公开(公告)号：US06531668B1

公开(公告)日：2003-03-11

申请号：US09943451

申请日：2001-08-30

申请人： Qing Ma

发明人： Qing Ma

IPC分类号： H01H5900

CPC分类号： B81B3/007 ,  B81B2201/014 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81B2203/0353 ,  B81B2203/04 ,  B81C2201/056 ,  H01H1/20 ,  H01H59/0009 ,  H01H2001/0084 ,  H01H2059/0036 ,  H01H2059/0063 ,  Y10T29/49002 ,  Y10T29/49016 ,  Y10T29/49082 ,  Y10T29/49105 ,  Y10T29/49128 ,  Y10T29/49147

摘要： A microelectromechanical system (MEMS) switch having a high-resonance-frequency beam is disclosed. The MEMS switch includes first and second spaced apart electrical contacts, and an actuating electrode. The beam is adapted to establish contact between the electrodes via electrostatic deflection of the beam as induced by the actuating electrode. The beam may have a cantilever or bridge structure, and may be hollow or otherwise shaped to have a high resonant frequency. Methods of forming the high-speed MEMS switch are also disclosed.

公开(公告)号：US20020160611A1

公开(公告)日：2002-10-31

申请号：US09844356

申请日：2001-04-27

发明人： David Horsley

IPC分类号： H01L021/311

CPC分类号： B81C1/00142 ,  B81B2203/0315 ,  B81C2201/056 ,  B81C2203/036

摘要： A method of fabricating a non-perforate suspended platform on a bonded-substrate is disclosed. The method includes forming a dielectric layer on a support surface of a base substrate followed by patterning an interface surface of the dielectric layer to define a well feature. The well feature is etched until a well having a depth that leaves a thin protective layer of the dielectric layer covering the support surface. Next a platform substrate is urged into contact with the base substrate followed by annealing the base and platform substrates to fusion bond the interface surface with a mounting surface of the platform substrate. The platform substrate is thinned, using CMP for example, to form a membrane over a sealed cavity defined by the well and the mounting surface. The membrane is patterned and etch to form a plurality of trenches that extend through the membrane to the sealed cavity and define a suspended platform and a flexure. Only those portions of the suspended platform substrate necessary to define the suspended platform and the flexures are patterned and etched so that the suspended platform is devoid of perforations. As a result, the surface area of the suspended platform is maximized because perforations or the like do not subtract from the available surface area. A selective etch material such as HF is used to remove the remaining dielectric layer from beneath the platform and the flexures thereby freeing the suspended platform and the flexures. The thin protective layer prevents pitting or damage to the support surface of the base substrate during the removal of the dielectric layer.

摘要翻译： 公开了一种在接合衬底上制造非穿孔悬挂平台的方法。 该方法包括在基底基板的支撑表面上形成电介质层，然后对电介质层的界面进行构图以形成阱结构。 蚀刻阱特征，直到具有覆盖覆盖支撑表面的介电层的薄保护层的深度的阱。 接下来，平台基板被推压与基底基板接触，然后对基底和平台基板进行退火，以将界面表面与平台基板的安装表面熔合。 平台基板例如使用CMP来减薄，以在由井和安装表面限定的密封空腔上形成膜。 膜被图案化和蚀刻以形成多个沟槽，其延伸穿过膜到密封腔并限定悬挂平台和挠曲。 仅限定了悬挂平台和挠曲件所需的悬浮平台基板的那些部分被图案化和蚀刻，使得悬挂的平台没有穿孔。 结果，悬挂平台的表面面积最大化，因为穿孔等不能从可用的表面积中减去。 使用诸如HF的选择性蚀刻材料从平台下方除去剩余的电介质层，并且弯曲，从而释放悬浮平台和挠曲。 薄的保护层在去除介电层期间防止对基底基板的支撑表面的点蚀或损坏。

公开(公告)号：US06465355B1

公开(公告)日：2002-10-15

申请号：US09844356

申请日：2001-04-27

申请人： David Horsley

发明人： David Horsley

IPC分类号： H01L21311

CPC分类号： B81C1/00142 ,  B81B2203/0315 ,  B81C2201/056 ,  B81C2203/036

摘要： A method of fabricating a non-perforate suspended platform on a bonded-substrate is disclosed. The method includes forming a dielectric layer on a support surface of a base substrate followed by patterning an interface surface of the dielectric layer to define a well feature. The well feature is etched until a well having a depth that leaves a thin protective layer of the dielectric layer covering the support surface. Next a platform substrate is urged into contact with the base substrate followed by annealing the base and platform substrates to fusion bond the interface surface with a mounting surface of the platform substrate. The platform substrate is thinned, to form a membrane over a sealed cavity defined by the well and the mounting surface. The membrane is patterned and etch to form a plurality of trenches that extend through the membrane to the sealed cavity and define a suspended platform and a flexure. A selective etch material such as HF is used to remove the remaining dielectric layer from beneath the platform and the flexures thereby freeing the suspended platform and the flexures.

