利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

195 条记录 (耗时 0.04 秒)

    Optical imaging device and imaging method for microscopy
    121.
    发明授权
    Optical imaging device and imaging method for microscopy 有权
    光学成像装置及显微镜成像方法

    公开(公告)号：US08711472B2

    公开(公告)日：2014-04-29

    申请号：US12568306

    申请日：2009-09-28

    申请人： Hans-Juergen Mann ,  Heiko Feldmann

    发明人： Hans-Juergen Mann ,  Heiko Feldmann

    IPC分类号： G02B21/04

    CPC分类号： G02B17/0631 ,  G02B21/04

    摘要： The present invention relates to an optical imaging device, in particular for microscopy, with a first optical element group and a second optical element group, wherein the first optical element group and the second optical element group, on an image plane, form an image of an object point of an object plane via at least one imaging ray having an imaging ray path. The first optical element group comprises a first optical element with a reflective first optical surface in the imaging ray path and a second optical element with a reflective second optical surface in the imaging ray path, wherein the first optical surface is concave. The second optical element group comprises a third optical element with a concave reflective third optical surface in the imaging ray path and a fourth optical element with a convex reflective fourth optical surface in the imaging ray path without light passage aperture.

    摘要翻译： 本发明涉及具有第一光学元件组和第二光学元件组的特别是显微镜的光学成像装置，其中第一光学元件组和第二光学元件组在图像平面上形成图像 经由具有成像光线路径的至少一个成像射线的物体平面的物体点。 第一光学元件组包括在成像光线路径中具有反射第一光学表面的第一光学元件和在成像光线路径中具有反射第二光学表面的第二光学元件，其中第一光学表面是凹形的。 第二光学元件组包括在成像光线路径中具有凹入反射第三光学表面的第三光学元件和在成像光线路径中具有凸起的反射第四光学表面的第四光学元件，而没有光通过孔。

    IMAGING OPTICSIIMAGING OPTICS, MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS HAVING SAME AND RELATED METHODS
    123.
    发明申请
    IMAGING OPTICSIIMAGING OPTICS, MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS HAVING SAME AND RELATED METHODS 有权
    成像光学光学，具有相同方法的微结构投影曝光装置

    公开(公告)号：US20130050671A1

    公开(公告)日：2013-02-28

    申请号：US13602553

    申请日：2012-09-04

    申请人： Hans-Juergen Mann ,  David Shafer

    发明人： Hans-Juergen Mann ,  David Shafer

    IPC分类号： G03B27/54 ,  G02B17/06

    CPC分类号： G03F7/702 ,  G02B17/0657 ,  G02B17/0663 ,  G03F7/70233

    摘要： An imaging optics has a plurality of mirrors to image an object field in an object plane into an image field in an image plane. The imaging optics includes a first partial objective to image the object field onto an intermediate image, and the imaging optics includes a second partial objective to image the intermediate image onto the image field. The second partial objective includes a penultimate mirror in the beam path of imaging light between the object field and the image field, and the second partial objective includes a last mirror in the beam path. The penultimate mirror images the intermediate image onto a further intermediate image, and the last mirror images the further intermediate image onto the image field.

    摘要翻译： 成像光学元件具有多个反射镜，用于将物平面中的物场映像成图像平面中的图像场。 成像光学器件包括将对象场成像到中间图像上的第一部分目标，并且成像光学器件包括将中间图像成像到图像场上的第二部分目标。 第二部分目标包括在物场和图像场之间的成像光束的光束路径中的倒数第二反射镜，并且第二部分物镜包括光束路径中的最后一个反射镜。 倒数第二个镜像将中间图像映射到另一个中间图像上，最后一个镜像将另外的中间图像映像到图像场上。

    Projection objective having mirror elements with reflective coatings
    125.
    发明授权
    Projection objective having mirror elements with reflective coatings 有权
    具有反射涂层的镜面元件的投影物镜

