公开(公告)号：US20100166943A1

公开(公告)日：2010-07-01

申请号：US12345745

申请日：2008-12-30

申请人： Yimin Hsu ,  Arley Cleveland Marley

发明人： Yimin Hsu ,  Arley Cleveland Marley

IPC分类号： C23C16/52

CPC分类号： G11B5/455 ,  B82Y25/00 ,  G01R33/028 ,  G01R33/091 ,  G11B5/3173 ,  G11B5/3932 ,  H01F10/3254 ,  H01F10/3272

摘要： A method for determining a magnetic anisotropy of a free layer of a magnetoresistive sensor. The method includes forming a functional magnetoresistive sensor and also a test sensor on a wafer. The test sensor has a sensor stack that is identical to that of the functional sensor, however the test head does not have a magnetic bias structure for biasing the free layer. A series of tests can be performed to construct a transfer curve for the test sensor. This can then be used to determine a magnetic anisotropy of the test head, which also corresponds to a magnetic anisotropy of the functional head.

摘要翻译： 用于确定磁阻传感器的自由层的磁各向异性的方法。 该方法包括在晶片上形成功能磁阻传感器以及测试传感器。 测试传感器具有与功能传感器相同的传感器堆叠，然而测试头不具有用于偏置自由层的磁偏置结构。 可以进行一系列测试以构建测试传感器的传递曲线。 这可以用于确定测试头的磁各向异性，其也对应于功能头的磁各向异性。

公开(公告)号：US20100078406A1

公开(公告)日：2010-04-01

申请号：US12241751

申请日：2008-09-30

申请人： Hung-Chin Guthrie ,  Yimin Hsu ,  Ming Jiang ,  Sue Siyang Zhang

发明人： Hung-Chin Guthrie ,  Yimin Hsu ,  Ming Jiang ,  Sue Siyang Zhang

IPC分类号： B44C1/22

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315

摘要： A method for manufacturing a write pole for a perpendicular magnetic write head. The method employs a damascene process to construct the write pole with a very accurately controlled track width. The method includes depositing a layer of material that can be readily removed by reactive ion etching. This material can be referred to as a RIEable material. A mask is formed over the RIEable material and a reactive ion etching is performed to form a tapered trench in the RIEAble material. A CMP stop layer can the be deposited, and a write pole plated into the trench. A CMP can then be performed to define the trailing edge of the write pole. Another masking, etching and plating step can be performed to form a trailing, wrap-around magnetic shield.

摘要翻译： 一种用于制造用于垂直磁写头的写极的方法。 该方法采用镶嵌工艺构造具有非常精确控制的轨道宽度的写极点。 该方法包括沉积可以通过反应离子蚀刻容易地去除的材料层。 该材料可以称为可分级材料。 在RIEable材料上形成掩模，并执行反应离子蚀刻以在RIEAble材料中形成锥形沟槽。 可以将CMP停止层沉积，并将写入极电镀到沟槽中。 然后可以执行CMP以限定写入极的后沿。 可以执行另一掩模，蚀刻和电镀步骤以形成拖尾的环绕磁屏蔽。

公开(公告)号：US07656611B2

公开(公告)日：2010-02-02

申请号：US10927875

申请日：2004-08-27

申请人： Yinshi Liu ,  Nian-Xiang Sun ,  Yunxiao Gao ,  Yimin Hsu ,  Tomohiro Okada ,  Yasuyuki Okada

发明人： Yinshi Liu ,  Nian-Xiang Sun ,  Yunxiao Gao ,  Yimin Hsu ,  Tomohiro Okada ,  Yasuyuki Okada

IPC分类号： G11B5/147 ,  G11B5/31

CPC分类号： G11B5/1278

摘要： A perpendicular write head includes a main pole comprising high moment magnetic layers laminated with both soft magnetic layers and non-magnetic layers for antiferromagnetic coupling (AFC) between the high moment material layers. The perpendicular write head includes a return pole connected to the main pole by a back gap closure at a distal end and separated from the main pole by a gap at an air bearing surface (ABS). A write coil is positioned between the main pole and the return pole and the surface area of the return pole at the ABS is substantially larger than the surface area of the main pole at the ABS.

