公开(公告)号：US20120314202A1

公开(公告)日：2012-12-13

申请号：US13571481

申请日：2012-08-10

Applicant: Steven Danyluk ,  Fang Li

Inventor： Steven Danyluk ,  Fang Li

IPC: G01B11/16 ,  G01J4/00

CPC classification number: G01B11/168 ,  G01L1/241 ,  G01L5/0047

Abstract: The present invention provides a tool for and method of using an infrared transmission technique to extract the full stress components of the in-plane residual stresses in thin, multi crystalline silicon wafers including in situ measurement of residual stress for large cast wafers. The shear difference method is used to obtain full stress components by integrating the shear stress map from the boundaries. System ambiguity at the boundaries is resolved completely by introducing a new analytical function. A new anisotropic stress optic law is provided, and stress optic coefficients are calibrated for different crystal grain orientations and stress orientations.

Abstract translation: 本发明提供了一种使用红外透射技术提取薄多晶硅晶片中的平面内残余应力的全应力分量的工具和方法，包括原位测量大型晶圆的残余应力。 剪切差法用于通过从边界积分剪切应力图来获得全应力分量。 通过引入新的分析功能，完全解决了边界的系统模糊。 提供了新的各向异性应力光学定律，并且针对不同的晶粒取向和应力取向校准了应力光学系数。

公开(公告)号：US07876437B1

公开(公告)日：2011-01-25

申请号：US12535828

申请日：2009-08-05

Applicant: William J. Furnas ,  Sarath K. Tennekoon ,  Gary C. Weber

Inventor： William J. Furnas ,  Sarath K. Tennekoon ,  Gary C. Weber

IPC: G01J4/00

CPC classification number: G01B11/06 ,  G01L1/2206 ,  G01L1/241 ,  G01N21/90

Abstract: An apparatus and method for measurement of the stress in and thickness of the walls of glass containers is disclosed that uses fluorescence to quickly and accurately ascertain both the thickness of the stress layers and the wall thickness in addition to the stress curve in glass containers. The apparatus and method may be used to quickly and accurately measure both the stress in and the thickness of the side walls of glass containers throughout the circumference of the glass containers. The apparatus and method are adapted for large scale glass container manufacturing, and are capable of high speed measurement of the stress in and the thickness of the side walls of glass containers.

Abstract translation: 公开了用于测量玻璃容器的壁的应力和厚度的装置和方法，除了玻璃容器中的应力曲线之外，还使用荧光来快速准确地确定应力层的厚度和壁厚。 该装置和方法可用于快速且准确地测量玻璃容器在玻璃容器的整个圆周上的侧壁的应力和厚度。 该装置和方法适用于大规模玻璃容器制造，并且能够高速测量玻璃容器的侧壁的应力和厚度。

公开(公告)号：US07730547B2

公开(公告)日：2010-06-01

申请号：US10542697

申请日：2004-01-23

Applicant: Enrique V. Barrera ,  Satish Nagarajaiah ,  Prasad Dharap ,  Li Zhiling ,  Jong Dae Kim

Inventor： Enrique V. Barrera ,  Satish Nagarajaiah ,  Prasad Dharap ,  Li Zhiling ,  Jong Dae Kim

IPC: G01N23/00

CPC classification number: G01D5/12 ,  B82Y15/00 ,  G01K11/20 ,  G01L1/005 ,  G01L1/2287 ,  G01L1/2293 ,  G01L1/241

Abstract: The present invention is directed toward devices comprising carbon nanotubes that are capable of detecting displacement, impact, stress, and/or strain in materials, methods of making such devices, methods for sensing/detecting/monitoring displacement, impact, stress, and/or strain via carbon nanotubes, and various applications for such methods and devices. The devices and methods of the present invention all rely on mechanically-induced electronic perturbations within the carbon nanotubes to detect and quantify such stress/strain. Such detection and quantification can rely on techniques which include, but are not limited to, electrical conductivity/conductance and/or resistivity/resistance detection/measurements, thermal conductivity detection/measurements, electroluminescence detection/measurements, photoluminescence detection/measurements, and combinations thereof. All such techniques rely on an understanding of how such properties change in response to mechanical stress and/or strain.

