公开(公告)号：US06577040B2

公开(公告)日：2003-06-10

申请号：US09839035

申请日：2001-04-20

申请人： Clark T.-C. Nguyen

发明人： Clark T.-C. Nguyen

IPC分类号： H02N200

CPC分类号： H03H3/0078 ,  H01H59/0009 ,  H01H2059/0072 ,  H03H9/02409 ,  H03H9/24 ,  H03H9/2452 ,  H03H9/462 ,  H03H9/465 ,  H03H9/505 ,  H03H2009/02511 ,  H03H2009/02519 ,  H03H2009/02527

摘要： Several MEMS-based methods and architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. A method and apparatus are shown for generating a signal having at least one desired output frequency such as LO frequency in an RF subsystem in response to a tuning voltage and without the need for a phase-locking circuit. One of the primary benefits of the use of such architectures is a savings in power consumption by trading power for high selectivity (i.e., high Q). Consequently, the present invention relies on the use of a large number of micromechanical links in SSI networks to implement signal processing functions with basically zero DC power consumption.

摘要翻译： 提供了几种利用电路中的振动微机械谐振器来实现滤波，混频，频率参考和放大功能的基于MEMS的方法和架构。 示出了用于在RF子系统中响应于调谐电压产生具有至少一个所需输出频率（例如LO频率）的信号并且不需要锁相电路的方法和装置。 使用这种架构的主要优点之一是通过为高选择性（即高Q）的交易功率节省了功耗。 因此，本发明依赖于在SSI网络中使用大量的微机械连接来实现基本上零直流功率消耗的信号处理功能。

公开(公告)号：US20020179421A1

公开(公告)日：2002-12-05

申请号：US09843395

申请日：2001-04-26

发明人： Byron L. Williams ,  Laurinda W. Ng ,  Darius L. Crenshaw ,  Jose L. Melendez

IPC分类号： H01H057/00

CPC分类号： H01H59/0009 ,  H01G5/16 ,  H01H2059/0072

摘要： The present invention includes an integrated circuit switch including a membrane supported over a first conductor on a substrate, a conductive region on the membrane and connecting to the first conductor on the substrate, a pulldown electrode on the substrate and under the membrane and a pillar to support the membrane after the pulldown threshold has been reached. A voltage greater than a pulldown threshold is applied between the membrane and the pulldown electrode will pull the membrane down to make a capacitive coupling to the first conductor. The addition of the pillars increases the upward restoring force when the activation voltage is removed.

摘要翻译： 本发明包括集成电路开关，其包括支撑在衬底上的第一导体上的膜，膜上的导电区域并连接到衬底上的第一导体，衬底上的下拉电极和膜下方的柱 在达到下拉阈值后支持膜。 在膜和下拉电极之间施加大于下拉阈值的电压将使膜向下拉以与第一导体形成电容耦合。 当激活电压被去除时，柱的添加增加了向上的恢复力。

公开(公告)号：US20010033121A1

公开(公告)日：2001-10-25

申请号：US09839102

申请日：2001-04-20

申请人： The Regents of the University of Michigan

发明人： Clark T.-C Nguyen

IPC分类号： H01L041/04

CPC分类号： H03H3/0078 ,  H01H59/0009 ,  H01H2059/0072 ,  H03H9/02409 ,  H03H9/24 ,  H03H9/2452 ,  H03H9/462 ,  H03H9/465 ,  H03H9/505 ,  H03H2009/02511 ,  H03H2009/02519 ,  H03H2009/02527

摘要： Several MEMS-based architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. A method and apparatus are provided for upconverting and filtering an information signal utilizing a vibrating micromechanical device based on an AC signal having a desired frequency. One of the primary benefits of the use of such architectures is a savings in power consumption by trading power for high selectivity (i.e., high Q). Consequently, the present invention relies on the use of a large number of micromechanical links in SSI networks to implement signal processing functions with basically zero DC power consumption.