摘要翻译： 公开了一种在接合衬底上制造非穿孔悬挂平台的方法。 该方法包括在基底基板的支撑表面上形成电介质层，然后对电介质层的界面进行构图以形成阱结构。 蚀刻阱特征，直到具有覆盖覆盖支撑表面的介电层的薄保护层的深度的阱。 接下来，平台基板被推压与基底基板接触，然后对基底和平台基板进行退火，以将界面表面与平台基板的安装表面熔合。 平台基板被薄化，以在由井和安装表面限定的密封空腔上形成膜。 膜被图案化和蚀刻以形成多个沟槽，其延伸穿过膜到密封腔并限定悬挂平台和挠曲。 使用诸如HF的选择性蚀刻材料从平台下方除去剩余的电介质层，并且弯曲，从而释放悬浮平台和挠曲。

公开(公告)号：US06396620B1

公开(公告)日：2002-05-28

申请号：US09702082

申请日：2000-10-30

申请人： Scott H. Goodwin-Johansson

发明人： Scott H. Goodwin-Johansson

IPC分类号： G02B2600

CPC分类号： B81B3/0021 ,  B81B2203/0127 ,  B81C2201/0109 ,  B81C2201/056 ,  G02B26/02 ,  G02B26/0841 ,  G02B26/085

摘要： An electromagnetic radiation shutter device driven by electrostatic forces comprises a stationary membrane capable of allowing electromagnetic radiation transmission therethrough, and a first and second flexible membrane comprising an electrode element and at least one biasing element. The first flexible membrane has a fixed portion attached to the underside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the underside of the stationary membrane. The second flexible membrane has a fixed portion attached to the topside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the topside of the stationary membrane. In operation, a voltage differential is established between the electrode element of the first flexible membrane and the electrode element of the second flexible membrane thereby moving the first and second flexible membranes relative to the stationary membrane. In a closed state (i.e. fully activated), the flexible membranes will be generally parallel to the stationary membrane and will be capable of deflecting electromagnetic radiation. In an open state (i.e. no voltage applied), the flexible membranes will generally be fully curled based on biasing in the flexible membranes induced during fabrication and/or imparted by material characteristics.

摘要翻译： 由静电力驱动的电磁辐射快门装置包括能够允许电磁辐射透射的固定膜，以及包括电极元件和至少一个偏压元件的第一和第二柔性膜。 第一柔性膜具有附接到固定膜的下侧的固定部分和与固定部分相邻并从固定膜的下侧释放的远侧部分。 第二柔性膜具有固定部分，固定部分固定在固定膜的顶面上，远侧部分与固定部分相邻并从固定膜顶部释放。 在操作中，在第一柔性膜的电极元件和第二柔性膜的电极元件之间建立电压差，从而使第一和第二柔性膜相对于固定膜移动。 在关闭状态（即完全激活）时，柔性膜将大致平行于固定膜并且能够偏转电磁辐射。 在打开状态（即没有施加电压）的情况下，柔性膜通常将基于在制造过程中诱导的柔性膜中的偏置和/或由材料特性赋予而完全卷曲。

公开(公告)号：US5543108A

公开(公告)日：1996-08-06

申请号：US257643

申请日：1994-06-09

申请人： Walter Bacher ,  Hans Biedermann ,  Heinz Dinglreiter ,  Helmut Kalb

发明人： Walter Bacher ,  Hans Biedermann ,  Heinz Dinglreiter ,  Helmut Kalb

IPC分类号： B29C33/52 ,  B29C33/00 ,  B29C67/00 ,  B29D99/00 ,  B81C1/00 ,  B32B31/00

CPC分类号： B29C43/021 ,  B29C33/0033 ,  B81C99/0085 ,  B29C2059/023 ,  B29L2011/0016 ,  B29L2031/14 ,  B29L2031/7506 ,  B29L2031/7532 ,  B81C2201/0183 ,  B81C2201/056

摘要： A method of making microstructure bodies of plastic material. A microstructured plate-like base body which is made by any known molding procedure and which has a first side serving as a first reference plane and a second side which has plastic microstructures projecting therefrom is covered at its second side with a material layer that engages the microstructures, whereupon the material layer is machined to provide a second reference surface parallel to the first reference surface and the base body is then machined parallel to the second reference surface to expose the microstructures projecting therefrom and the material layer is finally removed selectively with respect to the plastic material to release the microstructured bodies.

摘要翻译： 一种制造塑料材料微结构体的方法。 通过任何已知的模制步骤制成并具有第一侧作为第一参考平面的微结构的板状基体，以及具有从其突出的具有塑性微结构的第二侧在其第二侧被覆盖有材料层 微结构，然后材料层被加工以提供平行于第一参考表面的第二参考表面，然后平行于第二参考表面加工基体，以暴露从其突出的微结构，并且材料层最终相对于 塑料材料释放出微结构体。