Apparatus and method for inspecting defects
    111.
    发明授权
    Apparatus and method for inspecting defects 失效
    用于检查缺陷的装置和方法

    公开(公告)号:US07511806B2

    公开(公告)日:2009-03-31

    申请号:US11931120

    申请日:2007-10-31

    IPC分类号: G01N21/00

    CPC分类号: G01N21/9501

    摘要: A defect-inspecting apparatus including an arrangement to convert detected light into a first signal corresponding to light illuminated by a high-angle illumination optical system and/or a second signal corresponding to light illuminated by a low-angle illumination optical system; and a classification unit which utilizes the first and second signal and classifies defects on the object to be inspected, wherein a defect size is estimated by changing a correction coefficient of the defect size on a basis of a concave-convex level (b/a), where the concave-convex level (b/a) of a defect is indicated by a ratio of a size b of a first direction of the defect to a size a of a second direction of the defect, where the second direction is lateral to the first direction.

    摘要翻译: 一种缺陷检查装置,包括将检测到的光转换成对应于由高角度照明光学系统照射的光的第一信号和/或对应于由低角度照明光学系统照射的光的第二信号的装置; 以及分类单元,其利用所述第一信号和所述第二信号并对所检查的物体进行缺陷分类,其中通过基于凹凸水平(b / a)改变所述缺陷尺寸的校正系数来估计缺陷尺寸, 其中缺陷的凹凸级(b / a)由缺陷的第一方向的尺寸b与缺陷的第二方向的尺寸a的比值表示,其中第二方向与第 第一个方向。

    Exhaust emission control device of an internal combustion engine
    112.
    发明申请
    Exhaust emission control device of an internal combustion engine 审中-公开
    内燃机的废气排放控制装置

    公开(公告)号:US20080276920A1

    公开(公告)日:2008-11-13

    申请号:US11907915

    申请日:2007-10-18

    IPC分类号: F02D41/00

    摘要: As forcible modulation parameters, a cycle and an amplitude are set so that O2 and CO concentrations in emissions at a catalyst inlet can be increased, and based upon the preset parameters, forcible modulation that forcibly fluctuates an exhaust air-fuel ratio is carried out to facilitate catalysis for early activation, and the forcible modulation is then switched to O2-F/B control.

    摘要翻译: 作为强制调制参数,设定循环和振幅,使得在催化剂入口处的排放物中的O 2和CO浓度可以增加,并且基于预设参数,强制调制强制使排气 进行空燃比以促进早期激活的催化,然后将强制调制切换到O 2 -F / B控制。

    Spark plug with improved noble metal chip
    115.
    发明授权
    Spark plug with improved noble metal chip 有权
    火花塞与改进的贵金属芯片

    公开(公告)号:US07221078B2

    公开(公告)日:2007-05-22

    申请号:US10854365

    申请日:2004-05-27

    申请人: Tetsuya Watanabe

    发明人: Tetsuya Watanabe

    IPC分类号: H01T13/20

    CPC分类号: H01T13/39 Y02E20/14

    摘要: In a spark plug composed of a center electrode and an earth electrode, at least one of confronting portions of the center electrode and the earth electrode which are in opposed relation to each other is constructed with a noble metal chip containing Pt as a principal component. The noble metal chip is joined to an electrode base material of the center electrode or the earth electrode and is made of an alloy comprising Pt and another element. In this noble metal chip, Pt is contained as a first component, while Re is contained as a second component. The employment of this noble metal chip enables suppressing the growth of platinum balls even in a high-temperature atmosphere.

    摘要翻译: 在由中心电极和接地电极构成的火花塞中,中心电极和接地电极的彼此相对的相对部分中的至少一个由以Pt为主要成分的贵金属芯片构成。 贵金属芯片与中心电极或接地电极的电极母材接合,由包含Pt和其他元素的合金构成。 在该贵金属芯片中,作为第一成分含有Pt,作为第二成分含有Re。 使用这种贵金属芯片即使在高温气氛中也能够抑制铂球的生长。

    Relay
    116.
    发明授权
    Relay 有权
    中继

    公开(公告)号:US07137412B2

    公开(公告)日:2006-11-21

    申请号:US11293299

    申请日:2005-12-05

    申请人: Tetsuya Watanabe

    发明人: Tetsuya Watanabe

    IPC分类号: F15C1/04 F15B21/00 F16K49/00

    摘要: A relay long in service life aiming at higher reliability and lower cost is achieved by use of a technology of microelectromechanical•systems. The relay comprises a flow path having narrow chokes and wide chokes, formed by bonding two insulating members together, a plurality of liquid chambers formed by partitioning the flow path with the narrow chokes and the wide chokes, a plurality of electrodes disposed at the plurality of the liquid chambers, respectively, first and second gas chambers disposed so as to communicate with respective ends of the flow path, a gas sealed in the first and second gas chambers, respectively, heating means for heating the gas, and holes defined in one of the insulating members, communicating with the flow path, respectively, wherein a conductive fluid is introduced into the flow path through respective inlet ports of the holes, and the respective inlet ports are sealed.

