中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

19 records (took 0.017 seconds)

    Apparatus and methods for processing a substrate
    11.
    发明授权
    Apparatus and methods for processing a substrate 有权
    用于处理衬底的装置和方法

    公开(公告)号：US08968485B2

    公开(公告)日：2015-03-03

    申请号：US13251064

    申请日：2011-09-30

    Applicant: Arjun Mendiratta ,  Cheng-Yu Lin ,  David Mui

    Inventor： Arjun Mendiratta ,  Cheng-Yu Lin ,  David Mui

    IPC: B08B3/00 ,  B08B1/02 ,  B08B3/04 ,  H01L21/02 ,  H01L21/67

    CPC classification number: B08B1/02 ,  B08B3/04 ,  H01L21/02065 ,  H01L21/02074 ,  H01L21/6704 ,  H01L21/67051

    Abstract: An apparatus for processing a substrate, comprising: a process chamber having a track; a carrier connected to the track; upper and lower proximity heads in the chamber and positioned along the path, the proximity heads having opposing faces that define a gap in which a meniscus of fluid is formed, the path being defined along the gap between the opposing faces; a first pre-wet dispenser and a second pre-wet dispenser disposed along side of the upper proximity head and directed toward the path; a drive for moving each of the pre-wet dispensers between a center position along the length of the upper proximity head and opposite outer positions near outer ends of the upper proximity head; and a pre-wet controller for causing the drive to move each of the first and second pre-wet dispensers based on a position of the carrier when moved under the first and second pre-wet dispensers.

    Abstract translation: 一种用于处理衬底的设备，包括：具有轨道的处理室; 连接到轨道的载体; 所述腔室中的上和下邻近头部沿所述路径定位，所述邻近头部具有限定形成有液体弯液面的间隙的相对面，所述路径沿着相对面之间的间隙限定; 第一预湿式分配器和第二预湿式分配器，其设置在上接近头部的侧面并且朝向路径; 驱动器，用于在沿着上邻近头部的长度的中心位置和靠近上接近头部的外端的相对的外部位置之间移动每个预湿式分配器; 以及预湿式控制器，用于当所述第一和第二预湿式分配器下移动时，使得所述驱动器基于所述载体的位置移动所述第一和第二预湿式分配器中的每一个。

    VALVE DEVICE
    12.
    发明申请
    VALVE DEVICE 审中-公开
    阀门设备

    公开(公告)号：US20130220455A1

    公开(公告)日：2013-08-29

    申请号：US13727279

    申请日：2012-12-26

    Applicant: Cheng-Yu LIN

    Inventor： Cheng-Yu LIN

    IPC: E03C1/28

    CPC classification number: E03C1/28 ,  E03C1/12 ,  E03F5/0407 ,  E03F2005/0417 ,  F16K31/1221 ,  Y10T137/7837 ,  Y10T137/7908

    Abstract: A drain valve device includes a base and a control unit removably disposed in the base. The control unit includes a valve and a resilient component positioned between the valve and the base. The drain valve device opens automatically as soon as water entering the base exceeds a predetermined level. The drain valve device shuts automatically as soon as water entering the base is less than a predetermined level. The drain valve device has advantages, namely simple structure, convenient of use, prevention of intrusion of odor and pests, easy to clean, and unlikely to get clogged.

    Abstract translation: 排水阀装置包括基座和可移除地设置在基座中的控制单元。 控制单元包括阀和位于阀与基座之间的弹性元件。 一旦进入基座的水超过预定水位，排水阀装置就会自动打开。 一旦进入底座的水小于预定水平，排水阀装置就会自动关闭。 排水阀装置具有结构简单，使用方便，防止臭味入侵，易于清洁，不易堵塞的优点。

    Speaker module of electronic device
    13.
    发明授权
    Speaker module of electronic device 有权
    电子设备扬声器模块

    公开(公告)号：US08150092B2

    公开(公告)日：2012-04-03

    申请号：US12427950

    申请日：2009-04-22

    Applicant: Ming-Shuo Huang ,  Chi-Cheng Liao ,  Cheng-Yu Lin

    Inventor： Ming-Shuo Huang ,  Chi-Cheng Liao ,  Cheng-Yu Lin

    IPC: H04R1/02

    CPC classification number: H04R1/02 ,  H04R2499/11

    Abstract: An acoustic speaker module of a portable electronic device includes an acoustic housing, an acoustic speaker, a chip card and an elastic member. The acoustic housing has an accommodation space, a first opening and a second opening. The acoustic speaker is seamlessly connected with the first opening. The chip card is disposed at the second opening. The elastic member and the chip card are disposed at the second opening to make the accommodation space to form a hermetical space.

    Abstract translation: 便携式电子设备的声音扬声器模块包括声学壳体，声学扬声器，芯片卡和弹性构件。 声学壳体具有容置空间，第一开口和第二开口。 声音扬声器与第一开口无缝连接。 芯片卡设置在第二开口处。 弹性构件和芯片卡设置在第二开口处以形成容纳空间以形成密封空间。

    Valve device
    15.
    发明授权
    Valve device 有权
    阀门装置

    公开(公告)号：US09038661B2

    公开(公告)日：2015-05-26

    申请号：US13727279

    申请日：2012-12-26

    Applicant: Cheng-Yu Lin

    Inventor： Cheng-Yu Lin

    IPC: E03F5/04 ,  E03C1/28 ,  E03C1/12 ,  F16K31/122

    CPC classification number: E03C1/28 ,  E03C1/12 ,  E03F5/0407 ,  E03F2005/0417 ,  F16K31/1221 ,  Y10T137/7837 ,  Y10T137/7908

    Abstract: A drain valve device includes a base and a control unit removably disposed in the base. The control unit includes a valve and a resilient component positioned between the valve and the base. The drain valve device opens automatically as soon as water entering the base exceeds a predetermined level. The drain valve device shuts automatically as soon as water entering the base is less than a predetermined level. The drain valve device has advantages, namely simple structure, convenient of use, prevention of intrusion of odor and pests, easy to clean, and unlikely to get clogged.

