公开(公告)号：US06274488B1

公开(公告)日：2001-08-14

申请号：US09547836

申请日：2000-04-12

申请人： Somit Talwar ,  Yun Wang

发明人： Somit Talwar ,  Yun Wang

IPC分类号： H01L2144

CPC分类号： H01L21/28518

摘要： A method of forming a silicide region (80) on a Si substrate (10) in the manufacturing of semiconductor integrated devices, a method of forming a semiconductor device (MISFET), and a device having suicide regions formed by the present method. The method of forming a silicide region involves forming a silicide region (80) in the (crystalline) Si substrate having an upper surface (12) and a lower surface (14). The method comprises the steps of first forming an amorphous doped region (40) in the Si substrate at or near the upper surface, to a predetermined depth (d). This results in the formation of an amorphous-crystalline interface (I) between the amorphous doped region and the crystalline Si substrate. The next step is forming a metal layer (60) atop the Si substrate upper surface, in contact with the amorphous doped region. The next step involves performing backside irradiation with a first radiation beam (66). This heats the interface sufficient to initiate explosive recrystallization (XRC) of amorphous doped region. This, in turn, provides heat to the metal layer sufficient to cause the diffusion of metal atoms from the metal layer into the amorphous doped region. In this manner, a silicide region of very high quality and low sheet resistance is formed in the Si substrate.

摘要翻译： 在半导体集成器件的制造中，在Si衬底（10）上形成硅化物区域（80）的方法，形成半导体器件（MISFET）的方法以及通过本方法形成的具有硅化物区域的器件。 形成硅化物区域的方法包括在具有上表面（12）和下表面（14）的（晶体）Si衬底中形成硅化物区域（80）。 该方法包括以下步骤：首先在Si衬底中或在上表面附近形成非晶态掺杂区（40）至预定深度（d）。 这导致在非晶掺杂区域和晶体Si衬底之间形成非晶态界面（I）。 下一步是在Si衬底上表面上形成与非晶掺杂区接触的金属层（60）。 下一步涉及用第一辐射束（66）进行背面照射。 这加热了足以引发非晶掺杂区域的爆炸重结晶（XRC）的界面。 这反过来又向金属层提供足以使金属原子从金属层扩散到非晶掺杂区域中的热量。 以这种方式，在Si衬底中形成具有非常高质量和低薄层电阻的硅化物区域。

公开(公告)号：US5649168A

公开(公告)日：1997-07-15

申请号：US475841

申请日：1995-06-07

申请人： Caroline Josette Huang ,  Yun Wang

发明人： Caroline Josette Huang ,  Yun Wang

IPC分类号： G06F17/30 ,  G06F13/14 ,  G06F15/16

CPC分类号： G06F17/30575 ,  Y10S707/99942 ,  Y10S707/99943 ,  Y10S707/99945

摘要： A system and method of pass through in a heterogeneous distributed database environment allows a client to specify syntax that is only understood and processed by a database instance of a back-end server even if it is not understood by an interface module. A hybrid pass through feature provides a combination of both a pass through mode and a native mode allowing statements to be passed through to the database instance or to be processed by the interface module. To accomplish this, a pass through session is established. The scope of the pass through session is defined by statements that establish and terminate the session. Rules determine whether dynamic statements are handled in pass through mode or in native mode based on whether the statements are within or outside of the scope of the pass through session. Input host variable support is provided to database instances that don't otherwise support host variables.

摘要翻译： 在异构分布式数据库环境中传递的系统和方法允许客户端指定仅由接口模块不理解的后端服务器的数据库实例才能理解和处理的语法。 混合传递功能提供传递模式和本机模式的组合，允许将语句传递到数据库实例或由接口模块处理。 为了实现这一点，建立了通过会话。 通过会话的范围由建立和终止会话的语句定义。 规则确定动态语句是以通过模式处理还是以本地模式处理，基于语句是否在通过会话的范围之内或之外。 输入主机变量支持提供给不另外支持主机变量的数据库实例。

