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    Methods and apparatus for downstream dissociation of gases
    91.
    发明申请
    Methods and apparatus for downstream dissociation of gases 审中-公开
    气体下游解离的方法和装置

    公开(公告)号：US20060137612A1

    公开(公告)日：2006-06-29

    申请号：US11292520

    申请日：2005-12-02

    Applicant: William Holber ,  Xing Chen

    Inventor： William Holber ,  Xing Chen

    IPC: C23C16/00 ,  C23F1/00

    CPC classification number: B01J19/088 ,  B01J2219/0875 ,  C23C16/452 ,  H01J37/32357 ,  H01J37/3244

    Abstract: A method and apparatus for activating and dissociating gases involves generating an activated gas with a plasma located in a chamber. A downstream gas input is positioned relative to an output of the chamber to enable the activated gas to facilitate dissociation of a downstream gas introduced by the gas input, wherein the dissociated downstream gas does not substantially interact with an interior surface of the chamber.

    Abstract translation: 用于激活和解离气体的方法和装置包括用位于室中的等离子体产生活化气体。 下游气体输入端相对于腔室的输出定位，以使得活化气体能够促进由气体输入引入的下游气体的解离，其中解离的下游气体基本上不与腔室的内表面相互作用。

    Focused beam spectroscopic ellipsometry method and system
    93.
    发明申请
    Focused beam spectroscopic ellipsometry method and system 审中-公开
    聚焦光束椭偏仪的方法和系统

    公开(公告)号：US20050105090A1

    公开(公告)日：2005-05-19

    申请号：US11007420

    申请日：2004-12-07

    Applicant: Timothy Piwonka-Corle ,  Karen Scoffone ,  Xing Chen ,  Lloyd Lacomb ,  Jean-Louis Stehle ,  Dorian Zahorski ,  John-Pierre Rey

    Inventor： Timothy Piwonka-Corle ,  Karen Scoffone ,  Xing Chen ,  Lloyd Lacomb ,  Jean-Louis Stehle ,  Dorian Zahorski ,  John-Pierre Rey

    IPC: G01N21/21 ,  G01J4/00

    CPC classification number: G01N21/211 ,  G01N2021/213

    Abstract: A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape to reduce off-axis aberrations in the focused beam. Some embodiments include both a spectrophotometer and an ellipsometer integrated together as a single instrument. In such instrument, the spectrophotometer and ellipsometer share a radiation source, and radiation from the source can be focused by either the spectrophotometer or the ellipsometer to the same focal point on a sample. Preferred embodiments of the ellipsometer employ a rotating, minimal-length Rochon prism as a polarizer, and include a spectrometer with an intensified photodiode array to measure reflected radiation from the sample, and a reference channel (in addition to a sample channel which detects radiation reflected from the sample).

    Abstract translation: 使用反射光学器件的光谱椭偏仪的方法和系统通过从该区域反射辐射（优选宽带UV，可见光和近红外辐射）来测量样品的小区域。 该系统优选地具有自动对焦组件和被编程用于根据测量结果确定样品上薄膜的厚度和/或复合折射率的处理器。 优选地，沿着偏振器和分析器之间的光路仅采用反射光学元件，样品光束以反射光学器件的每个分量以低入射角反射，光束被反射聚焦到样品上的小的紧密斑点 并且提供入射角选择元件用于仅选择仅以单个选定角度（或窄范围的角度）从样品反射的辐射。 聚焦镜优选具有椭圆形以减少聚焦光束中的离轴像差。 一些实施例包括作为单个仪器集成在一起的分光光度计和椭偏仪。 在这种仪器中，分光光度计和椭偏仪共享一个辐射源，来自源的辐射可以通过分光光度计或椭偏仪聚焦到样品上的同一焦点。 椭偏仪的优选实施例采用旋转的，最小长度的Rochon棱镜作为偏振器，并且包括具有增强的光电二极管阵列的光谱仪，以测量来自样品的反射辐射，以及参考通道（除了检测辐射的样品通道 从样品）。

    Inductively-coupled toroidal plasma source
    94.
    发明授权
    Inductively-coupled toroidal plasma source 有权
    电感耦合环形等离子体源