Abstract translation: 本发明涉及包括能够检测材料中的位移，冲击，应力和/或应变的碳纳米管的装置，制造这种装置的方法，用于感测/检测/监测位移，冲击，应力和/或 通过碳纳米管的应变，以及用于这种方法和装置的各种应用。 本发明的装置和方法都依赖于碳纳米管内机械诱导的电子扰动来检测和量化这种应力/应变。 这种检测和定量可以依赖于包括但不限于导电性/电导性和/或电阻率/电阻检测/测量，热导率检测/测量，电致发光检测/测量，光致发光检测/测量及其组合的技术 。 所有这些技术都依赖于对这些性质如何响应于机械应力和/或应变而变化的理解。

公开(公告)号：US07639348B2

公开(公告)日：2009-12-29

申请号：US10586148

申请日：2004-03-05

Applicant: Yasushi Niitsu ,  Kensuke Ichinose ,  Kenji Gomi

Inventor： Yasushi Niitsu ,  Kensuke Ichinose ,  Kenji Gomi

IPC: G01B11/16 ,  G01J4/00

CPC classification number: G01L5/0047 ,  G01L1/241

Abstract: The stress of a sample semiconductor wafer is detected with high accuracy in the form of an absolute value without rotating the sample or the entire optical system. A laser light R is subjected to photoelastic modulation in a PEM 6 to generate a birefringence phase difference and then it is passed through first and second quarter wavelength plates and passes through a semiconductor wafer D having residual stress. When it is passed through a test piece, the direction of the stress of the test piece is detected when the angle between the laser light R and a linear polarization light is 0 and 90 degrees. The transmitted electric signal is delivered to an analog/digital converter 16, and the signal is inputted to a signal processor thus generating transmission signal data. The signal processor reads out the stored reference signal data and the transmission signal data and calculates a reference birefringence phase difference and the absolute values of the birefringence phase difference.

Abstract translation: 以绝对值的形式高精度地检测样品半导体晶片的应力，而不旋转样品或整个光学系统。 激光R在PEM6中进行光弹性调制以产生双折射相位差，然后通过第一和第二四分之一波长板并通过具有残余应力的半导体晶片D. 当通过试片时，当激光R和线偏振光之间的角度为0度和90度时，检测试片的应力方向。 发送的电信号被传送到模拟/数字转换器16，并且该信号被输入到信号处理器，从而产生发送信号数据。 信号处理器读出存储的参考信号数据和发送信号数据，并计算参考双折射相位差和双折射相位差的绝对值。

公开(公告)号：US07583368B1

公开(公告)日：2009-09-01

申请号：US11731739

申请日：2007-03-30

Applicant: Jeffrey A. Simpson ,  Mark A. Imbrock ,  Nathan Strimpel

Inventor： Jeffrey A. Simpson ,  Mark A. Imbrock ,  Nathan Strimpel

IPC: G01L1/24 ,  G01B9/02

CPC classification number: G01L1/241 ,  G01N21/21 ,  G01N21/45 ,  G01N21/958

Abstract: A detection system for measuring glass that has been placed under strain and the resulting stress lines in the glass has a light source of individual elements configured to create a light distribution. The light distribution has a discontinuity which enhances the viewing of a photoelastic effect in the glass. The light source creates a viewable optical interference (i.e., color changes) which results from stress lines in the glass.

Abstract translation: 用于测量已经处于应变状态的玻璃的测量系统以及玻璃中产生的应力线具有被配置为产生光分布的各个元件的光源。 光分布具有不连续性，其增强了玻璃中光弹效应的观察。 光源产生由玻璃中的应力线产生的可见的光学干涉（即，颜色变化）。

公开(公告)号：US20090173159A1

公开(公告)日：2009-07-09

申请号：US11999219

申请日：2007-11-03

Applicant: Evan J. Reed ,  Michael R. Armstrong

Inventor： Evan J. Reed ,  Michael R. Armstrong

IPC: G01H11/00 ,  G01L1/24

CPC classification number: G01L1/241 ,  G01N21/3581 ,  H01L41/08

Abstract: Strain waves of THz frequencies can coherently generate radiation when they propagate past an interface between materials with different piezoelectric coefficients. Such radiation is of detectable amplitude and contains sufficient information to determine the time-dependence of the strain wave with unprecedented subpicosecond, nearly atomic time and space resolution.

Abstract translation: 当THz频率的应变波传播通过具有不同压电系数的材料之间的界面时，可以相干地产生辐射。 这种辐射具有可检测的幅度，并且包含足够的信息以确定具有空前的亚皮秒，几乎原子时间和空间分辨率的应变波的时间依赖性。

公开(公告)号：US07458277B2

公开(公告)日：2008-12-02

申请号：US11845619

申请日：2007-08-27

Applicant: Frederick M. Discenzo

Inventor： Frederick M. Discenzo

IPC: G01L1/24

CPC classification number: G01L3/12 ,  G01L1/241

Abstract: A system and method relating to the measuring of torque in a rotating shaft is provided. An optical torque sensing system comprises a rotating shaft, wherein a sleeve of photo-elastic material overlays a portion of the shaft. A light emitting component delivers light into the photo-elastic material, wherein the light delivered by the light emitting component is directed through the photo-elastic material along an axis of the rotating shaft. A capturing component captures the light that exits the photo-elastic material. The exiting light comprises fringe pattern data, and a computing system computes torsion strain of the shaft based at least in part on the fringe pattern information

