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公开(公告)号:US20140166990A1
公开(公告)日:2014-06-19
申请号:US13716448
申请日:2012-12-17
Applicant: UNIVERSAL DISPLAY CORPORATION
Inventor: Ruiqing Ma , Jeff Silvernail , Prashant Mandlik , Julia J. Brown , John Felts
CPC classification number: H01L51/56 , H01L51/001 , H01L51/0021 , H01L51/0029 , H01L51/0097 , H01L51/5212 , H01L2251/5338 , H01L2251/568 , Y02E10/549 , Y02P70/521
Abstract: A method of forming microelectronic systems on a flexible substrate includes depositing a plurality of layers on one side of the flexible substrate. Each of the plurality of layers is deposited from one of a plurality of sources. A vertical projection of a perimeter of each one of the plurality of sources does not intersect the flexible substrate. The flexible substrate is in motion during the depositing the plurality of layers via a roll to roll feed and retrieval system.
Abstract translation: 在柔性基板上形成微电子系统的方法包括在柔性基板的一侧上沉积多个层。 多个层中的每一个从多个源中的一个源沉积。 多个源中的每一个的周边的垂直投影不与柔性基板相交。 柔性基板在通过辊到辊进给和取出系统沉积多个层期间运动。
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公开(公告)号:US20140087497A1
公开(公告)日:2014-03-27
申请号:US14018449
申请日:2013-09-05
Inventor: Prashant Mandlik , Ruiqing Ma , Sigurd Wagner , Bhadrinarayana Lalgudi Visweswaran
IPC: H01L51/56
CPC classification number: H01L51/56 , H01L51/0097 , H01L51/5253
Abstract: Methods for forming a coating over a surface are disclosed. A method includes directing a first source of barrier film material toward a substrate in a first direction at an angle θ relative to the substrate, wherein θ is greater than about 0° and less than about 85°. Additionally, a method of depositing a barrier film over a substrate includes directing a plurality of N sources of barrier film material toward a substrate, each source being directed at an angle θN relative to the substrate, wherein for each θN, θ is greater than about 0° and less than about 180°. For at least a first of the θN, θN is greater than about 0° and less than about 85°, and for at least a second of the θN, θN is greater than about 95° and less than about 180°.
Abstract translation: 公开了在表面上形成涂层的方法。 一种方法包括以第一方向以角度将第一阻挡膜材料源朝向衬底引导; 相对于基底,其中& 大于约0°且小于约85°。 另外,在衬底上沉积阻挡膜的方法包括将多个N源的阻挡膜材料引导向衬底,每个源相对于衬底以一定角度N指向;其中对于每个衬底,N, ; 大于约0°且小于约180°。 对于至少第一个“N”和“N”,N大于约0°且小于约85°,并且对于至少一秒的“N”和“N”,N大于约95°或更小 比约180°。
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公开(公告)号:US11665951B2
公开(公告)日:2023-05-30
申请号:US17090930
申请日:2020-11-06
Inventor: Prashant Mandlik , Ruiqing Ma , Sigurd Wagner , Bhadrinarayana Lalgudi Visweswaran
CPC classification number: H01L51/56 , H01L51/5253 , H01L51/0097
Abstract: Methods for forming a coating over a surface are disclosed. A method includes directing a first source of barrier film material toward a substrate in a first direction at an angle θ relative to the substrate, wherein θ is greater than about 0° and less than about 85°. Additionally, a method of depositing a barrier film over a substrate includes directing a plurality of N sources of barrier film material toward a substrate, each source being directed at an angle θN relative to the substrate, wherein for each θN, θ is greater than about 0° and less than about 180°. For at least a first of the θN, θN is greater than about 0° and less than about 85°, and for at least a second of the θN, θN is greater than about 95° and less than about 180°.
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公开(公告)号:US11223032B2
公开(公告)日:2022-01-11
申请号:US15825493
申请日:2017-11-29
Applicant: Universal Display Corporation
Inventor: Ruiqing Ma , Michael Hack , Julia J. Brown
Abstract: OLED device structures are provided that include an OLED, a high index optical layer (HOL), a thin film barrier disposed over the high index optical layer, and a low index optical layer (LOL) disposed over the thin film barrier. It is shown that such devices provide acceptable color emission that is at least comparable to a conventional device, while also exhibiting improved efficiency and luminance.
