公开(公告)号：US20020088919A1

公开(公告)日：2002-07-11

申请号：US10027061

申请日：2001-12-26

Inventor： Hiroshi Muramatsu

IPC: G01J001/00

CPC classification number: G01Q60/22 ,  G01Q10/06 ,  G01Q30/06

Abstract: According to the conventional light detection of a light probe microscope, there have been a problem that an excessive stray light is detected in case that a detector whose light-intercepting face is large with respect to the size of a bright point is used, and a problem that an optical axis alignment is necessary in case that the detector having a small light-intercepting face in the order of the bright point is used. Besides, in order to obtain plural optical information, plural light detectors have been necessary. It is adapted such that, by using a two-dimensional image sensor, a two-dimensional image is obtained in real time, and a signal intensity of an optional detection region in the two-dimensional image is obtained by picture signal processing means. It is adapted such that plural information are image-formed on the two-dimensional image sensor, and plural detection regions are designated.

Abstract translation: 根据光探针显微镜的常规光检测，存在如下问题：在使用相对于亮点尺寸的遮光面大的检测器的情况下，检测到过多的杂散光， 在使用具有亮点次序的小的遮光面的检测器的情况下需要光轴对准的问题。 此外，为了获得多个光信息，需要多个光检测器。 适于使得通过使用二维图像传感器实时获得二维图像，并且通过图像信号处理装置获得二维图像中的可选检测区域的信号强度。 适于使得在二维图像传感器上形成多个信息，并且指定多个检测区域。

公开(公告)号：US20020074523A1

公开(公告)日：2002-06-20

申请号：US09975162

申请日：2001-10-11

Inventor： Nicolo F. Machi ,  Nam H. Vo

IPC: G01J001/00

CPC classification number: G01J3/108 ,  B64D47/04

Abstract: An infrared LASER diode based high intensity light (100) for use as an aircraft landing light or searchlight in conjunction with night vision imaging systems. The high intensity light (100) uses infrared LASER diodes (110) installed into a heat sink (112) for temperature stability. The infrared light emitted from the LASER diodes (110) is transmitted to an optical positioning plate (106) by optical transmission means (108). The optical positioning plate (106) combines the emissions of the individual LASER diodes (110) to a single infrared light beam, which is collimated by an aspheric lens (102).

Abstract translation: 一种基于红外线激光二极管的高强度光（100），用作飞机着陆灯或探照灯与夜视成像系统。 高强度光（100）使用安装在散热器（112）中的红外激光二极管（110）来实现温度稳定性。 从激光二极管（110）发射的红外光通过光传输装置（108）传输到光学定位板（106）。 光学定位板（106）将单个激光二极管（110）的发射与由非球面透镜（102）准直的单个红外光束组合。

公开(公告)号：US20020074516A1

公开(公告)日：2002-06-20

申请号：US09796641

申请日：2001-03-02

Inventor： W. Thomas Novak ,  Michael Kovalerchik

IPC: G01J001/00 ,  G01N021/00 ,  G01N023/00

CPC classification number: H01L21/68 ,  G03F7/70716 ,  H01J2237/20278 ,  H01J2237/3175

Abstract: A stage positioning system including a stationary frame, a slide movable relative to the frame in a first direction, and a support platform connected to the slide and movable therewith in the first direction. The support platform is movably attached to the slide for movement in a second direction generally orthogonal to the first direction. The system will further include a first linear motor containing a first magnet assembly and a first coil device that engages the first magnet assembly to move the slide in the first direction. A second linear will contain a second magnet assembly and a second coil device that engages the second magnet assembly to move the support platform in the second direction. The stage positioning system is particularly suited for positioning an article in electron beam or EUV light lithography systems.

Abstract translation: 一种舞台定位系统，包括固定框架，可沿第一方向相对于框架移动的滑块，以及连接到滑块并沿第一方向可移动的支撑平台。 支撑平台可移动地附接到滑动件，用于沿大致垂直于第一方向的第二方向移动。 该系统还将包括第一线性电动机，其包含第一磁体组件和接合第一磁体组件以沿第一方向移动滑块的第一线圈装置。 第二线性将包含接合第二磁体组件以在第二方向上移动支撑平台的第二磁体组件和第二线圈装置。 舞台定位系统特别适用于将物品定位在电子束或EUV光刻系统中。

公开(公告)号：US20020070359A1

公开(公告)日：2002-06-13

申请号：US09804250

申请日：2001-03-13

Inventor： Yutaka Kai ,  Hideyuki Miyata

IPC: G01J001/00

CPC classification number: H04B10/572 ,  H01S5/026 ,  H01S5/06837 ,  H01S5/0687 ,  H01S5/12 ,  H01S5/4025 ,  H01S5/4031 ,  H01S5/4087 ,  H04B10/503

Abstract: Disclosed herein is a light source device and a wavelength control device therefor. The light source device includes a plurality of laser diodes, a temperature sensor provided in the vicinity of the plurality of laser diodes, a control loop for controlling the temperatures of the plurality of laser diodes according to an output from the temperature sensor to thereby control the oscillation wavelengths of the plurality of laser diodes, and a unit for compensating temperature control conditions for the laser diodes other than a reference laser diode selected from the plurality of laser diodes, according to a change in temperature control condition for the reference laser diode. By the compensation of the temperature control conditions, the oscillation wavelength of each laser diode can be easily stabilized to each wavelength channel of WDM.

