公开(公告)号：US06231774B1

公开(公告)日：2001-05-15

申请号：US09215165

申请日：1998-12-18

申请人： Susumu Saito

发明人： Susumu Saito

IPC分类号： G01N2100

CPC分类号： H01J37/32935

摘要： Plasma P that is caused to fluctuate by a magnet 128 is generated inside a reaction chamber 102 of an etching apparatus 100. The signal of the fluctuating plasma light detected at a photosensor unit 136 via a detection window 134 is sampled over a constant sampling cycle with a arithmatic control unit 120 to obtain data strings. A plurality of hypothetical fluctuation cycles are hypothesized and the step for calculating the moving average values during the individual hypothetical fluctuation cycles using the data strings is repeated, then arithmetic processing is performed on the moving average values calculated for the individual repetition timings to create moving average value data for each of the hypothetical fluctuation cycles to ascertain approximate expressions corresponding to the individual hypothetical fluctuation cycles. In addition, deviation quantities between data strings of the individual moving average values and the corresponding approximate expressions during a given period are calculated, and the hypothetical fluctuation cycle corresponding to the smallest deviation quantity is determined as the fluctuation cycle of the plasma P. Based upon the fluctuation cycle thus determined, the data string of the moving average value is ascertained from the data strings of the sampling signal to determine the endpoint for the processing.

摘要翻译： 在蚀刻装置100的反应室102内部产生由磁体128波动的等离子体P.经由检测窗口134在光电传感器单元136处检测到的等离子体波的信号被采样在恒定的采样周期 一个获取数据串的算术控制单元120。 假设多个假设的波动周期，并且重复在使用数据串的各个假设波动周期期间计算移动平均值的步骤，然后对针对各个重复定时计算的移动平均值执行运算处理以创建移动平均 每个假设波动周期的值数据，以确定对应于各个假设波动周期的近似表达式。 此外，计算各个移动平均值的数据串与给定期间的对应近似表达式之间的偏差量，并将与最小偏差量对应的假设波动周期确定为等离子体P的波动周期。基于 如此确定的波动周期，从采样信号的数据串确定移动平均值的数据串，以确定处理的端点。

公开(公告)号：US5995130A

公开(公告)日：1999-11-30

申请号：US685560

申请日：1996-07-24

申请人： Kazuhiro Akatsu ,  Susumu Saito ,  Keiji Kataoka ,  Shuho Yokokawa ,  Koji Doi ,  Masahiro Mizuno

发明人： Kazuhiro Akatsu ,  Susumu Saito ,  Keiji Kataoka ,  Shuho Yokokawa ,  Koji Doi ,  Masahiro Mizuno

IPC分类号： B41J2/44 ,  G02B26/10 ,  G02B26/12 ,  G03G15/04 ,  H04N1/04 ,  H04N1/113 ,  H04N1/191 ,  B41J2/47

CPC分类号： G02B26/123 ,  H04N1/0402 ,  H04N1/1135 ,  H04N1/1911

摘要： A laser beam scanning apparatus and method for providing controllable print density. The laser beam scanning apparatus includes a modulator for modulating a light beam, a rotating polygon mirror for deflectively scanning a light beam which is passed through the modulator, at least one lens unit having at least one lens which is movable to a position on the optical axis and a position completely off the optical axis, and a controller for switching the modulating clock frequency of the modulator and the rotating speed of the polygon mirror together with selective shifting of the at least one lens unit or lens thereof to a position on the optical axis or completely off the optical axis whereby the method effects control of the apparatus for controlling print density.

摘要翻译： 一种用于提供可控打印浓度的激光束扫描装置和方法。 激光束扫描装置包括用于调制光束的调制器，用于偏转地扫描通过调制器的光束的旋转多面镜，至少一个透镜单元，其具有至少一个可移动到光学器件上的位置的透镜 轴和完全离开光轴的位置，以及用于切换调制器的调制时钟频率和多面镜的旋转速度的控制器，以及至少一个透镜单元或其透镜的选择性移位至光学上的位置 轴或完全离开光轴，由此该方法实现了用于控制打印浓度的装置的控制。

