POLISHING COMPOUND FOR COPPER WIRINGS AND METHOD FOR POLISHING SURFACE OF SEMICONDUCTOR INTEGRATED CIRCUIT
    11.
    发明申请
    POLISHING COMPOUND FOR COPPER WIRINGS AND METHOD FOR POLISHING SURFACE OF SEMICONDUCTOR INTEGRATED CIRCUIT 审中-公开
    用于铜线的抛光化合物和用于抛光半导体集成电路表面的方法

    公开(公告)号:US20080064211A1

    公开(公告)日:2008-03-13

    申请号:US11935043

    申请日:2007-11-05

    IPC分类号: H01L21/302 H01L21/461

    CPC分类号: H01L21/3212 C09G1/02

    摘要: To provide a technique for realizing high-precision surface planarization when copper is used as a wiring metal. A polishing compound is used which comprises water; a peroxide oxidizer; a surface protective agent for copper; at least one first chelating agent selected from the group consisting of tartaric acid, malonic acid, malic acid, citric acid, maleic acid, oxalic acid and fumaric acid; and at least one second chelating agent selected from the group consisting of triethylenetetramine, ethylenediaminediacetic acid, ethylenediaminetetraacetic acid, tetraethylenepentamine, glycol-ether-diaminetetraacetic acid, trans-1,2-cyclohexanediaminetetraacetic acid, o-phenanthroline, and derivatives thereof.

    摘要翻译: 提供一种当使用铜作为布线金属时实现高精度表面平坦化的技术。 使用包含水的抛光化合物; 过氧化物氧化剂; 铜表面保护剂; 至少一种选自酒石酸,丙二酸,苹果酸,柠檬酸,马来酸,草酸和富马酸的第一螯合剂; 和至少一种选自三亚乙基四胺,乙二胺二乙酸,乙二胺四乙酸,四亚乙基五胺,二醇醚 - 二胺四乙酸,反式-1,2-环己烷二胺四乙酸,邻菲咯啉及其衍生物的第二螯合剂。

    PROCESS FOR PRODUCING LITHIUM-CONTAINING COMPOSITE OXIDE
    13.
    发明申请
    PROCESS FOR PRODUCING LITHIUM-CONTAINING COMPOSITE OXIDE 有权
    生产含锂的复合氧化物的方法

    公开(公告)号:US20070264573A1

    公开(公告)日:2007-11-15

    申请号:US11828009

    申请日:2007-07-25

    摘要: To provide a process for a lithium-containing composite oxide for a positive electrode for a lithium secondary battery, which has a large volume capacity density and high safety, and is excellent in the charge and discharge cyclic durability and low temperature characteristics. A process for producing a lithium-containing composite oxide represented by the formula LipNxMyOzFa (wherein N is at least one element selected from the group consisting of Co, Mn and Ni, M is at least one element selected from the group consisting of Al, alkaline earth metal elements and transition metal elements other than N, 0.9≦p≦1.2, 0.95≦x≦2.00, 0≦y≦0.05, 1.9≦z≦4.2 and 0≦a≦0.05), which comprises firing a mixture of a lithium source, an N element source, an M element source and if necessary, a fluorine source, characterized in that an aqueous solution having an M element source dissolved therein is mixed with an N element source powder or its pulverized product to form a slurry; if necessary after being pulverized, the slurry is dried for granulation to obtain a granulated product, which is mixed with a lithium source powder and if necessary, a fluorine source powder to obtain a mixture; and the mixture is fired at from 700 to 1,100° C. in an oxygen-containing atmosphere.

    摘要翻译: 为了提供具有大容量密度和高安全性的用于锂二次电池用正极的含锂复合氧化物的方法,并且充放电循环耐久性和低温特性优异。 一种制备由下式表示的含锂复合氧化物的方法:其中R 1,R 2,R 2,R 3, (其中N是选自Co,Mn和Ni中的至少一种元素,M是选自Al,碱土金属元素和过渡金属中的至少一种元素) 除了N,0.9 <= p <= 1.2,0.95 <= x <= 2.00,0 <= y <= 0.05,1.9 <= z <= 4.2和0 <= a <= 0.05),其包括烧 锂源,N元素源,M元素源和必要时的氟源的混合物,其特征在于将其中溶解有M元素源的水溶液与N元素源粉末或其粉碎产物混合形成 泥浆 如果需要,粉碎后,将浆料干燥造粒,得到粒状物,将其与锂源粉末混合,根据需要与需要的氟源粉末混合,得到混合物; 在含氧气氛中将混合物在700〜1100℃下烧成。

    Positive electrode active material for lithium secondary battery and process for producing the same
    16.
    发明申请
    Positive electrode active material for lithium secondary battery and process for producing the same 审中-公开
    锂二次电池用正极活性物质及其制造方法