摘要翻译： 垂直写头包括主极，其包括在高力矩材料层之间层叠有软磁层和用于反铁磁耦合（AFC）的非磁性层的高力矩磁层。 垂直写头包括通过在远端处的后间隙闭合连接到主极的返回极，并且通过空气轴承表面（ABS）处的间隙与主极分离。 写入线圈位于主极和返回极之间，并且ABS处的返回极的表面积基本上大于ABS处的主极的表面积。

公开(公告)号：US20090141397A1

公开(公告)日：2009-06-04

申请号：US11949620

申请日：2007-12-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Quan-chiu Harry Lam ,  Yansheng Luo ,  Vladimir Nikitin ,  Changqing Shi

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Quan-chiu Harry Lam ,  Yansheng Luo ,  Vladimir Nikitin ,  Changqing Shi

IPC分类号： G11B5/127 ,  G11B5/23

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315

摘要： A magnetic write head for perpendicular magnetic data recording having a notched write pole for reduced magnetic core width (MCW) dependence on skew. The write pole is configured with a notch that can extend to or slightly beyond the flare point of the write pole, and is formed on the leading portion of the write pole. The notch can have a notch depth, as measured from the ABS of 50-200 nm or about 120 nm. The notch can have a notch height, measured in the down track direction that is 40-90 nm or 20-90 percent of the write pole height.

摘要翻译： 用于垂直磁数据记录的磁写头，具有用于减小磁芯宽度（MCW）的偏斜写入极对偏斜的依赖性。 写入极配置有可以延伸到或稍微超过写入极的闪点的凹口，并且形成在写入极的引导部分上。 切口可以具有从50-200nm或约120nm的ABS测量的切口深度。 切口可以具有沿向下方向测量的切口高度，其为40-90nm或写入极高度的20-90％。

公开(公告)号：US07538976B2

公开(公告)日：2009-05-26

申请号：US11412017

申请日：2006-04-25

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin

IPC分类号： G11B5/127

CPC分类号： G11B5/3146 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3116

摘要： A magnetic structure for use in a magnetic head for avoiding wide angle track erasure and other forms of adjacent track interference. The magnetic structure includes a trailing shield having a specially configured back edge opposite the air bearing surface ABS. The magnetic shield has a shallow substantially constant throat height at a center portion. Then, the back edge of the shield tapers back away from the ABS in first and second intermediate portion located at either side of the center portion. These intermediate portions lead to first and second outer portions that have substantially constant throat heights that are larger than the throat height at the center region. The throat height at each of the laterally outer portions can be 1.5 to 5 times the throat height of the center portion. This configuration, chokes off stray fields that might be picked up by the outer portions of the shield preventing excessive magnetic flux from reaching the central portion of the shield where it might affect writing. In addition, the limited throat height of the outer portion (ie. the back edge of the outer portions does not keep tapering back away from the ABS) prevents the outer portions from picking up too much stray magnetic field, while also ensuring that sufficient magnetic material will be present to absorb desired magnetic field from the write pole during use.

摘要翻译： 用于磁头的磁结构，用于避免广角跟踪擦除和其他形式的相邻轨道干扰。 磁性结构包括后挡板，其具有与空气轴承表面ABS相对的特殊配置的后边缘。 磁屏蔽件在中心部分具有浅实质上恒定的喉部高度。 然后，屏蔽件的后边缘在位于中心部分两侧的第一和第二中间部分中从ABS逐渐变细。 这些中间部分导致第一和第二外部部分具有大于喉部高度在中心区域处大致恒定的喉部高度。 每个横向外部部分的喉部高度可以是中心部分的喉部高度的1.5至5倍。 这种构造可以消除可能由屏蔽外部拾取的杂散场，防止过多的磁通量到达屏蔽的中心部分，从而可能影响写入。 此外，外部部分的限制喉部高度（即，外部部分的后边缘不保持从ABS退回）防止外部部分拾取太多的杂散磁场，同时还确保足够的磁 将存在材料以在使用期间从写入极吸收期望的磁场。

公开(公告)号：US20090103211A1

公开(公告)日：2009-04-23

申请号：US11877570

申请日：2007-10-23

申请人： Tsung Yuan Chen ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Changqing Shi

发明人： Tsung Yuan Chen ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Changqing Shi

IPC分类号： G11B5/127 ,  G11B5/11

CPC分类号： G11B5/3116 ,  G11B5/1278

摘要： A magnetic write head for perpendicular magnetic data recording having a trailing shield with a two step throat height. The trailing shield is formed over a non-magnetic bump that forms a notch in the leading edge of the trailing shield. This notch defines a first, smaller throat height closest to the write pole and a larger throat height away from the write pole. The smaller throat height near the write pole prevents excess magnetic flux from leaking to the write pole, thereby ensuring efficient strong write field. The larger trailing shield throat height away from the write pole prevents magnetic saturation oft the trailing shield and also greatly facilitates manufacturing avoiding problems related to variations and deviations in manufacturing processes used to define the trailing shield.

