Low differential pressure transducer
    121.
    发明授权
    Low differential pressure transducer 有权
    低压差传感器

    公开(公告)号:US08191424B2

    公开(公告)日:2012-06-05

    申请号:US12877301

    申请日:2010-09-08

    CPC classification number: G01L19/0084 G01L13/025 G01L19/0645

    Abstract: It is an object of the present invention to provide a pressure transducer having a header wherein the header is comprised of a first section and a second section that are offset from each other. Each first and second section has a flexible diaphragm adapted to receive a first and second pressure, respectively. A central channel connects the diaphragms and a pressure sensor, located within the central channel, communicates with the channel and produces an output equal to the difference between the first and second pressures. The resultant device is a low differential pressure transducer which enables one to bring leads from the sensor out while having diaphragms of substantially the same size and diameter, therefore enabling the diaphragms to exhibit the same back pressure and be equally compliant.

    Abstract translation: 本发明的目的是提供一种具有头部的压力传感器,其中头部由彼此偏移的第一部分和第二部分组成。 每个第一和第二部分具有适于分别接收第一和第二压力的柔性隔膜。 中心通道连接隔膜和位于中心通道内的压力传感器与通道连通并产生等于第一和第二压力之差的输出。 所得到的装置是低压差换能器,其使得能够将传感器的引线带出,同时具有基本上相同尺寸和直径的隔膜,因此使得隔膜具有相同的背压并且具有相同的顺应性。

    Pressure transducer structures suitable for curved surfaces
    122.
    发明授权
    Pressure transducer structures suitable for curved surfaces 有权
    适用于弯曲表面的压力传感器结构

    公开(公告)号:US08069730B2

    公开(公告)日:2011-12-06

    申请号:US12291870

    申请日:2008-11-14

    CPC classification number: G01L1/18 G01L19/003 G01M9/06

    Abstract: A novel flexible transducer structure is suitable for attaching to curved surface such as the leading edge of an aircraft wing. The structure comprises a thin flexible sheet of an insulating material with a leadless transducer secured to the sheet. The sheet is then placed over the curved surface and assumes the curvature of the surface. The transducer secured to the sheet provides an output of pressure according the pressure exerted on the sheet. The sheet basically is fabricated from a thin material such as Kapton and is flexible so as to assume the curvature of the surface with the transducer being exposed to pressure applied to the curved surface. The sensor in conjunction with the flexible sheet allows pressure to be measured without disturbing the air flow patterns of the measuring surfaces and because of its construction, is moisture resistant over a large variety of atmospheric conditions.

    Abstract translation: 一种新颖的柔性换能器结构适用于连接到诸如飞机机翼前缘的弯曲表面。 该结构包括具有固定到片材的无引导换能器的绝缘材料的薄柔性片。 然后将片材放置在弯曲表面上并呈现表面的曲率。 固定到片材上的传感器根据施加在片材上的压力提供压力输出。 片材基本上由诸如Kapton的薄材料制成,并且是柔性的,以便呈现表面的曲率,其中换能器暴露于施加到弯曲表面的压力。 传感器与柔性片材相结合,允许测量压力,而不会干扰测量表面的气流图案,并且由于其结构,在各种大气条件下都是防潮的。

    FUSION BONDING PROCESS AND STRUCTURE FOR FABRICATING SILICON-ON-INSULATION (SOI) SEMICONDUCTOR DEVICES
    123.
    发明申请
    FUSION BONDING PROCESS AND STRUCTURE FOR FABRICATING SILICON-ON-INSULATION (SOI) SEMICONDUCTOR DEVICES 审中-公开
    用于制造硅绝缘(SOI)半导体器件的熔接接合工艺和结构

    公开(公告)号:US20110275192A1

    公开(公告)日:2011-11-10

    申请号:US13188511

    申请日:2011-07-22

    CPC classification number: H01L21/76251

    Abstract: A method of fabricating a semiconductor-on-insulator device including: providing a first semiconductor wafer having an about 500 angstrom thick oxide layer thereover; etching the first semiconductor wafer to raise a pattern therein; doping the raised pattern of the first semiconductor wafer through the about 500 angstrom thick oxide layer; providing a second semiconductor wafer having an oxide thereover; and, bonding the first semiconductor wafer oxide to the second semiconductor wafer oxide at an elevated temperature.

