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公开(公告)号：US06217979B1
公开(公告)日：2001-04-17
申请号：US09085853
申请日：1998-05-27
IPC分类号： C04B3700
CPC分类号： C04B35/486 , C04B35/4885 , C04B35/6264 , C04B2235/3225 , C04B2235/6025 , H01L41/0973 , H01L41/314 , H04R17/08 , Y10T428/24273 , Y10T428/24322 , Y10T428/24331
摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.
摘要翻译： 公开了制造压电/电致伸缩薄膜元件的方法。 薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。 该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的 形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方 。
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公开(公告)号：US5958165A
公开(公告)日：1999-09-28
申请号：US891200
申请日：1997-07-10
CPC分类号： B32B18/00 , C04B35/63 , C04B35/6342 , C04B2235/656 , C04B2235/6567 , C04B2237/32 , C04B2237/343 , C04B2237/348 , C04B2237/62 , Y10T156/1056 , Y10T156/1057
摘要： A method of manufacturing a ceramic member composed of a thin plate having a plurality of fine through holes and a rigid plate integrally formed with the thin plate by firing. The thin plate is supported by the rigid plate at least at both sides of a portion where the plurality of fine through holes are formed. A minimum value of the size of the holes is 150 .mu.m or less, a thickness of the thin plate 7 is 100 .mu.m or less, and a minimum value of the interval between adjacent holes is 150 .mu.m or less. A tensile strength .sigma. of a green sheet for the thin plate is 10 kgf/cm.sup.2 or more and 200 kgf/cm.sup.2 or less. An elongation factor represented by the expression .DELTA.I.multidot.S/T, where .DELTA.I represents an amount (mm) of elongation at rupture; T, a tension (kgf) at rupture; and S, a cross section (mm.sup.2) of the green sheet for the thin plate, is 0.5 mm.sup.3 /kgf or more and 25.0 mm.sup.3 /kgf or less. An absolute value of the difference of pre-sintering temperature T.sub.50 between the green sheet for the thin plate and the green sheet for the rigid plate is 50.degree. C. or less, and an absolute value of the difference of firing shrinkage factor F therebetween is 1.5% or less. The green sheet for the thin plate having the plurality of fine through holes 1 formed by punching thereupon is laminated upon the rigid plate to form an integral laminate, and then fired.
摘要翻译： 一种制造陶瓷构件的方法，该陶瓷构件由具有多个细小通孔的薄板和通过烧制与薄板一体形成的刚性板构成。 至少在形成有多个细通孔的部分的两侧，该薄板由刚性板支撑。 孔的尺寸的最小值为150μm以下，薄板7的厚度为100μm以下，相邻孔之间的间隔的最小值为150μm以下。 薄板的生片的拉伸强度σ为10kgf / cm 2以上且200kgf / cm 2以下。 由表达式DELTA IxS / T表示的伸长系数，其中DELTA I表示断裂伸长量（mm）; T，断裂时的张力（kgf）; S为薄板用生片的截面积（mm2）为0.5mm 3 / kgf以上25.0mm 3 / kgf以下。 薄板的生片与刚性板的生片之间的预烧结温度T50的差的绝对值为50℃以下，烧成收缩率F的差绝对值为 1.5％以下。 具有通过冲压形成的多个细小通孔1的薄板的生片层压在刚性板上以形成整体层压体，然后烧制。
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公开(公告)号：US5955392A
公开(公告)日：1999-09-21
申请号：US858264
申请日：1997-05-19
IPC分类号： C04B35/111 , C04B35/486 , C04B35/622 , H01L21/48 , H01L23/15
CPC分类号： H01L21/4807 , C04B35/111 , C04B35/486 , C04B35/622 , C04B35/62218 , H01L23/15 , H01L2924/0002
摘要： A ceramic green sheet includes ceramic particles having a spherical diameter of 0.01-0.5 .mu.m of a primary particle as a ceramic component, an average degree of aggregation of 10 or less, wherein the ceramic green sheet contains at most 1 vol % of secondary particles having a diameter of 20 .mu.m or more and has a surface roughness (Ra) of 0.2 .mu.m or less. A method for producing a ceramic substrate having a thickness of 30 .mu.m or less includes the steps of: preparing a ceramic slurry by mixing a ceramic powder with an organic binder and at least one organic solvent, and adjusting a viscosity to be within the range of 100-10,000 mPa.s; removing coarse aggregated particles from the ceramic slurry; molding the ceramic slurry into a ceramic green sheet by a reverse roll coater method; and firing the ceramic green sheet so that an average crystal grain size be 2 .mu.m or less.
