PIEZOELECTRIC FILM ELEMENT, AND MANUFACTURING METHOD OF THE SAME AND PIEZOELECTRIC FILM DEVICE
    93.
    发明申请
    PIEZOELECTRIC FILM ELEMENT, AND MANUFACTURING METHOD OF THE SAME AND PIEZOELECTRIC FILM DEVICE 有权
    压电薄膜元件及其制造方法及压电薄膜器件

    公开(公告)号:US20110187237A1

    公开(公告)日:2011-08-04

    申请号:US13018693

    申请日:2011-02-01

    IPC分类号: H01L41/047

    摘要: A piezoelectric film element is provided, which is capable of improving piezoelectric properties, having on a substrate at least a lower electrode, a lead-free piezoelectric film, and an upper electrode, wherein at least the lower electrode out of the lower electrode and the upper electrode has a crystal structure of a cubic crystal system, a tetragonal crystal system, an orthorhombic crystal system, a hexagonal crystal system, a monoclinic crystal system, a triclinic crystal system, a trigonal crystal system, or has a composition in which one of these crystals exists or two or more of them coexist, and crystal axes of the crystal structure are preferentially oriented to a specific axis smaller than or equal to two axes of these crystals, and a ratio c/a′ is set in a range of 0.992 or more and 0.999 or less, which is the ratio of a crystal lattice spacing c in a direction of a normal line to the substrate surface, with respect to a crystal lattice spacing a′ whose inclination angle from the substrate surface is in a range of 10° or more and 30° or less.

    摘要翻译: 提供一种能够改善压电性能的压电膜元件,其在基板上至少具有下电极,无铅压电膜和上电极,其中至少下电极中的下电极和 上电极具有立方晶系,四方晶系,正交晶系,六方晶系,单斜晶系,三斜晶系,三
    晶体系的晶体结构,或其组成为: 这些晶体存在或其中的两种以上共存,并且晶体结构的晶轴优先取向小于或等于这些晶体的两个轴的特定轴,并且将比率c / a'设定在0.992的范围内 以上且0.999以下,其是法线方向的晶格间距c与基板表面的比率,相对于晶格间距a',其倾斜角 从基板表面的厚度为10°以上且30°以下的范围。

    Softening point measuring apparatus and thermal conductivity measuring apparatus
    95.
    发明申请
    Softening point measuring apparatus and thermal conductivity measuring apparatus 有权
    软化点测量仪和热导率测量仪

    公开(公告)号:US20110038392A1

    公开(公告)日:2011-02-17

    申请号:US12806364

    申请日:2010-08-11

    IPC分类号: G01N25/02 G01N25/18

    CPC分类号: G01N25/18 G01N25/04 G01Q60/58

    摘要: In a local softening point measuring apparatus and thermal conductivity measuring apparatus using a probe microscope as a base, environment of the prob˜ and a sample surface is set to 1/100 atmospheric pressure (103 Pa) or lower. Otherwise, a side surface of the probe is coated with a thermal insulation material having a thickness that enables thermal dissipation to be reduced to 1/100 or lower, to thereby reduce the thermal dissipation from the side surface of the probe, and exchange heat substantially only at the contacting portion between the probe and the sample surface.

    摘要翻译: 在使用探针显微镜作为基础的局部软化点测定装置和热导率测定装置中,将试样表面的环境设定为1/100大气压(103Pa)以下。 否则,探针的侧表面涂覆有能够使散热减小到1/100或更低的厚度的绝热材料,从而减少从探针侧表面的散热,并且基本上交换热量 仅在探针和样品表面之间的接触部分处。

    Optical displacement-detecting mechanism and probe microscope using the same
    96.
    发明授权
    Optical displacement-detecting mechanism and probe microscope using the same 有权
    光学位移检测机构和探针显微镜使用相同

    公开(公告)号:US07787133B2

    公开(公告)日:2010-08-31

    申请号:US11840549

    申请日:2007-08-17

    IPC分类号: G01B11/14

    CPC分类号: G01Q20/02

    摘要: The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.

    摘要翻译: 光学位移检测机构具有:用光照射被测物的光源; 用于驱动光源的光源驱动电路; 由半导体制成的光检测器,用于在由光源照射测量目标物之后接收光,并将光转换成电信号从而检测光的强度; 以及放大器,其包括用于以预定的放大系数对光学检测器的检测信号进行电流 - 电压转换的电流 - 电压转换电路。 在光学位移检测机构中,使用光谱半宽度为10nm以上的光源,由此可以以2mW以上的输出功率驱动光源,而不产生模式跳噪声和光反馈噪声。

    Method of correcting opaque defect of photomask using atomic force microscope fine processing device
    97.
    发明授权
    Method of correcting opaque defect of photomask using atomic force microscope fine processing device 有权
    使用原子力显微镜精细加工装置校正光掩模不透明缺陷的方法

    公开(公告)号:US07571639B2

    公开(公告)日:2009-08-11

    申请号:US11796996

    申请日:2007-04-27

    IPC分类号: H01J37/352

    摘要: An opaque defect is processed by scanning with a high load or height fixed mode using a probe harder than a pattern material of a photomask at the time of going scanning, and is observed by scanning with a low load or intermittent contact mode at the time of returning scanning so as to detect an ending point of the opaque defect by the height information. When there is a portion reaching to a glass substrate as an ending point, this portion is not scanned by the high load or height fixed mode in the next processing, and only a portion not reaching to the ending point is scanned by the high load or height fixed mode.

