公开(公告)号：US20060274795A1

公开(公告)日：2006-12-07

申请号：US11407712

申请日：2006-04-20

申请人： Hitoshi Sekita ,  Kazuya Takasago ,  Nobuo Nakata ,  Arata Nakamura

发明人： Hitoshi Sekita ,  Kazuya Takasago ,  Nobuo Nakata ,  Arata Nakamura

IPC分类号： H01S3/13 ,  H01S3/098

CPC分类号： H01S3/005 ,  H01S3/1301 ,  H01S3/235

摘要： A femtosecond laser with stabilized output, and a method for stabilizing the output of a femtosecond laser. The femtosecond laser comprises a regenerative amplifier, a photodetector, a control portion and a variable attenuator, wherein the variable attenuator is provided so as to be capable of controlling an output beam of the regenerative amplifier, the photodetector is provided between the regenerative amplifier and the variable attenuator, the photodetector detects an output beam of the regenerative amplifier and transmits the results of the detection to a power controller, and the power controller controls the variable attenuator depending on the a difference between a predetermined target value and the results.

摘要翻译： 具有稳定输出的飞秒激光器和用于稳定飞秒激光器的输出的方法。 飞秒激光器包括再生放大器，光电检测器，控制部分和可变衰减器，其中可变衰减器被设置为能够控制再生放大器的输出光束，光电检测器设置在再生放大器和 可变衰减器，光电检测器检测再生放大器的输出光束，并将检测结果发送到功率控制器，功率控制器根据预定目标值与结果之间的差异来控制可变衰减器。

公开(公告)号：US20040066828A1

公开(公告)日：2004-04-08

申请号：US10619303

申请日：2003-07-14

申请人： Cyber Laser Inc.

发明人： Yusuke Tamaki ,  Hitoshi Sekita ,  Kazuya Takasago ,  Taisuke Miura

IPC分类号： H01S003/08

CPC分类号： H01S3/235 ,  H01S3/08 ,  H01S3/08072 ,  H01S3/106

摘要： The present invention has the object of offering a laser resonator capable of maintaining high amplification efficiency even if the thermal lensing effect occurring in the laser medium varies during operation or over repeated operation and suspension of the laser device. The laser resonator comprises at least a pair of reflection portions (planar reflective mirrors 3) provided such as to allow a laser beam to oscillate therebetween; a laser medium provided on the optical path of the laser between the pair of reflection portions; an excitation portion (excitation laser device 5) for exciting the laser medium; an optical system (convex lens 1) provided on the optical path of the laser beam between the laser medium and the pair of reflection portions for changing the state of the laser in the laser medium; and a movement portion for moving the optical system along the optical axis of the laser.

摘要翻译： 本发明的目的是提供一种激光谐振器，即使在激光介质中发生的热透镜效应在操作期间或者在激光装置的重复操作和暂停时都会发生变化时，其能够保持高的放大效率。 激光谐振器包括至少一对反射部分（平面反射镜3），其被设置为允许激光束在它们之间振荡; 设置在所述一对反射部之间的所述激光的光路上的激光介质; 用于激发激光介质的激励部分（激发激光装置5） 在激光介质和一对反射部分之间设置在激光束的光路上的光学系统（凸透镜1），用于改变激光介质中激光的状态; 以及用于沿着激光的光轴移动光学系统的移动部分。

公开(公告)号：US20020009115A1

公开(公告)日：2002-01-24

申请号：US09876329

申请日：2001-06-07

申请人： Cyber Laser Inc.

发明人： Tetsumi Sumiyoshi ,  Hitoshi Sekita ,  Akira Shiratori

IPC分类号： H01S003/10 ,  H01S003/091 ,  H01S003/094

CPC分类号： G02F1/39 ,  H01S3/0941 ,  H01S3/1024

摘要： The invention offers a low-noise, compact, high-efficiency light generating device and an irradiation method thereof for use in medical applications. A fundamental harmonic laser head 106 is composed of a quasi-continuous wave oscillation mode laser diode (QCW-LD) 101, a laser crystal 103, a rear mirror 104 and an output mirror 105. The QCW-LD 101 is driven by an LD power source 102 capable of modulating the pulse waveform in time. A beam adjusting portion 108 comprises a wave plate, a polarizer, a lens and an isolator. A wavelength converting portion 112 is an optical parametric oscillator (OPO) comprising a non-linear optical crystal 109, an OPO input mirror and an OPO output mirror 111.

