MEMS SWITCH WITH IMPROVED STANDOFF VOLTAGE CONTROL
    91.
    发明申请
    MEMS SWITCH WITH IMPROVED STANDOFF VOLTAGE CONTROL 有权
    MEMS开关具有改进的待机电压控制

    公开(公告)号:US20090160584A1

    公开(公告)日:2009-06-25

    申请号:US11962178

    申请日:2007-12-21

    CPC classification number: H01H59/0009 H01H1/0036

    Abstract: A MEMS switch is provided including a substrate, a movable actuator coupled to the substrate and having a first side and a second side, a first fixed electrode coupled to the substrate and positioned on the first side of the movable actuator to generate a first actuation force to pull the movable actuator toward a conduction state, and a second fixed electrode coupled to the substrate and positioned on the second side of the movable actuator to generate a second actuation force to pull the movable actuator toward a non-conducting state.

    Abstract translation: 提供一种MEMS开关,其包括基板,耦合到基板并具有第一侧和第二侧的可移动致动器,耦合到基板并定位在可移动致动器的第一侧上的第一固定电极,以产生第一致动力 将可动致动器拉向导通状态,以及第二固定电极,其连接到基板并且定位在可动致动器的第二侧上,以产生第二致动力,以将可动致动器拉向非导通状态。

    MEMS BASED MOTOR STARTER WITH MOTOR FAILURE DETECTION
    95.
    发明申请
    MEMS BASED MOTOR STARTER WITH MOTOR FAILURE DETECTION 有权
    具有电机故障检测的基于MEMS的电机起动器

    公开(公告)号:US20080310057A1

    公开(公告)日:2008-12-18

    申请号:US11763646

    申请日:2007-06-15

    Abstract: A motor starter is disclosed. The motor starter includes control circuitry integrally arranged with at least one current path and a processor included in the control circuitry. The motor starter further includes at least one processor algorithm residing on the processor, the at least one processor algorithm containing instructions to monitor characteristics of current on the at least one current path and to provide data pertaining to a condition of the at least one current path. The motor starter further includes a micro electromechanical system (MEMS) switch disposed on the at least one current path, the MEMS switch responsive to the control circuitry to facilitate the control of an electrical current, passing through the at least one current path.

    Abstract translation: 公开了一种电动机起动器。 电动机启动器包括与至少一个电流路径一体地布置的控制电路和包括在控制电路中的处理器。 电动机启动器还包括驻留在处理器上的至少一个处理器算法,所述至少一个处理器算法包含用于监视至少一个当前路径上的电流的特性的指令,以及提供与至少一个当前路径的条件有关的数据 。 电动机启动器还包括设置在至少一个电流路径上的微机电系统(MEMS)开关,所述MEMS开关响应于控制电路以便于通过至少一个电流路径的电流的控制。

    Small scale wires with microelectromechanical devices
    98.
    发明授权
    Small scale wires with microelectromechanical devices 有权
    小型电线与微机电装置

    公开(公告)号:US07339244B2

    公开(公告)日:2008-03-04

    申请号:US11340135

    申请日:2006-01-26

    Abstract: A process cycles between etching and passivating chemistries to create rough sidewalls that are converted into small structures. In one embodiment, a mask is used to define lines in a single crystal silicon wafer. The process creates ripples on sidewalls of the lines corresponding to the cycles. The lines are oxidized in one embodiment to form a silicon wire corresponding to each ripple. The oxide is removed in a further embodiment to form structures ranging from micro sharp tips to photonic arrays of wires. Fluidic channels are formed by oxidizing adjacent rippled sidewalls. The same mask is also used to form other structures for MEMS devices.

    Abstract translation: 蚀刻和钝化化学物质之间的过程循环,以产生转变成小结构的粗糙侧壁。 在一个实施例中,使用掩模来限定单晶硅晶片中的线。 该过程在对应于循环的线的侧壁上产生波纹。 在一个实施例中,线被氧化以形成对应于每个纹波的硅线。 在另一个实施方案中去除氧化物以形成从微尖端到光线阵列的结构。 通过氧化相邻的波纹侧壁形成流体通道。 同样的掩模也用于形成用于MEMS器件的其它结构。

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