    公开(公告)号：US08279404B2

    公开(公告)日：2012-10-02

    申请号：US12703417

    申请日：2010-02-10

    申请人： Danny Chan ,  Hans-Juergen Mann ,  Sascha Migura

    发明人： Danny Chan ,  Hans-Juergen Mann ,  Sascha Migura

    IPC分类号： G03B27/54 ,  G03B27/72

    CPC分类号： G03F7/70308 ,  B82Y10/00 ,  G02B5/0891 ,  G02B13/143 ,  G02B17/0663 ,  G03F7/70233 ,  G21K1/062 ,  G21K2201/067

    摘要： An optical system is disclosed that includes a plurality of elements arranged to image radiation at a wavelength λ from an object field in an object surface to an image field in an image surface. The elements include mirror elements having a reflective surface formed by a reflective coating positioned at a path of radiation. At least one of the mirror elements has a rotationally asymmetrical reflective surface deviating from a best-fit rotationally symmetric reflective surface by about λ or more at one or more locations. The elements include an apodization correction element effective to correct a spatial intensity distribution in an exit pupil of the optical system relative to the optical system without the apodization correcting element. The apodization correction element can be effective to increase symmetry of the spatial intensity distribution in the exit pupil relative to the optical system without the apodization correcting element.

    摘要翻译： 公开了一种光学系统，其包括多个元件，其被布置成将从物体表面中的物场到波长λ的辐射成像到图像表面中的图像场。 元件包括具有由位于辐射路径处的反射涂层形成的反射表面的镜元件。 至少一个镜元件具有在一个或多个位置处偏离最佳拟合旋转对称反射表面约λ或更大的旋转非对称反射表面。 这些元件包括有效地校正光学系统的出射光瞳相对于没有变迹校正元件的光学系统的空间强度分布的变迹校正元件。 变迹校正元件可以有效地增加出射光瞳相对于没有变迹校正元件的光学系统的空间强度分布的对称性。

    Combination stop for catoptric projection arrangement
    127.
    发明授权
    Combination stop for catoptric projection arrangement 有权
    组合停止投影安排

    公开(公告)号：US08208127B2

    公开(公告)日：2012-06-26

    申请号：US12173595

    申请日：2008-07-15

    申请人： Hans-Juergen Mann ,  Daniel Kraehmer ,  Aurelian Dodoc ,  Toralf Gruner

    发明人： Hans-Juergen Mann ,  Daniel Kraehmer ,  Aurelian Dodoc ,  Toralf Gruner

    IPC分类号： G03B27/72 ,  G03B27/54 ,  G03B27/42 ,  G03B27/58

    CPC分类号： G03F7/70941 ,  G02B5/005 ,  G02B17/0657 ,  G03F7/70233 ,  G03F7/7025

    摘要： The disclosure relates to an optical projection arrangement that can be used to image a reticle onto a substrate. The projection arrangement includes reflective elements, by which a ray path is defined. A combination stop is in a pupil of the ray path. The combination stop has a first opening (aperture opening) for use as an aperture stop. The combination stop also has a second opening for allowing passage of a ray bundle of the ray path, such that the combination stop acts as a combined aperture stop and stray light stop. In addition, the disclosure relates to a corresponding combination stop for optical arrangements, as well as related systems, components and methods.

    摘要翻译： 本公开涉及一种可用于将掩模版成像到基底上的光学投影装置。 投影装置包括反射元件，通过该反射元件定义光线路径。 光束路径中的光瞳组合停止。 组合止动件具有用作孔径光阑的第一开口（孔口）。 组合挡块还具有用于允许射线路径的射线束通过的第二开口，使得组合挡块用作组合孔径光阑和杂散光挡块。 此外，本公开涉及用于光学布置的相应组合停止，以及相关系统，部件和方法。

    MAGNIFYING IMAGING OPTICAL UNIT AND METROLOGY SYSTEM INCLUDING SAME
    128.
    发明申请
    MAGNIFYING IMAGING OPTICAL UNIT AND METROLOGY SYSTEM INCLUDING SAME 有权
    放大成像光学单元和包括它的计量系统

    公开(公告)号：US20120140351A1

    公开(公告)日：2012-06-07

    申请号：US13358026

    申请日：2012-01-25

    申请人： Hans-Juergen Mann

    发明人： Hans-Juergen Mann

    IPC分类号： G02B17/06

    CPC分类号： G02B17/0657 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/84 ,  G21K7/00

    摘要： An imaging optical unit includes at least four mirrors to image an object field in an object plane into an image field in an image plane. The ratio of the structural length of the imaging optical unit to the imaging scale of the imaging optical unit is less than 4.9 mm. The imaging optical unit provides improved handling properties, such as, for example, when used in a metrology system.