摘要翻译： 提供了几种利用电路中的振动微机械谐振器来实现滤波，混频，频率参考和放大功能的基于MEMS的架构。 提供一种方法和装置，用于使用基于具有期望频率的AC信号的振动微机械装置对信息信号进行上变频和滤波。 使用这种架构的主要优点之一是通过为高选择性（即高Q）的交易功率节省了功耗。 因此，本发明依赖于在SSI网络中使用大量的微机械连接来实现基本上零直流功率消耗的信号处理功能。

公开(公告)号：US06229684B1

公开(公告)日：2001-05-08

申请号：US09461247

申请日：1999-12-15

申请人： Allen Bruce Cowen ,  Vijayakumar Rudrappa Dhuler ,  Edward Arthur Hill ,  David Alan Koester ,  Ramaswamy Mahadevan

发明人： Allen Bruce Cowen ,  Vijayakumar Rudrappa Dhuler ,  Edward Arthur Hill ,  David Alan Koester ,  Ramaswamy Mahadevan

IPC分类号： H01G501

CPC分类号： H01G5/18 ,  B81B3/0056 ,  F03G7/06 ,  H01G5/16 ,  H01H1/0036 ,  H01H59/0009 ,  H01H61/02 ,  H01H2059/0063 ,  H01H2059/0072 ,  H01H2059/0081 ,  H01H2061/006

摘要： A variable capacitor having low loss and a correspondingly high Q is provided. In addition to a substrate, the variable capacitor includes at least one substrate electrode and a substrate capacitor plate that are disposed upon the substrate and formed of a low electrical resistance material, such as HTS material or a thick metal layer. The variable capacitor also includes a bimorph member extending outwardly from the substrate and over the at least one substrate electrode. The bimorph member includes first and second layers formed of materials having different coefficients of thermal expansion. The first and second layers of the bimorph member define at least one bimorph electrode and a bimorph capacitor plate such that the establishment of a voltage differential between the substrate electrode and the bimorph electrode moves the bimorph member relative to the substrate electrode, thereby altering the interelectrode spacing as well as the distance between the capacitor plates. As such, the capacitance of the variable capacitor can be controlled based upon the relative spacing between the bimorph member and the underlying substrate. A method is also provided for micromachining or otherwise fabricating a variable capacitor having an electrode and a capacitor plate formed of a low electrical resistance material such that the resulting variable capacitor has low loss and a correspondingly high Q. The variable capacitor can therefore be employed in high frequency applications, such as required by some tunable filters.

摘要翻译： 提供具有低损耗和相应高Q的可变电容器。 除了基板之外，可变电容器包括至少一个基板电极和基板电容器板，其设置在基板上并且由诸如HTS材料或厚金属层的低电阻材料形成。 可变电容器还包括从基板向外延伸并且在至少一个基板电极上方的双压电晶片。 双压电晶片构件包括由具有不同热膨胀系数的材料形成的第一和第二层。 双压电晶片构件的第一和第二层限定至少一个双压电晶片电极和双压电晶片电容器板，使得在衬底电极和双压电晶片电极之间建立电压差使得双压电晶片相对于衬底电极移动，从而改变电极间 间距以及电容器板之间的距离。 因此，可以基于双压电晶片构件和下面的衬底之间的相对间隔来控制可变电容器的电容。 还提供了一种用于微加工或以其他方式制造具有由低电阻材料形成的电极和电容器板的可变电容器的方法，使得所得到的可变电容器具有低损耗和相应高的Q.因此可变电容器可用于 高频应用，如某些可调谐滤波器所要求的。

公开(公告)号：US20180315571A1

公开(公告)日：2018-11-01

申请号：US15770705

申请日：2016-11-15

申请人： CAVENDISH KINETICS, INC.