    公开(公告)号:US20060263690A1

    公开(公告)日:2006-11-23

    申请号:US10529289

    申请日:2003-09-25

    IPC分类号: H01M4/58 H01M4/52

    摘要: A positive electrode active material for a lithium secondary battery containing a lithium-cobalt composite oxide, which has a large volume capacity density, has a high safety and is excellent in charge and discharge cyclic durability, and its production process, are provided. A lithium-cobalt composite oxide represented by the formula LipCoxMyOzFa (wherein M is a transition metal element other than Co or an alkaline earth metal element, 0.9≦p≦1.1, 0.980≦x≦1.000, 0≦y≦0.02, 1.9≦z≦2.1, x+y=1 and 0≦a≦0.02) and comprising a mixture containing substantially spherical hard first particles of lithium-cobalt composite oxide having such a sharp particle size distribution that the volume basis cumulative size D10 is at least 50% of the average particle size D50, and the volume basis cumulative size D90 is at most 150% of the average particle size D50, and second particles of lithium-cobalt composite oxide filling the space among the first particles, in a mass ratio of first particles/second particles of from 1/2 to 9/1, and process for producing the same.

    摘要翻译: 提供了具有大体积容量密度的含有锂钴复合氧化物的锂二次电池用正极活性物质,其安全性高,充放电循环耐久性优异,其制造方法。 由下式表示的锂钴复合氧化物:由下式表示的锂 - 钴复合氧化物: a(其中M是除Co或碱土金属元素以外的过渡金属元素,0.9 <= p <= 1.1,0.980 <= x <= 1.000,0 <= y <= 0.02,1.9 < z <= 2.1,x + y = 1,0 <= a <= 0.02),并且包括含有基本上球形的硬质的第一个具有如此尖锐的粒度分布的锂 - 钴复合氧化物颗粒的混合物的混合物,体积基础累积尺寸D10为 平均颗粒尺寸D50的至少50%,体积基础累积尺寸D90为平均粒径D50的至多150%,并且以质量计填充第一颗粒之间的空间的第二种锂 - 钴复合氧化物颗粒 第一颗粒/第二颗粒的​​比率为1/2至9/1,及其制备方法。

    Semiconductor polishing compound, process for its production and polishing method
    17.
    发明申请
    Semiconductor polishing compound, process for its production and polishing method 审中-公开
    半导体抛光剂,其生产和抛光方法

    公开(公告)号:US20050126080A1

    公开(公告)日:2005-06-16

    申请号:US11039848

    申请日:2005-01-24

    CPC分类号: H01L21/31053 C09G1/02

    摘要: A semiconductor polishing compound comprising cerium oxide abrasive grains, water and an additive, wherein the additive is a water-soluble organic polymer such as ammonium polyacrylate or an anionic surfactant, the pH at 25° C. is from 3.5 to 6, and the concentration of the additive is from 0.01 to 0.5% based on the total mass of the polishing compound. This polishing compound simultaneously has dispersion stability, excellent scratch characteristics and excellent polishing planarization characteristics. In particular, this polishing compound provides excellent planarization characteristics having dishing fluctuation reduced, when used for polishing a semiconductor substrate having a silicon nitride film 3 and a silicon oxide film 2 formed on a silicon substrate 1. Further, the time for polishing a pattern wafer can be shortened by using this polishing compound.

    摘要翻译: 包含氧化铈磨粒,水和添加剂的半导体抛光化合物,其中添加剂是水溶性有机聚合物如聚丙烯酸铵或阴离子表面活性剂,25℃时的pH为3.5至6,并且浓度 的添加剂基于抛光化合物的总质量为0.01至0.5%。 该抛光化合物同时具有分散稳定性,优异的划痕特性和优异的抛光平面化特性。 特别地,当用于研磨形成在硅衬底1上的具有氮化硅膜3和氧化硅膜2的半导体衬底时,该抛光化合物提供具有凹陷波动减小的优异的平坦化特性。 此外,通过使用该研磨用化合物,可以缩短研磨图案晶片的时间。

    Method for synthesizing a composite oxide by citrating process
    18.
    发明授权
    Method for synthesizing a composite oxide by citrating process 失效
    通过柠檬酸化方法合成复合氧化物的方法

    公开(公告)号:US5168095A

    公开(公告)日:1992-12-01

    申请号:US657942

    申请日:1991-02-21

    摘要: A composite oxide synthesized by a citrating process and utilized in functional ceramics materials is prepared by the following process. Co-precipitants or mixtures of at least one component selected from the group consisting of carbonates, basic copper and/or hydroxides of elements which compose a composite oxide are reacted with citric acid in an aqueous solution or in an organic solvent. The elements are selected from at least one element of the group consisting of Y, rare earth elements, transition elements, and alkali metal or alkaline earth metal elements. The citrate compound formed is baked to complete the composite oxide.The composite oxide synthesized by this invention has superconduction at the most temperature of 93.degree. K. with excellent Meissner effect.

