Thin film capacitor with an improved top electrode and method of forming the same
    101.
    发明授权
    Thin film capacitor with an improved top electrode and method of forming the same 有权
    具有改进的顶电极的薄膜电容器及其形成方法

    公开(公告)号:US06291290B1

    公开(公告)日:2001-09-18

    申请号:US09257254

    申请日:1999-02-25

    申请人: Koji Arita

    发明人: Koji Arita

    IPC分类号: H01L2120

    CPC分类号: H01L28/75 H01L28/55

    摘要: A method of making a top electrode for a thin film capacitor with a multi-layer structure that includes a high dielectric oxide layer, a first conductive layer on the high dielectric oxide layer and having a high formability to a reactive ion etching, and a second conductive layer on the first conductive layer, the second conductive layer having a high formability to the reactive ion etching. The first conductive layer is deposited with a lower deposition rate than the second conductive layer. An interface between the first conductive layer and the high dielectric oxide layer is such that a density of a leak current across the interface is suppressed at not higher than 1×10−8 A/cm2 upon applying a voltage of 2V across the dielectric oxide layer after the multi-layer structure has been subjected to a heat treatment at 350° C.

    摘要翻译: 一种制造具有多层结构的薄膜电容器的顶部电极的方法,所述多层结构包括高电介质氧化物层,高电介质氧化物层上的第一导电层和对反应离子蚀刻具有高可成形性的方法,以及第二 导电层,第二导电层对反应离子蚀刻具有高成形性。 以比第二导电层更低的沉积速率沉积第一导电层。 第一导电层和高电介质氧化物层之间的界面使得跨越界面的漏电流的密度被抑制在不高于1×10 -8 A / cm 2的电压下,在电介质氧化物层之后施加2V的电压 多层结构已经在350℃进行热处理

    Ferroelectric flat panel displays
    102.
    发明授权
    Ferroelectric flat panel displays 失效
    铁电平板显示屏

    公开(公告)号:US06198225B1

    公开(公告)日:2001-03-06

    申请号:US09326838

    申请日:1999-06-07

    IPC分类号: G09G310

    摘要: A thin film of ferroelectric layered superlattice material in a flat panel display device is energized to selectively influence the display image. In one embodiment, a voltage pulse causes the layered superlattice material to emit electrons that impinge upon a phosphor, causing the phosphor to emit light. In another embodiment, an electric potential creates a remanent polarization in the layered superlattice material, which exerts an electric field in liquid crystal layer, thereby influencing the transmissivity of light through the liquid crystal. The layered superlattice material is a metal oxide formed using an inventive liquid precursor containing an alkoxycarboxylate. The thin film thickness is preferably in the range 50-140 nm, so that polarizabilty and transparency of the thin film is enhanced. A display element may comprise a varistor device to prevent cross-talk between pixels and to enable sudden polarization switching. A functional gradient in the ferroelectric thin film enhances electron emission. Two ferroelectric elements, one on either side of the phosphor may be used to enhance luminescence. A phosphor can be sandwiched between a dielectric and a ferroelectric to enhance emission.

    摘要翻译: 平板显示装置中的铁电层状超晶格材料薄膜被通电以选择性地影响显示图像。 在一个实施例中,电压脉冲使得层状超晶格材料发射撞击磷光体的电子,导致磷光体发光。 在另一个实施例中,电位在层状超晶格材料中产生剩余极化,其在液晶层中施加电场,从而影响透过液晶的透射率。 层状超晶格材料是使用本发明的含有烷氧基羧酸盐的液体前体形成的金属氧化物。 薄膜厚度优选在50-140nm的范围内,从而提高薄膜的极化性和透明度。 显示元件可以包括用于防止像素之间的串扰并允许突发极化切换的变阻器装置。 铁电薄膜中的功能梯度增强了电子发射。 可以使用两个铁电元件,一个在荧光体的两侧,以增强发光。 荧光体可以夹在电介质和铁电体之间以增强发射。

    Temperature distribution measuring device and measuring method
    104.
    发明授权
    Temperature distribution measuring device and measuring method 失效
    温度分布测量装置及测量方法

    公开(公告)号:US5660471A

    公开(公告)日:1997-08-26

    申请号:US199794

    申请日:1994-02-22

    摘要: A temperature distribution measuring device has a turnable sensor head section 1 in which a plurality of detecting sections are arranged, a shaft 2 to which the sensor head section 1 is mounted so that the array direction of the detecting sections is inclined to the axis of rotation thereof, a rotation driving motor for rotating the shaft 2, control circuit 8 for controlling the direction and speed of rotation of the rotation driving section 3, and an umbrella-shaped chopping member for intermittently blocking incident infrared beams. The device has high spatial resolution and can offer temperature resolution at low cost.