摘要翻译： 本发明提供一种用于医疗应用的低噪声，紧凑，高效的发光装置及其照射方法。 基波谐波激光头106由准连续波振荡模式激光二极管（QCW-LD）101，激光晶体103，后反射镜104和输出镜105组成.QCW-LD 101由LD 能够及时调制脉搏波形的电源102。 光束调节部分108包括波片，偏振器，透镜和隔离器。 波长转换部分112是包括非线性光学晶体109，OPO输入反射镜和OPO输出反射镜111的光学参量振荡器（OPO）。

公开(公告)号：US20100009550A1

公开(公告)日：2010-01-14

申请号：US12517651

申请日：2007-12-07

申请人： Susumu Tsujikawa ,  Masanao Kamata ,  Tetsumi Sumiyoshi

发明人： Susumu Tsujikawa ,  Masanao Kamata ,  Tetsumi Sumiyoshi

IPC分类号： H01L21/268 ,  B23K26/00

CPC分类号： H01L23/5258 ,  B23K26/0604 ,  B23K26/0613 ,  B23K26/083 ,  B23K26/38 ,  B23K2101/40 ,  H01L27/11 ,  H01L2924/0002 ,  H01L2924/00

摘要： [PROBLEMS] To provide a method and an apparatus for cutting a conductive link of a redundant circuit in a semiconductor circuit.[MEANS FOR SOLVING PROBLEMS] A method is provided for selectively cutting a plurality of conductive links embedded in a protection layer which covers at least the conductive links in a semiconductor device formed on a semiconductor substrate. A focused beam is aligned with a target link, a first pulsed laser beam having a short laser wavelength of 400 nm or shorter and a second pulsed laser beam having a wavelength longer than 400 nm are generated, the first and the second pulsed laser beams are overlapped and applied onto the conductive link from over the protection layer. Preferably, the second pulsed laser is applied after the first pulsed layer in terms of time.

摘要翻译： 提供一种用于切割半导体电路中的冗余电路的导电链路的方法和装置。 解决问题的手段提供了一种用于选择性地切割嵌入到形成在半导体衬底上的半导体器件中至少覆盖导电链路的保护层中的多个导电链路的方法。 聚焦光束与目标链路对准，生成具有400nm或更短的激光波长短的第一脉冲激光束和波长大于400nm的第二脉冲激光束，第一和第二脉冲激光束 重叠并从保护层上方施加到导电连接上。 优选地，第二脉冲激光器在时间之后施加在第一脉冲层之后。

公开(公告)号：US07123635B2

公开(公告)日：2006-10-17

申请号：US10619305

申请日：2003-07-14

申请人： Yusuke Tamaki ,  Kazuya Takasago ,  Taisuke Miura ,  Hitoshi Sekita

发明人： Yusuke Tamaki ,  Kazuya Takasago ,  Taisuke Miura ,  Hitoshi Sekita

IPC分类号： H01S3/04

CPC分类号： H01S3/042 ,  H01S3/025 ,  H01S3/027 ,  H01S3/0404

摘要： The present invention offers a laser oscillator device having sufficient cooling ability to maintain a lasing medium which generates high-density thermal energy at a temperature appropriate for use, while being capable of being made compact. The laser oscillator device comprises an excitation beam source for generating an excitation beam, a laser medium for receiving the excitation beam and performing optical amplification, a laser oscillator device for causing resonance of light emitted by the laser medium for laser oscillation, and a cooling system for cooling said laser medium, wherein the cooling system uses a gas as the heat-carrying medium.