公开(公告)号：US5590321A

公开(公告)日：1996-12-31

申请号：US475976

申请日：1995-06-07

申请人： Eileen T. Lin ,  Yun Wang

发明人： Eileen T. Lin ,  Yun Wang

IPC分类号： G06F17/30

CPC分类号： G06F17/30557 ,  G06F17/30463 ,  G06F17/30545 ,  Y10S707/966 ,  Y10S707/99931

摘要： High performance query optimization in a heterogeneous distributed multi-database system. An efficient technique is disclosed to enable an interface module, located between a host computer and a back-end database system, to perform maximal query or subquery push down. That is, the interface module is configured to select either the entire query or the largest subquery(s) that can be forwarded to a single database instance within the back-end database system without extensive decomposition or extraneous commands. The interface module has stored therein a data structure having information concerning the data stored in, and the capabilities of, each of the back-end databases in the heterogeneous environment. Based on this information, the interface module determines whether a query or subquery satisfies two criteria. First, the interface module determines whether a single database instance within the heterogeneous environment contains all of the data referenced in the query or subquery. This is referred to as data coverage. Next, the interface module determines whether the same single database instance provides all the functions or capabilities needed to satisfy the query or subquery. This is referred to as function or capability coverage. If both of these criteria are met, the query or subquery can be pushed down to the single database instance.

摘要翻译： 异构分布式多数据库系统中的高性能查询优化。 公开了一种有效的技术，使位于主计算机和后端数据库系统之间的接口模块能够执行最大的查询或子查询下推。 也就是说，接口模块被配置为选择可以转发到后端数据库系统中的单个数据库实例的整个查询或最大子查询，而无需广泛的分解或无关的命令。 接口模块在其中存储有具有与异构环境中的每个后端数据库存储的数据和能力相关的信息的数据结构。 基于此信息，接口模块确定查询或子查询是否满足两个条件。 首先，接口模块确定异构环境中的单个数据库实例是否包含查询或子查询中引用的所有数据。 这被称为数据覆盖。 接下来，接口模块确定相同的单个数据库实例是否提供满足查询或子查询所需的所有功能或功能。 这被称为功能或能力覆盖。 如果满足这两个条件，则可以将查询或子查询推送到单个数据库实例。

公开(公告)号：US5588150A

公开(公告)日：1996-12-24

申请号：US310797

申请日：1994-09-29

申请人： Eileen T. Lin ,  Yun Wang

发明人： Eileen T. Lin ,  Yun Wang

IPC分类号： G06F17/30

CPC分类号： G06F17/30557 ,  G06F17/30463 ,  G06F17/30545 ,  Y10S707/966 ,  Y10S707/99931

摘要： High performance query optimization in a heterogeneous distributed multi-database system. An efficient technique is disclosed to enable an interface module, located between a host computer and a back-end database system, to perform maximal query or subquery push down. That is, the interface module is configured to select either the entire query or the largest subquery(s) that can be forwarded to a single database instance within the back-end database system without extensive decomposition or extraneous commands. The interface module has stored therein a data structure having information concerning the data stored in, and the capabilities of, each of the back-end databases in the heterogeneous environment. Based on this information, the interface module determines whether a query or subquery satisfies two criteria. First, the interface module determines whether a single database instance within the heterogeneous environment contains all of the data referenced in the query or subquery. This is referred to as data coverage. Next, the interface module determines whether the same single database instance provides all the functions or capabilities needed to satisfy the query or subquery. This is referred to as function or capability coverage. If both of these criteria are met, the query or subquery can be pushed down to the single database instance.

公开(公告)号：US5407869A

公开(公告)日：1995-04-18

申请号：US787906

申请日：1991-11-06

申请人： Paul H. Holloway ,  Yun Wang

发明人： Paul H. Holloway ,  Yun Wang

IPC分类号： H01L21/314 ,  H01L21/02

CPC分类号： H01L21/314

摘要： A method of passivating a surface of a Group III-V compound substrate comprising exposing the surface to a solution comprising P.sub.2 S.sub.5, S and (NH.sub.4).sub.2 S for a time sufficient to prevent formation of segregated surface atoms and oxides on the substrate surface, thereby minimizing the density of surface states thereof, the solution containing P.sub.2 S.sub.5, S and (NH.sub.4).sub.2 S in a ratio.