    Abstract translation: 排水阀装置包括基座和可移除地设置在基座中的控制单元。 控制单元包括阀和位于阀与基座之间的弹性元件。 一旦进入基座的水超过预定水位，排水阀装置就会自动打开。 一旦进入底座的水小于预定水平，排水阀装置就会自动关闭。 排水阀装置具有结构简单，使用方便，防止臭味入侵，易于清洁，不易堵塞的优点。

    Single substrate processing head for particle removal using low viscosity fluid
    16.
    发明授权
    Single substrate processing head for particle removal using low viscosity fluid 有权
    用于使用低粘度流体进行颗粒去除的单基板加工头

    公开(公告)号：US08584613B2

    公开(公告)日：2013-11-19

    申请号：US12165577

    申请日：2008-06-30

    Applicant: Arnold Kholodenko ,  Cheng-yu Lin ,  Leon Ginzburg ,  Mark Mandelboym ,  Gregory A. Tomasch ,  Anwar Husain

    Inventor： Arnold Kholodenko ,  Cheng-yu Lin ,  Leon Ginzburg ,  Mark Mandelboym ,  Gregory A. Tomasch ,  Anwar Husain

    IPC: B05C5/02

    CPC classification number: H01L21/67023 ,  H01L21/67051 ,  H01L21/67173 ,  H01L21/67748 ,  Y10T137/85938

    Abstract: A head for dispensing a thin film over a substrate is disclosed. The head includes a body assembly that extends between a first and a second end that is at least a width of the substrate. The body includes a main bore that is defined between the first and the second ends, the main bore connected to an upper side of a reservoir through a plurality of feeds that are defined between the main bore and the reservoir. The body also includes a plurality of outlets connected to a lower side of the reservoir and extend to an output slot. The plurality of feeds have a larger cross-sectional area than the plurality of outlets and the plurality of feeds are fewer than the plurality of outlets. Wherein fluid is configured to flow through the main bore, through the plurality of feeds along the bore and fill the reservoir up to at least the threshold level before fluid is evenly output as a film out of the output slot onto the substrate.

    Abstract translation: 公开了一种用于在衬底上分配薄膜的头部。 头部包括主体组件，其在至少基板的宽度的第一端和第二端之间延伸。 主体包括限定在第一和第二端之间的主孔，主孔通过限定在主孔和储存器之间的多个进料连接到储存器的上侧。 主体还包括连接到储存器的下侧并延伸到输出槽的多个出口。 多个进料具有比多个出口更大的横截面积，并且多个进料少于多个出口。 其中流体构造成流过主孔，通过沿着孔的多个进料，并且在流体均匀地输出为输出槽之外的流体到基板上之前将储存器填充到至少阈值水平。

    SINGLE SUBSTRATE PROCESSING HEAD FOR PARTICLE REMOVAL USING LOW VISCOSITY FLUID
    17.
    发明申请
    SINGLE SUBSTRATE PROCESSING HEAD FOR PARTICLE REMOVAL USING LOW VISCOSITY FLUID 有权
    使用低粘度流体进行颗粒去除的单基板加工头

    公开(公告)号：US20090320942A1

    公开(公告)日：2009-12-31

    申请号：US12165577

    申请日：2008-06-30

    Applicant: Arnold Kholodenko ,  Cheng-yu Lin ,  Leon Ginzburg ,  Mark Mandelboym ,  Gregory A. Tomasch ,  Anwar Husain

    Inventor： Arnold Kholodenko ,  Cheng-yu Lin ,  Leon Ginzburg ,  Mark Mandelboym ,  Gregory A. Tomasch ,  Anwar Husain

    IPC: F16L41/00

    CPC classification number: H01L21/67023 ,  H01L21/67051 ,  H01L21/67173 ,  H01L21/67748 ,  Y10T137/85938

    Abstract: A head for dispensing a thin film over a substrate is disclosed. The head includes a body assembly that extends between a first and a second end that is at least a width of the substrate. The body includes a main bore that is defined between the first and the second ends, the main bore connected to an upper side of a reservoir through a plurality of feeds that are defined between the main bore and the reservoir. The body also includes a plurality of outlets connected to a lower side of the reservoir and extend to an output slot. The plurality of feeds have a larger cross-sectional area than the plurality of outlets and the plurality of feeds are fewer than the plurality of outlets. Wherein fluid is configured to flow through the main bore, through the plurality of feeds along the bore and fill the reservoir up to at least the threshold level before fluid is evenly output as a film out of the output slot onto the substrate.

    Abstract translation: 公开了一种用于在衬底上分配薄膜的头部。 头部包括主体组件，其在至少基板的宽度的第一端和第二端之间延伸。 主体包括限定在第一和第二端之间的主孔，主孔通过限定在主孔和储存器之间的多个进料连接到储存器的上侧。 主体还包括连接到储存器的下侧并延伸到输出槽的多个出口。 多个进料具有比多个出口更大的横截面积，并且多个进料少于多个出口。 其中流体构造成流过主孔，通过沿着孔的多个进料，并且在流体均匀地输出为输出槽之外的流体到基板上之前将储存器填充到至少阈值水平。

Patent Agency Ranking