公开(公告)号：US08898923B2

公开(公告)日：2014-12-02

申请号：US13706225

申请日：2012-12-05

Applicant: Mitutoyo Corporation

Inventor： Michael Nahum ,  Joseph D. Tobiason ,  Casey E. Emtman

IPC: G01B5/14 ,  G01D21/02 ,  G01L1/00

CPC classification number: G01D21/02 ,  G01B3/205 ,  G01L1/00 ,  G01L1/044 ,  G01L1/2206 ,  G01L5/0038 ,  G01L5/009

Abstract: An electrically powered caliper is provided which includes a scale member, a slider, a displacement sensor, a force sensing arrangement and a signal processing portion. The signal processing portion is configured to receive a force signal and indicate a respective force corresponding to the respective position of the slider. Force data is acquired comprising a plurality of respective forces corresponding to respective positions of the slider. The signal processing portion defines an acceptable measurement force range defined by at least a minimum force threshold that is determined such that it exceeds a compensation force corresponding to at least one force component included in the force signal that is independent of user variations of the measurement force. It may analyze acquired force data to identify pre-contact data, and set the minimum force threshold for a current measurement procedure based on that pre-contact data.

Abstract translation: 提供一种电动卡钳，其包括刻度件，滑块，位移传感器，力感测装置和信号处理部分。 信号处理部分被配置为接收力信号并且指示对应于滑块的​​相应位置的相应力。 获取力数据，其包括对应于滑块的​​相应位置的多个相应的力。 信号处理部分限定由至少最小力阈值限定的可接受的测量力范围，该最小力阈值被确定为使得其超过对应于包括在力信号中的至少一个力分量的补偿力，该力分量独立于测量力的用户变化 。 它可以分析获取的力数据以识别预接触数据，并且基于该预接触数据设置当前测量过程的最小力阈值。

公开(公告)号：US20140305213A1

公开(公告)日：2014-10-16

申请号：US14230764

申请日：2014-03-31

Applicant: Paul David Swanson ,  Richard L. Waters ,  Charles Tally

Inventor： Paul David Swanson ,  Richard L. Waters ,  Charles Tally

IPC: G01P15/02

CPC classification number: G01L1/044 ,  G01L5/0057 ,  G01P15/097

Abstract: Systems and methods for perturbation analysis of harmonic oscillations in the time domain according to several embodiments can include a time domain switching sensor and a resonator for imposing a first oscillation and a second oscillation on the sensor. The first and second oscillations can have the same amplitude A and period P, but can have a known phase shift. The sensor can use a time interval, which can be defined by the time between when the sensor passes a reference point due to motion caused by the first oscillation and when the sensor passes the same reference point, but due to motion caused by the second oscillation. With this configuration an improved accuracy of measurement for the system can be realized.

Abstract translation: 根据几个实施例的时域中的谐波振荡的扰动分析的系统和方法可以包括时域切换传感器和用于在传感器上施加第一振荡和第二振荡的谐振器。 第一和第二振荡可以具有相同的振幅A和周期P，但是可以具有已知的相移。 传感器可以使用时间间隔，其可以由传感器由于第一振荡引起的运动而传感器通过参考点之间的时间以及当传感器通过相同的参考点时，而是由于由第二振荡引起的运动 。 通过这种配置，可以实现系统的改进的测量精度。

公开(公告)号：US08621661B2

公开(公告)日：2013-12-31

申请号：US13821708

申请日：2011-01-10

Applicant: Seung Hoon Nahm ,  Hoon Sik Jang ,  Sang Gu Jeon ,  Min Seok Kim

Inventor： Seung Hoon Nahm ,  Hoon Sik Jang ,  Sang Gu Jeon ,  Min Seok Kim

IPC: G01N3/08 ,  B81B7/02 ,  G01R31/00

CPC classification number: G01N3/08 ,  B82Y25/00 ,  G01L1/044 ,  G01L1/16 ,  G01N3/066 ,  G01N2203/0623 ,  G01R33/093 ,  G01R33/095

Abstract: Disclosed is an electrical-mechanical complex sensor for nanomaterials, including: a detector having a piezoelectric film therein, for measuring a mechanical property of a nanomaterial when a bending or tensile load is applied to the nanomaterial; a first detection film formed at an end of the detector to measure the mechanical property and an electrical property of the nanomaterial) in real time at the same time, when the nanomaterial contacts the first detection film; and a support to which one end of the detector is integrally connected, for supporting the detector.