摘要翻译： 一种钝化III-V族化合物基材表面的方法，包括将表面暴露于包含P2S5，S和（NH4）2S的溶液的时间足以防止在基材表面上形成偏析的表面原子和氧化物，从而最小化 其表面状态的密度，含有一定比例的P2S5，S和（NH4）2S的溶液。

公开(公告)号：US5241648A

公开(公告)日：1993-08-31

申请号：US479523

申请日：1990-02-13

申请人： Josephine M. Cheng ,  Donald J. Haderle ,  Richard W. Hedges ,  Balakrishna R. Iyer ,  Chandrasekaran Mohan ,  Yun Wang

发明人： Josephine M. Cheng ,  Donald J. Haderle ,  Richard W. Hedges ,  Balakrishna R. Iyer ,  Chandrasekaran Mohan ,  Yun Wang

IPC分类号： G06F12/00 ,  G06F17/30

CPC分类号： G06F17/30498 ,  Y10S707/99937

摘要： Results of a relational data base management system are joined in a process requiring, first, existence of an index on the join columns of the inner table, and, second, ordering on the join column of the first table. First, the index on the inner table's join column is scanned for rows of the inner table having join column values matching such values of rows in the outer table. This is done in a single pass through the outer table. Next, a temporary work table containing the identifiers of inner table rows having join column values matching those of the outer table is produced by concatenating the row identifiers to their matching outer table rows. Following this, the temporary work table is ordered by the identifiers. Last, the identifier list of inner table rows is used to retrieve the corresponding rows of the inner table. All predicates local to the inner table are applied to the retrieved rows, and those satisfying these local predicates are combined with their matching outer table rows and returned to the user.

公开(公告)号：US09490128B2

公开(公告)日：2016-11-08

申请号：US13595873

申请日：2012-08-27

申请人： Yun Wang ,  Andrew M. Hawryluk ,  Xiaoru Wang ,  Xiaohua Shen

发明人： Yun Wang ,  Andrew M. Hawryluk ,  Xiaoru Wang ,  Xiaohua Shen

IPC分类号： H01L21/268 ,  H01L27/146 ,  H01L21/02 ,  H01L21/285

CPC分类号： H01L21/268 ,  H01L21/02107 ,  H01L21/28518 ,  H01L27/14634 ,  H01L27/1469

摘要： Methods of annealing a thin semiconductor wafer are disclosed. The methods allow for high-temperature annealing of one side of a thin semiconductor wafer without damaging or overheating heat-sensitive electronic device features that are either on the other side of the wafer or embedded within the wafer. The annealing is performed at a temperature below the melting point of the wafer so that no significant dopant redistribution occurs during the annealing process. The methods can be applied to activating dopants or to forming ohmic contacts.

摘要翻译： 公开了薄半导体晶片的退火方法。 该方法允许对薄半导体晶片的一侧进行高温退火，而不会损坏或过热晶片另一侧或嵌入晶片内的热敏电子器件特征。 在低于晶片的熔点的温度下进行退火，使得在退火过程中不会发生显着的掺杂剂再分布。 该方法可用于活化掺杂剂或形成欧姆接触。

公开(公告)号：US09004839B2

公开(公告)日：2015-04-14

申请号：US13379009

申请日：2011-11-10

申请人： Yun Wang

发明人： Yun Wang

IPC分类号： B65G49/06 ,  B65G1/02 ,  B65G1/16

CPC分类号： B65G1/026 ,  B65G1/16 ,  B65G49/061 ,  B65G49/062 ,  B65G49/064 ,  B65G49/067 ,  B65G49/068

摘要： A glass substrate storage and transportation system is provided, including a storage platform and a transportation platform. The storage platform includes a plurality of storage housings for receiving the upright glass substrates. A glass substrate storage platform is also provided. The glass substrate storage and transportation system and the glass substrate storage platform adopt a vertical storage mode to store the glass substrates for solving the technical problems of the space utilization rate being low and the product having defect resulted by the particle pollution.