Abstract translation: 提供了一种与旋转轴中的扭矩测量有关的系统和方法。 光学扭矩感测系统包括旋转轴，其中光弹性材料的套筒覆盖轴的一部分。 发光部件将光输送到光弹性材料中，其中由发光部件传送的光沿着旋转轴的轴线引导通过光弹性材料。 捕获组件捕获离开光弹性材料的光。 退出的光包括条纹图案数据，并且计算系统至少部分地基于条纹图案信息来计算轴的扭转应变

公开(公告)号：US20080041141A1

公开(公告)日：2008-02-21

申请号：US11845619

申请日：2007-08-27

Applicant: Frederick Discenzo

Inventor： Frederick Discenzo

IPC: G01M1/00

CPC classification number: G01L3/12 ,  G01L1/241

Abstract: A system and method relating to the measuring of torque in a rotating shaft is provided. An optical torque sensing system comprises a rotating shaft, wherein a sleeve of photo-elastic material overlays a portion of the shaft. A light emitting component delivers light into the photo-elastic material, wherein the light delivered by the light emitting component is directed through the photo-elastic material along an axis of the rotating shaft. A capturing component captures the light that exits the photo-elastic material. The exiting light comprises fringe pattern data, and a computing system computes torsion strain of the shaft based at least in part on the fringe pattern information

Abstract translation: 提供了一种与旋转轴中的扭矩测量有关的系统和方法。 光学扭矩感测系统包括旋转轴，其中光弹性材料的套筒覆盖轴的一部分。 发光部件将光输送到光弹性材料中，其中由发光部件传送的光沿着旋转轴的轴线引导通过光弹性材料。 捕获组件捕获离开光弹性材料的光。 退出的光包括条纹图案数据，并且计算系统至少部分地基于条纹图案信息来计算轴的扭转应变

公开(公告)号：US07274440B1

公开(公告)日：2007-09-25

申请号：US10936019

申请日：2004-09-08

Applicant: Gary Janik ,  Shankar Krishnan

Inventor： Gary Janik ,  Shankar Krishnan

IPC: G01B11/16 ,  G01J4/00

CPC classification number: G01L1/241 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/447 ,  G01J4/00 ,  G01N2203/0641 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Systems and methods for measuring stress in a specimen are provided. One system includes an optical subsystem configured to measure stress-induced birefringence in patterned structures formed on the specimen. In some embodiments, the optical subsystem may be configured as a spectroscopic ellipsometer, a multi-angle laser ellipsometer, a polarimeter, a polarized reflectometer, or some combination thereof. The system also includes a processor coupled to the optical subsystem. The processor is configured to determine stress in a material of the patterned structures using the stress-induced birefringence measurements. One method includes measuring stress-induced birefringence in patterned structures formed on the specimen using an optical technique. The method also includes determining stress in a material of the patterned structures using the stress-induced birefringence measurements.

Abstract translation: 提供了用于测量样品中应力的系统和方法。 一个系统包括被配置为测量形成在样本上的图案化结构中的应力诱导双折射的光学子系统。 在一些实施例中，光学子系统可以被配置为分光椭偏仪，多角度激光椭偏仪，偏振计，偏振反射计或其某种组合。 该系统还包括耦合到光学子系统的处理器。 处理器被配置为使用应力诱导的双折射测量来确定图案化结构的材料中的应力。 一种方法包括使用光学技术来测量在样品上形成的图案化结构中的应力诱导双折射。 该方法还包括使用应力诱导的双折射测量来确定图案化结构的材料中的应力。

公开(公告)号：US20070044568A1

公开(公告)日：2007-03-01

申请号：US11513934

申请日：2006-08-31

Applicant: Koichi Kobayashi

Inventor： Koichi Kobayashi

IPC: G01L1/24

CPC classification number: G01B11/167 ,  G01L1/241 ,  G01L5/0047

Abstract: A non-contacting strain measurement method and system employs a laser light source for irradiating a test piece to provide a spectral pattern in spaced relationship from the test piece. The pattern is viewed while the test piece is placed under tension by a plurality of video cameras. The CCD video cameras are coupled to signal processing circuits which calculate the Poisson ratio according to the formula: εxx=−ΔAx/2L0 tan θ0

Abstract translation: 非接触应变测量方法和系统采用激光光源照射测试片以提供与测试片间隔开的光谱图案。 当测试片被多个摄像机放置在张力下时，观察图案。 CCD摄像机耦合到信号处理电路，信号处理电路根据以下公式计算泊松比：<？in-line-formula description =“In-line Formulas”end =“lead”？> epsilon xx