公开(公告)号：US5928532A

公开(公告)日：1999-07-27

申请号：US962736

申请日：1997-11-03

申请人： Chishio Koshimizu ,  Susumu Saito

发明人： Chishio Koshimizu ,  Susumu Saito

IPC分类号： G01N21/68 ,  H01J37/32 ,  B23K10/00 ,  B44C1/22 ,  G01N21/00

CPC分类号： H01J37/32935 ,  G01N21/68 ,  H01J37/32954 ,  H01J37/32963

摘要： When processing using a plasma is performed for an object to be processed, a photodetecting unit sequentially detects emission of two active species having specific wavelengths in a designated period during the processing. On the basis of the emission detection information of the two active species, two approximate expressions of linear functions are obtained in the relationship between the emission intensity and time. The ratio of the two approximate expressions of linear functions and the derivative of the ratio are obtained to form a graph in which the ratio is plotted on the abscissa, the derivative of the ratio is plotted on the ordinate, and the intersection between the average value of the ratio and the average value of the derivative of the ratio is the origin. The ratio and the derivative of the ratio are obtained by using the emission detection information of the two active species during the processing after the designated period. The end point of the plasma processing is determined when the position of the ratio and the derivative of the ratio thus obtained deviates from a predetermined region in the graph.

摘要翻译： 当对待处理对象进行使用等离子体的处理时，光检测单元依次检测在处理期间的指定期间内具有特定波长的两种活性物质的发射。 基于两种活性物质的发射检测信息，在发射强度和时间的关系中获得两个线性函数的近似表达式。 获得线性函数的两个近似表达式和比率导数之间的比率，以形成其中横坐标绘制比率的曲线图，该比率的导数绘制在纵坐标上，平均值之间的交点 的比率和该比率的导数的平均值是起源。 通过在指定时间段之后的处理期间使用两种活性物质的发射检测信息来获得该比率的比率和导数。 当比例的位置和由此获得的比率的导数偏离图中的预定区域时，确定等离子体处理的终点。

公开(公告)号：US5888337A

公开(公告)日：1999-03-30

申请号：US649324

申请日：1996-05-17

申请人： Susumu Saito

发明人： Susumu Saito

IPC分类号： G01N21/68 ,  C23F4/00 ,  G02B6/00 ,  G02B6/04 ,  G02B27/14 ,  G02B27/44 ,  G03F7/20 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  C23F1/02

CPC分类号： H01J37/32935 ,  H01J37/32963 ,  H01J37/32972

摘要： An endpoint detector for plasma etching comprises a photo detecting section for receiving an emission spectrum of plasma due to etching gas from a process chamber for providing plasma etching to a processing object so as to detect a specific waveform of the received emission spectrum, a calculating section for detecting an endpoint of an etching process based on a detecting signal sent from the photo detecting means, the photo detecting section comprises a first optical system for detecting light having a specific wavelength from the emission spectrum received from the process chamber so as to be photoelectrically transferred, and a second optical system for detecting a part of the emission spectrum so as to be photoelectrically transferred before light having a specific wavelength is extracted from the emission spectrum by the first optical system, and the calculating section reduces drift of an electrical signal, which is based on light having a specific wavelength extracted from the first optical system, based on an electrical signal, which is based on light extracted from the second optical system, so as to detect the endpoint of the etching process.

摘要翻译： 用于等离子体蚀刻的端点检测器包括：光电检测部分，用于接收来自用于向处理对象提供等离子体蚀刻的处理室的蚀刻气体，以便检测接收到的发射光谱的特定波形的等离子体的发射光谱;计算部分 用于基于从光检测装置发送的检测信号来检测蚀刻处理的端点，光检测部分包括第一光学系统，用于从从处理室接收的发射光谱中检测具有特定波长的光，以便光电 以及第二光学系统，用于在通过第一光学系统从发射光谱提取具有特定波长的光之前，用于检测发射光谱的一部分，以便光电转移，并且计算部分减少电信号的漂移， 其基于从中提取出特定波长的光 第一光学系统，基于基于从第二光学系统提取的光的电信号，以便检测蚀刻过程的终点。

