Apparatus and method for plasma etching
    11.
    发明申请
    Apparatus and method for plasma etching 审中-公开
    用于等离子体蚀刻的装置和方法

    公开(公告)号:US20070199657A1

    公开(公告)日:2007-08-30

    申请号:US11500360

    申请日:2006-08-08

    IPC分类号: H01L21/306 C23F1/00

    摘要: The invention aims at solving the problems of throughput deterioration, reproducibility deterioration and plasma discharge instability when performing continuous discharge during multiple steps of plasma etching. According to the present invention, the gas supply unit is operated while determining the timing for switching conditions of a plurality of plasma etching steps, and the gas flow rate and gas pressure are controlled so that the pressure of processing gas supplied from the gas supply unit to the processing chamber does not fall below a predetermined pressure immediately subsequent to switching steps. For example, upon switching processing gases, the end point of a step is predicted based on an interference film thickness meter, and prior to the end point by two seconds or more, the flow rate of MFC is set to the gas flow rate for the subsequent step and the gas is flown to the exhaust device, so that simultaneously as when the end point signal is received, the processing gases are switched by switching valves.

    摘要翻译: 本发明旨在解决在等离子体蚀刻的多个步骤期间执行连续放电时的吞吐量劣化,再现性劣化和等离子体放电不稳定性的问题。 根据本发明,在确定多个等离子体蚀刻步骤的切换条件的定时的同时操作气体供给单元,并且控制气体流量和气体压力,使得从气体供应单元供应的处理气体的压力 到切换步骤之后,处理室不会下降到预定压力以下。 例如,在切换处理气体时,基于干涉膜厚度计预测台阶的终点,并且在终点2秒以上之前,将MFC的流量设定为 随后的步骤和气体流到排气装置,从而同时当接收到终点信号时,处理气体由切换阀切换。

    Pesticide of environmental preservation type
    12.
    发明申请
    Pesticide of environmental preservation type 审中-公开
    环保型农药

    公开(公告)号:US20070191285A1

    公开(公告)日:2007-08-16

    申请号:US10562903

    申请日:2003-07-01

    IPC分类号: A01N43/16

    摘要: The present invention relates to a pesticide with surfactant of alkyl glucoside-derivatives blended into hydrogenated starch hydrolysate. Pesticide of the present invention, therefore, causes no concern about occurrence of pesticide-resistance, giving no adverse effect to agricultural and horticultural products, while working better to control harmful organisms at lower concentrations than conventional. Moreover, it is pesticide of environmental preservation type with better safety for humans and animals as well as ecological friedliness.

    摘要翻译: 本发明涉及与氢化淀粉水解产物共混的烷基葡糖苷衍生物的表面活性剂的农药。 因此,本发明的农药不会引起农药抗性的发生,对农业和园艺产品没有不利影响,同时更好地控制比常规浓度低的有害生物。 此外,它是环保型杀虫剂,对人类和动物的安全性更好,生态学上也很好。

    Subframe for vehicle, and bush installation structure
    13.
    发明申请
    Subframe for vehicle, and bush installation structure 失效
    车辆子框架和衬套安装结构

    公开(公告)号:US20070024044A1

    公开(公告)日:2007-02-01

    申请号:US10574856

    申请日:2005-03-29

    摘要: A front cross member 202 of a rear subframe 53 has a recessed portion 221 which is recessed continuously over a longitudinal direction thereof. The recessed portion 221 is formed at a lower portion of the cross member 202 and is recessed upwardly, and an elastic bush 240 is fitted in a resulting recess. The elastic bush 240 has an elastic element 243 which connects together an inner tube 241 and an outer tube 242 which surrounds the inner tube 231 and is mounted on the rear subframe 53 at the recessed portion 221 as a bracket. The bracket 221 has bracket plate portions 263a, 263b which each have a plane which is brought into contact with an end face of the inner tube and folded-back portions 235, 235. The bracket 221 is disposed in such a manner as to hold therein both ends of the inner tube 241 and is configured such that the elastic bush 240 is mounted thereon by passing a bolt 224 through the inner tube 241.

    摘要翻译: 后副车架53的前横梁202具有在其纵向方向上连续凹陷的凹部221。 凹部221形成在横构件202的下部并向上凹入,并且弹性衬套240装配在所得到的凹部中。 弹性衬套240具有弹性元件243,该弹性元件243将内管241和围绕内管231的外管242连接在一起,并且作为支架在作为凹部221安装在后副框53上。 支架221具有托架板部263a,263b,每个托架板部分具有与内管的端面和折回部分235,235接触的平面。 支架221设置成保持在内管241的两端,并且通过使螺栓224穿过内管241而使弹性衬套240安装在其上。

    Optical disk apparatus compatible with different types of mediums
    15.
    发明申请
    Optical disk apparatus compatible with different types of mediums 失效
    与不同类型介质兼容的光盘设备

