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公开(公告)号:US20230253368A1
公开(公告)日:2023-08-10
申请号:US18300175
申请日:2023-04-13
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jiun Yi Wu , Chen-Hua Yu , Chung-Shi Liu
IPC: H01L25/065 , H01L23/00 , H01L23/538 , H01L21/56
CPC classification number: H01L25/0657 , H01L24/14 , H01L23/5384 , H01L21/56 , H01L23/5386 , H01L24/95 , H01L23/5385
Abstract: A structure includes core substrates attached to a first side of a redistribution structure, wherein the redistribution structure includes first conductive features and first dielectric layers, wherein each core substrate includes conductive pillars, wherein the conductive pillars of the core substrates physically and electrically contact first conductive features; an encapsulant extending over the first side of the redistribution structure, wherein the encapsulant extends along sidewalls of each core substrate; and an integrated device package connected to a second side of the redistribution structure.
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公开(公告)号:US11664350B2
公开(公告)日:2023-05-30
申请号:US17143657
申请日:2021-01-07
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jiun Yi Wu , Chen-Hua Yu , Chung-Shi Liu
IPC: H01L23/52 , H01L25/065 , H01L23/00 , H01L23/538 , H01L21/56
CPC classification number: H01L25/0657 , H01L21/56 , H01L23/5384 , H01L23/5385 , H01L23/5386 , H01L24/14 , H01L24/95
Abstract: A structure includes core substrates attached to a first side of a redistribution structure, wherein the redistribution structure includes first conductive features and first dielectric layers, wherein each core substrate includes conductive pillars, wherein the conductive pillars of the core substrates physically and electrically contact first conductive features; an encapsulant extending over the first side of the redistribution structure, wherein the encapsulant extends along sidewalls of each core substrate; and an integrated device package connected to a second side of the redistribution structure.
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公开(公告)号:US11658164B2
公开(公告)日:2023-05-23
申请号:US17170224
申请日:2021-02-08
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chen-Hua Yu , Chien-Hsun Lee , Jiun Yi Wu
IPC: H01L25/10 , H01L23/31 , H01L25/065 , H01L23/00 , H01L23/498 , H01L25/00 , H01L21/56 , H01L21/48 , H01L23/367
CPC classification number: H01L25/105 , H01L21/4857 , H01L21/561 , H01L23/3121 , H01L23/367 , H01L23/49822 , H01L24/08 , H01L24/94 , H01L25/0655 , H01L25/50 , H01L2224/08225 , H01L2225/1023 , H01L2225/1058
Abstract: A method includes bonding a first package to a second package to form a third package. The first package is an Integrated Fan-Out (InFO) package including a plurality of package components, and an encapsulating material encapsulating the plurality of package components therein. The plurality of package components include device dies. The method further includes placing at least a portion of the third package into a recess in a Printed Circuit Board (PCB). The recess extends from a top surface of the PCB to an intermediate level between the top surface and a bottom surface of the PCB. Wire bonding is performed to electrically connect the third package to the PCB.
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公开(公告)号:US20230122816A1
公开(公告)日:2023-04-20
申请号:US18068088
申请日:2022-12-19
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chien-Hsun Chen , Jiun Yi Wu , Chien-Hsun Lee , Chung -Shi Liu
Abstract: A method includes placing a package component over a carrier, encapsulating the package component in an encapsulant, and forming a connection structure over and electrically coupling to the package component. The formation of the connection structure includes forming a first via group over and electrically coupling to the package component, forming a first conductive trace over and contacting the first via group, forming a second via group overlying and contacting the first conductive trace, wherein each of the first via group and the second via group comprises a plurality of vias, forming a second conductive trace over and contacting the second via group, forming a top via overlying and contacting the second conductive trace, and forming an Under-Bump-Metallurgy (UBM) over and contacting the top via.
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公开(公告)号:US20220367211A1
公开(公告)日:2022-11-17
申请号:US17870321
申请日:2022-07-21
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jiun Yi Wu , Chen-Hua Yu
IPC: H01L21/52 , H01L21/56 , H01L23/522 , H01L23/31 , H01L21/768
Abstract: A system substrate package, a system package, and methods of forming the same are described herein. The system substrate package includes an integrated substrate with multiple discrete interconnect structures. In embodiments the multiple discrete interconnect structures are placed and encapsulated and have a gap formed between the multiple discrete interconnect structures. The system substrate package reduces package warpage and mitigates board level reliability issues.