摘要翻译： 陶瓷生片包括作为陶瓷成分的一次粒子的球形直径为0.01-0.5μm，平均聚集度为10以下的陶瓷粒子，其中，陶瓷生片含有1体积％以下的二次粒子 其直径为20μm以上，表面粗糙度（Ra）为0.2μm以下。 制造厚度为30μm以下的陶瓷基板的方法包括以下步骤：通过将陶瓷粉末与有机粘合剂和至少一种有机溶剂混合制备陶瓷浆料，并将粘度调节在该范围内 100-10,000 mPa.s; 从陶瓷浆料中除去粗凝集颗粒; 通过反转涂布机将陶瓷浆料成型为陶瓷生片; 烧成陶瓷生片，使平均晶粒尺寸为2μm以下。
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公开(公告)号：US5895702A
公开(公告)日：1999-04-20
申请号：US891057
申请日：1997-07-10
CPC分类号： B32B18/00 , C04B37/001 , C04B2237/343 , C04B2237/348 , C04B2237/52 , C04B2237/62 , C04B2237/704 , C04B2237/86 , Y10T428/24322 , Y10T428/24331 , Y10T428/24967
摘要： A ceramic member includes a thin plate having a plurality of minute throughholes and a rigid plate supporting the thin plate. The area of the thin plate both ends of which are supported by the rigid plate has a part bent toward the rigid plate so that the line connecting the apexes of the bent part is a straight line, and minute throughholes are formed in the vicinity of the apexes of the bent part. Good adhesion between minute throughholes formed on the line connecting the apexes of the bent part and the drum and the like is obtained, and defective transfer can be prevented.
摘要翻译： 陶瓷构件包括具有多个微通孔的薄板和支撑薄板的刚性板。 其两端由刚性板支撑的薄板区域具有朝向刚性板弯曲的部分，使得连接弯曲部分的顶点的线是直线，并且在该附近形成微小的通孔 弯曲部分的顶点。 获得了在连接弯曲部分的顶点和滚筒等的线上形成的细小通孔之间的良好粘合性，并且可以防止有缺陷的转移。
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105.发明授权Piezoelectric/electrostrictive film element with a diaphram having at least one stress releasing end section 失效具有至少一个应力释放端部分的膜的压电/电致伸缩膜元件
公开(公告)号：US5889353A
公开(公告)日：1999-03-30
申请号：US965769
申请日：1997-11-07
CPC分类号： B41J2/1637 , B41J2/161 , B41J2/1623 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646 , H01L41/0973 , B41J2002/14387 , Y10T29/42
摘要： A piezoelectric and/or electrostrictive film element including a ceramic substrate, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between lower and upper electrodes. The substrate has a window closed by a diaphragm portion. The unit is disposed on the diaphragm portion such that at least one of the opposite ends of the unit is spaced apart from the edge of the window in a direction toward the center of the diaphragm portion. The end part of the diaphragm portion spaced apart from the edge of the window is upwardly convexed or downwardly concaved to provide a stress releasing section for effectively converting stresses generated in the piezoelectric or electrostrictive unit into displacement of the diaphragm portion. Also disclosed are methods for forming the stress releasing section by firing the unfired piezoelectric/electrostrictive layer formed on the diaphragm portion of the fired ceramic substrate.
摘要翻译： 一种包括陶瓷衬底的压电和/或电致伸缩膜元件，以及形成在衬底上并包括在下电极和上电极之间的压电或电致伸缩层的压电或电致伸缩单元。 基板具有由隔膜部分封闭的窗口。 单元设置在隔膜部分上，使得单元的相对端中的至少一个在朝向隔膜部分的中心的方向上与窗口的边缘间隔开。 与窗口边缘隔开的隔膜部分的端部向上凸起或向下凹入以提供应力释放部分，用于将压电或电致伸缩单元中产生的应力有效地转换成膜片部分的位移。 还公开了通过烧结形成在烧制的陶瓷衬底的隔膜部分上的未烧结的压电/电致伸缩层来形成应力释放部分的方法。
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公开(公告)号：US5853514A
公开(公告)日：1998-12-29
申请号：US716876
申请日：1996-09-20
IPC分类号： G01L1/16 , C04B35/49 , C04B35/493 , H01L41/09 , H01L41/22 , H04R17/00 , H04R17/08 , C04B37/00 , H01L41/08
CPC分类号： C04B35/486 , C04B35/4885 , C04B35/6264 , H01L41/0973 , H01L41/314 , C04B2235/3225 , C04B2235/6025 , H04R17/08 , Y10T428/24273 , Y10T428/24322 , Y10T428/24331
摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.