    Abstract translation: 一种制造绝缘体上半导体器件的方法,包括:提供其上具有约500埃厚的氧化物层的第一半导体晶片; 蚀刻第一半导体晶片以在其中升高图案; 通过约500埃厚的氧化物层掺杂第一半导体晶片的凸起图案; 提供其上具有氧化物的第二半导体晶片; 并且在升高的温度下将第一半导体晶片氧化物接合到第二半导体晶片氧化物。

    METHOD AND SYSTEM FOR DETERMINING GAS TURBINE TIP CLEARANCE
    124.
    发明申请
    METHOD AND SYSTEM FOR DETERMINING GAS TURBINE TIP CLEARANCE 失效
    用于确定气体涡轮机间隙的方法和系统

    公开(公告)号:US20110188994A1

    公开(公告)日:2011-08-04

    申请号:US13084822

    申请日:2011-04-12

    CPC classification number: G01B13/12 F01D11/06 F01D11/20 F05D2270/301

    Abstract: A system for sensing at least one physical characteristic associated with an engine including a turbine having a plurality of blades turning inside a casing, the system including: a pressure sensor coupled substantially adjacent to the casing and including at least one output; a port in the turbine casing for communicating a pressure indicative of a clearance between the blades and casing to the pressure sensor; a cooling cavity substantially surrounding the pressure sensor; and, an inlet for receiving fluid from the engine and feeding the fluid to the cooling cavity to cool the pressure sensor; wherein, the pressure sensor output is indicative of the clearance between the blades and casing.

    Abstract translation: 一种用于感测与发动机相关联的至少一个物理特性的系统,包括具有在壳体内部转动的多个叶片的涡轮机,所述系统包括:压力传感器,其基本上与壳体相邻并且包括至少一个输出; 涡轮壳体中的端口,用于将指示叶片和壳体之间的间隙的压力传递到压力传感器; 基本上围绕压力传感器的冷却腔; 以及用于从发动机接收流体并将流体供给到冷却腔以冷却压力传感器的入口; 其中,压力传感器输出表示叶片和壳体之间的间隙。

    LEADLESS OIL FILLED PRESSURE TRANSDUCER
    125.
    发明申请
    LEADLESS OIL FILLED PRESSURE TRANSDUCER 有权
    无铅油封压力传感器

    公开(公告)号:US20110126633A1

    公开(公告)日:2011-06-02

    申请号:US13025257

    申请日:2011-02-11

    Inventor: Anthony D. Kurtz

    Abstract: An oil-filled pressure transducer having reduced back pressure, comprising an alignment plate having a sensor accommodating aperture, a sensor module inserted into the sensor accommodating aperture, a header surrounding the alignment plate, the header having a protruding top surface, and a diaphragm disposed on the protruding top surface to create a relatively small oil accommodating region between the diaphragm and the sensor. This configuration reduces the oil volume required for operation, which ultimately reduces the back pressure applied against the diaphragm.

    Abstract translation: 具有降低的背压的充油压力传感器,包括具有传感器容纳孔的对准板,插入到传感器容纳孔中的传感器模块,围绕对准板的集管,具有突出的顶表面的集管和设置的隔膜 在突出的顶部表面上,以在隔膜和传感器之间产生相对较小的油容纳区域。 该配置减少了操作所需的油量,这最终降低了施加在隔膜上的背压。

    Redundant self compensating leadless pressure sensor
    126.
    发明授权
    Redundant self compensating leadless pressure sensor 有权
    冗余自补偿无铅压力传感器

    公开(公告)号:US07866215B2

    公开(公告)日:2011-01-11

    申请号:US12286810

    申请日:2008-10-02

    Inventor: Anthony D. Kurtz

    CPC classification number: G01L9/0054 G01L13/025 G01L15/00

    Abstract: There is disclosed a redundant pressure sensing chip which includes first and second redundant devices. Each pressure sensing device produces an output proportional to applied pressure irrespective of vibration/acceleration of the device. Each device also provides an output proportional to pressure and because of the nature of the devices, thermal effects as well as acceleration and the vibration are canceled. Based on chip operation and subtracting the signals from the two diaphragms, acceleration/vibration is canceled but also the effects of absolute pressure and differential pressure is also canceled. Therefore the chip can be used as a redundant absolute pressure sensor as well as a differential pressure sensor.

    Abstract translation: 公开了一种包括第一和第二冗余设备的冗余压力感测芯片。 每个压力感测装置产生与施加的压力成比例的输出,而与装置的振动/加速度无关。 每个设备还提供与压力成比例的输出,并且由于设备的性质,热效应以及加速度和振动被消除。 基于芯片操作和减去两个隔膜的信号,加速/振动被取消,绝对压力和压差的影响也被取消。 因此,该芯片可用作冗余绝对压力传感器以及差压传感器。

    High temperature transducer using SOI electronics
    127.
    发明授权
    High temperature transducer using SOI electronics 有权
    使用SOI电子的高温传感器

    公开(公告)号:US07861597B2

    公开(公告)日:2011-01-04

    申请号:US12291868

    申请日:2008-11-14

    CPC classification number: G01L9/065 G01L9/0052 G01L19/0092 G01L19/02 G01L19/04

    Abstract: There is disclosed a high temperature pressure sensing system which includes a SOI Wheatstone bridge including piezoresistors. The bridge provides an output which is applied to an analog to digital converter also fabricated using SOI technology. The output of the analog to digital converter is applied to microprocessor, which microprocessor processes the data or output of the bridge to produce a digital output indicative of bridge value. The microprocessor also receives an output from another analog to digital converter indicative of the temperature of the bridge as monitored by a span resistor coupled to the bridge. The microprocessor has a separate memory coupled thereto which is also fabricated from SOI technology and which memory stores various data indicative of the microprocessor also enabling the microprocessor test and system test to be performed.

