Planar motor
    141.
    发明申请

    公开(公告)号:US20050116548A1

    公开(公告)日:2005-06-02

    申请号:US10882258

    申请日:2004-07-02

    摘要: A planar motor permits a thinner design, controlled vibration, and highly accurate positioning by disposing X-axis and Y-axis coreless type linear motors on the same plane without using an expensive linear guide and by incorporating high-accuracy capacitance displacement sensors in X and Y directions. Two pairs of permanent magnets are disposed such that they are respectively orthogonalized with respect to two axes that are orthogonalized with each other on a movable stage and that they generate magnetic fluxes in a direction perpendicular to a surface of the movable stage. Furthermore, the permanent magnets of one pair are disposed symmetrically to each other about one of the two axes, while those of the other pair are disposed symmetrically to each other about the other axis. Two pairs of coils are provided such that they oppose and match the two pairs of permanent magnets. A cross-shaped common electrode is installed to the movable stage and disposed such that it opposes a fixed electrode composed of two electrodes disposed on a fixed electrode base. Displacements of the movable stage can be determined from changes in capacitance of capacitors formed by the cross-shaped common electrode and the fixed electrodes.

    Linear compressor and apparatus to control the same
    143.
    发明申请
    Linear compressor and apparatus to control the same 失效
    线性压缩机和设备控制相同

    公开(公告)号:US20050031470A1

    公开(公告)日:2005-02-10

    申请号:US10790700

    申请日:2004-03-03

    申请人: Kwang Lee

    发明人: Kwang Lee

    摘要: A linear compressor and apparatus to control the linear compressor are provided which allows a frequency of a drive current supplied to a drive motor to synchronize with a resonance frequency varying according to a load fluctuation, in real time, thus obtaining a maximum efficiency of the linear compressor. The linear compressor includes a drive motor, a piston reciprocating by the drive motor and a control unit generating a reference current having a phase difference of 90° with respect to a displacement waveform of the piston and a frequency equal to the displacement waveform of the piston, and controls a drive current supplied to the drive motor to synchronize with a resonance frequency of the piston by synchronizing the drive current with the reference current.

    摘要翻译: 提供了一种用于控制线性压缩机的线性压缩机和装置,其允许提供给驱动电动机的驱动电流的频率与根据负载波动变化的谐振频率实时同步,从而获得线性压缩机的最大效率 压缩机。 线性压缩机包括驱动电动机,由驱动电动机往复运动的活塞和控制单元,该控制单元生成相对于活塞的位移波形具有90°的相位差的参考电流,并且频率等于活塞的位移波形 并且通过使驱动电流与参考电流同步来控制提供给驱动电动机的驱动电流与活塞的共振频率同步。

    Linear motor apparatus, and stage apparatus, exposure system and device
production method using the linear motor apparatus
    144.
    发明授权
    Linear motor apparatus, and stage apparatus, exposure system and device production method using the linear motor apparatus 失效
    线性电动机装置,舞台装置,曝光系统和使用线性电动机装置的装置制造方法

    公开(公告)号:US5973459A

    公开(公告)日:1999-10-26

    申请号:US665498

    申请日:1996-06-18

    申请人: Hiroshi Itoh

    发明人: Hiroshi Itoh

    摘要: A linear motor apparatus includes a mover, a stator, a detector, and a driver. The mover is adapted to be shifted along a shifting direction, and has a predetermined magnetic flux distribution. The stator has a plurality of coils aligned along the shifting direction of the mover. The detector detects the relative position of the mover with respect to the stator. The driver excites two or more coils simultaneously based on a predetermined target value and the output of the detector.

    摘要翻译: 线性电动机装置包括动子,定子,检测器和驱动器。 移动器适于沿着移动方向移动,并且具有预定的磁通量分布。 定子具有沿着移动器的移动方向排列的多个线圈。 检测器检测移动器相对于定子的相对位置。 基于预定的目标值和检测器的输出,驾驶员同时激励两个或更多个线圈。

    Linear motor
    146.
    发明授权
    Linear motor 失效
    直线电机

    公开(公告)号:US5872407A

    公开(公告)日:1999-02-16

    申请号:US624083

    申请日:1996-03-29

    CPC分类号: H02K41/03 H02K29/06

    摘要: A linear motor has a stator and a movable piece. The stator has a field magnet for propulsion. The movable piece has a bobbin which includes a cylindrical member wrapping around the stator, an armature coil which is located around the bobbin, and a yoke which is attached around the armature coil. A groove is formed on the cylindrical member. At the bottom of the groove, a sensor is arranged for detecting the strength of the magnetic field from the field magnet.

    摘要翻译: 线性电动机具有定子和可动件。 定子具有用于推进的磁场。 可动片具有线轴,该线轴包括围绕定子缠绕的圆柱形构件,位于线圈架周围的电枢线圈和围绕电枢线圈安装的磁轭。 在圆柱形构件上形成凹槽。 在槽的底部设置有用于检测来自场磁体的磁场强度的传感器。

    Voice coil motor feedback control circuit
    148.
    发明授权
    Voice coil motor feedback control circuit 失效
    音圈电机反馈控制电路

    公开(公告)号:US5818180A

    公开(公告)日:1998-10-06

    申请号:US819597

    申请日:1997-03-17

    申请人: Athos Canclini

    发明人: Athos Canclini

    摘要: A circuit for driving a voice coil motor used to position the heads of a disk drive is disclosed. The circuit consists of a an H-bridge circuit, a controller, and a feedback loop. The feedback loop prevents the BEMF from driving a voltage on the voice coil motor above the supply voltage.