Abstract translation: 本文公开了一种光源装置及其波长控制装置。 光源装置包括多个激光二极管，设置在多个激光二极管附近的温度传感器，用于根据温度传感器的输出控制多个激光二极管的温度的控制回路，从而控制 多个激光二极管的振荡波长，以及用于补偿从多个激光二极管中选择的参考激光二极管以外的激光二极管的温度控制条件的单元，根据参考激光二极管的温度控制条件的变化。 通过温度控制条件的补偿，每个激光二极管的振荡波长可以容易地稳定到WDM的每个波长通道。

公开(公告)号：US20010045524A1

公开(公告)日：2001-11-29

申请号：US09451856

申请日：1999-12-01

Inventor： HIROSHI FUDOJI ,  TAKESHI KONNO ,  MITSURU EGASHIRA ,  MIKIHIKO KOBAYASHI ,  NORIO SHINYA

IPC: G01J005/02 ,  G01J001/00 ,  G01N021/00 ,  G01N023/00

CPC classification number: H01L24/95 ,  H01L21/4853 ,  H01L25/50 ,  H01L2224/95145 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/0102 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01082 ,  H01L2924/12042 ,  H05K3/3478 ,  H01L2924/00

Abstract: A process for arranging a number of micro-bodies efficiently and precisely as one on one spot on a substrate. Charged spots are formed by a converging ion beam or the like on a substrate having an insulating property or the like, and micro-bodies having a size of 200 microns or less are attracted and stuck to the charged spots.

Abstract translation: 一种用于在基板上一个一个地高效且精确地布置多个微体的方法。 带电点由具有绝缘性等的基板上的会聚离子束等形成，并且具有200微米或更小尺寸的微体被吸引并粘附到带电点。

公开(公告)号：US20010045505A1

公开(公告)日：2001-11-29

申请号：US09774015

申请日：2001-01-31

Inventor： Masashi Morizane ,  Shihomi Nakatani ,  Yukihiro Yoshimine ,  Sadaji Tsuge

IPC: H01J040/00 ,  G01J001/00

CPC classification number: B32B17/10018 ,  B32B17/10 ,  B32B17/10788 ,  H01L31/048 ,  H01L31/049 ,  Y02E10/50 ,  B32B2367/00

Abstract: A solar cell module including a plurality of solar cell elements 1 sealed by EVA resin between a front surface glass 20 and a rear surface member 5 is provided with a sodium diffusion preventing layer of a PET film 6 of a smaller water vapor transmission rate than those of the EVA sheets 3, 4 interposed between the front surface glass 20 and the solar cell elements 1.

Abstract translation: 包括在前表面玻璃20和后表面构件5之间由EVA树脂密封的多个太阳能电池元件1的太阳能电池模块设置有比这些的更小的水蒸汽透过率的PET膜6的钠扩散防止层 插入在前表面玻璃20和太阳能电池元件1之间的EVA片材3,4。

公开(公告)号：US20040258204A1

公开(公告)日：2004-12-23

申请号：US10873796

申请日：2004-06-22

Inventor： Makoto Nokita ,  Osamu Tsujii

IPC: G01T001/24 ,  G01J001/00

CPC classification number: A61B6/585 ,  A61B6/00 ,  H04N5/32

Abstract: Since a notification unit (130) notifies a radiographer of the driving state of an X-ray detector (110), he/she can identify that the X-ray detector (110) is set in a detection signal accumulation state. When the irradiation button of an X-ray generation apparatus is then pressed, a subject can be irradiated with X-rays.

Abstract translation: 由于通知单元（130）向X射线检测器通知X射线检测器（110）的驱动状态，所以能够识别X射线检测器（110）被设定为检测信号累加状态。 然后，当按下X射线产生装置的照射按钮时，可以用X射线照射被摄体。

公开(公告)号：US20040251420A1

公开(公告)日：2004-12-16

申请号：US10866408

申请日：2004-06-12

Inventor： Xiao-Dong Sun

IPC: G01J001/00 ,  G01T001/24 ,  G01T001/20

CPC classification number: G01T1/2018 ,  G01T1/202

Abstract: Method, components, design and fabrication process of a advanced X-ray flat panel detector (FPD), with built-in anti-scattering grid to reduce the X-ray scattering are disclosed. We further disclose two methods in the new X-ray detector: In the first method, the grid is placed on top of X-ray scintillator layer of a FPD, the pixels of X-ray FPD underneath are aligned with the hole structures of anti-scatter grids. The high performance anti-scatter grid applied and aligned to the flat panel detector (FPD) pixel-by-pixel can significantly reduce the noise from the scattered X-rays. The key advantages of the improved art are substantial reduction of grid shadow, improved image contrast-to-noise ratio (CNR) and minimized attenuation of direct X-rays. The new FPD with built-in grid may significantly enhance X-ray imaging system performance for a FPD based digital detection system with high image quality, high throughput and low cost for many X-ray imaging applications. In the second method, the grid may be fully or partially filled with X-ray scintillators and the combined sensor plate can be applied as X-ray sensor on a FPD. This plate integrates X-ray scintillator with anti-scatter grid. Using this scintillator plate on FPD, the key X-ray detector performances, such as image contrast-to-noise ratio (CNR), modulation transfer function (MTF), and detective quantum efficiency (DQE) may be improved significantly. The design of the detector plate allows flexible choices of the various scintillators to meet specific requirements of an X-ray imaging system, without sacrificing the detector performances such as the scattering X-ray rejection and MTF.