    公开(公告)号:US20060221799A1

    公开(公告)日:2006-10-05

    申请号:US11447078

    申请日:2006-06-06

    IPC分类号: G11B7/00

    摘要: A polarizing beam splitter for separating an upstream beam from a downstream beam according to the polarization of an incident beam is provided between first and second light sources emitting laser beams at respective wavelength and an objective lens. A phase plate for providing a phase difference to a beam incident on the polarizing beam splitter is provided between the polarizing beam splitter and the light sources. A portion of the laser beam incident on the polarizing beam splitter is reflected by the polarizing beam splitter and caused to be incident on a photo-detecting unit, so as to prevent an unnecessary portion of the laser beam is incident on the photo-detecting unit. According to the invention, the laser beam is used efficiently and the cost of fabricating an optical disk apparatus is reduced by eliminating a need for a gain controlling circuit in the photo-detecting unit.

    摘要翻译: 在发射各波长的激光束和物镜的第一和第二光源之间设置有用于根据入射光束的偏振从上游光束分离上游光束的偏振分束器。 在偏振分束器和光源之间设置有用于向入射到偏振分束器上的光束提供相位差的相位板。 入射到偏振分束器上的激光束的一部分被偏振分束器反射并入射到光检测单元上,以防止激光束的不必要部分入射到光检测单元 。 根据本发明,激光束被有效地利用,并且通过消除对光检测单元中的增益控制电路的需要来降低制造光盘装置的成本。

    Manufacturing method of butt joint, butt joint, manufacturing method of bent member, and friction stir joining method
    16.
    发明申请
    Manufacturing method of butt joint, butt joint, manufacturing method of bent member, and friction stir joining method 审中-公开
    对接制造方法,对接,弯曲部件的制造方法以及摩擦搅拌接合方法

    公开(公告)号:US20060151576A1

    公开(公告)日:2006-07-13

    申请号:US10519412

    申请日:2003-07-08

    IPC分类号: B23K20/12 B23K31/02

    摘要: Two joining members different in high temperature deformation resistance are disposed in an abutted manner. The rotational direction of a probe of a joining member is set to coincide with a rotational direction rotating from the joining member having lower high temperature deformation resistance toward the joining member having higher high temperature deformation resistance. Then, the rotating probe is inserted into the abutting portion of the joining members. The probe is advanced along the abutting portion with the probe inserted in the abutting portion to perform friction stir joining. As a result, a butt joint having high joining strength can be obtained.

    摘要翻译: 两个不同耐高温变形阻力的接合件以邻接的方式设置。 接合构件的探针的旋转方向被设定为与从具有较低的耐高温变形阻力的接合构件向具有较高耐高温变形阻力的接合构件转动的旋转方向一致。 然后,将旋转探针插入到接合部件的抵接部。 探头沿着邻接部分前进,探针插入邻接部分中以进行摩擦搅拌接合。 结果,可以获得具有高接合强度的对接接头。

    Medical particle irradiation apparatus
    17.
    发明授权
    Medical particle irradiation apparatus 失效
    医用颗粒物照射装置

    公开(公告)号:US07030396B2

    公开(公告)日:2006-04-18

    申请号:US10724217

    申请日:2003-12-01

    IPC分类号: G21G5/00 H01J37/14

    摘要: Disclosed is a medical particle irradiation apparatus comprising a rotating gantry 1 including an irradiation unit 4 emitting particle beams; an annular frame 16 located within and supported by the rotating gantry 1 such that it can rotate relative to the rotating gantry 1; an annular frame 15 fixedly located opposite the annular frame 16; an anti-corotation mechanism 34 being in contact with both the annular frames 16 and 15 to prevent the annular frame 16 from rotating together with the rotating gantry 1 during rotation of the rotating gantry 1; and a flexible moving floor 17 interposed between the annular frames 15 and 16, the flexible moving floor 17 being engaged with the annular frames 15 and 16 in such a manner as to move freely such that its bottom is substantially level and that it moves as the rotating gantry rotates.

    摘要翻译: 公开了一种医用颗粒物照射装置,包括:旋转台架1,其包括发射粒子束的照射单元4; 位于旋转机架1内并由其支撑的环形框架16,使得其可相对于旋转机架1旋转; 固定地与环形框架16相对的环形框架15; 防旋转机构34与环形框架16和15两者接触,以防止环形框架16在旋转机架1的旋转期间与旋转机架1一起旋转; 以及插入在环形框架15和16之间的柔性移动地板17,柔性移动地板17以可自由移动的方式与环形框架15和16接合,使得其底部基本上平齐,并且其随着 旋转龙门旋转。

    Particle beam irradiation system and method of adjusting irradiation apparatus
    18.
    发明申请
    Particle beam irradiation system and method of adjusting irradiation apparatus 有权
    粒子束照射系统及照射装置调整方法