    摘要翻译: 通过使用微机电系统的技术,实现了更长的使用寿命,从而实现更高的可靠性和更低的成本。 继电器包括通过将两个绝缘构件结合在一起形成的具有窄扼流圈和宽扼流圈的流路,通过将流路与窄扼流圈和宽扼流圈隔开而形成的多个液室,多个电极 分别设置为与流路的各端连通的第一和第二气体室,分别密封在第一和第二气体室中的气体,用于加热气体的加热装置,以及以下 绝缘构件分别与流路连通,其中导电流体通过孔的相应入口引入流路,并且各个入口被密封。

    Shaft sealing apparatus
    117.
    发明授权

    公开(公告)号:US07055825B2

    公开(公告)日:2006-06-06

    申请号:US10718569

    申请日:2003-11-24

    IPC分类号: F16J15/32

    摘要: Herein disclosed is a shaft sealing apparatus which comprises a vacuum casing formed with a vacuum chamber, a driving shaft having an outer cylindrical surface and movably extending in the vacuum chamber of the vacuum casing, and a sealing ring in the form of an annular ring shape and including a sealing lip held in contact with the outer cylindrical surface of the driving shaft, an annular spring member operative to impart a force to the sealing lip to ensure that the sealing lip is held in tight contact with the outer cylindrical surface of the driving shaft, and a peripheral portion radially outwardly extending from the sealing lip, in which the outer cylindrical surface of the driving shaft is smaller in surface roughness Ra than 0.1 (μm).

    Workflow server and workflow system control method
    119.
    发明授权
    Workflow server and workflow system control method 失效
    工作流服务器和工作流系统控制方法

    公开(公告)号:US06859823B1

    公开(公告)日:2005-02-22

    申请号:US09514945

    申请日:2000-02-28

    IPC分类号: G06Q10/00 G06F15/16

    CPC分类号: G06Q10/10

    摘要: A workflow server is provided with, in association with a user management table 100 for managing work items for each user, a list 130 of substitute users for indicating a substitute user for each work or process and a list 140 of users in charge who designates the user as a substitute. When a client terminal user selects a specific user among the users in charge on the list 130, the workflow server checks the power of substitute by referring to the list 140 of substitute users for the selected user, thereby to allow the client terminal user to process a predesignated unprocessed work item instead of the selected user in charge.

    摘要翻译: 与用于管理每个用户的工作项的用户管理表100相关联地提供工作流服务器,用于指示每个工作或处理的替代用户的代表用户列表130以及指定用户的用户的列表140 用户作为替代品。 当客户终端用户在列表130中负责的用户中选择特定用户时,工作流服务器通过参照所选择的用户的替代用户的列表140来检查替代的权力,从而允许客户终端用户处理 预先指定的未处理的工作项目,而不是所选的用户。

    Method and its apparatus for inspecting particles or defects of a semiconductor device
    120.
    发明申请
    Method and its apparatus for inspecting particles or defects of a semiconductor device 有权
    用于检查半导体器件的颗粒或缺陷的方法及其装置

    公开(公告)号:US20050024633A1

    公开(公告)日:2005-02-03

    申请号:US10933977

    申请日:2004-09-03

    IPC分类号: G01N21/88 G01N21/94

    摘要: Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.

    摘要翻译: 通常,作为检测结果,粒子/缺陷检查装置输出检测出的粒子/缺陷的总数。 对于制造过程中的故障采取对策,分析检查装置检测到的颗粒/缺陷。 由于检查装置输出大量检测到的粒子/缺陷,所以需要巨大的时间来分析检测到的粒子/缺陷,从而导致制造过程中的失败的对策的延迟。 在本发明中,用于光学检查颗粒或缺陷的装置在检查结果中将颗粒或缺陷尺寸与故障原因相关联。 数据处理电路从检查结果统计中指出故障原因,并显示检查结果信息。 通过设定用于识别半导体装置等上的各区域的故障的阈值来进行故障分析,以统计学评价检测出的粒子。