公开(公告)号：US08035808B2

公开(公告)日：2011-10-11

申请号：US12727752

申请日：2010-03-19

Applicant: Yoshimasa Oshima ,  Toshiyuki Nakao ,  Shigeru Matsui

Inventor： Yoshimasa Oshima ,  Toshiyuki Nakao ,  Shigeru Matsui

IPC: G01N21/00 ,  G01N21/88

CPC classification number: G01N21/9501 ,  G01N2021/4716

Abstract: A surface defect inspection apparatus and method for irradiating a beam multiple times to a same region on a surface of an inspection sample, detecting each scattered light from the same region by detection optical systems individually to produce plural signals, and wherein irradiating the beam includes performing a line illumination of the beam on a line illumination region of the sample surface. The line illumination region is moved in a longitudinal direction at a pitch shorter than a length of the line illumination region in the longitudinal direction.

Abstract translation: 一种表面缺陷检查装置和方法，用于将多个光束照射到检查样品的表面上的相同区域，分别通过检测光学系统检测来自相同区域的每个散射光以产生多个信号，并且其中照射光束包括执行 在样品表面的线照射区域上的光束的线照明。 线照明区域沿纵向方向以比线照明区域的长度方向的长度短的间距移动。

公开(公告)号：US07990530B2

公开(公告)日：2011-08-02

申请号：US12819528

申请日：2010-06-21

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/94

Abstract: In the conventional contaminant particle/defect inspection method, if the illuminance of the illumination beam is held at not more than a predetermined upper limit value not to give thermal damage to the sample, the detection sensitivity and the inspection speed being in the tradeoff relation with each other, it is very difficult to improve one of the detection sensitivity and the inspection speed without sacrificing the other or improve both at the same time. The invention provides an improved optical inspection method and an improved optical inspection apparatus, in which a pulse laser is used as a light source, and a laser beam flux is split into a plurality of laser beam fluxes which are given different time delay to form a plurality of illumination spots. The scattered light signal from each illumination spot is isolated and detected by using a light emission start timing signal for each illumination spot.

Abstract translation: 在常规污染物颗粒/缺陷检查方法中，如果照明光束的照度被保持在不对样品造成热损伤的预定上限值以下，则检测灵敏度和检查速度与 彼此难以提高检测灵敏度和检测速度之一而不牺牲另一方或同时改善两者。 本发明提供了一种改进的光学检查方法和改进的光学检查装置，其中使用脉冲激光器作为光源，并且激光束通量被分割成多个激光束，其被给予不同的时间延迟以形成 多个照明点。 通过使用每个照明点的发光开始定时信号来隔离并检测来自每个照明点的散射光信号。

公开(公告)号：US07773210B2

公开(公告)日：2010-08-10

申请号：US12482479

申请日：2009-06-11

Applicant: Kenji Oka ,  Shigeru Matsui

Inventor： Kenji Oka ,  Shigeru Matsui

IPC: G01N21/00

CPC classification number: G01N21/8851 ,  G01N21/9501

Abstract: An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section.

Abstract translation: 外观检查装置分析由检测器获得的检测信号的检测特性的差异，以灵活地满足各种检查目的，而不改变电路或软件。 该装置包括信号合成部，其根据设定条件合成来自检测器的检测信号。 输入操作部分通过信号合成部分设置检测信号的合成条件，并且信息显示部分显示由信号合成部分根据由输入设置的条件合成的合成信号构成的合成图 操作部分。

公开(公告)号：US07764367B2

公开(公告)日：2010-07-27

申请号：US11834217

申请日：2007-08-06

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/4738

Abstract: A surface inspection method and a surface inspection apparatus in which a plurality of photodetectors are arranged in a plurality of directions so that light scattered, diffracted or reflected on a surface of an object to be inspected or in the vicinity of the surface is detected and a plurality of signals obtained by this are subjected to weighted addition processing or weighted averaging processing by linear combination.

