摘要:
The invention aims at solving the problems of throughput deterioration, reproducibility deterioration and plasma discharge instability when performing continuous discharge during multiple steps of plasma etching. According to the present invention, the gas supply unit is operated while determining the timing for switching conditions of a plurality of plasma etching steps, and the gas flow rate and gas pressure are controlled so that the pressure of processing gas supplied from the gas supply unit to the processing chamber does not fall below a predetermined pressure immediately subsequent to switching steps. For example, upon switching processing gases, the end point of a step is predicted based on an interference film thickness meter, and prior to the end point by two seconds or more, the flow rate of MFC is set to the gas flow rate for the subsequent step and the gas is flown to the exhaust device, so that simultaneously as when the end point signal is received, the processing gases are switched by switching valves.
摘要:
The present invention relates to a pesticide with surfactant of alkyl glucoside-derivatives blended into hydrogenated starch hydrolysate. Pesticide of the present invention, therefore, causes no concern about occurrence of pesticide-resistance, giving no adverse effect to agricultural and horticultural products, while working better to control harmful organisms at lower concentrations than conventional. Moreover, it is pesticide of environmental preservation type with better safety for humans and animals as well as ecological friedliness.
摘要:
A front cross member 202 of a rear subframe 53 has a recessed portion 221 which is recessed continuously over a longitudinal direction thereof. The recessed portion 221 is formed at a lower portion of the cross member 202 and is recessed upwardly, and an elastic bush 240 is fitted in a resulting recess. The elastic bush 240 has an elastic element 243 which connects together an inner tube 241 and an outer tube 242 which surrounds the inner tube 231 and is mounted on the rear subframe 53 at the recessed portion 221 as a bracket. The bracket 221 has bracket plate portions 263a, 263b which each have a plane which is brought into contact with an end face of the inner tube and folded-back portions 235, 235. The bracket 221 is disposed in such a manner as to hold therein both ends of the inner tube 241 and is configured such that the elastic bush 240 is mounted thereon by passing a bolt 224 through the inner tube 241.
摘要:
A particle therapy system, as one example of a particle beam irradiation system, comprises a charged particle beam generator and an irradiation field forming apparatus. An ion beam from the charged particle beam generator is irradiated to a diseased part in the body of a patient through the irradiation field forming apparatus. A scattering compensator and a range modulation wheel (RMW) are disposed on the upstream side in a direction of beam advance and are movable along a beam axis. The movement of the scattering compensator and the RMW adjusts a size of the ion beam entering a scatterer device, whereby a change in scattering intensity of the ion beam in the scatterer device is adjusted. As a result, a penumbra in dose distribution is reduced and a more uniform dose distribution in a direction perpendicular to the direction of beam advance is obtained in the diseased part.
摘要:
A polarizing beam splitter for separating an upstream beam from a downstream beam according to the polarization of an incident beam is provided between first and second light sources emitting laser beams at respective wavelength and an objective lens. A phase plate for providing a phase difference to a beam incident on the polarizing beam splitter is provided between the polarizing beam splitter and the light sources. A portion of the laser beam incident on the polarizing beam splitter is reflected by the polarizing beam splitter and caused to be incident on a photo-detecting unit, so as to prevent an unnecessary portion of the laser beam is incident on the photo-detecting unit. According to the invention, the laser beam is used efficiently and the cost of fabricating an optical disk apparatus is reduced by eliminating a need for a gain controlling circuit in the photo-detecting unit.
摘要:
Two joining members different in high temperature deformation resistance are disposed in an abutted manner. The rotational direction of a probe of a joining member is set to coincide with a rotational direction rotating from the joining member having lower high temperature deformation resistance toward the joining member having higher high temperature deformation resistance. Then, the rotating probe is inserted into the abutting portion of the joining members. The probe is advanced along the abutting portion with the probe inserted in the abutting portion to perform friction stir joining. As a result, a butt joint having high joining strength can be obtained.
摘要:
Disclosed is a medical particle irradiation apparatus comprising a rotating gantry 1 including an irradiation unit 4 emitting particle beams; an annular frame 16 located within and supported by the rotating gantry 1 such that it can rotate relative to the rotating gantry 1; an annular frame 15 fixedly located opposite the annular frame 16; an anti-corotation mechanism 34 being in contact with both the annular frames 16 and 15 to prevent the annular frame 16 from rotating together with the rotating gantry 1 during rotation of the rotating gantry 1; and a flexible moving floor 17 interposed between the annular frames 15 and 16, the flexible moving floor 17 being engaged with the annular frames 15 and 16 in such a manner as to move freely such that its bottom is substantially level and that it moves as the rotating gantry rotates.
摘要:
The present invention provides an increased degree of uniformity of radiation dose distribution for the interior of a diseased part. A particle beam therapy system includes a charged particle beam generation apparatus and an irradiation apparatus. An ion beam is generated by the charged particle beam generation apparatus. The irradiation apparatus exposes a diseased part to the generated ion beam. A scattering device, a range adjustment device, and a Bragg peak spreading device are installed upstream of a first scanning magnet and a second scanning magnet. The scattering device and the range adjustment device are combined together and moved along a beam axis, whereas the Bragg peak spreading device is moved independently along the beam axis. The scattering device moves to adjust the degree of ion beam scattering. The range adjustment device moves to adjust ion beam scatter changes caused by an absorber thickness adjustment. The Bragg peak spreading device moves to adjust ion beam scatter changes arising out of an SOBP device. These adjustments provide uniformity of radiation dose distribution for the diseased part.
摘要:
An accelerator system which can be implemented in a small size at low manufacturing cost and which can nonetheless ensure a high utilization efficiency of the ion beam. The system includes an ion source for generating an ion beam, pre-accelerators for accelerating the ion beam generated by the ion source, an radioisotope producing unit for irradiating a target with the ion beam accelerated by the pre-accelerators for producing radioisotopes, a synchrotron into which the ion beam accelerated by the pre-accelerators is injected and from which the ion beam is ejected after acceleration, and a selector electromagnet for introducing the ion beam accelerated by the pre-accelerators into either the radioisotope producing unit or the synchrotron.
摘要:
A polarizing beam splitter for separating an upstream beam from a downstream beam according to the polarization of an incident beam is provided between first and second light sources emitting laser beams at respective wavelength and an objective lens. A phase plate for providing a phase difference to a beam incident on the polarizing beam splitter is provided between the polarizing beam splitter and the light sources. A portion of the laser beam incident on the polarizing beam splitter is reflected by the polarizing beam splitter and caused to be incident on a photo-detecting unit, so as to prevent an unnecessary portion of the laser beam is incident on the photo-detecting unit. According to the invention, the laser beam is used efficiently and the cost of fabricating an optical disk apparatus is reduced by eliminating a need for a gain controlling circuit in the photo-detecting unit.