    摘要翻译: 温度分布测量装置具有安装有多个检测部的可转动传感器头部1,安装有传感器头部1的轴2,使得检测部的排列方向相对于旋转轴倾斜 用于旋转轴2的旋转驱动电机,用于控制旋转驱动部分3的旋转方向和速度的控制电路8以及用于间歇地阻挡入射的红外光束的伞形切割部件。 该器件具有高空间分辨率,可以低成本提供温度分辨率。

    Temperature distribution measurement apparatus
    105.
    发明授权
    Temperature distribution measurement apparatus 失效
    温度分布测量装置

    公开(公告)号:US5567052A

    公开(公告)日:1996-10-22

    申请号:US372855

    申请日:1995-01-13

    摘要: A temperature distribution measurement apparatus has an infrared array sensor that comprises a pyroelectric substrate with infrared ray detecting electrodes, a focusing member comprising an infrared lens for focusing incident infrared rays on the infrared array sensor, a cylindrical chopping member for intermittently shielding incident infrared rays from the plurality of detector elements and a driving member for continuously rotating a rotating member which includes the infrared array sensor. The temperature distribution measurement apparatus combined with computational means and detector means is applied to determine number, position, and movements of persons in a space.

    摘要翻译: 温度分布测量装置具有红外阵列传感器,该红外阵列传感器包括具有红外线检测电极的热电基片,聚焦部件,包括用于将入射红外线聚焦在红外阵列传感器上的红外透镜,用于间断地屏蔽入射红外线的圆柱形切片部件 所述多个检测器元件和用于连续旋转包括所述红外阵列传感器的旋转部件的驱动部件。 应用与计算装置和检测器装置结合的温度分布测量装置来确定人员在空间中的数量,位置和移动。

    Air conditioner and heat pump with tetra fluoroethane-containing working
fluid
    106.
    发明授权
    Air conditioner and heat pump with tetra fluoroethane-containing working fluid 失效
    空调和热泵配四氟乙烷工作液

    公开(公告)号:US5438849A

    公开(公告)日:1995-08-08

    申请号:US305320

    申请日:1994-09-15

    IPC分类号: C09K5/04 F25B1/00

    CPC分类号: C09K5/045 C09K2205/22

    摘要: An air conditioner or heat pump containing a working fluid comprising tetrafluoroethane and at least two fluorinated hydrocarbons having a boiling point of not higher than -40.degree. C. under atmospheric pressure selected from the group consisting of methane derivatives and ethane derivatives which consist of one or two carbon atoms, hydrogen atoms and fluorine atoms, which has very small influence on the ozone layer in the stratosphere and is suitable as a substitute working fluid for chlorodifluoromethane.

    摘要翻译: 一种包含工作流体的空调或热泵,其包含四氟乙烷和至少两种沸点不高于-40℃的氟化烃,所述氟化烃在大气压下选自甲烷衍生物和乙烷衍生物,所述甲烷衍生物和乙烷衍生物由一个或多个 两个碳原子,氢原子和氟原子,对平流层臭氧层的影响非常小,适用于氯二氟甲烷的替代工作流体。

    Environmental control system and method
    107.
    发明授权
    Environmental control system and method 失效
    环境控制体系和方法

    公开(公告)号:US5299428A

    公开(公告)日:1994-04-05

    申请号:US39832

    申请日:1993-03-30

    摘要: An environmental control system comprises room temperature measurement apparatus, a plurality of thermal sensors fixed on a mattress over abed, a plurality of humidity sensors fixed on the mattress over the bed, an air conditioning unit for varying the room temperature, and a control circuit. The control circuit determines a thermal sensation of a sleeper from measured values by a plurality of thermal sensors , determines a perspiratory sensation of the sleeper from the measured values by a plurality of humidity sensors, and controls the air conditioning unit so as to let the temperature of the air in the vicinity of the bed be different from the room temperature by an amount prescribed by the combination of the room temperature value and the thermal and perspiratory sensation values, thus maintaining a comfortable condition in the bedroom and on the mattress.

    摘要翻译: 环境控制系统包括室温测量装置,固定在床垫上的多个热传感器,固定在床上的多个湿度传感器,用于改变室温的空调单元和控制电路。 控制电路通过多个热传感器从测量值确定睡眠者的热感觉,通过多个湿度传感器从测量值确定睡眠者的呼吸感觉,并且控制空调单元以使温度 在床附近的空气不同于室温通过室温值和热和呼吸感觉值的组合规定的量,从而在卧室和床垫上保持舒适的状态。

    Portable cooler using chemical reaction

    公开(公告)号:US5154067A

    公开(公告)日:1992-10-13

    申请号:US806332

    申请日:1991-12-13

    IPC分类号: F25D11/00 F25B17/08

    CPC分类号: F25B17/08

    摘要: A portable cooler for cooling an article by utilizing the endothermic and exothermic phenomenon pertaining to a chemical reaction is disclosed, in which an adsorbent and a working medium are sealed in a reaction chamber defined between an inner wall and an outer wall, a working medium retaining member is disposed on the inner wall inside the reaction chamber for holding therein the working medium, the working medium retaining member being spaced from the adsorbent disposed on the outer wall, and a heater is held in contact with the adsorbent for regenerating the same, at least a part of said outer wall constituting a heat radiating portion.