公开(公告)号：US5739051A

公开(公告)日：1998-04-14

申请号：US715489

申请日：1996-09-18

申请人： Susumu Saito

发明人： Susumu Saito

IPC分类号： G01N21/73 ,  H01J37/32 ,  H01L21/00 ,  C23C16/00

CPC分类号： H01J37/32935 ,  G01N21/73 ,  H01J37/32963 ,  H01J37/3299

摘要： Method and device for detecting the end point of a plasma process, the method and device being capable of making it unnecessary to set a threshold every process or every processed object and also capable of correctly detecting the end point of the plasma process even if process conditions are changed. The method and device can be therefore used for more purposes. According to the end point detecting method realized by the end point detecting device, the emission spectrum of an active species having a specific wavelength and caused when a semiconductor wafer W is processed with plasma P is detected by a photodetector and the end point of the plasma process is detected on the basis of light strength changes of the emission spectrum. More specifically, an average value m and dispersed ones .sigma..sup.2 of light strengths I are calculated for a predetermined time period T.sub.1 at the initial process stage by a first arithmetical unit and the differences of light strengths I relative to the average value m are calculated after the lapse of the predetermined time period T.sub.1 by a second arithmetical unit. These differences are compared with the dispersed values .sigma..sup.2 by a comparator and the time at which values thus obtained exceed a predetermined reference value is decided to be the end point of the plasma process.

摘要翻译： 用于检测等离子体处理的终点的方法和装置，所述方法和装置能够使每个处理或每个处理对象不必设置阈值，并且还能够正确地检测等离子体处理的终点，即使处理条件 改变了 因此，该方法和装置可用于更多的目的。 根据端点检测装置实现的终点检测方法，通过光电检测器和等离子体处理等离子体P检测出具有特定波长并且由半导体晶片W处理而产生的活性物质的发射光谱 基于发射光谱的光强度变化来检测过程。 更具体地说，在初始处理阶段通过第一算术单元在预定时间段T1内计算光强度I的平均值m和分散像素σ2，并且在经过第一算术单元之后计算光强度I相对于平均值m的差异， 第二算术单元经过预定时间段T1。 这些差异通过比较器与分散值sigma2进行比较，并且由此获得的值超过预定参考值的时间被确定为等离子体处理的终点。

公开(公告)号：US5737008A

公开(公告)日：1998-04-07

申请号：US698160

申请日：1996-08-07

申请人： Shinya Kobayashi ,  Kunio Sato ,  Seiji Maruo ,  Susumu Saito

发明人： Shinya Kobayashi ,  Kunio Sato ,  Seiji Maruo ,  Susumu Saito

IPC分类号： B41J2/44 ,  B41J2/47 ,  G03G15/01 ,  G03G15/04 ,  G03G15/043 ,  H04N1/113 ,  H04N1/29 ,  H04N1/40 ,  H04N1/21

CPC分类号： H04N1/40025 ,  B41J2/473 ,  H04N1/295

摘要： An electrophotographic image recording apparatus that forms an electrostatic latent image so that the uniformly charged surface of a photoreceptor is scanned for its exposure with a beam spot of a light beam generated according to image information, to discharge the surface of the photoreceptor up to a medium potential. The electrophotographic image recording apparatus includes a light beam generator capable of varying an amount of light beam and a light intensity distribution pattern of a beam spot on the surface of the photoreceptor, an intensity distribution pattern controller for controlling the light beam generator according to the image information of peripheral pixels, to vary the intensity distribution pattern of the beam spot on the surface of the photoreceptor, and a light beam output controller for controlling the light beam generator to put the exposure energy on pixels, exposed to the beam spots of intensity distribution patterns, at a predetermined value.

摘要翻译： 一种电子照相图像记录装置，其形成静电潜像，使得根据图像信息产生的光束的光斑扫描感光体的均匀充电表面以进行曝光，以将感光体的表面排出到介质 潜在。 电子照相图像记录装置包括能够改变感光体表面上的光束的光束量和光束强度分布图案的光束发生器，用于根据图像控制光​​束发生器的强度分布图案控制器 周边像素的信息，以改变感光体表面上的光斑的强度分布图案;以及光束输出控制器，用于控制光束发生器将曝光能量放在像素上，暴露于强度分布的光束点 图案，以预定值。

