Photo-patternable and developable silsesquioxane resins for use in device fabrication
    14.
    发明授权
    Photo-patternable and developable silsesquioxane resins for use in device fabrication 有权
    用于器件制造的光可图案化和可开发的倍半硅氧烷树脂

    公开(公告)号:US09086626B2

    公开(公告)日:2015-07-21

    申请号:US14007671

    申请日:2012-03-28

    IPC分类号: G03F7/075

    CPC分类号: G03F7/0757

    摘要: A coatable resin solution capable of forming a coating when applied to the surface of a substrate that is photo-patternable and developable as a dielectric material upon exposure to ultraviolet radiation is provided. The resin solution comprises a silsequioxane-based (SSQ-based) resin, at least one initiator, and an organic solvent. The SSQ-based resin includes both a hydride component and at least one photo-curable component. The resulting coating exhibits a dielectric constant that is less than or equal to about 3.5.

    摘要翻译: 提供了一种可涂覆的树脂溶液,当涂布在基材的表面上时,其可以在曝光于紫外线照射下作为电介质材料可光刻图形显影。 树脂溶液包含基于硅氧烷的(SSQ)树脂,至少一种引发剂和有机溶剂。 SSQ型树脂包括氢化物组分和至少一种可光固化组分。 所得涂层的介电常数小于或等于约3.5。

    Benzocyclobutene-terminated polymides
    15.
    发明授权
    Benzocyclobutene-terminated polymides 失效
    苯并环丁烯封端的聚酰亚胺

    公开(公告)号:US5464925A

    公开(公告)日:1995-11-07

    申请号:US248906

    申请日:1994-05-25

    IPC分类号: C07D209/48 C08G73/10

    CPC分类号: C07D209/48 C08G73/101

    摘要: The present invention is an oligomer represented by the formula: ##STR1## wherein X is a moiety selected from the group consisting of: ##STR2## where each Y is independently S, O, CH.sub.2, C.dbd.O, CH.sub.3 --C--CH.sub.3, O.dbd.S.dbd.O, or CF.sub.3 --C--CF.sub.3.In another aspect, the present invention is a polymer of the above-described oligomer.

    摘要翻译: 本发明是由下式表示的低聚物:其中X是选自下组的部分:其中每个Y独立地为S, O,CH2,C = O,CH3-C-CH3,O = S = O或CF3-C-CF3。 另一方面,本发明是上述低聚物的聚合物。