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公开(公告)号:US20220359427A1
公开(公告)日:2022-11-10
申请号:US17815338
申请日:2022-07-27
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jiun Yi Wu , Chen-Hua Yu
IPC: H01L23/00 , H01L23/538 , H01L21/48
Abstract: A device includes a redistribution structure, including conductive features; dielectric layers; and an internal support within a first dielectric layer of the dielectric layers, wherein the internal support is free of passive and active devices; a first interconnect structure attached to a first side of the redistribution structure; a second interconnect structure attached to the first side of the redistribution structure, wherein the second interconnect structure is laterally adjacent the first interconnect structure, wherein the internal support laterally overlaps both the first interconnect structure and the second interconnect structure.
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公开(公告)号:US20220302009A1
公开(公告)日:2022-09-22
申请号:US17805594
申请日:2022-06-06
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jiun Yi Wu , Chen-Hua Yu , Chung-Shi Liu
Abstract: A semiconductor package includes an interconnect structure including a redistribution structure, an insulating layer over the redistribution structure, and conductive pillars on the insulating layer, wherein the conductive pillars are connected to the redistribution structure, wherein the interconnect structure is free of active devices, a routing substrate including a routing layer over a core substrate, wherein the interconnect structure is bonded to the routing substrate by solder joints, wherein each of the solder joints bonds a conductive pillar of the conductive pillars to the routing layer, an underfill surrounding the conductive pillars and the solder joints, and a semiconductor device including a semiconductor die connected to a routing structure, wherein the routing structure is bonded to an opposite side of the interconnect structure as the routing substrate.
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公开(公告)号:US20220278036A1
公开(公告)日:2022-09-01
申请号:US17187138
申请日:2021-02-26
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jiun Yi Wu , Chen-Hua Yu , Chung-Shi Liu
IPC: H01L23/498 , H01L23/31 , H01L23/00 , H01L21/48
Abstract: In an embodiment, a method for manufacturing a semiconductor device includes forming a redistribution structure on a carrier substrate, connecting a plurality of core substrates physically and electrically to the redistribution structure with a first anisotropic conductive film, the first anisotropic conductive film including a dielectric material and conductive particles, and pressing the plurality of core substrates and the redistribution structure together to form conductive paths between the plurality of core substrates and the redistribution structure with the conductive particles in the first anisotropic conductive film. The method also includes encapsulating the plurality of core substrates with an encapsulant. The method also includes and attaching an integrated circuit package to the redistribution structure, the redistribution structure being between the integrated circuit package and the plurality of core substrates, the integrated circuit package laterally overlapping a first core substrate and a second core substrate of the plurality of core substrates.
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公开(公告)号:US20210366877A1
公开(公告)日:2021-11-25
申请号:US17143657
申请日:2021-01-07
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jiun Yi Wu , Chen-Hua Yu , Chung-Shi Liu
IPC: H01L25/065 , H01L23/00 , H01L23/538 , H01L21/56
Abstract: A structure includes core substrates attached to a first side of a redistribution structure, wherein the first redistribution structure includes first conductive features and first dielectric layers, wherein each core substrate includes conductive pillars, wherein the conductive pillars of the core substrates physically and electrically contact first conductive features; an encapsulant extending over the first side of the redistribution structure, wherein the encapsulant extends along sidewalls of each core substrate; and an integrated device package connected to a second side of the first redistribution structure.
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公开(公告)号:US20210366863A1
公开(公告)日:2021-11-25
申请号:US17020130
申请日:2020-09-14
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jiun Yi Wu , Chen-Hua Yu
IPC: H01L23/00
Abstract: In an embodiment, a structure includes a core substrate, a redistribution structure coupled, the redistribution structure including a plurality of redistribution layers, the plurality of redistribution layers comprising a dielectric layer and a metallization layer, a first local interconnect component embedded in a first redistribution layer of the plurality of redistribution layers, the first local interconnect component comprising conductive connectors, the conductive connectors being bonded to a metallization pattern of the first redistribution layer, the dielectric layer of the first redistribution layer encapsulating the first local interconnect component, a first integrated circuit die coupled to the redistribution structure, a second integrated circuit die coupled to the redistribution structure, an interconnect structure of the first local interconnect component electrically coupling the first integrated circuit die to the second integrated circuit die, and a set of conductive connectors coupled to a second side of the core substrate.
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