公开(公告)号：US5637427A

公开(公告)日：1997-06-10

申请号：US611179

申请日：1996-03-05

申请人： Yasuo Yamamoto ,  Susumu Saito ,  Yutaka Sugizaki ,  Kaoru Torikoshi

发明人： Yasuo Yamamoto ,  Susumu Saito ,  Yutaka Sugizaki ,  Kaoru Torikoshi

IPC分类号： G03G9/087 ,  G03G13/01

CPC分类号： G03G9/08755 ,  G03G13/013

摘要： A color toner and a black toner for electrostatic charge development comprises a binder resin and a colorant, wherein the binder resin comprises a polyester resin containing (a) an ethoxylated bisphenol type diol, (b) a propoxylated bisphenol type diol and (c) an aromatic dicarboxylic acid or an anhydride or ester thereof, as main monomer components, and the polyester resin further containing (d) at least one compound selected from the group consisting of alkylsuccinic acids, acid anhydrides and esters thereof, alkenylsuccinic acids, and acid anhydrides and esters thereof in an amount of 7 to 25 mol % based on the total monomer amount of the polyester resin, and the colorant is a flushing pigment comprising hydrous paste of an organic pigment and the polyester resin, or comprising a carbon black having a primary particle size of from not less than 30 nm to not more than 50 nm. Furthermore, a method for producing the color toner and the black toner, and an method for forming a full color image using the color toners or using the color toners and the black toner in combination, are disclosed.

摘要翻译： 用于静电荷显影的彩色调色剂和黑色调色剂包括粘合剂树脂和着色剂，其中粘合剂树脂包含含有（a）乙氧基化双酚型二醇，（b）丙氧基化双酚型二醇和（c） 芳族二羧酸或其酸酐或酯作为主要单体组分，并且所述聚酯树脂还含有（d）至少一种选自烷基琥珀酸，酸酐及其酯，烯基琥珀酸和酸酐的化合物和 酯的含量相对于聚酯树脂的总单体量为7〜25摩尔％，着色剂是包含有机颜料和聚酯树脂的含水糊剂的冲洗颜料，或者包含具有一次粒子的炭黑 尺寸不小于30nm至不大于50nm。 此外，公开了一种用于生产彩色调色剂和黑色调色剂的方法，以及使用彩色调色剂或使用彩色调色剂和黑色调色剂组合形成全色图像的方法。

公开(公告)号：US5578819A

公开(公告)日：1996-11-26

申请号：US493556

申请日：1995-06-22

申请人： Keiji Kataoka ,  Susumu Saito ,  Shuuho Yokokawa ,  Satoshi Aita ,  Muneyoshi Akai ,  Shigeo Nemoto ,  Isao Nakajima ,  Hitomi Shimizu ,  Kunitomo Takahashi ,  Youji Hirose

发明人： Keiji Kataoka ,  Susumu Saito ,  Shuuho Yokokawa ,  Satoshi Aita ,  Muneyoshi Akai ,  Shigeo Nemoto ,  Isao Nakajima ,  Hitomi Shimizu ,  Kunitomo Takahashi ,  Youji Hirose

IPC分类号： G02B26/10 ,  G06K15/12 ,  G11B7/0025 ,  G11B7/085 ,  G11B7/14 ,  H04N1/053 ,  H04N1/113 ,  H04N1/191 ,  H01J3/14

CPC分类号： G11B7/14 ,  G06K15/1261 ,  H04N1/053 ,  G11B7/0025 ,  G11B7/08564 ,  H04N1/1135 ,  H04N1/1911 ,  H04N2201/0471 ,  H04N2201/04781

摘要： A simple optical recorder which permits alignment of scanning positions of a plurality of laser beams with high accuracy and effects optical recording using the laser beams. The optical recorder is provided with a photosensitive drum which is scanned by a plurality of laser beams formed in rows at an inclined angle with respect to the direction of scan, a single photosensor for sensing each of the sweep positions of the laser beams, and a controller for controlling the scanning positions of the laser beams on the basis of a sensing result of the sensor. The controller is made up of an optical sensing signal separation circuit, synchronous clock generation circuits, FIFO memory circuit elements, and OR circuits.