Abstract translation: 公开了先进的X射线平板检测器（FPD）的方法，部件，设计和制造工艺，内置防散射栅格以减少X射线散射。 我们在新的X射线检测器中进一步披露了两种方法：第一种方法是将栅格放置在FPD的X射线闪烁体层的顶部，X射线FPD下面的像素与反射镜的孔结构对齐 散射网格 逐像素应用和对准平板检测器（FPD）的高性能防散射栅极可以显着降低散射X射线的噪声。 改进的艺术的关键优点是大大减少了网格阴影，改善了图像对比噪声比（CNR）和最小化的直接X射线衰减。 具有内置网格的新型FPD可以显着增强基于FPD的数字检测系统的X射线成像系统性能，具有高图像质量，高吞吐量和低成本的X射线成像应用。 在第二种方法中，栅格可以用X射线闪烁体完全或部分地填充，并且组合的传感器板可以作为X射线传感器应用于FPD。 该板将X射线闪烁体与防散射网格集成。 在FPD上使用闪烁体板，可以显着提高关键的X射线检测器性能，如图像对比噪声比（CNR），调制传递函数（MTF）和检测量子效率（DQE）。 检测器板的设计允许各种闪烁体的灵活选择以满足X射线成像系统的特定要求，而不牺牲检测器性能，例如散射X射线抑制和MTF。

公开(公告)号：US20040200975A1

公开(公告)日：2004-10-14

申请号：US10412215

申请日：2003-04-14

Inventor： Dale Marius Brown ,  Kevin Matocha ,  Peter Micah Sandvik ,  Leo Lombardo

IPC: G01J001/00

CPC classification number: H01L31/103 ,  C02F2201/326 ,  G01J1/429 ,  G02B5/208 ,  H01L31/02164 ,  H01L31/0312

Abstract: An ultraviolet sensor monitors an effectiveness of ultraviolet lamps used in sterilization systems. The sensor includes an ultraviolet photodetector and a filter cooperating therewith configured for detecting light at wavelengths between 200-300 nm. A purification system for air or water utilizes the sensor in conjunction with an ultraviolet lamp directing ultraviolet light toward the air or water.

Abstract translation: 紫外线传感器监测灭菌系统中使用的紫外线灯的有效性。 该传感器包括一个紫外光电探测器和一个与之相配合的滤波器，用于检测波长在200-300nm之间的光。 用于空气或水的净化系统利用传感器与紫外线灯相结合，将紫外线指向空气或水。

公开(公告)号：US20040195529A1

公开(公告)日：2004-10-07

申请号：US10788609

申请日：2004-02-27

Inventor： Guido Hergenhan ,  Christian Ziener ,  Kai Gaebel

IPC: G01J001/00

CPC classification number: H05G2/003 ,  G01J1/429 ,  H05G2/008

Abstract: The invention is directed to an arrangement for stabilizing the radiation emission of a plasma, particularly for generating extreme ultraviolet (EUV) radiation. The object of the invention, to find a novel possibility for generating short-wavelength radiation which is stable over time from a plasma generated by energy input into a target jet, in which intensity variations due to altered coupling of excitation radiation into the target jet are minimized, is met according to the invention in that measuring devices are provided for successive detection over time of deviations of at least one of the directions of the target jet or the energy beam from an intersection point of the two directions that is provided as an interaction point, wherein the measuring devices have output signals which are suitable as regulating variables for the orientation of the directions on the interaction point, and actuating elements are provided for adjusting and tracking at least one of the directions of either the target jet or the energy beam depending on the output signal of the measuring devices in the manner of a control loop.

Abstract translation: 本发明涉及用于稳定等离子体的辐射发射，特别是用于产生极紫外（EUV）辐射的装置。 本发明的目的是找到一种新颖的产生短波长辐射的可能性，其中从由能量输入到目标射流中的能量输入产生的等离子体在时间上是稳定的，其中由激发辐射耦合到目标射流引起的强度变化是 根据本发明，满足了最小化，因为测量装置被提供用于随着目标射流或能量束的至少一个方向的偏离的时间的连续检测，来自作为相互作用提供的两个方向的交点 点，其中测量装置具有适于作为相互作用点上的方向的取向的调节变量的输出信号，并且提供致动元件用于调整和跟踪目标射流或能量束的至少一个方向 取决于测量装置的输出信号以控制回路的方式。