公开(公告)号：US20240077437A1

公开(公告)日：2024-03-07

申请号：US17902926

申请日：2022-09-05

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Alexander Krokhmal ,  Asher Peled

IPC: G01N23/223

CPC classification number: G01N23/223 ,  G01N2223/076 ,  G01N2223/3306 ,  G01N2223/507

Abstract: A system for X-ray analysis, includes: (a) an X-ray analysis assembly configured to (i) direct an X-ray beam to impinge on a surface of a sample, and (ii) receive fluorescence radiation excited from the sample in response to the impinged X-ray beam, (b) a target assembly including measurement targets: placed in an optical path between the X-ray analysis assembly and the sample, and configured to move between (i) one or more first positions in which one or more of the measurement targets are positioned in the X-ray beam, and (ii) one or more second positions in which the optical path is unobstructed by the target assembly, and (c) a processor, configured to control movement of the target assembly between the first and second positions, for alternately, (i) monitoring properties of the X-ray beam using the measurement targets, and (ii) performing the X-ray analysis at a measurement site of the sample.

公开(公告)号：US20240077435A1

公开(公告)日：2024-03-07

申请号：US18307823

申请日：2023-04-27

Applicant: Bruker Technologies Ltd.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166

CPC classification number: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166 ,  G01N2223/6116

Abstract: A method for evaluating a sample that includes an array of structural elements. The method includes obtaining a first small angle x-ray scattering (SAXS) pattern for a first angular relationship between the sample and an x-ray beam that exhibits a first collimation value and has a given cross-sectional area on a first side of the sample. A second SAXS pattern is obtained for a second angular relationship between the sample and the x-ray beam, while the x-ray beam exhibits a second collimation value that differs from the first collimation value while maintaining the given cross-sectional area of the x-ray beam on the first side of the sample, wherein the second angular relationship differs from the first angular relationship.

公开(公告)号：US20210285898A1

公开(公告)日：2021-09-16

申请号：US17254281

申请日：2019-07-04

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166

Abstract: An x-ray apparatus, that may include a mount that is configured to hold a sample; an x-ray source, that is configured to direct an x-ray beam toward a first side of the sample; a detector, positioned downstream to a second side of the sample, the detector is configured to detect, during a sample measurement period, at least a part of x-rays that have been transmitted through the sample; and an x-ray intensity detector that is positioned, during a beam intensity monitoring period at a measurement position that is located between the x-ray source and the first side of the sample, so as to detect at least a part of the x-ray beam before the x-ray beam reaches the sample.

公开(公告)号：US20240377342A1

公开(公告)日：2024-11-14

申请号：US18783482

申请日：2024-07-25

Applicant: Bruker Technologies Ltd.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166

Abstract: An x-ray apparatus includes a mount that is configured to hold a sample and an x-ray source that is configured to direct an x-ray beam toward a first side of the sample. A small angle x-ray scattering (SAXS) detector is positioned downstream to a second side of the sample, and configured to detect at least a part of a SAXS pattern formed by x-rays that have been transmitted through the sample and exited through the second side. An x-ray fluorescence (XRF) detector is configured to detect fluorescent x-rays emitted from the sample, wherein the XRF detector comprises an aperture.

公开(公告)号：US20240027374A1

公开(公告)日：2024-01-25

申请号：US18333555

申请日：2023-06-13

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Andrei Baranovskiy ,  Inbar Grinberg ,  Michael G. Greene ,  Matthew Wormington

IPC: G01N23/207 ,  G06N3/08

CPC classification number: G01N23/207 ,  G06N3/08 ,  G01N2223/6116

Abstract: A method for training a neural network (NN), the method includes: receiving a training dataset including: (a) multiple pairs of: (i) a diffraction image indicative of X-ray photons diffracted from structures formed in a sample responsively to directing an incident X-ray beam at an angle relative to the sample, and (ii) a label, including: a first parameter indicative of at least a first property of the structures, and a second parameter indicative of at least a second property of the incident X-ray beam, and (b) multiple predefined outputs for the multiple pairs, respectively. The NN is trained to obtain the predefined outputs by: (i) applying the NN to at least a given pair of the pairs, and (ii) responsively to receiving from the NN an estimated output of the given pair, providing the NN with a given predefined output of the predefined outputs that corresponds to the given pair.

公开(公告)号：US12249059B2

公开(公告)日：2025-03-11

申请号：US17709451

申请日：2022-03-31

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Alexander Krokhmal ,  Alexander Brandt ,  Dor Perry ,  Asher Peled ,  Matthew Wormington

IPC: G06T7/00

Abstract: A system includes first and second imaging assemblies, and a processor. The first imaging assembly is configured to produce a first image of a measurement site in a sample. The second imaging assembly is coupled with a measurement assembly and is configured to produce a second image of the measurement site. The processor is configured to: (i) perform, based on the first image, a first movement of the sample relative to the measurement assembly, (ii) perform, based on the second image, a second movement of the sample for aligning the sample with the measurement assembly, and (iii) control the measurement assembly to perform a measurement in the measurement site.

公开(公告)号：US20230316487A1

公开(公告)日：2023-10-05

申请号：US17709451

申请日：2022-03-31

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Alexander Krokhmal ,  Alexander Brandt ,  Dor Perry ,  Asher Peled ,  Matthew Wormington

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G06T2207/10116 ,  G06T2207/30148

Abstract: A system includes first and second imaging assemblies, and a processor. The first imaging assembly is configured to produce a first image of a measurement site in a sample. The second imaging assembly is coupled with a measurement assembly and is configured to produce a second image of the measurement site. The processor is configured to: (i) perform, based on the first image, a first movement of the sample relative to the measurement assembly, (ii) perform, based on the second image, a second movement of the sample for aligning the sample with the measurement assembly, and (iii) control the measurement assembly to perform a measurement in the measurement site.

公开(公告)号：US11703464B2

公开(公告)日：2023-07-18

申请号：US17505696

申请日：2021-10-20

Applicant: Bruker Technologies Ltd.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01T1/166 ,  G01N23/223

CPC classification number: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166 ,  G01N2223/6116

Abstract: A method for evaluating an array of high aspect ratio (HAR) structures on a sample includes illuminating the sample with an x-ray beam along a first axis parallel to within two degrees to the HAR structures in the array and sensing a first pattern of small angle x-ray scattering (SAXS) scattered from the sample while illuminating the sample along the first axis. The sample is illuminated with the x-ray beam along a second axis that is oblique to the HAR structures in the array, and a second pattern of the SAXS scattered from the sample is sensed while illuminating the sample along the second axis. Information is extracted with respect to the HAR structures based on the first and second patterns.