摘要翻译： 本发明提供了具有足够的冷却能力的激光振荡器装置，以保持在适于使用的温度下产生高密度热能的激光介质，同时能够制造得紧凑。 激光振荡器装置包括用于产生激发光束的激发光束源，用于接收激发光束并执行光放大的激光介质，用于引起由激光介质发射的用于激光振荡的光的共振的激光振荡器装置，以及冷却系统 用于冷却所述激光介质，其中所述冷却系统使用气体作为所述载热介质。

公开(公告)号：US20060050748A1

公开(公告)日：2006-03-09

申请号：US11219062

申请日：2005-09-02

申请人： Tetsumi Sumiyoshi ,  Jun Sakuma

发明人： Tetsumi Sumiyoshi ,  Jun Sakuma

IPC分类号： H01S3/10 ,  H01S3/30

CPC分类号： G02F1/3534

摘要： A laser device that generates a CW laser beam in the ultraviolet range with a wavelength of less than 200 nm by inputting two laser beams having different wavelengths to a nonlinear optical crystal which is, for example, a CLBO crystal, to perform sum frequency mixing, and among the two laser beams, at least one laser beam is output from a fiber laser device. Thereby, the volume of the laser device portion of a processing device or a measuring device that uses an ultraviolet laser beam can be made small, and the effective use of workspace can be realized.

摘要翻译： 一种激光装置，其通过将具有不同波长的两个激光束输入到例如CLBO晶体的非线性光学晶体上，在波长小于200nm的紫外范围内产生CW激光束，以进行和频混合， 并且在两个激光束中，从光纤激光器件输出至少一个激光束。 因此，能够使使用紫外线激光的处理装置或测量装置的激光装置部分的体积小，能够实现工作空间的有效利用。

公开(公告)号：US20040066811A1

公开(公告)日：2004-04-08

申请号：US10619305

申请日：2003-07-14

申请人： Cyber Laser Inc.

发明人： Yusuke Tamaki ,  Kazuya Takasago ,  Taisuke Miura ,  Hitoshi Sekita

IPC分类号： H01S003/04

CPC分类号： H01S3/042 ,  H01S3/025 ,  H01S3/027 ,  H01S3/0404

摘要： The present invention offers a laser oscillator device having sufficient cooling ability to maintain a lasing medium which generates high-density thermal energy at a temperature appropriate for use, while being capable of being made compact. The laser oscillator device comprises an excitation beam source for generating an excitation beam, a laser medium for receiving the excitation beam and performing optical amplification, a laser oscillator device for causing resonance of light emitted by the laser medium for laser oscillation, and a cooling system for cooling said laser medium, wherein the cooling system uses a gas as the heat-carrying medium.

摘要翻译： 本发明提供了具有足够的冷却能力的激光振荡器装置，以保持在适于使用的温度下产生高密度热能的激光介质，同时能够制造得紧凑。 激光振荡器装置包括用于产生激发光束的激发光束源，用于接收激发光束并执行光放大的激光介质，用于引起由激光介质发射的用于激光振荡的光的共振的激光振荡器装置，以及冷却系统 用于冷却所述激光介质，其中所述冷却系统使用气体作为所述载热介质。

公开(公告)号：US08124000B2

公开(公告)日：2012-02-28

申请号：US11997607

申请日：2006-07-27

申请人： Susumu Tsujikawa ,  Yoshio Otani ,  Tetsumi Sumiyoshi

发明人： Susumu Tsujikawa ,  Yoshio Otani ,  Tetsumi Sumiyoshi

IPC分类号： B23K26/36 ,  B29D11/00

CPC分类号： G02F1/133516 ,  B23K26/0624 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/361 ,  B23K26/40 ,  B23K2103/172

摘要： A method for removing and modifying a protrusion by using a short pulse laser is provided for modifying a color filter. In a color filter modifying method, a transparent substrate (2) is scanned with a beam in a parallel direction, while irradiating a protrusion (8) generated on the color filters (3-1, 3-2, 3-3) formed on a transparent substrate (2) with a beam collected by a high NA condensing lens (18), and a protrusion (8) is removed or modified.

摘要翻译： 提供了通过使用短脉冲激光器去除和修改突起的方法来修改滤色器。 在滤色器修改方法中，在平行方向上用光束扫描透明基板（2），同时照射在形成于其上的滤色器（3-1,3-2,3-3）上产生的突起（8） 具有由高NA聚光透镜（18）收集的光束的透明基板（2）和突起（8）被去除或修改。