    摘要翻译: 通过柠檬酸化合成并用于功能性陶瓷材料的复合氧化物通过以下方法制备。 与选自组成复合氧化物的元素的碳酸盐,碱性铜和/或氢氧化物中的至少一种组分的共沉淀剂或混合物在柠檬酸的水溶液或有机溶剂中反应。 元素选自由Y,稀土元素,过渡元素和碱金属或碱土金属元素组成的组中的至少一种元素。 将形成的柠檬酸盐化合物烘烤以完成复合氧化物。 通过本发明合成的复合氧化物在93°K的最高温度下具有超导性,具有优良的Meissner效应。

    Air electrode material powder for solid oxide fuel cell and its production process
    19.
    发明授权
    Air electrode material powder for solid oxide fuel cell and its production process 有权
    固体氧化物燃料电池用空气极材料粉及其制备方法

    公开(公告)号:US09379391B2

    公开(公告)日:2016-06-28

    申请号:US14451197

    申请日:2014-08-04

    摘要: To provide an air electrode material powder for a solid oxide fuel cell, comprising a novel LSCF powder having a highly uniform composition suitable as an air electrode material for a solid oxide fuel cell, and its production process.A composite oxide having a perovskite structure and containing lanthanum, strontium, cobalt, iron and oxide, wherein the dispersion point determined by the peak intensity [La] of the Lα1 characteristic X-ray of lanthanum and the peak intensity [Sr] of the Lα1 characteristic X-ray of strontium as obtained by EPMA measurement, is present within a range of the formula (1) and the dispersion point determined by the peak intensity [Co] of the Kα1 characteristic X-ray of cobalt and the peak intensity [Fe] of the Kα1 characteristic X-ray of iron is present within a range of the formula (2): a[La]−150≦[Sr]≦a[La]+150  (1) b[Co]−300≦[Fe]≦b[Co]+300  (2) wherein 0.2≦a≦1.0 and 0.1≦b≦4.0.

    摘要翻译: 为了提供一种固体氧化物型燃料电池用空气极材料粉末及其制造方法,其特征在于,具有适合作为固体氧化物型燃料电池用空气极性材料的高度均匀组成的新型LSCF粉末。 具有钙钛矿结构并含有镧,锶,钴,铁和氧化物的复合氧化物,其中由镧的Lα1特征X射线的峰强度[La]和Lα1的峰强度[Sr] 通过EPMA测定获得的锶特征X射线存在于式(1)的范围内,并且由钴的Kα1特征X射线的峰强度[Co]确定的色散点和峰强度[Fe ]]]>在式(2)的范围内存在铁的Kα1特征X射线:a [La] -150&nlE; [Sr]&nlE; a [La] +150(1)b [Co] -300& [Fe]&nlE; b [Co] +300(2)其中0.2&nlE; a&nlE; 1.0和0.1&nlE; b&nlE; 4.0。

    Fluoroalkyl group-containing n-substituted (meth)acrylamide compound, polymer thereof, and use thereof
    20.
    发明授权
    Fluoroalkyl group-containing n-substituted (meth)acrylamide compound, polymer thereof, and use thereof 有权
    含氟烷基的正取代(甲基)丙烯酰胺化合物,其聚合物及其用途

    公开(公告)号:US09000110B2

    公开(公告)日:2015-04-07

    申请号:US13391120

    申请日:2010-08-17

    摘要: A compound represented by the following formula (a): CH2═CR1—CONJ-CGR2—(CH2)n—COO-Q1-Rf1  (a) is provided. This compound is capable of forming a polymer having an oil repellency equivalent to polymers containing a polyfluoroalkyl group containing at least 8 carbon atoms, although the polyfluoroalkyl group contains up to 6 carbon atoms. In the formula, R1 is hydrogen atom or methyl group, R2 is hydrogen atom or a group represented by —(CH2)m—COO-Q2-Rf2 (r), n and m are independently an integer of 0 to 4, Rf1 and Rf2 are independently a polyfluoroalkyl group or a polyfluoroether group containing 1 to 6 carbon atoms, Q1 and Q2 are independently single bond or a divalent linkage group, J is hydrogen atom or an alkyl group containing 1 to 3 carbon atoms, and G is hydrogen atom or an alkyl group containing 1 to 3 carbon atoms.

    摘要翻译: 提供由下式(a)表示的化合物:CH2 = CR1-CONJ-CGR2-(CH2)n-COO-Q1-Rf1(a)。 尽管多氟烷基含有最多6个碳原子,但是该化合物能够形成斥油性等同于含有至少8个碳原子的多氟烷基的聚合物的聚合物。 式中,R 1为氢原子或甲基,R 2为氢原子或 - (CH 2)m -COO-Q 2 -R f 2(r)表示的基团,n和m分别为0〜4的整数,Rf 1及 Rf2独立地为含有1〜6个碳原子的多氟烷基或多氟醚基,Q1和Q2独立地为单键或二价连接基团,J为氢原子或含有1〜3个碳原子的烷基,G为氢原子 或含有1至3个碳原子的烷基。