    摘要翻译: 通过使用在扫描时比光掩模的图案材料更硬的探针,以高负载或高度固定模式进行扫描来处理不透明缺陷,并且通过在低负载或间歇接触模式下扫描来观察不透明缺陷 返回扫描,以便通过高度信息检测不透明缺陷的终点。 当到达玻璃基板的部分为终点时,在下一个处理中该部分不被高负载或高度固定模式扫描,并且只有未到达终点的部分被高负载扫描 高度固定模式。

    Scanning probe microscope and scanning method
    98.
    发明授权
    Scanning probe microscope and scanning method 有权
    扫描探针显微镜和扫描方法

    公开(公告)号:US07373806B2

    公开(公告)日:2008-05-20

    申请号:US10925049

    申请日:2004-08-24

    IPC分类号: G01B5/28

    CPC分类号: G01Q10/065 G01Q60/32

    摘要: A scanning probe microscope has a probe tip for undergoing a scanning operation to scan a sample surface in X- and Y-directions parallel to the sample surface and for undergoing movement in a Z-direction vertical to the sample surface. A vibration unit vibrates the probe tip at a vibration frequency that resonates with of forcedly vibrates the probe tip. An observation unit collects observational data from the sample surface when the probe tip is in proximity or contact with the sample surface. A detection unit detects a variation in the state of vibration of the probe tip when the probe tip is in proximity or contact with the sample surface during a scanning operation. A control controls scanning of the probe tip in the X- and Y-directions and movement of the probe tip in the Z-direction, and controls scanning of the probe tip in a direction parallel to the sample surface after the observational data is collected from the sample surface and until the probe tip reached a next observation position in the X- and Y-direction. During a scanning operation, the control unit controls the probe tip to move in the Z-direction away from the sample surface only when the detection unit detects a variation in the state of vibration of the probe tip.

    摘要翻译: 扫描探针显微镜具有用于进行扫描操作的探针尖端,以在与样品表面平行的X和Y方向上扫描样品表面,并且在垂直于样品表面的Z方向上进行移动。 振动单元以与谐振的振动频率振动探针尖端,强制地振动探针尖端。 当探头尖端接近或与样品表面接触时,观察单元从样品表面收集观察数据。 检测单元在扫描操作期间当探针尖端接近或接触样品表面时检测探针尖端的振动状态的变化。 控制器控制探针尖端沿X方向和Y方向的扫描以及探针尖端沿Z方向的移动,并且在从观察数据收集之后控制探针尖端在与样品表面平行的方向上的扫描 样品表面,直到探针尖端到达X和Y方向的下一个观察位置。 在扫描操作期间,只有当检测单元检测到探针尖端的振动状态的变化时,控制单元才控制探针尖端沿Z方向移动离开样品表面。

    Optical Displacement Detection Mechanism and Surface Information Measurement Device Using the Same
    99.
    发明申请
    Optical Displacement Detection Mechanism and Surface Information Measurement Device Using the Same 有权
    光学位移检测机构及其表面信息测量装置

    公开(公告)号:US20080049236A1

    公开(公告)日:2008-02-28

    申请号:US11841445

    申请日:2007-08-20

    IPC分类号: G01B11/14

    CPC分类号: G01B11/024 G01Q20/02

    摘要: There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions. In an optical displacement detection mechanism comprising a light source irradiating a light to a cantilever becoming the measurement object, a light source drive circuit driving the light source, a photodetector receiving the light after irradiated to the cantilever from the light source to thereby detect an intensity of the light, and an amplifier amplifying a detection signal of the photodetector at a predetermined amplification rate, there is made such that, by providing a light intensity regulator and an amplification rate regulator, an irradiated light intensity to the cantilever and an amplification rate of the photodetector can be made variable.

    摘要翻译: 提供了一种光学位移检测机构,其中即使测量对象改变,检测灵敏度和噪声比可以调节,而不依赖于诸如反射率的光学特性或测量对象的形状和机械特性, 可以使通过照射光将测量对象的热变形对测量对象的影响减小,并且可以在最佳条件下确保测量精度。 在包括将光照射到作为测量对象的悬臂的光源的光学位移检测机构中,驱动光源的光源驱动电路,从光源照射到悬臂的光接收器,其接收光,从而检测强度 以及以预定的放大率放大光检测器的检测信号的放大器,通过提供光强度调节器和放大率调节器,对悬臂的照射光强度和放大率 可以使光电检测器变得可变。

    Pyrimidone derivatives
    100.
    发明授权
    Pyrimidone derivatives 失效
    嘧啶衍生物

    公开(公告)号:US07256199B1

    公开(公告)日:2007-08-14

    申请号:US09787426

    申请日:1999-09-24

    IPC分类号: C07D401/04 A61K31/506

    摘要: A pyrimidone derivative represented by the formula (I) or a salts thereof: wherein R1 represents an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, an aryl group and the like; R2 represents a hydrogen atom, hydroxyl group, an alkyl group, an alkenyl group and the like, R3 represents a pyridyl group, and a medicament comprising said derivative or a salt thereof as an active ingredient which is used for preventive and/or therapeutic treatment of a disease caused by tau protein kinase 1 hyperactivity such as Alzheimer disease.

    摘要翻译: 由式(I)表示的嘧啶酮衍生物或其盐:其中R 1表示烷基,烯基,炔基,环烷基,芳基等; R 2表示氢原子,羟基,烷基,烯基等,R 3表示吡啶基,并且包含所述衍生物或 其盐作为活性成分,用于预防和/或治疗由tau蛋白激酶1多动症如阿尔茨海默病引起的疾病。