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公开(公告)号:US11018319B2
公开(公告)日:2021-05-25
申请号:US16654346
申请日:2019-10-16
Applicant: Universal Display Corporation
Inventor: Ruiqing Ma , Emory Krall , Jason Paynter , Jeffrey Silvernail
Abstract: A first product as disclosed herein includes multiple devices, such as OLEDs, which are moveably connected to one another. The devices may be moveable from a first position in which they are stacked, closed, rolled, or the like, to a second expanded position in which they may be usable together as a single device. Active areas of the devices may be disposed within 3 mm from each adjacent or included active area when the device is in the first position, the second position, or both. Each active device may include a barrier film that covers at least a portion of the substrate and/or the active area of one or more of the devices.
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公开(公告)号:US20210066675A1
公开(公告)日:2021-03-04
申请号:US17090930
申请日:2020-11-06
Inventor: Prashant Mandlik , Ruiqing Ma , Sigurd Wagner , Bhadrinarayana Lalgudi Visweswaran
Abstract: Methods for forming a coating over a surface are disclosed. A method includes directing a first source of barrier film material toward a substrate in a first direction at an angle θ relative to the substrate, wherein θ is greater than about 0° and less than about 85°. Additionally, a method of depositing a barrier film over a substrate includes directing a plurality of N sources of barrier film material toward a substrate, each source being directed at an angle θN relative to the substrate, wherein for each θN, θ is greater than about 0° and less than about 180°. For at least a first of the θN, θN is greater than about 0° and less than about 85°, and for at least a second of the θN, θN is greater than about 95° and less than about 180°.
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公开(公告)号:US10910590B2
公开(公告)日:2021-02-02
申请号:US14661335
申请日:2015-03-18
Applicant: UNIVERSAL DISPLAY CORPORATION
Inventor: Siddharth Harikrishna Mohan , William E. Quinn , Ruiqing Ma , Emory Krall , Luke Walski
Abstract: A novel thin film encapsulated OLED panel architecture and a method for making the panels with improved shelf life is disclosed. The OLED panel consists of a plurality of OLED pixels; each OLED pixel is individually hermetically sealed and isolated from its neighboring pixels. The organic stack of the OLED pixel is contained within its own hermetically sealed structure, achieved by making the structure on a barrier coated substrate and using a first barrier material as the grid and a second barrier for encapsulating the entire OLED pixel. The first barrier material provides the edge seal while the second barrier disposed over the pixel provides protection from top down moisture diffusion. By isolating and hermetically sealing individual pixels; any damage such as moisture and oxygen ingress due to defects or particles, delamination, cracking etc. can be effectively contained within the pixel thereby protecting other pixels in the panel.
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公开(公告)号:US10886503B2
公开(公告)日:2021-01-05
申请号:US16654042
申请日:2019-10-16
Applicant: Universal Display Corporation , Kent State University
Inventor: Yue Cui , Deng-ke Yang , Ruiqing Ma , Gregory McGraw , Julia J. Brown
Abstract: Novel microlens array architectures for enhanced light outcoupling from light emission are provided. Organic light emitting devices (OLEDs) that include an outcoupling layer including these novel microlens array architectures and method for fabricating such OLEDs are provided. These devices may be used to provide OLEDs with optimized light extraction.
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公开(公告)号:US20200266391A1
公开(公告)日:2020-08-20
申请号:US16868586
申请日:2020-05-07
Applicant: Universal Display Corporation
Inventor: Ruiqing Ma , Julia J. Brown , Chaoyu Xiang , Michael Hack , Jason Paynter
Abstract: Devices, components and fabrication methods are provided for improving the efficiency of OLED displays. An outcoupling component such as a microlens array (MLA) is attached to an OLED, with a relatively small distance between the MLA and the OLED. Cross-talk and back scattering are reduced by the use of colored lenses, focusing layers, and other methods.
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公开(公告)号:US20200058898A1
公开(公告)日:2020-02-20
申请号:US16663392
申请日:2019-10-25
Applicant: Universal Display Corporation
Inventor: Ruiqing Ma , Julia J. Brown
Abstract: A method of fabricating an organic light emitting device (OLED) on a substrate includes providing a mold having surface features, forming a substrate over the mold, fabricating an OLED over the substrate while the substrate is in the mold, and removing the mold from the substrate having the OLED fabricated thereon.
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