Abstract translation: 表面检查方法和表面检查装置，其中多个光电检测器被布置在多个方向上，使得在被检测物体的表面或表面附近检测到散射，衍射或反射的光，并且 通过这样获得的多个信号通过线性组合进行加权相加处理或加权平均处理。

公开(公告)号：US20090135413A1

公开(公告)日：2009-05-28

申请号：US12349206

申请日：2009-01-06

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/47

Abstract: When detecting light scattered by an object to be inspected by using a pulse laser as a light source, noise increases unless a sampling repletion period of an A/D converter is determined so as to be related to a pulse oscillation repetition period of the light source. (1) The sampling repletion period of the A/D converter is set equal to the pulse oscillation repetition period of the light source or an integer times thereof, and the sampling is synchronized with oscillation of the light source. Or (2) the sampling repletion period of the A/D converter is set equal to a half-integer times the pulse oscillation repetition period of the light source. Even if a ripple component resulting from emission pulses of the light source remains in the scattered light signal supplied to the A/D converter remains, therefore, its influence can be eliminated or reduced.

Abstract translation: 当通过使用脉冲激光器作为光源检测被检查物体散射的光时，噪声增加，除非确定A / D转换器的采样恢复周期以与光源的脉冲振荡重复周期相关 。 （1）A / D转换器的采样补偿周期被设定为等于光源的脉冲振荡重复周期或其整数倍，采样与光源的振荡同步。 或者（2）将A / D转换器的采样恢复周期设定为等于光源的脉冲振荡重复周期的半个整数倍。 即使由于光源的发射脉冲而产生的纹波分量残留在供给A / D转换器的散射光信号中，因此可以消除或减小其影响。

公开(公告)号：US07487049B2

公开(公告)日：2009-02-03

申请号：US11826088

申请日：2007-07-12

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/47

Abstract: When detecting light scattered by an object to be inspected by using a pulse laser as a light source, noise increases unless a sampling repletion period of an A/D converter is determined so as to be related to a pulse oscillation repetition period of the light source. (1) The sampling repletion period of the A/D converter is set equal to the pulse oscillation repetition period of the light source or an integer times thereof, and the sampling is synchronized with oscillation of the light source. Or (2) the sampling repletion period of the A/D converter is set equal to a half-integer times the pulse oscillation repetition period of the light source. Even if a ripple component resulting from emission pulses of the light source remains in the scattered light signal supplied to the A/D converter remains, therefore, its influence can be eliminated or reduced.

Abstract translation: 当通过使用脉冲激光器作为光源检测被检查物体散射的光时，噪声增加，除非确定A / D转换器的采样恢复周期以与光源的脉冲振荡重复周期相关 。 （1）A / D转换器的采样补偿周期被设定为等于光源的脉冲振荡重复周期或其整数倍，采样与光源的振荡同步。 或者（2）将A / D转换器的采样恢复周期设定为等于光源的脉冲振荡重复周期的半个整数倍。 即使由于光源的发射脉冲而产生的纹波分量残留在供给A / D转换器的散射光信号中，因此可以消除或减小其影响。

公开(公告)号：US07457455B2

公开(公告)日：2008-11-25

申请号：US10995512

申请日：2004-11-24

Applicant: Shigeru Matsui ,  Katsuya Suzuki

Inventor： Shigeru Matsui ,  Katsuya Suzuki

IPC: G06K9/00

CPC classification number: G06T7/001 ,  G01N21/95607 ,  G03F7/7065 ,  G06T2207/30148

Abstract: The pattern defect inspection apparatus is operable to detect defects by comparing a detection image, which is obtained through scanning by an image sensor those patterns that have the identical shape and are continuously disposed on the object under tested at equal intervals in row and column directions, with a reference image obtained by scanning neighboring identical shape patterns in the row and column directions. This apparatus has a unit for generating an average reference image by statistical computation processing from the images of identical shape patterns lying next to the detection image including at least eight nearest chips on the up-and-down and right-and-left sides and at diagonal positions with the detection image being intermediately situated. The apparatus also includes a unit that detects a defect by comparing the detection image to the average reference image thus generated.