摘要翻译： 提供玻璃基板储运系统，包括储存平台和运输平台。 存储平台包括用于接收直立玻璃基板的多个存储壳体。 还提供了玻璃基板存储平台。 玻璃基板存储和运输系统和玻璃基板存储平台采用垂直存储模式存储玻璃基板，以解决空间利用率低的技术问题和由颗粒污染导致的缺陷产品。

公开(公告)号：US08838626B2

公开(公告)日：2014-09-16

申请号：US12641234

申请日：2009-12-17

申请人： Zhiqiang Yu ,  Yuejian Fang ,  Lei Zhai ,  Yun Wang ,  Zhonghai Wu ,  Mo Dai

发明人： Zhiqiang Yu ,  Yuejian Fang ,  Lei Zhai ,  Yun Wang ,  Zhonghai Wu ,  Mo Dai

IPC分类号： G06F17/30 ,  G06F17/27 ,  G06F17/22

CPC分类号： G06F17/2247 ,  G06F17/272

摘要： Embodiments of techniques and systems for parallel XML parsing are described. An event-level XML parser may include a lightweight events partitioning stage, parallel events parsing stages, and a post-processing stage. The events partition may pick out event boundaries using single-instruction, multiple-data instructions to find occurrences of the “

摘要翻译： 描述用于并行XML解析的技术和系统的实施例。 事件级XML解析器可以包括轻量级事件分区阶段，并行事件解析阶段和后处理阶段。 事件分区可以使用单指令多数据指令来选择事件边界，以发现“<”字符的出现，标记事件边界。 可以执行随后的检查以帮助识别其他事件边界以及“<”字符的非边界实例。 在事件解析期间，可以在结构元数据中记录未解决的项目，例如命名空间解析或开始和结束元素的匹配。 可以在随后的后处理期间使用该结构元数据来执行XML数据的检查。 如果XML数据格式良好，则由事件解析过程形成的各个子事件流可以被组合成平坦的结果事件流结构。 可以描述和要求保护其他实施例。

公开(公告)号：US20140097171A1

公开(公告)日：2014-04-10

申请号：US13646673

申请日：2012-10-06

申请人： Yun Wang ,  Andrew M. Hawryluk

发明人： Yun Wang ,  Andrew M. Hawryluk

IPC分类号： H01L21/428 ,  B23K26/18 ,  B23K26/12 ,  B23K26/08 ,  B23K26/06

CPC分类号： B23K26/127 ,  B23K26/0006 ,  B23K26/034 ,  B23K26/0608 ,  B23K26/0622 ,  B23K26/0738 ,  B23K26/0853 ,  B23K26/18 ,  B23K26/354 ,  B23K2103/56 ,  H01L21/268 ,  H01L21/28035 ,  H01L21/324

摘要： Systems and methods for performing ultrafast laser annealing in a manner that reduces pattern density effects in integrated circuit manufacturing are disclosed. The method includes scanning at least one first laser beam over the patterned surface of a substrate. The at least one first laser beam is configured to heat the patterned surface to a non-melt temperature Tnonmelt that is within about 400° C. of the melt temperature Tmelt. The method also includes scanning at least one second laser beam over the patterned surface and relative to the first laser beam. The at least one second laser beam is pulsed and is configured to heat the patterned surface from the non-melt temperature provided by the at least one first laser beam up to the melt temperature.

摘要翻译： 公开了以降低集成电路制造中的图案密度效应的方式进行超快速激光退火的系统和方法。 该方法包括在衬底的图案化表面上扫描至少一个第一激光束。 至少一个第一激光束被配置为将图案化表面加热到熔融温度Tmelt在约400℃以内的非熔融温度Tnonmelt。 该方法还包括在图案化表面上并相对于第一激光束扫描至少一个第二激光束。 所述至少一个第二激光束是脉冲的并且被配置为将图案化表面从由至​​少一个第一激光束提供的非熔化温度加热至熔融温度。