Abstract translation: 公开了一种用于纳米材料的机电复合传感器，包括：其中具有压电膜的检测器，用于当对纳米材料施加弯曲或拉伸载荷时测量纳米材料的机械性能; 当纳米材料接触第一检测膜时，同时实时地形成在检测器的端部处的第一检测膜，以测量纳米材料的机械性能和电学性质） 以及检测器的一端整体连接的支撑件，用于支撑检测器。

公开(公告)号：US20130194028A1

公开(公告)日：2013-08-01

申请号：US13809156

申请日：2011-07-08

Applicant: Manfred Brandl ,  Jean Marc Lucchini

Inventor： Manfred Brandl ,  Jean Marc Lucchini

IPC: F16H21/44 ,  H03K17/96

CPC classification number: F16H21/44 ,  F16F1/025 ,  G01D5/145 ,  G01L1/044 ,  G01L1/122 ,  H03K17/96 ,  H03K17/97 ,  H03K2217/96038 ,  Y10T74/18992

Abstract: The invention relates to a spring (1), in particular for a push button, for fixing to a carrier (2) and for registering a vertical force (F). The spring (3) is designed in such a way that when actuated it converts a vertical movement into a horizontal movement that can be detected by sensor means (4).

Abstract translation: 本发明涉及一种弹簧（1），特别是用于按钮的弹簧（1），用于固定到托架（2）上并用于登记垂直力（F）。 弹簧（3）被设计成使得当被致动时，其将垂直运动转换成可由传感器装置（4）检测的水平运动。

公开(公告)号：US08427178B2

公开(公告)日：2013-04-23

申请号：US12694052

申请日：2010-01-26

Applicant: Gilbert P. Gianetti

Inventor： Gilbert P. Gianetti

IPC: G01R27/26

CPC classification number: G01R27/26 ,  G01D5/24 ,  G01D5/2417 ,  G01L1/044 ,  G01L1/144

Abstract: A detection circuit for detecting changes in capacitance. The detection circuit includes a tuned ratio circuit and an alternating current (AC) source AC-coupled to the tuned ratio circuit. The tuned ratio circuit includes first and second tuned circuits that are tuned to, or close, to the frequency of the AC source. Output circuitry is coupled between the two tuned circuits. During use as a transducer, an active capacitive transducer is inductively coupled to the first tuned circuit. Changes in the capacitance of the active capacitive transducer cause changes in the tuning of the first tuned circuit. The output circuitry generates an output signal that is a function of the difference between the tunings of the first and second tuned circuits.

Abstract translation: 用于检测电容变化的检测电路。 检测电路包括调谐比电路和交流耦合到调谐比电路的交流（AC）源。 调谐比电路包括调谐到或接近AC电源频率的第一和第二调谐电路。 输出电路耦合在两个调谐电路之间。 在用作换能器期间，有源电容换能器感应耦合到第一调谐电路。 有源电容式换能器的电容变化导致第一调谐电路的调谐变化。 输出电路产生作为第一和第二调谐电路的调谐之间的差异的函数的输出信号。

公开(公告)号：US20110209926A1

公开(公告)日：2011-09-01

申请号：US13104566

申请日：2011-05-10

Applicant: Otto KUHLMANN ,  Tanja MUECK ,  Volker RELLING ,  Gerald PETZOLD

Inventor： Otto KUHLMANN ,  Tanja MUECK ,  Volker RELLING ,  Gerald PETZOLD

IPC: G01L1/22 ,  G01G3/14

CPC classification number: G01G23/002 ,  G01G3/1414 ,  G01L1/044

Abstract: Force plate (1) having a plate-shaped carrier (2) which, when arranged vertically, has an upper carrier section (3) at the top in the vertical direction and a lower carrier section (4) at the bottom in the vertical direction. A first end carrier section (5) is connected, on the one hand, to the upper carrier section (3) via a vertical rod (7) and, on the other hand, to the lower carrier section (4) via a horizontally oriented spring element (6). That end of the lower carrier section (4) which faces away from the first end carrier section (5) is connected to the upper carrier section (3) via a horizontal rod (8). A second end carrier section (15) connects the horizontal rod (8) to the lower carrier section (4) via a vertically arranged spring element (16).