发明人： Robertus Petrus VAN KAMPEN ,  Richard L. KNIPE ,  Mickael RENAULT ,  Shibajyoti Ghosh DASTIDER ,  Jacques Marcel MUYANGO

IPC分类号： H01H59/00 ,  H01G5/16 ,  B81B3/00

CPC分类号： H01H59/0009 ,  B81B3/001 ,  B81B3/0035 ,  B81B2201/016 ,  H01G5/16 ,  H01H2059/0018 ,  H01H2059/0072

摘要： A MEMS switch contains an RF electrode 102, pull-down electrodes 104 and anchor electrodes 108 located on a substrate 101. A plurality of islands 226 are provided in the pull-down electrode and electrically isolated therefrom. On top of the RF electrode is the RF contact 206 to which the MEMS-bridge 212, 214 forms an ohmic contact in the pulled-down state. The pull-down electrodes 104 are covered with a dielectric layer 202 to avoid a short-circuit between the bridge and the pull-down electrode. Contact stoppers 224 are disposed on the dielectric layer 202 at locations corresponding to the islands 226, and the resulting gap between the bridge and the dielectric layer in the pulled-down state reduces dielectric charging. In alternative embodiments, the contact stoppers are provide within the dielectric layer 202 or disposed on the islands themselves and under the dielectric layer. The switch provides good controllability of the contact resistance of MEMS switches over a wide voltage operating range.

公开(公告)号：US20180174788A1

公开(公告)日：2018-06-21

申请号：US15735213

申请日：2016-06-14

申请人： King Abdullah University of Science and Technology

发明人： Mohammed Affan Zidan ,  Jurgen Kosel ,  Khaled Nabil Salama

IPC分类号： H01H59/00 ,  H01H49/00

CPC分类号： H01H59/0009 ,  H01H49/00 ,  H01H59/00 ,  H01H2059/0018 ,  H01H2059/0072 ,  H01H2201/038

摘要： A microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch.

公开(公告)号：US20150315011A1

公开(公告)日：2015-11-05

申请号：US14698034

申请日：2015-04-28

申请人： Seiko Epson Corporation

发明人： Shogo INABA ,  Akihiko EBINA ,  Takuya KINUGAWA

IPC分类号： B81B3/00 ,  B81C1/00

CPC分类号： B81B3/001 ,  B81B3/0013 ,  B81B3/0021 ,  B81B2201/014 ,  B81B2203/0118 ,  B81C1/0015 ,  B81C2203/0136 ,  H01H1/0036 ,  H01H35/14 ,  H01H35/24 ,  H01H2059/0072

摘要： A MEMS structure includes: a substrate; a lower electrode disposed above the substrate; an upper electrode including a movable portion disposed facing and spaced from the lower electrode; and a projection projecting from a surface of the movable portion on a side facing the lower electrode, the projection being composed of a material different from that of the movable portion.

摘要翻译： MEMS结构包括：基板; 设置在所述基板上方的下电极; 上部电极，其包括面向并与所述下部电极间隔开的可动部; 以及在与所述下电极相对的一侧从所述可动部的表面突出的突起，所述突起由与所述可动部不同的材料构成。

公开(公告)号：US08629360B2

公开(公告)日：2014-01-14

申请号：US13460056

申请日：2012-04-30

申请人： Brandon William Pillans ,  Cody Blake Moody ,  Francis Joseph Morris

发明人： Brandon William Pillans ,  Cody Blake Moody ,  Francis Joseph Morris

IPC分类号： H01H57/00

CPC分类号： H01H59/0009 ,  H01H2059/0018 ,  H01H2059/0072

摘要： An RF MEMS capacitive switch aligns holes in one of its electrodes to dielectric posts to reduce trapped charge without affecting the capacitance ratio of the switch. When actuated, the electrode contacts the posts' one or more contact surfaces around the plurality of holes so that each hole overlaps at least a central portion of the post to which it is aligned. By selecting the hole size such that the top electrode appears to be approximately a continuous conductive sheet at the RF frequency, the alignment of the holes to the posts reduces the amount of trapped charge without lowering switch capacitance. In different embodiments, the post diameter may be smaller than the hole diameter so that the overlap is complete, in which case trapped charge is largely eliminated.