Abstract translation: 图案缺陷检查装置可以通过将通过图像传感器进行扫描而得到的检测图像进行比较来检测缺陷，所述检测图像具有相同形状且连续设置在被检测物体上的行和列方向上等间隔的那些图案， 具有通过扫描行和列方向上的相邻相同形状图案而获得的参考图像。 该装置具有用于通过统计计算处理从邻近检测图像的相同形状图案的图像生成平均参考图像的单元，该检测图像包括上下左右侧至少八个最近的码片，以及在 对角位置，检测图像位于中间位置。 该装置还包括通过将检测图像与由此生成的平均参考图像进行比较来检测缺陷的单元。

公开(公告)号：US07417720B2

公开(公告)日：2008-08-26

申请号：US11522399

申请日：2006-09-18

Applicant: Masami Iizuka ,  Shigeru Matsui ,  Tadashi Suzuki ,  Hiroshi Goto ,  Takayuki Ono

Inventor： Masami Iizuka ,  Shigeru Matsui ,  Tadashi Suzuki ,  Hiroshi Goto ,  Takayuki Ono

IPC: G01N21/00

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/9501 ,  G01N2021/9513

Abstract: A lighting optical machine and defect inspection system having high reliability and safety when a laser beam is used as a light source. The lighting optical machine comprises: a housing, which accommodates a laser source, a beam deflection mechanism having first and second plane mirrors enabling a beam emitted from the laser source to be reflected so that the beam travels in the direction almost parallel to the beam emitted from the laser source, a beam expander for converting the beam to a parallel beam having a larger cross-sectional area, an objective lens, through which the parallel beam is reduced and applied to the surface of a sample; a first control mechanism for controlling the directions of the two plane mirrors of the beam deflection mechanism with an electric signal; and a second control mechanism for controlling the focus position of the beam expander with an electric signal.

Abstract translation: 当使用激光束作为光源时，具有高可靠性和安全性的照明光学机器和缺陷检查系统。 照明光学机器包括：容纳激光源的壳体，具有第一和第二平面镜的光束偏转机构，其使得能够反射从激光源发射的光束，使得光束在几乎平行于发射的光束的方向上行进 来自激光源的光束扩展器，用于将光束转换成具有较大截面面积的平行光束，物镜，平行光束通过该物镜被还原并施加到样品的表面; 用于以电信号控制所述光束偏转机构的两个平面镜的方向的第一控制机构; 以及用电信号控制光束扩展器的聚焦位置的第二控制机构。

公开(公告)号：US20080059083A1

公开(公告)日：2008-03-06

申请号：US11976015

申请日：2007-10-19

Applicant: Takanori Ninomiya ,  Seiji Isogai ,  Shigeru Matsui ,  Toshiei Kurosaki

Inventor： Takanori Ninomiya ,  Seiji Isogai ,  Shigeru Matsui ,  Toshiei Kurosaki

IPC: G01B11/30

CPC classification number: H01L21/67288 ,  G01N21/9501 ,  G01N23/22 ,  G01N2021/8861 ,  G06T7/0004 ,  G06T7/73 ,  G06T2207/30148 ,  H01J37/28 ,  H01J2237/24592

Abstract: Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.

Abstract translation: 基于检查装置检测到的多个缺陷的位置坐标和属性，选择由观察装置容易检测到的缺陷。 利用这些选择的缺陷作为指标，观察装置检测并观察缺陷。 此外，创建用于表示两个装置之间的缺陷位置坐标中的相关关系的坐标变换公式，观察装置转换缺陷位置坐标以观察缺陷。

公开(公告)号：US20080007725A1

公开(公告)日：2008-01-10

申请号：US11822330

申请日：2007-07-05

Applicant: Takahiro Togashi ,  Shigeru Matsui

Inventor： Takahiro Togashi ,  Shigeru Matsui

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2021/8861 ,  G01N2021/8874 ,  G01N2021/95676

Abstract: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.