日：2003-09-16

申请号：US09492917

申请日：2000-01-21

Applicant: Dean Allister Parfeniuk ,  David Malcolm Camm ,  Johan George Fourie ,  Roger Housden ,  Arne Kjørvel ,  Steven McCoy ,  Sujay Prasad ,  Tilman Jochen Thrum

Inventor： Dean Allister Parfeniuk ,  David Malcolm Camm ,  Johan George Fourie ,  Roger Housden ,  Arne Kjørvel ,  Steven McCoy ,  Sujay Prasad ,  Tilman Jochen Thrum

IPC: H01J1726

CPC classification number: H01J61/35 ,  H01J61/025 ,  H01J61/30 ,  H01J61/40 ,  H01J61/52 ,  H01J61/82

Abstract: A method and apparatus for producing high intensity electromagnetic radiation are disclosed. The apparatus includes a high intensity arc lamp having an inner envelope cooled by a first flow of liquid along an inside surface of the inner envelope. The arc lamp includes first and second electrodes for generating a high power plasma arc within the inner envelope, the arc emitting the radiation. The apparatus further includes a cooling device for producing a second flow of liquid in contact with an outside surface of the inner envelope. In order to approximate a desired electromagnetic radiation spectrum, the apparatus may further include an energy redistributor for redistributing energy within a first radiation spectrum generated by the arc to produce a second radiation spectrum.

Abstract translation: 公开了一种用于产生高强度电磁辐射的方法和装置。 该装置包括高强度弧光灯，其具有沿着内封套的内表面由第一液体流冷却的内封套。 弧光灯包括用于在内壳内产生高功率等离子弧的第一和第二电极，发射辐射的电弧。 该装置还包括冷却装置，用于产生与内封套的外表面接触的第二液体流。 为了近似期望的电磁辐射光谱，该装置还可以包括能量再分配器，用于在由电弧产生的第一辐射光谱内再分配能量以产生第二辐射光谱。

公开(公告)号：US06617771B2

公开(公告)日：2003-09-09

申请号：US10056104

申请日：2002-01-24

Applicant: Aviv Amirav

Inventor： Aviv Amirav

IPC: H01J1726

CPC classification number: H01J49/025

Abstract: The invention provides an ion source, including an inlet port for introduction of a sample into the ion source; an outlet port through which an ion beam exits; an ionizer for ionizing the sample; an ion formation chamber confined by an ion cage, and at least one electrical shield for shielding the ion chamber from the penetration of electrical fields affecting the ions inside the chamber.

Abstract translation: 本发明提供了一种离子源，包括用于将样品引入离子源的入口端口; 离子束离开的出口; 用于离子化样品的离子发生器; 由离子笼限制的离子形成室和至少一个用于屏蔽离子室免受影响室内离子的电场穿透的电屏蔽。