公开(公告)号：US3452192A

公开(公告)日：1969-06-24

申请号：US3452192D

申请日：1965-02-18

Applicant: INDUSTRIAL NUCLEONICS CORP

Inventor： HANKEN ALBERT F G

IPC: G01N9/24 ,  G01N23/08 ,  G01N23/12 ,  H01J39/00

CPC classification number: G01N23/083 ,  G01N9/24

公开(公告)号：US3448283A

公开(公告)日：1969-06-03

申请号：US3448283D

申请日：1965-04-28

Applicant: LEEDS & NORTHRUP CO

Inventor： HIGLEY JOSEPH B ,  ROBERTSON DONALD ,  SCHROYER FRANKLIN K

IPC: G01J5/02 ,  G01J5/28 ,  G01J5/60 ,  G01K7/22 ,  G01J3/50 ,  H01J39/00

CPC classification number: G01J5/28 ,  G01J5/602

公开(公告)号：US3431413A

公开(公告)日：1969-03-04

申请号：US3431413D

申请日：1966-11-10

Applicant: ATOMIC ENERGY COMMISSION

Inventor： ANDERSON JESSE I ,  OLSEN DALE G

IPC: A61B6/04 ,  G01T1/163 ,  G01T1/166 ,  G01T1/16 ,  H01J39/00

CPC classification number: A61B6/0457 ,  A61B6/037 ,  G01T1/163 ,  G01T1/1635 ,  G01T1/166

公开(公告)号：US5814823A

公开(公告)日：1998-09-29

申请号：US900379

申请日：1997-07-12

Applicant: Victor M. Benveniste

Inventor： Victor M. Benveniste

IPC: G01T1/29 ,  H01J37/244 ,  H01J37/317 ,  H01J47/00 ,  H01J39/00

CPC classification number: H01J37/244 ,  H01J2237/31703

Abstract: An improved neutral particle detector (52) for an ion implantation system (10) is provided for detecting the neutral particle content of an ion beam (28) which is comprised primarily of neutral particles and positively charged ions. The neutral particle detector (52) comprises (i) a deflector plate (78) residing at a negative electrical potential; (ii) a first collecting electrode (82) residing at a positive electrical potential with respect to said deflector plate (78) for collecting secondary electrons emitted by the deflector plate (78) as a result of neutral particles in the ion beam impacting the deflector plate (78); and (iii) a second collecting electrode (84) residing at a positive electrical potential with respect to said deflector plate (78) for collecting secondary electrons emitted by the deflector plate (78) as a result of positively charged ions in the ion beam impacting the deflector plate (78). The deflector plate (78) and the collecting electrodes (82, 84) are separated by a distance through which the ion beam passes. The neutral particle detector (52) determines the neutral particle fraction of the ion beam independent of the composition or pressure of the residual background gas through which the ion beam propagates.

Abstract translation: 提供用于离子注入系统（10）的改进的中性粒子检测器（52），用于检测主要由中性粒子和带正电离子组成的离子束（28）的中性粒子含量。 中性粒子检测器（52）包括（i）位于负电位的偏转板（78）; （ii）相对于所述偏转板（78）位于正电位的第一收集电极（82），用于收集偏转板（78）发射的二次电子，这是由于离子束中的中性粒子撞击偏转器 板（78）; 和（iii）相对于所述偏转板（78）位于正电位的第二集电电极（84），用于收集由所述偏转板（78）发射的二次电子，这是由于离子束中的带正电荷的离子冲击 偏转板（78）。 偏转板（78）和收集电极（82,84）分离离子束通过的距离。 中性粒子检测器（52）确定离子束的中性粒子分数，与离子束传播的残留背景气体的组成或压力无关。

公开(公告)号：US5369274A

公开(公告)日：1994-11-29

申请号：US623930

申请日：1991-02-11

Applicant: Wilhelm Brunger

Inventor： Wilhelm Brunger

IPC: G01N23/227 ,  G01Q30/02 ,  G01Q30/20 ,  H01J37/252 ,  H01J39/00

CPC classification number: G01N23/2273 ,  H01J37/252

Abstract: A commercially available Auger apparatus is developed in such a manner thatt is suitable for carrying out a high-resolution x-ray photoelectron spectroscopy. As a result, the stress to the material is low while the resolution capacity is high. The primary electron beam of an Auger probe impinges on the rear surface of the membrane and induces an x-ray radiation. This x-ray radiations triggers photoelectrons from the membrane surface which are used for the analysis of the uppermost atom layers of the surface. By means of a sample holder, which is designed as a Faraday cage, the electrons are kept back which are emitted from the rear surface of the membrane. The method is suitable for examining very fine structures in the .mu.- and sub-.mu.-range.