    摘要翻译: 公开了用于驱动用于定位磁盘驱动器的磁头的音圈电机的电路。 该电路由H桥电路,控制器和反馈回路组成。 反馈回路防止BEMF将音圈电机上的电压驱动到电源电压以上。

    Method for detecting position of linear stepping motor and apparatus
therefor
    149.
    发明授权
    Method for detecting position of linear stepping motor and apparatus therefor 失效
    线性步进电机位置检测方法及其设备

    公开(公告)号:US5793834A

    公开(公告)日:1998-08-11

    申请号:US707956

    申请日:1996-09-10

    申请人: In-oh Park

    发明人: In-oh Park

    CPC分类号: H02P6/006 H02P6/185 H02P8/00

    摘要: A method for detecting the position of a linear stepping motor which includes the steps of generating a reference clock signal for detecting the position of the linear stepping motor using an oscillator and counting the reference clock signal with a counter, generating digital values of carrier sine waves sin.omega.t and cos.omega.t by inputting the output of the counter to a ROM having sine and cosine functions, converting the digital values of the carrier sine waves sin.omega.t and cos.omega.t to analog sine wave signals sin.omega.t and cos.omega.t using a digital-to-analog converter and outputting the result, generating the signals sin.omega.tcos.theta. and cos.omega.tsin.theta. by multiplying the analog sine wave signals sin.omega.t and cos.omega.t by sine wave signals sin.theta. and cos.theta. from a linear scale in a multiplier, adding the signals sin.omega.tcos.theta. and cos.omega.tsin.theta. in an adder to form a modulated signal sin(.omega.t+.theta.), converting the a modulated signal sin(.omega.t+.theta.) to a predetermined square wave signal in a comparator so as to be synchronized with the counter, and detecting the phase difference between the square wave signal from the comparator and the sine wave signal sin.omega.t to detect the position of the linear stepping motor. The reference sine wave and square wave signals are compared twice in one period and the displacement of the linear stepping motor is detected in real time by being synchronized with the reference sine wave.

    摘要翻译: 一种用于检测线性步进电机的位置的方法,包括以下步骤:产生用于使用振荡器检测线性步进电机的位置并用计数器对参考时钟信号进行计数的基准时钟信号,产生载波正弦波的数字值 通过将计数器的输出输入到具有正弦和余弦函数的ROM的sinωω和cosωωt,将载波正弦波sinωt和cosωt的数字值转换为模拟正弦波信号sinωω和cosω 使用数模转换器并输出结果,通过将模拟正弦波信号sinωt和cosωt乘以正弦波信号sinθ和cosθ从而产生信号sinωtcosθ和cosωtsinθ, 乘法器中的线性标度,在加法器中加上信号sinωωtcosθ和cosωtsinθ,以形成调制信号sin(ω,t +θ),将调制信号 将nal sin(omega t + theta)与比较器中的预定方波信号进行比较,以便与计数器同步,并且检测来自比较器的方波信号与正弦波信号sinωt之间的相位差以检测位置 的线性步进电机。 参考正弦波和方波信号在一个周期内进行两次比较,通过与参考正弦波同步,实时检测线性步进电机的位移。

    Load current control of pulse width modulated drive signal including
calibration and correction coefficient
    150.
    发明授权
    Load current control of pulse width modulated drive signal including calibration and correction coefficient 失效
    负载电流控制脉宽调制驱动信号包括校准和校正系数

    公开(公告)号:US5631817A

    公开(公告)日:1997-05-20

    申请号:US424130

    申请日:1995-04-19

    申请人: Akira Minami

    发明人: Akira Minami

    摘要: A PWM pulse of a duty ratio according to a current instruction value D of a servo control section is outputted from a pulse width modulating section to a driving section, thereby current driving a load. In a calibrating process, a calibration processing section outputs a reference current instruction value Dr corresponding to a reference load current Ir and measures a drive current Is of a load. When the measurement current Is doesn't coincide with the reference load current Ir, the current instruction value is adjusted, a current instruction value Ds of the measurement current Is which coincides with the reference load current Ir is obtained, and a correction coefficient K=Ds/Dr of the current instruction value is decided. A correcting section corrects the current instruction value D which is outputted from a control section by the correction coefficient K obtained by the calibrating section and outputs to the pulse width modulating section.

    摘要翻译: 根据伺服控制部的当前指令值D的占空比的PWM脉冲从脉冲宽度调制部输出到驱动部,由此驱动负载。 在校准处理中,校准处理部输出与基准负载电流Ir对应的基准电流指令值Dr,并测量负载的驱动电流Is。 当测量电流Is与参考负载电流Ir不一致时,调整当前指令值,获得与参考负载电流Ir一致的测量电流Is的当前指令值Ds,校正系数K = 确定当前指令值的Ds / Dr。 校正部通过由校准部获得的校正系数K校正从控制部输出的当前指示值D,并输出到脉冲宽度调制部。