摘要翻译： 公开了制造压电/电致伸缩薄膜元件的方法。 薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。 该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的 形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方 。
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107.发明授权
公开(公告)号：US5600197A
公开(公告)日：1997-02-04
申请号：US365129
申请日：1994-12-28
CPC分类号： B41J2/1637 , B41J2/161 , B41J2/1623 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646 , H01L41/098 , H01L41/314 , H01L41/43 , B41J2002/14387 , H04R17/08 , Y10T29/42
摘要： A piezoelectric/electrostrictive film element which includes a ceramic substrate having at least one window and an integrally formed diaphragm portion for closing each window, and a piezoelectric/electrostrictive unit including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in this order on the diaphragm portion. The piezoelectric/electrostrictive layer consists of a dense body having a crystal grain size of not smaller than 0.7 .mu.m, and a porosity (x) of not greater than 15%, and the diaphragm portion has a deflection percentage (y) of 0-8%, which is a percentage of an amount of deflection of a central part of the diaphragm portion, with respect to a length of a shortest line which extends across the corresponding window and passes a center of the window. Further, the porosity (x) and the deflection percentage (y) satisfies the following formula: y.ltoreq.0.1167x.sup.2 -3.317x+25.5. Also disclosed are three methods for producing the piezoelectric/electrostrictive film element as described above.
摘要翻译： 一种压电/电致伸缩膜元件，包括具有至少一个窗口的陶瓷基板和用于封闭每个窗口的整体形成的隔膜部分，以及包括下电极，压电/电致伸缩层和上电极的压电/电致伸缩单元， 在隔膜部分上依次形成。 压电/电致伸缩层由具有不小于0.7μm的晶粒尺寸和孔隙率（x）不大于15％的致密体构成，并且隔膜部分的偏转百分比（y）为0- 相对于延伸穿过对应的窗口并通过窗口的中心的最短线的长度，其为膜片部分的中心部分的偏转量的百分比为8％。 此外，孔隙率（x）和偏转百分比（y）满足下式：y <= 0.1167x2-3.317x + 25.5。 还公开了如上所述的制造压电/电致伸缩膜元件的三种方法。
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公开(公告)号：US07474060B2
公开(公告)日：2009-01-06
申请号：US10919747
申请日：2004-08-16
IPC分类号： G09G3/10
CPC分类号： G09G3/22
摘要： A light source has a light emission section comprising a two-dimensional array of electron emitters and a drive circuit for applying a drive voltage to each of the electron emitters of the light emission section. The drive circuit applies the drive voltage between upper and lower electrodes of each of the electron emitters based on a control signal representative of turn-on/turn-off from an external source (a turn-on/turn-off switch or the like), for thereby controlling each of the electron emitters. Each of the electron emitters has a plate-like emitter, an upper electrode disposed on a face side of the emitter, and a lower electrode disposed on a reverse side of the emitter.
摘要翻译： 光源具有包括电子发射体的二维阵列的发光部和用于向发光部的各个电子发射体施加驱动电压的驱动电路。 驱动电路基于表示来自外部源（导通/关断开关等）的接通/断开的控制信号，在每个电子发射器的上下电极之间施加驱动电压， ，从而控制每个电子发射器。 每个电子发射器具有板状发射极，设置在发射极的正面侧的上部电极和设置在发射极背面的下部电极。
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公开(公告)号：US07141915B2
公开(公告)日：2006-11-28
申请号：US10896769
申请日：2004-07-22
IPC分类号： H01L41/08
CPC分类号： B81B3/0018 , B81B2201/032 , G02B26/0841 , G02B26/0858 , H01L41/0474 , H01L41/0973 , H04R17/005 , H04R2201/003
摘要： An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.
摘要翻译： 致动器装置具有驱动部，该驱动部具有布置在基板上的平面中的多个致动器，以及传递来自驱动部的致动器的驱动力的单个第一板部件。 多个间隔件设置在第一板构件和基板之间，形成m个单元。 每个致动器具有形成在基板上的空腔，振动部分和固定部分。 第一板构件的刚性大于致动器的振动部的刚性。
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公开(公告)号：US07129642B2
公开(公告)日：2006-10-31
申请号：US10459386
申请日：2003-06-11
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Iwao Ohwada
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Iwao Ohwada
IPC分类号： H01J11/04
摘要： An electron emitter has an emitter section formed on a substrate, and a cathode electrode and an anode electrode formed on a same surface of the emitter section. A slit is formed between the cathode electrode and the anode electrode. A drive voltage from a pulse generation source is applied between the cathode electrode and the anode electrode, and the anode electrode is connected to the ground. A collector electrode is provided above the emitter section at a position facing the slit. The collector electrode is connected to a bias voltage source through a resistor. The emitter section is made of a piezoelectric material.
摘要翻译： 电子发射体具有在基板上形成的发射极部分，以及形成在发射极部分的同一表面上的阴极电极和阳极电极。 在阴极电极和阳极电极之间形成狭缝。 来自脉冲发生源的驱动电压被施加在阴极电极和阳极电极之间，并且阳极电极连接到地面。 在与狭缝对置的位置处，在发射极部分的上方设置有集电极。 集电极通过电阻连接到偏置电压源。 发射极部分由压电材料制成。
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