Abstract translation: PCT No.PCT / DE89 / 00398 Sec。 371日期1991年2月11日 102（e）日期1991年2月11日PCT提交1989年6月16日PCT公布。 WO89 / 12818 PCT公开号 日期为1989年12月28日。市售的俄歇仪器以适于进行高分辨率X射线光电子能谱的方式开发。 结果，材料的应力低，而分辨率高。 俄歇探针的一次电子束撞击膜的后表面并诱导X射线辐射。 这种X射线辐射从膜表面触发用于分析表面最上层原子层的光电子。 通过设计为法拉第笼的样品保持器，电子被保持回来，其从膜的后表面发射。 该方法适用于检测微量和微量级的非常精细的结构。

公开(公告)号：US4407857A

公开(公告)日：1983-10-04

申请号：US279182

申请日：1981-06-30

Applicant: Gilbert N. Butterwick

Inventor： Gilbert N. Butterwick

IPC: H01J9/12 ,  H01J39/00

CPC classification number: H01J9/12

Abstract: A method is provided for making a lithium-sodium-antimony photocathode including the step of forming a base layer including antimony on a substrate. Sodium is then deposited onto the base layer at an elevated temperature to a first peak value of responsivity, thereby forming a sodium-antimony surface. Next, at room temperature, lithium is deposited onto the substrate containing the sodium-antimony surface until the lithium-sodium-antimony photocathode develops a hazy brown color. The photocathode is sensitized by heating the substrate to an elevated temperature until a second peak value of responsivity, greater than the first peak value, is obtained. Antimony, sodium and lithium are then alternately deposited on the photocathode in order to stabilize the second responsivity peak.

Abstract translation: 提供了一种制备锂 - 钠 - 锑光电阴极的方法，包括在基板上形成包括锑的基层的步骤。 然后将钠在升高的温度下沉积到基底层上，达到响应度的第一峰值，从而形成钠 - 锑表面。 接着，在室温下，将锂沉积在含有钠 - 锑表面的基材上，直至锂 - 锑 - 锑光电阴极形成浑浊的棕色。 光电阴极通过将衬底加热到​​升高的温度而变得敏感，直到获得大于第一峰值的响应度的第二峰值。 然后将锑，钠和锂交替沉积在光电阴极上，以稳定第二响应峰。

公开(公告)号：US4249074A

公开(公告)日：1981-02-03

申请号：US913253

申请日：1978-06-06

Applicant: John F. Zettler ,  Harold F. Twyman

Inventor： John F. Zettler ,  Harold F. Twyman

IPC: F16P3/14 ,  G01V8/20 ,  H01J39/00

CPC classification number: G01V8/20 ,  F16P3/14 ,  F16P3/144

Abstract: An intrusion detection system is disclosed for safeguarding an operator of an industrial machine such as a press brake. A light screen barrier (420) comprises sequentially pulsed beams (422) which are spaced far enough apart to permit penetration by a work piece (144) without obstructing more than one beam whereas penetration by the operator's hand will obstruct at least two adjacent, successively pulsed beams. A pulse train of regularly spaced signal pulses (BRS) with each pulse corresponding to a light beam is produced when none of the light beams are obstructed. A missing pulse detector (600, 40') with a logic circuit (502) produces a control signal for stopping the machine only when two or more adjacent light beams are obstructed causing two or more successive missing pulses in the pulse train.

