Abstract:
A spray coated member having an excellent resistance to plasma erosion is produced by irradiating an electron beam to an outermost surface layer portion of a ceramic spray coated portion covering a surface of a substrate to form an electron beam irradiated layer.
Abstract:
A spray coated member having an excellent resistance to plasma erosion is produced by irradiating an electron beam to an outermost surface layer portion of a ceramic spray coated portion covering a surface of a substrate to form an electron beam irradiated layer.
Abstract:
For the purpose of solving problems inherent to a white Al2O3 spray coating, i.e. drawbacks that the injury resistance, corrosion resistance, heat resistance, abrasion resistance and the like are poor and the light reflectance is high because the coating is porous and weak in the bonding force among particles, there are proposed a spray coating member having excellent injury resistance and the like in which a surface of a substrate is covered with a colored Al2O3 spray coating of a luminosity lower than grayish white, achromatic or chromatic color.
Abstract translation:为了解决白色Al 2 O 3喷涂的固有问题,即耐腐蚀性,耐腐蚀性,耐热性,耐磨性等差的缺点,并且光反射率高,因为涂层是多孔的并且在粘结中是弱的 颗粒之间的力量,提出了具有优异的耐损伤性等的喷涂部件,其中基板的表面被发光度低于灰白色,无色或彩色的着色Al 2 O 3喷涂层覆盖。
Abstract:
An electrostatic chuck member comprises an electrode layer and an electric insulating layer, wherein a spray coating layer of an oxide of a Group 3A element in the Periodic Table is formed as an outermost layer of the member and a surface of the spray coating layer is rendered into a densified re-melting layer having an average surface roughness (Ra) Of 0.8-3.0 μm.
Abstract:
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.
Abstract translation:本发明提供一种等离子体处理容器的内部构件,该等离子体处理容器在含有卤素气体的环境下具有优异的耐化学腐蚀和等离子体侵蚀性,并且其制造方法是通过将基材的表面覆盖而形成的构件 由作为底层形成的金属涂层,形成在作为中间层的底涂层上的Al 2 O 3 O 3膜和Y 2 N 2 O 3组成的多层复合层 > O 3喷涂涂层形成在中间层上作为顶涂层。
Abstract:
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.
Abstract:
In order to advantageously solve problems such as lowering of the productivity, contamination of alloy coating due to the adoption of different metal, increase of the cost due to the adoption of different coating process, a coating of MCrAlX alloy is directly formed on a substrate surface of a member exposed to a high temperature at a thickness of 10.about.300 .mu.m through atmospheric plasma spraying process in air or flame spraying process (including low-velocity flame spraying process, high-velocity flame spraying process) and thereafter the same MCrAlX alloy is applied thereonto at a thickness of 100.about.800 .mu.m through low pressure plasma spraying process in a non-oxidizing atmosphere.
Abstract:
To provide heat-resistant alloy members that maintain the resistance to corrosion at high temperature of the chromized layer formed on Ni- or Co-base heat-resistant alloys and which yet are improved in various mechanical properties. The improved Ni- or Co-base heat-resistant alloy member having a chromized layer that is characterized by having a chromium concentration of 25-80% and a thickness of 10-100 .mu.m. This member is produced by controlling both the vapor pressure of a chromium halide being used in chromization and the temperature therefor in such a way that the chromized layer being formed is adjusted to have a chromium concentration and a thickness within the ranges specified above.
Abstract:
A roll for hot dipping bath includes at its outer peripheral surface at least one spiral groove for the discharge of dross. In this roll, the outer peripheral surface existing between the adjoining groove portions includes a rough surface, capable of applying a molten metal composition to a sheet of metal without transferring a groove mark to the sheet.