摘要:
A defect-inspecting apparatus including an arrangement to convert detected light into a first signal corresponding to light illuminated by a high-angle illumination optical system and/or a second signal corresponding to light illuminated by a low-angle illumination optical system; and a classification unit which utilizes the first and second signal and classifies defects on the object to be inspected, wherein a defect size is estimated by changing a correction coefficient of the defect size on a basis of a concave-convex level (b/a), where the concave-convex level (b/a) of a defect is indicated by a ratio of a size b of a first direction of the defect to a size a of a second direction of the defect, where the second direction is lateral to the first direction.
摘要:
As forcible modulation parameters, a cycle and an amplitude are set so that O2 and CO concentrations in emissions at a catalyst inlet can be increased, and based upon the preset parameters, forcible modulation that forcibly fluctuates an exhaust air-fuel ratio is carried out to facilitate catalysis for early activation, and the forcible modulation is then switched to O2-F/B control.
摘要:
An FTI structure is employed in an isolation region making contact in a Y direction with a P-type impurity region serving as a drain region of a PMOS transistor. First, second and third N-type impurity layers serving as body regions are connected to a high potential line via fourth, fifth and sixth N-type impurity layers, respectively, and further via a seventh N-type impurity layer. The fourth to sixth N-type impurity layers are provided between an insulating layer of an SOI substrate and an element isolation insulating film in a PTI region.
摘要:
An optical information recording medium, comprising on a substrate a recording layer containing a dye compound having a specific structure. An optical information recording method, comprising recording information on the optical information recording medium by irradiation with laser light of a wavelength of 550 or shorter or 440 nm or shorter.
摘要:
In a spark plug composed of a center electrode and an earth electrode, at least one of confronting portions of the center electrode and the earth electrode which are in opposed relation to each other is constructed with a noble metal chip containing Pt as a principal component. The noble metal chip is joined to an electrode base material of the center electrode or the earth electrode and is made of an alloy comprising Pt and another element. In this noble metal chip, Pt is contained as a first component, while Re is contained as a second component. The employment of this noble metal chip enables suppressing the growth of platinum balls even in a high-temperature atmosphere.
摘要:
A relay long in service life aiming at higher reliability and lower cost is achieved by use of a technology of microelectromechanical•systems. The relay comprises a flow path having narrow chokes and wide chokes, formed by bonding two insulating members together, a plurality of liquid chambers formed by partitioning the flow path with the narrow chokes and the wide chokes, a plurality of electrodes disposed at the plurality of the liquid chambers, respectively, first and second gas chambers disposed so as to communicate with respective ends of the flow path, a gas sealed in the first and second gas chambers, respectively, heating means for heating the gas, and holes defined in one of the insulating members, communicating with the flow path, respectively, wherein a conductive fluid is introduced into the flow path through respective inlet ports of the holes, and the respective inlet ports are sealed.
摘要:
Herein disclosed is a shaft sealing apparatus which comprises a vacuum casing formed with a vacuum chamber, a driving shaft having an outer cylindrical surface and movably extending in the vacuum chamber of the vacuum casing, and a sealing ring in the form of an annular ring shape and including a sealing lip held in contact with the outer cylindrical surface of the driving shaft, an annular spring member operative to impart a force to the sealing lip to ensure that the sealing lip is held in tight contact with the outer cylindrical surface of the driving shaft, and a peripheral portion radially outwardly extending from the sealing lip, in which the outer cylindrical surface of the driving shaft is smaller in surface roughness Ra than 0.1 (μm).
摘要:
Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.
摘要:
A workflow server is provided with, in association with a user management table 100 for managing work items for each user, a list 130 of substitute users for indicating a substitute user for each work or process and a list 140 of users in charge who designates the user as a substitute. When a client terminal user selects a specific user among the users in charge on the list 130, the workflow server checks the power of substitute by referring to the list 140 of substitute users for the selected user, thereby to allow the client terminal user to process a predesignated unprocessed work item instead of the selected user in charge.
摘要:
Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.