Abstract translation: 公开了一种入侵检测系统，用于保护诸如压力机的工业机器的操作者。 光屏障（420）包括顺序地脉冲的光束（422），其间隔足够远以允许工件（144）穿透而不会阻塞多于一个光束，而操作者的手的穿透将阻塞至少两个相邻的，连续的 脉冲束。 当没有光束被阻挡时，产生具有对应于光束的每个脉冲的规则间隔信号脉冲（BRS）的脉冲串。 具有逻辑电路（502）的丢失脉冲检测器（600,40'）仅在两个或更多个相邻光束被阻塞时产生用于停止机器的控制信号，从而导致脉冲串中的两个或更多个连续的丢失脉冲。

公开(公告)号：US4224518A

公开(公告)日：1980-09-23

申请号：US972192

申请日：1978-12-21

Applicant: Norman J. Taylor

Inventor： Norman J. Taylor

IPC: G01Q30/02 ,  G01Q30/06 ,  H01J49/06 ,  H01J49/48 ,  H01J39/00

CPC classification number: H01J49/06 ,  H01J49/482

Abstract: A multi-stage cylindrical mirror analyzer incorporates a primary radiation source, such as an electron gun, disposed internally and along the axis of the multi-stage analyzer. The gun includes all of the optical elements for producing a well defined beam, correcting aberration thereof and scanning the beam on a sample. The components of the gun are distributed along the axial length of the analyzer. Aberration of the scanned beam due to traversal of a subsequent lense is minimized by placing the pivot point of the deflected beam trajectory substantially at the center of the lense. The greater dispersion of the multi-stage analyzer and the unit magnification thereof permit proportionately greater exit aperture dimensions, whereby a wider field of view may be realized.

Abstract translation: 多级柱面镜分析仪包含一个主辐射源，例如电子枪，内置并沿着多级分析仪的轴线。 枪包括用于产生明确定义的光束的所有光学元件，校正其像差并扫描样品上的光束。 枪的组件沿分析仪的轴向长度分布。 通过将偏转的光束轨迹的枢转点基本上位于透镜的中心，由于穿过随后的透镜而使扫描光束的偏移最小化。 多级分析仪的分散度越大，单元放大倍率越大，出口孔尺寸越大，可以实现更宽的视野。

公开(公告)号：US4208581A

公开(公告)日：1980-06-17

申请号：US849900

申请日：1977-11-09

Applicant: Masao Kaneko

Inventor： Masao Kaneko

IPC: G01B15/02 ,  G01N23/16 ,  G01N23/223 ,  G01Q30/00 ,  G01Q40/00 ,  G01T1/16 ,  H01J39/00

CPC classification number: G01N23/16

Abstract: In a radioactive ray gauge system, a measuring head continuously detects the thickness of coated material on an advancing sheet. The head has a non-contact type sheet surface-to-head distance detector thereon. The distance detector continuously detects the distance so as to maintain the distance constant thereby eliminating error in the thickness measurement caused by sheet thickness variation, sheet-bending, warping or fluttering.

Abstract translation: 在放射性射线计系统中，测量头连续地检测在前进片上的涂覆材料的厚度。 头部具有非接触型片材对地距离检测器。 距离检测器连续地检测距离，以便保持距离恒定，从而消除由板厚变化，弯曲，翘曲或飘动引起的厚度测量误差。

公开(公告)号：US4179604A

公开(公告)日：1979-12-18

申请号：US946986

申请日：1978-09-29

Applicant: Aristos Christou

Inventor： Aristos Christou

IPC: G01Q20/00 ,  G01Q30/02 ,  G01T1/20 ,  H01J37/244 ,  H01J39/00

CPC classification number: G01T1/20 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/24507 ,  H01J2237/24585

Abstract: In a scanning electron beam system wherein a primary beam of electrons is anned over the surface of a specimen and electron images are generated by collecting electrons scattered from the surface, an improved electron collector for selectively collecting the primary electrons that have suffered low loss in being scattered by the surface. Three symmetrically shaped mesh grids are arranged in front of a scintillator in the path of the backscattered electrons. The grids are disposed relative to each other and biased so that the electric fields permit passage of electrons within a narrow energy range. The scintillator is coated with a layer of tantalum and a layer of gold to provide thermal stability and resistance to damage from bombardment by high-energy electrons.

Abstract translation: 在扫描电子束系统中，电子的主光束被扫描在试样的表面上，并且通过收集从表面散射的电子产生电子图像，改进的电子收集器用于选择性地收集已经遭受低损耗的一次电子 被表面散落 在后向散射电子的路径中，三个对称形网格布置在闪烁体的前面。 栅极相对于彼此设置并且被偏置，使得电场允许电子在窄能量范围内通过。 闪烁体涂有一层钽和一层金，以提供热稳定性和抵抗高能电子轰击造成的损伤。