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公开(公告)号:US07490519B2
公开(公告)日:2009-02-17
申请号:US11241049
申请日:2005-09-30
申请人: Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore , Parag Thakre , Russell William Craddock , Peter Ken Kinnell , John Christopher Greenwood
发明人: Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore , Parag Thakre , Russell William Craddock , Peter Ken Kinnell , John Christopher Greenwood
CPC分类号: G01L9/0019
摘要: A differential pressure sensing system is provided. The sensing system includes a membrane layer having a channel extending diametrically therein, and including one or more cavities provided radially outbound of the channel and at least one resonant beam disposed in the channel and configured to oscillate at a desired frequency. The system further includes sensing circuitry configured to detect oscillation of the at least one resonant beam indicative of deformation in the membrane layer.
摘要翻译: 提供差压感测系统。 感测系统包括膜层,其具有在其中径向延伸的通道,并且包括设置在通道中径向出入的一个或多个空腔,以及设置在通道中并被配置为以期望频率振荡的至少一个谐振束。 该系统还包括感测电路,其被配置为检测指示膜层变形的至少一个谐振光束的振荡。
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公开(公告)号:US07017418B1
公开(公告)日:2006-03-28
申请号:US11012417
申请日:2004-12-15
申请人: Parag Thakre , Shankar Chandrasekaran , Kuna Venkat Satya Rama Kishore , Russell William Craddock
发明人: Parag Thakre , Shankar Chandrasekaran , Kuna Venkat Satya Rama Kishore , Russell William Craddock
IPC分类号: G01L15/00
CPC分类号: G01L9/0019 , G01L9/0008 , G01L9/0016 , G01L9/0022
摘要: A differential pressure sensor for use in an industrial application is described. The differential pressure sensor includes a membrane layer having a covered portion and an exposed portion where a first side of the exposed portion of the membrane layer is in fluid communication to a first aperture and a second side of the exposed portion is in fluid communication to a second aperture. The differential pressure sensor also includes at least one resonating device secured to the covered portion of the membrane layer and configured to oscillate at a desired frequency and a sensing circuitry configured to a detect oscillation in the at least one resonating device indicative of deformation in the membrane layer.
摘要翻译: 描述了用于工业应用的差压传感器。 差压传感器包括具有被覆部分和暴露部分的膜层,其中膜层的暴露部分的第一侧与第一孔流体连通,并且暴露部分的第二侧与流体连通 第二个光圈。 差压传感器还包括至少一个固定到膜层的被覆盖部分并被配置为以期望的频率振荡的谐振装置,以及感测电路,其被配置为检测至少一个谐振装置中的振荡,指示膜中的变形 层。
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公开(公告)号:US08354899B2
公开(公告)日:2013-01-15
申请号:US12565127
申请日:2009-09-23
申请人: Christopher Fred Keimel , Marco Francesco Aimi , Shubhra Bansal , Reed Roeder Corderman , Kuna Venkat Satya Rama Kishore , Eddula Sudhakar Reddy , Atanu Saha , Kanakasabapathi Subramanian , Parag Thakre , Alex David Corwin
发明人: Christopher Fred Keimel , Marco Francesco Aimi , Shubhra Bansal , Reed Roeder Corderman , Kuna Venkat Satya Rama Kishore , Eddula Sudhakar Reddy , Atanu Saha , Kanakasabapathi Subramanian , Parag Thakre , Alex David Corwin
IPC分类号: H01H51/22
CPC分类号: H01H1/0036 , H01H59/0009 , H01H2001/0052 , H01H2001/0084 , Y10T29/49105
摘要: Provided is a device, such as a switch structure, that includes a contact and a conductive element that is configured to be deformable between a first position in which the conductive element is separated from the contact and a second position in which the conductive element contacts the contact. The conductive element can be formed substantially of metallic material configured to inhibit time-dependent deformation. For example, the metallic material may be configured to exhibit a maximum steady-state plastic strain rate of less than 10−12 s−1 when subject to a stress of at least about 25 percent of a yield strength of the metallic material and a temperature less than or equal to about half of a melting temperature of the metallic material. The contact and the conductive element may be part of a microelectromechanical device or a nanoelectromechanical device. Associated methods are also provided.