摘要翻译： RF MEMS电容开关将其一个电极中的孔对准电介质柱，以减少捕获的电荷而不影响开关的电容比。 当致动时，电极接触多个孔周围的柱的一个或多个接触表面，使得每个孔至少与其对准的柱的中心部分重叠。 通过选择孔尺寸使得顶部电极在RF频率处看起来是大致连续的导电片，孔的对准到柱减少了俘获电荷的量而不降低开关电容。 在不同的实施例中，柱直径可以小于孔直径，使得重叠完成，在这种情况下，被大量消除被捕获的电荷。

公开(公告)号：US20140009244A1

公开(公告)日：2014-01-09

申请号：US14001602

申请日：2012-03-20

申请人： Christophe Pavageau

发明人： Christophe Pavageau

IPC分类号： H01P1/10

CPC分类号： H01P1/15 ,  B81B5/00 ,  B81B2201/018 ,  H01H1/0036 ,  H01H1/20 ,  H01H59/0009 ,  H01H2001/0063 ,  H01H2001/0084 ,  H01H2059/0072 ,  H01P1/127 ,  H01P3/003

摘要： The RF MEMS crosspoint switch comprising a first transmission line and a second transmission line that crosses the first transmission line; the first transmission line comprises two spaced-apart transmission line portions, and a switch element that permanently electrically connects the said two spaced-apart transmission line portions; the second transmission line crosses the first transmission line between the two spaced-apart transmission line portions; the RF MEMS crosspoint switch further comprises actuation means for actuating the switch element at least between a first position, in which the switch element is electrically connecting the two spaced-apart transmission line portions of the first transmission line and the first and second transmission lines are electrically disconnected, and a second position, in which the switch element is electrically connecting the two spaced-apart transmission line portions of the first transmission line and is also electrically connecting the two transmission lines together.

摘要翻译： RF MEMS交叉点开关包括穿过第一传输线的第一传输线和第二传输线; 第一传输线包括两个间隔开的传输线部分，以及永久地电连接所述两个间隔开的传输线部分的开关元件; 第二传输线在两个间隔开的传输线部分之间穿过第一传输线; RF MEMS交叉点开关还包括用于至少在第一位置之间致动开关元件的致动装置，其中开关元件电连接第一传输线的两个间隔开的传输线部分和第一和第二传输线 以及第二位置，其中开关元件电连接第一传输线的两个间隔开的传输线部分，并且还将两个传输线电连接在一起。

公开(公告)号：US08295027B2

公开(公告)日：2012-10-23

申请号：US13368275

申请日：2012-02-07

申请人： Michael Bennett Cohn ,  Ji-Hai Xu

发明人： Michael Bennett Cohn ,  Ji-Hai Xu

IPC分类号： H01G5/00 ,  H01G5/16

CPC分类号： H01H59/0009 ,  B81B7/0077 ,  B81B2201/018 ,  B81B2203/0118 ,  B81B2207/093 ,  B81C1/00301 ,  B81C1/00357 ,  B81C3/001 ,  B81C2201/019 ,  B81C2203/0109 ,  B81C2203/0118 ,  B81C2203/019 ,  H01H2059/0018 ,  H01H2059/0072

摘要： A MEMS device and method of making same is disclosed. In one embodiment, a micro-switch includes a base assembly comprising a movable structure bearing a contact pad. The base assembly is wafer-scale bonded to a lid assembly comprising an activator and a signal path. The movable structure moves within a sealed cavity formed during the bonding process. The signal path includes an input line and an output line separated by a gap, which prevents signals from propagating through the micro-switch when the switch is deactivated. In operation, a signal is launched into the signal path. When the micro-switch is activated, a force is established by the actuator, which pulls a portion of the movable structure upwards towards the gap in the signal path, until the contact pad bridges the gap between the input line and output line, allowing the signal to propagate through the micro-switch.

摘要翻译： 公开了MEMS器件及其制造方法。 在一个实施例中，微型开关包括基座组件，其包括承载接触垫的可移动结构。 基座组件被晶片刻度结合到包括激活器和信号路径的盖组件。 可移动结构在接合过程中形成的密封空腔内移动。 信号路径包括输入线和由间隙分开的输出线，当开关被去激活时，该线路防止信号通过微型开关传播。 在操作中，信号被发送到信号路径中。 当微动开关被激活时，致动器建立一个力，致动器将可移动结构的一部分朝向信号路径中的间隙向上拉，直到接触垫桥接输入线和输出线之间的间隙，从而允许 信号通过微型开关传播。