    公开(公告)号：US06815633B1

    公开(公告)日：2004-11-09

    申请号：US09804650

    申请日：2001-03-12

    Applicant: Xing Chen ,  William M. Holber ,  Andrew Barnett Cowe ,  Eric Georgelis ,  Ilya M. Bystyak ,  Andrzej Bortkiewicz

    Inventor： Xing Chen ,  William M. Holber ,  Andrew Barnett Cowe ,  Eric Georgelis ,  Ilya M. Bystyak ,  Andrzej Bortkiewicz

    IPC: B23K1000

    CPC classification number: H01J37/32009 ,  H01J27/16 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/32862

    Abstract: Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.

    Method and system for calibrating an ellipsometer
    98.
    发明授权
    Method and system for calibrating an ellipsometer 失效
    用于校准椭偏仪的方法和系统

    公开(公告)号：US5581350A

    公开(公告)日：1996-12-03

    申请号：US471997

    申请日：1995-06-06

    Applicant: Xing Chen ,  Philip D. Flanner, III ,  Kiron B. Malwankar ,  Jennming Chen

    Inventor： Xing Chen ,  Philip D. Flanner, III ,  Kiron B. Malwankar ,  Jennming Chen

    IPC: G01N21/21 ,  G01J4/00

    CPC classification number: G01N21/211 ,  G01N21/274 ,  G01N2021/213

    Abstract: A method for calibrating an ellipsometer, and an ellipsometer including a processor programmed to control the analyzer, polarizer, and other ellipsometer components, and to process the data measured by the ellipsometer to perform the calibration method automatically. Where the ellipsometer's polarizer rotates and the analyzer remains fixed during measurement, the method determines coarse approximations of values A.sub.0 and P.sub.0, and then processes reflectivity data obtained at two or more analyzer angles to determine refined approximations of the values A.sub.0 and P.sub.0, where P.sub.0 is the angle of the polarizer's optical axis at an initial time, and A.sub.0 is the offset of the actual orientation angle of the analyzer from a nominal analyzer angle. Preferably the ellipsometer is a spectroscopic ellipsometer, the reflectivity data determine a tan.psi. spectrum and a cos.DELTA. spectrum for each of the analyzer angles, and the coarse approximations of A.sub.0 and P.sub.0 are refined by processing the reflectivity data by performing regression on A.sub.0 and P.sub.0 until the differences among the tan.psi. and cos.DELTA. spectra for several analyzer angles are minimized. Where the ellipsometer's analyzer rotates and the polarizer remains fixed during measurement, the method coarsely determines values A'.sub.0 and P'.sub.0, and then processes reflectivity data obtained at two or more polarizer angles to determine refined approximations of the values A'.sub.0 and P'.sub.0, where P'.sub.0 is the angle of the analyzer's optical axis at an initial time, and A'.sub.0 is the offset of the actual orientation angle of the polarizer from a nominal polarizer angle.

    Abstract translation: 用于校准椭偏仪的方法以及椭圆计，其包括被编程为控制分析仪，偏振器和其它椭偏仪组件的处理器，并且处理由椭偏仪测量的数据以自动执行校准方法。 在测量期间，椭偏仪偏振器旋转并且分析仪保持固定，该方法确定值A0和P0的粗近似值，然后处理在两个或更多分析器角度获得的反射率数据，以确定值A0和P0的精确近似，其中P0为 偏振器的光轴在初始时的角度，A0是分析仪的实际取向角与标称分析仪角度的偏移。 优选地，椭偏仪是分光椭偏仪，反射率数据确定每个分析器角度的tan psi光谱和cosDDTA光谱，并且通过在A0和P0上进行回归处理反射率数据来改善A0和P0的粗略近似 直到几个分析仪角度的tan psi和cos DELTA光谱之间的差异最小化。 在椭偏仪的分析仪旋转和偏振器在测量期间保持固定的情况下，该方法粗略地确定值A'0和P'0，然后处理在两个或多个偏振器角度处获得的反射率数据，以确定值A'0和P的精确近似 '0，其中P'0是初始时分析仪的光轴的角度，A'0是偏振器与标称偏振器角度的实际定向角的偏移。

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