摘要翻译： 一种简单的光学记录器，其允许高精度地对齐多个激光束的扫描位置并且使用激光束实现光学记录。 光学记录仪设置有感光鼓，其由相对于扫描方向以倾斜角度形成的多个激光束扫描，用于感测激光束的每个扫描位置的单个光电传感器，以及 控制器，用于基于传感器的感测结果来控制激光束的扫描位置。 控制器由光感测信号分离电路，同步时钟发生电路，FIFO存储电路元件和OR电路组成。

公开(公告)号：US5453833A

公开(公告)日：1995-09-26

申请号：US61558

申请日：1993-05-17

申请人： Hiroyuki Kawashima ,  Fumio Ohtomo ,  Susumu Saito ,  Isao Minegishi

发明人： Hiroyuki Kawashima ,  Fumio Ohtomo ,  Susumu Saito ,  Isao Minegishi

IPC分类号： H01S5/068 ,  G01B9/02 ,  H01S3/13 ,  H01S5/0687

CPC分类号： H01S3/1303 ,  G01J9/0246 ,  H01S5/0687

摘要： A wavelength stabilizing light source apparatus comprising a light source, a beam splitter, a scanning mirror, a reflector, a first and a second light receiver, a phase detector and a wavelength stabilizer. The first light receiver receives a first interference signal formed from the interference between the coherent light coming from the scanning mirror and coherent light reflected by the first reflecting surface. The second light receiver receives a second interference signal formed from the interference between the coherent light coming from the scanning mirror and the coherent light reflected by the second reflecting surface. The phase detector detects the difference in phase between the first and the second interference signal. The wavelength stabilizer stabilizes the wavelength of the light source by keeping constant the phase difference detected by the phase detector. The apparatus also includes an optical path length difference forming device for keeping a constant difference in length between the first optical path of its first member and the second optical path of its second member despite changes in temperature.

摘要翻译： 一种波长稳定光源装置，包括光源，分束器，扫描镜，反射器，第一和第二光接收器，相位检测器和波长稳定器。 第一光接收器接收由来自扫描反射镜的相干光和由第一反射表面反射的相干光之间的干涉形成的第一干涉信号。 第二光接收器接收由来自扫描反射镜的相干光与由第二反射面反射的相干光之间的干涉而形成的第二干涉信号。 相位检测器检测第一和第二干涉信号之间的相位差。 波长稳定器通过将相位检测器检测到的相位差保持恒定来稳定光源的波长。 该装置还包括光路长度差形成装置，尽管温度有变化，但仍保持其第一构件的第一光路与其第二构件的第二光路之间的长度上的恒定差。

公开(公告)号：US5429902A

公开(公告)日：1995-07-04

申请号：US150801

申请日：1993-11-12

申请人： Susumu Saito ,  Takashi Imai ,  Masayuki Kurimoto ,  Hideyuki Akagi

发明人： Susumu Saito ,  Takashi Imai ,  Masayuki Kurimoto ,  Hideyuki Akagi

IPC分类号： G03G9/08 ,  G03G9/097 ,  G03G15/02

CPC分类号： C09C1/3684 ,  G03G9/09716 ,  C01P2004/64

摘要： An electrophotographic toner composition comprising toner particles containing at least a colorant, a binder resin and an additive, and an image formation method using the toner composition are disclosed, wherein said additive is an additive prepared by surface-treating titanium dioxide fine particles having less than 0.2% by weight of a water-soluble content with a surface treating agent by a wet process. The toner composition is excellent in chargeability, environmental stability of charging, toner admixing properties, and durability. The toner composition hardly adheres to a contact charging member and, even if it does, it causes no reduction in charging performance of the contact charging member and provides a satisfactory image.

摘要翻译： 公开了一种电子照相调色剂组合物，其包含至少含有着色剂，粘合剂树脂和添加剂的调色剂颗粒和使用该调色剂组合物的图像形成方法，其中所述添加剂是通过对二氧化钛细颗粒进行表面处理而制备的添加剂 0.2重量％的通过湿法处理的表面处理剂的水溶性成分。 调色剂组合物的带电性，充电的环境稳定性，调色剂混合性和耐久性优异。 调色剂组合物几乎不粘附到接触充电部件，即使如此，也不会导致接触充电部件的充电性能的降低，并且提供令人满意的图像。