Abstract translation: 具有板状载体（2）的力板（1），当垂直布置时，在垂直方向上具有上托架部分（3）和在垂直方向上的底部的下托架部分（4） 。 一方面，第一端部承载部分（5）通过竖直杆（7）连接到上部承载部分（3），另一方面通过水平定向连接到下部载体部分（4） 弹簧元件（6）。 背离第一端部承载部分（5）的下部承载部分（4）的端部经由水平杆（8）连接到上部承载部分（3）。 第二端部承载部分（15）通过垂直布置的弹簧元件（16）将水平杆（8）连接到下部承载部分（4）。

公开(公告)号：US07966898B2

公开(公告)日：2011-06-28

申请号：US11830612

申请日：2007-07-30

Applicant: Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

Inventor： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

IPC: G01L1/22

CPC classification number: G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

Abstract: A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Abstract translation: 微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。

公开(公告)号：US07785912B2

公开(公告)日：2010-08-31

申请号：US11818716

申请日：2007-06-15

Applicant: Changqing Zhan ,  Michael Barrett Wolfson ,  John W. Hartzell

Inventor： Changqing Zhan ,  Michael Barrett Wolfson ,  John W. Hartzell

IPC: H01L21/00

CPC classification number: B81B3/0021 ,  B81B2201/0292 ,  B81B2203/0118 ,  B81C1/00246 ,  B81C2203/075 ,  C30B1/02 ,  C30B29/00 ,  G01L1/044 ,  G01L9/0042 ,  G01P15/0802 ,  G01P15/124 ,  G01P2015/0828 ,  H01L27/12 ,  H01L29/66757 ,  H04R17/02 ,  H04R31/006

Abstract: A piezo-TFT cantilever microelectromechanical system (MEMS) and associated fabrication processes are provided. The method comprises: providing a substrate, such as glass for example; forming thin-films overlying the substrate; forming a thin-film cantilever beam; and simultaneously forming a TFT within the cantilever beam. The TFT is can be formed least partially overlying a cantilever beam top surface, at least partially overlying a cantilever beam bottom surface, or embedded within the cantilever beam. In one example, forming thin-films on the substrate includes: selectively forming a first layer with a first stress level; selectively forming a first active Si region overlying the first layer; and selectively forming a second layer overlying the first layer with a second stress level. The thin-film cantilever beam is formed from the first and second layers, while the TFT source/drain (S/D) and channel regions are formed from the first active Si region.

Abstract translation: 提供了压电TFT悬臂微机电系统（MEMS）及相关制造工艺。 该方法包括：提供例如玻璃等基板; 形成覆盖衬底的薄膜; 形成薄膜悬臂梁; 并且同时在悬臂梁内形成TFT。 TFT可以形成为最少部分地覆盖在悬臂梁顶表面上，至少部分地覆盖悬臂梁底表面或嵌入在悬臂梁内。 在一个示例中，在衬底上形成薄膜包括：选择性地形成具有第一应力水平的第一层; 选择性地形成覆盖在第一层上的第一有源Si区; 以及以第二应力水平选择性地形成覆盖所述第一层的第二层。 薄膜悬臂梁由第一和第二层形成，而TFT源极/漏极（S / D）和沟道区域由第一有源Si区形成。

公开(公告)号：US20100024572A1

公开(公告)日：2010-02-04

申请号：US11830612

申请日：2007-07-30

Applicant: MICHAEL L. ROUKES ,  CHUNG-WAH FON ,  WONHEE LEE ,  HONGXING TANG ,  BLAKE WATERS AXELROD ,  JOHN LIANG TAN

Inventor： MICHAEL L. ROUKES ,  CHUNG-WAH FON ,  WONHEE LEE ,  HONGXING TANG ,  BLAKE WATERS AXELROD ,  JOHN LIANG TAN

IPC: G01L1/18 ,  B44C1/22

CPC classification number: G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

Abstract: A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Abstract translation: 微流控嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。

公开(公告)号：US20080264185A1

公开(公告)日：2008-10-30

申请号：US11739853

申请日：2007-04-25

Applicant: Nobuhiko P. Kobayashi ,  Shih-Yuan Wang ,  Alexandre M. Bratkovski ,  R. Stanley Williams

Inventor： Nobuhiko P. Kobayashi ,  Shih-Yuan Wang ,  Alexandre M. Bratkovski ,  R. Stanley Williams

IPC: G01L1/04 ,  H01L21/00

CPC classification number: G01L1/044 ,  B82Y15/00 ,  G01D5/18 ,  G01F1/28

Abstract: A sensing device includes a nanowire configured to deform upon exposure to a force, and a transducer for converting the deformation into a measurement. The nanowire has two opposed ends; and the transducer is operatively connected to one of the two opposed ends of the nanowire. The other of the two opposed ends of the nanowire is freestanding.

Abstract translation: 感测装置包括构造成在暴露于力时变形的纳米线和用于将变形转换成测量的换能器。 纳米线有两个相反的两端; 并且换能器可操作地连接到纳米线的两个相对端中的一个。 纳米线的两个相对端的另一个是独立的。