    公开(公告)号:US20050145804A1

    公开(公告)日:2005-07-07

    申请号:US11052195

    申请日:2005-02-08

    摘要: The present invention provides an increased degree of uniformity of radiation dose distribution for the interior of a diseased part. A particle beam therapy system includes a charged particle beam generation apparatus and an irradiation apparatus. An ion beam is generated by the charged particle beam generation apparatus. The irradiation apparatus exposes a diseased part to the generated ion beam. A scattering device, a range adjustment device, and a Bragg peak spreading device are installed upstream of a first scanning magnet and a second scanning magnet. The scattering device and the range adjustment device are combined together and moved along a beam axis, whereas the Bragg peak spreading device is moved independently along the beam axis. The scattering device moves to adjust the degree of ion beam scattering. The range adjustment device moves to adjust ion beam scatter changes caused by an absorber thickness adjustment. The Bragg peak spreading device moves to adjust ion beam scatter changes arising out of an SOBP device. These adjustments provide uniformity of radiation dose distribution for the diseased part.

    摘要翻译: 本发明提供了患病部位的内部的辐射剂量分布的增加的均匀度。 粒子束治疗系统包括带电粒子束产生装置和照射装置。 由带电粒子束产生装置产生离子束。 照射装置将患病部分暴露于产生的离子束。 散射装置,量程调节装置和布拉格峰扩展装置安装在第一扫描磁体和第二扫描磁体的上游。 散射装置和范围调节装置组合在一起并沿着光束轴线移动,而布拉格峰扩展装置沿着光束轴线独立地移动。 散射装置移动以调节离子束散射的程度。 范围调整装置移动以调节由吸收体厚度调整引起的离子束散射变化。 布拉格峰扩展装置移动以调整由SOBP装置引起的离子束散射变化。 这些调整提供了患病部位的辐射剂量分布的均匀性。

    Accelerator system
    19.
    发明授权
    Accelerator system 失效
    加速器系统

    公开(公告)号:US06580084B1

    公开(公告)日:2003-06-17

    申请号:US09524554

    申请日:2000-03-13

    IPC分类号: H05H900

    CPC分类号: H05H7/06 G21K5/04

    摘要: An accelerator system which can be implemented in a small size at low manufacturing cost and which can nonetheless ensure a high utilization efficiency of the ion beam. The system includes an ion source for generating an ion beam, pre-accelerators for accelerating the ion beam generated by the ion source, an radioisotope producing unit for irradiating a target with the ion beam accelerated by the pre-accelerators for producing radioisotopes, a synchrotron into which the ion beam accelerated by the pre-accelerators is injected and from which the ion beam is ejected after acceleration, and a selector electromagnet for introducing the ion beam accelerated by the pre-accelerators into either the radioisotope producing unit or the synchrotron.

    摘要翻译: 可以以低制造成本实现小尺寸并且可以确保离子束的高利用效率的加速器系统。 该系统包括用于产生离子束的离子源,用于加速由离子源产生的离子束的预加速器,用于利用由预加速器加速以产生放射性同位素的离子束照射靶的放射性同位素产生单元,同步加速器 注入由加速器加速的离子束并且加速后离子束被排出的离子束,以及用于将由预加速器加速的离子束引入放射性同位素产生单元或同步加速器中的选择电磁体。

    Optical disk apparatus compatible with different types of mediums and comprising optical path separating means
    20.
    发明授权
    Optical disk apparatus compatible with different types of mediums and comprising optical path separating means 失效
    光盘装置与不同类型的介质兼容并且包括光路分离装置

    公开(公告)号:US06272098B1

    公开(公告)日:2001-08-07

    申请号:US09549174

    申请日:2000-04-13

    IPC分类号: G11B1712

    摘要: A polarizing beam splitter for separating an upstream beam from a downstream beam according to the polarization of an incident beam is provided between first and second light sources emitting laser beams at respective wavelength and an objective lens. A phase plate for providing a phase difference to a beam incident on the polarizing beam splitter is provided between the polarizing beam splitter and the light sources. A portion of the laser beam incident on the polarizing beam splitter is reflected by the polarizing beam splitter and caused to be incident on a photo-detecting unit, so as to prevent an unnecessary portion of the laser beam is incident on the photo-detecting unit. According to the invention, the laser beam is used efficiently and the cost of fabricating an optical disk apparatus is reduced by eliminating a need for a gain controlling circuit in the photo-detecting unit.

    摘要翻译: 在发射各波长的激光束和物镜的第一和第二光源之间设置有用于根据入射光束的偏振从上游光束分离上游光束的偏振分束器。 在偏振分束器和光源之间设置有用于向入射到偏振分束器上的光束提供相位差的相位板。 入射到偏振分束器上的激光束的一部分被偏振分束器反射并入射到光检测单元上,以防止激光束的不必要部分入射到光检测单元 。 根据本发明,激光束被有效地利用,并且通过消除对光检测单元中的增益控制电路的需要来降低制造光盘装置的成本。