    摘要翻译： 成像光学单元包括至少四个反射镜，以将物平面中的物场映像成图像平面中的图像场。 成像光学单元的结构长度与成像光学单元的成像尺度之比小于4.9mm。 成像光学单元提供改进的处理性能，例如当用于计量系统时。

    PROJECTION OBJECTIVE AND PROJECTION EXPOSURE APPARATUS WITH NEGATIVE BACK FOCUS OF THE ENTRY PUPIL
    129.
    发明申请
    PROJECTION OBJECTIVE AND PROJECTION EXPOSURE APPARATUS WITH NEGATIVE BACK FOCUS OF THE ENTRY PUPIL 有权
    投影目标和投影曝光装置与入侵者的负面反射

    公开(公告)号：US20120075608A1

    公开(公告)日：2012-03-29

    申请号：US13312196

    申请日：2011-12-06

    申请人： Hans-Juergen Mann ,  Wolfgang Singer

    发明人： Hans-Juergen Mann ,  Wolfgang Singer

    IPC分类号： G03B27/54 ,  G02B5/08

    CPC分类号： G02B17/0615 ,  B82Y10/00 ,  G02B13/22 ,  G02B17/0657 ,  G03F7/70233 ,  G03F7/7025 ,  G21K1/062 ,  G21K2201/061 ,  G21K2201/067

    摘要： The disclosure concerns a projection objective, which can include an object plane in which an object field is formed, an entry pupil, a mirrored entry pupil (RE) in a mirrored entry pupil plane obtained by mirroring the entry pupil (VE) at the object plane, an image plane, an optical axis, at least a first mirror and a second mirror. The projection objective can have a negative back focus of the entry pupil, and a principal ray originating from a central point of the object field and traversing the objective from the object plane to the image plane can intersect the optical axis in at least one point of intersection, wherein the geometric locations of all points of intersection lie between the image plane and the mirrored entry pupil plane.

    摘要翻译： 本公开涉及一种投影物镜，其可以包括其中形成物场的物平面，入射光瞳，通过在物体上镜像入射光瞳（VE）获得的镜像入射光瞳平面中的镜像入射光瞳（RE） 平面，图像平面，光轴，至少第一反射镜和第二反射镜。 投影物镜可以具有入射光瞳的负的后焦点，并且源自物场的中心点并且从物体平面向图像平面穿过物镜的主射线可以在光轴的至少一点 交叉点，其中所有交点交点的几何位置位于图像平面和镜像入射光瞳平面之间。

    CATADIOPTRIC PROJECTION OBJECTIVE
    130.
    发明申请
    CATADIOPTRIC PROJECTION OBJECTIVE 有权
    目标投影目标

    公开(公告)号：US20110235167A1

    公开(公告)日：2011-09-29

    申请号：US13153544

    申请日：2011-06-06

    申请人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf M. Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple

    发明人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf M. Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple

    IPC分类号： G02B17/08

    CPC分类号： G02B17/0804 ,  G02B17/08 ,  G02B17/0812 ,  G02B17/0844 ,  G02B17/0856 ,  G02B17/0892 ,  G03F7/70225

    摘要： A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.

    摘要翻译： 用于将设置在投影物镜的物平面中的图案成像到投影物镜的像平面上的反射折射投射物镜包括：用于将设置在物平面中的图案成像为第一中间图像的第一物镜部分; 第二目标部分，用于将第一中间成像成像成第二中间图像; 用于将第二中间成像直接成像到图像平面上的第三目标部分; 其中具有第一连续镜面的第一凹面镜和具有第二连续镜面的至少一个第二凹面镜布置在所述第二中间图像的上游; 瞳孔表面形成在物平面与第一中间图像之间，第一和第二中间图像之间以及第二中间图像与图像平面之间; 并且所有凹面反射镜光学地远离光瞳表面布置。 该系统具有中等透镜材料质量消耗的非常高的数值孔径的潜力。