摘要翻译: 提供了一种诸如开关结构的装置,其包括触点和导电元件,导电元件被配置为可在导电元件与触点分离的第一位置和导电元件接触的第二位置之间变形 联系。 导电元件可以基本上由配置成抑制时间变形的金属材料形成。 例如,当受到金属材料的屈服强度的至少约25%的应力和金属材料的屈服强度的应力时,金属材料可以被配置为表现出小于10-12s -1的最大稳态塑性应变速率 小于或等于金属材料的熔融温度的大约一半。 接触和导电元件可以是微机电装置或纳米机电装置的一部分。 还提供了相关的方法。
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公开(公告)号:US20110067983A1
公开(公告)日:2011-03-24
申请号:US12565127
申请日:2009-09-23
申请人: Christopher Fred Keimel , Marco Francesco Aimi , Shubhra Bansal , Reed Roeder Corderman , Kuna Venkat Satya Rama Kishore , Eddula Sudhakar Reddy , Atanu Saha , Kanakasabapathi Subramanian , Parag Thakre , Alex David Corwin
发明人: Christopher Fred Keimel , Marco Francesco Aimi , Shubhra Bansal , Reed Roeder Corderman , Kuna Venkat Satya Rama Kishore , Eddula Sudhakar Reddy , Atanu Saha , Kanakasabapathi Subramanian , Parag Thakre , Alex David Corwin
CPC分类号: H01H1/0036 , H01H59/0009 , H01H2001/0052 , H01H2001/0084 , Y10T29/49105
摘要: Provided is a device, such as a switch structure, that includes a contact and a conductive element that is configured to be deformable between a first position in which the conductive element is separated from the contact and a second position in which the conductive element contacts the contact. The conductive element can be formed substantially of metallic material configured to inhibit time-dependent deformation. For example, the metallic material may be configured to exhibit a maximum steady-state plastic strain rate of less than 10−12 s−1 when subject to a stress of at least about 25 percent of a yield strength of the metallic material and a temperature less than or equal to about half of a melting temperature of the metallic material. The contact and the conductive element may be part of a microelectromechanical device or a nanoelectromechanical device. Associated methods are also provided.
摘要翻译: 提供了一种诸如开关结构的装置,其包括触点和导电元件,导电元件被配置为可在导电元件与触点分离的第一位置和导电元件接触的第二位置之间变形 联系。 导电元件可以基本上由配置成抑制时间变形的金属材料形成。 例如,当受到金属材料的屈服强度的至少约25%的应力和金属材料的屈服强度的应力时,金属材料可以被配置为表现出小于10-12s -1的最大稳态塑性应变速率 小于或等于金属材料的熔融温度的大约一半。 接触和导电元件可以是微机电装置或纳米机电装置的一部分。 还提供了相关的方法。
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公开(公告)号:US07609136B2
公开(公告)日:2009-10-27
申请号:US11961767
申请日:2007-12-20
申请人: Xuefeng Wang , Kanakasabapathi Subramanian , Christopher Fred Keimel , Marco Francesco Aimi , Kuna Venkat Satya Rama Kishore , Glenn Scott Claydon , Oliver Charles Boomhower , Parag Thakre
发明人: Xuefeng Wang , Kanakasabapathi Subramanian , Christopher Fred Keimel , Marco Francesco Aimi , Kuna Venkat Satya Rama Kishore , Glenn Scott Claydon , Oliver Charles Boomhower , Parag Thakre
IPC分类号: H01H51/22
CPC分类号: H01H59/0009 , H01H2059/0072
摘要: A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact.
摘要翻译: MEMS开关包括衬底,耦合到衬底的可移动致动器,衬底接触件,衬底电极和电耦合到可移动致动器的导电阻塞件,并被构造成防止可动致动器接触衬底电极,同时允许可动致动器 与基板接触。
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公开(公告)号:US20090159410A1
公开(公告)日:2009-06-25
申请号:US11961767
申请日:2007-12-20
申请人: Xuefeng Wang , Kanakasabapathi Subramanian , Christopher Fred Keimel , Marco Francesco Aimi , Kuna Venkat Satya Rama Kishore , Glenn Scott Claydon , Oliver Charles Boomhower , Parag Thakre
发明人: Xuefeng Wang , Kanakasabapathi Subramanian , Christopher Fred Keimel , Marco Francesco Aimi , Kuna Venkat Satya Rama Kishore , Glenn Scott Claydon , Oliver Charles Boomhower , Parag Thakre
IPC分类号: H01H57/00
CPC分类号: H01H59/0009 , H01H2059/0072
摘要: A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact.
摘要翻译: MEMS开关包括衬底,耦合到衬底的可移动致动器,衬底接触件,衬底电极和电耦合到可移动致动器的导电阻塞件,并被构造成防止可动致动器接触衬底电极,同时允许可动致动器 与基板接触。
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公开(公告)号:US08779886B2
公开(公告)日:2014-07-15
申请号:US12627476
申请日:2009-11-30
申请人: Marco Francesco Aimi , Shubhra Bansal , Christopher Fred Keimel , Kuna Venkat Satya Rama Kishore , Sairam Sundaram , Parag Thakre
发明人: Marco Francesco Aimi , Shubhra Bansal , Christopher Fred Keimel , Kuna Venkat Satya Rama Kishore , Sairam Sundaram , Parag Thakre
CPC分类号: H01H59/0009 , H01H1/0036 , H01H2001/0052 , H01H2001/0084
摘要: A device, such as a switch structure, is provided. The switch structure can include a contact and a conductive element each respectively disposed on a substrate. The conductive element can be composed substantially of metallic material, and can be configured to be deformable between a first position, in which the conductive element is separated from the contact by a separation distance, and a second position, in which the conductive element contacts the contact and stores mechanical energy. The conductive element can be further configured such that, subsequent to being deformed into the second position at a temperature between about room temperature and about half of a melting temperature of the metallic material for a cumulative time of at least 107 seconds, the separation distance in the absence of external forces varies by less than 20 percent over the cumulative time. Associated methods are also provided.