摘要翻译： 用于垂直磁数据记录的磁写头，具有具有两段喉部高度的后挡板。 后挡板形成在非磁性凸块上，该非磁性凸块在后挡板的前缘形成凹口。 该凹口限定了最靠近写入极的第一较小的喉部高度和远离写入极的较大的喉部高度。 写极附近的较小的喉部高度可防止过多的磁通量泄漏到写入极，从而确保有效的强写入场。 远离写入极的较大的后屏蔽喉部高度防止尾部屏蔽层的磁饱和，并且还极大地有助于制造，避免与用于限定后屏蔽的制造工艺中的变化和偏差相关的问题。

公开(公告)号：US07506431B2

公开(公告)日：2009-03-24

申请号：US11744022

申请日：2007-05-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) is deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法允许写头形成有具有凹形后缘的写入极。 该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。 使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。 沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的ALD层的一部分。 执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。 然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

公开(公告)号：US20080271308A1

公开(公告)日：2008-11-06

申请号：US11744022

申请日：2007-05-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  C23C14/00

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) h deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法允许写头形成有具有凹形后缘的写入极。 该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。 使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。 沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的一部分ALD层。 执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。 然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

公开(公告)号：US20080072417A1

公开(公告)日：2008-03-27

申请号：US11525788

申请日：2006-09-21

申请人： Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek

发明人： Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a write pole for a perpendicular magnetic write head. The method includes forming a mask structure over a full film layer of magnetic write pole material. A layer of hard mask material such as conformally deposited alumina is then deposited full film over the mask and write pole material. An ion mill, such as in an Ar or CHF3 chemistry is then used to preferentially remove horizontally disposed portions of the alumina layer (hard mask layer), thereby forming vertical hard mask walls at the sides of the mask structure. An ion mill is then used to form the write pole, with the alumna side walls providing excellent masking for forming well defined write pole edges. A relatively gentle clean up process can then be performed to remove the remaining mask material and side walls. The use of the alumina side walls eliminated the need to use an alumina hard mask that extends over the entire top of the write pole, Because of this, after forming the write pole, a relatively gentle clean up such as TMAH etch and NMP can be used to remove the remaining mask and alumina walls from the write pole.

摘要翻译： 一种用于制造用于垂直磁写头的写极的方法。 该方法包括在磁性写入磁极材料的全部薄膜层上形成掩模结构。 然后将诸如保形沉积氧化铝的硬掩模材料层沉积在掩模上并写入极材料。 然后使用诸如Ar或CHF 3化学中的离子磨机来优先除去氧化铝层（硬掩模层）的水平设置的部分，从而在掩模结构的侧面形成垂直的硬掩模壁。 然后使用离子磨机形成写柱，校准侧壁为形成良好定义的写极边缘提供了优​​异的掩模。 然后可以执行相对温和的清理过程以除去剩余的掩模材料和侧壁。 使用氧化铝侧壁消除了使用在写入极的整个顶部上延伸的氧化铝硬掩模的需要。因此，在形成写入极之后，可以进行相对温和的清洁，例如TMAH蚀刻和NMP可以 用于从写入极上去除剩余的掩模和氧化铝壁。

公开(公告)号：US20080030897A1

公开(公告)日：2008-02-07

申请号：US11497202

申请日：2006-08-01

申请人： Hardayal Singh Gill ,  Kuok San Ho ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Vladimir Nikitin

发明人： Hardayal Singh Gill ,  Kuok San Ho ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Vladimir Nikitin

IPC分类号： G11B5/147 ,  G11B5/127

CPC分类号： G11B5/3123 ,  G11B5/1278 ,  G11B5/3967

摘要： A magnetic head structure for use in perpendicular magnetic recording. The magnetic head includes a magnetic write head having a return pole with a magnetic shunt structure extending from the back end opposite the ABS. The magnetic shunt structure prevents magnetic field from the write coil from reaching and affecting the read head. More specifically the shunt structure prevents magnetic field from the portion of the write coil beyond the back gap (as measured from the ABS) from magnetizing a magnetic shield of the read head. The shunt structure is also configured so as to avoid stray field writing. The size and shape of the shunt structure is therefore, limited to avoid attracting stray fields that might cause such stray field writing.

摘要翻译： 用于垂直磁记录的磁头结构。 磁头包括具有从与ABS相对的后端延伸的磁分路结构的返回极的磁写头。 磁分路结构防止来自写入线圈的磁场到达并影响读取头。 更具体地说，分流结构防止来自写入线圈的部分的磁场超过后隙（从ABS测量）来磁化读取磁头的磁屏蔽。 分流结构也被配置为避免杂散场写入。 因此，分流结构的尺寸和形状受到限制，以避免吸引可能导致这种杂散场写入的杂散场。