    Abstract translation: 公开了一种高温压力感测系统,其包括包括压敏电阻器的SOI惠斯登电桥。 该桥提供了一种应用于使用SOI技术制造的模数转换器的输出。 模数转换器的输出被应用于微处理器,微处理器处理桥的数据或输出以产生指示桥值的数字输出。 微处理器还接收来自另一模数转换器的输出,其指示由耦合到桥的跨接电阻器监测的桥的温度。 微处理器具有耦合到其上的单独的存储器,其也由SOI技术制造,并且存储器存储指示微处理器的各种数据,还使得能够执行微处理器测试和系统测试。

    Wireless interface for a plurality of transducers
    128.
    发明申请
    Wireless interface for a plurality of transducers 有权
    用于多个换能器的无线接口

    公开(公告)号:US20100332179A1

    公开(公告)日:2010-12-30

    申请号:US12459108

    申请日:2009-06-26

    CPC classification number: G01L19/086 G01D1/00 G01D15/00

    Abstract: A wireless interface system can interface with any one of a plurality of transducers of different types, such as pressure sensors, temperature sensors, current probes and so on. In the system, all such transducers employ identical connectors with a common connecting scheme. In this manner, any transducer can be connected to a wireless interface which has the same input connection scheme. When the wireless interface is connected to the transducer, a rechargeable battery, which is associated with the wireless interface, is activated. The wireless interface then determines the type of transducer being utilized and provides sufficient circuitry as well as determining the requirements of the connected transducer. In this manner, the wireless interface, besides recognizing and determining the type of transducer, can determine the range of the sensor, and depending on the type and range of the sensor, can provide specific circuitry to be activated to supply power and to read data from the sensor via common output pins.

    Abstract translation: 无线接口系统可以与诸如压力传感器,温度传感器,电流探针等的不同类型的多个换能器中的任何一个接口连接。 在系统中,所有这样的传感器采用具有公共连接方案的相同连接器。 以这种方式,任何传感器都可以连接到具有相同输入连接方案的无线接口。 当无线接口连接到传感器时,与无线接口相关联的可充电电池被激活。 然后,无线接口确定所使用的换能器的类型,并提供足够的电路以及确定所连接的换能器的要求。 以这种方式,除了识别和确定换能器的类型之外,无线接口可以确定传感器的范围,并且根据传感器的类型和范围,可以提供被激活以提供功率和读取数据的特定电路 从传感器通过公共输出引脚。

    OPTICAL MICROMACHINED PRESSURE SENSOR
    129.
    发明申请
    OPTICAL MICROMACHINED PRESSURE SENSOR 失效
    光学微压力传感器

    公开(公告)号:US20100310207A1

    公开(公告)日:2010-12-09

    申请号:US12774971

    申请日:2010-05-06

    Abstract: It is an objective of the present invention to provide a highly sensitive optical pressure sensor that uses a Mach-Zehnder Interferometer to measure pressure. The pressure sensor comprises a deflectable diaphragm including a substantially central boss and channel and an optical waveguide having a first arm and a second arm, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel, and further wherein the first and second arms contain a periodic array of etched holes to improve the overall sensitivity of the pressure sensor. The pressure sensor further comprises a light source coupled to the optical waveguide for introducing light to the waveguide and a light detector coupled to the waveguide for detecting changes in the intensity of light. The change in light intensity is then correlated to an applied pressure.

    Abstract translation: 本发明的目的是提供使用马赫 - 曾德干涉仪来测量压力的高灵敏度光学压力传感器。 压力传感器包括可偏转膜片,其包括基本上中心的凸台和通道以及具有第一臂和第二臂的光波导,其中第一臂基本上与凸台的边缘对齐,并且第二臂基本上与边缘 并且其中所述第一和第二臂包含蚀刻孔的周期性阵列以改善所述压力传感器的总体灵敏度。 压力传感器还包括耦合到光波导以将光引入波导的光源和耦合到波导的光检测器,用于检测光强度的变化。 然后将光强度的变化与施加的压力相关。

    Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures

    公开(公告)号:US07823455B2

    公开(公告)日:2010-11-02

    申请号:US11716138

    申请日:2007-03-09

    CPC classification number: G01L7/08 G01L9/06 G01L13/025 G01L19/0609

    Abstract: A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

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