摘要翻译: 提供了诸如开关结构的装置。 开关结构可以包括分别设置在基板上的触点和导电元件。 导电元件可以大体上由金属材料构成,并且可以被配置为可在第一位置和第二位置之间变形,第一位置和导电元件接触的第二位置 联系和存储机械能。 导电元件可以进一步构造成使得,在金属材料的熔融温度约为室温至大约一半的温度下变形为第二位置,累积时间至少为107秒,间隔距离 没有外部力量在累积时间内变化不到20%。 还提供了相关的方法。
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公开(公告)号:US20110128112A1
公开(公告)日:2011-06-02
申请号:US12627476
申请日:2009-11-30
申请人: Marco Francesco Aimi , Shubhra Bansal , Christopher Fred Keimel , Kuna Venkat Satya Rama Kishore , Sairam Sundaram , Parag Thakre
发明人: Marco Francesco Aimi , Shubhra Bansal , Christopher Fred Keimel , Kuna Venkat Satya Rama Kishore , Sairam Sundaram , Parag Thakre
IPC分类号: H01H37/00
CPC分类号: H01H59/0009 , H01H1/0036 , H01H2001/0052 , H01H2001/0084
摘要: A device, such as a switch structure, is provided. The switch structure can include a contact and a conductive element each respectively disposed on a substrate. The conductive element can be composed substantially of metallic material, and can be configured to be deformable between a first position, in which the conductive element is separated from the contact by a separation distance, and a second position, in which the conductive element contacts the contact and stores mechanical energy. The conductive element can be further configured such that, subsequent to being deformed into the second position at a temperature between about room temperature and about half of a melting temperature of the metallic material for a cumulative time of at least 107 seconds, the separation distance in the absence of external forces varies by less than 20 percent over the cumulative time. Associated methods are also provided.
摘要翻译: 提供了诸如开关结构的装置。 开关结构可以包括分别设置在基板上的触点和导电元件。 导电元件可以大体上由金属材料构成,并且可以被配置为可在第一位置和第二位置之间变形,第一位置和导电元件接触的第二位置 联系和存储机械能。 导电元件可以进一步构造成使得,在金属材料的熔融温度约为室温至大约一半的温度下变形为第二位置,累积时间至少为107秒,间隔距离 没有外部力量在累积时间内变化不到20%。 还提供了相关的方法。
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公开(公告)号:US08093971B2
公开(公告)日:2012-01-10
申请号:US12340775
申请日:2008-12-22
申请人: Xuefeng Wang , Alex David Corwin , Bo Li , Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore
发明人: Xuefeng Wang , Alex David Corwin , Bo Li , Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore
IPC分类号: H01H51/22
CPC分类号: H01H59/0009 , H01H1/0036 , H01H2001/0078 , H01H2001/0084 , Y10T29/49105
摘要: A micro electromechanical system switch having an electrical pathway is presented. The switch includes a first portion and a second portion. The second portion is offset to a zero overlap position with respect to the first portion when the switch is in open position (or in the closed position depending on the switch architecture). The switch further includes an actuator for moving the first portion and the second portion into contact.
摘要翻译: 提出了具有电路径的微机电系统开关。 开关包括第一部分和第二部分。 当开关处于打开位置时(或根据开关结构处于闭合位置),第二部分相对于第一部分偏移到零重叠位置。 开关还包括用于使第一部分和第二部分移动接触的致动器。
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公开(公告)号:US20100155203A1
公开(公告)日:2010-06-24
申请号:US12340775
申请日:2008-12-22
申请人: Xuefeng Wang , Alex David Corwin , Bo Li , Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore
发明人: Xuefeng Wang , Alex David Corwin , Bo Li , Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore
CPC分类号: H01H59/0009 , H01H1/0036 , H01H2001/0078 , H01H2001/0084 , Y10T29/49105
摘要: A micro electromechanical system switch having an electrical pathway is presented. The switch includes a first portion and a second portion. The second portion is offset to a zero overlap position with respect to the first portion when the switch is in open position (or in the closed position depending on the switch architecture). The switch further includes an actuator for moving the first portion and the second portion into contact.
摘要翻译: 提出了具有电路径的微机电系统开关。 开关包括第一部分和第二部分。 当开关处于打开位置时(或根据开关结构在关闭位置),第二部分相对于第一部分偏移到零重叠位置。 开关还包括用于使第一部分和第二部分移动接触的致动器。
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