公开(公告)号：US07164142B2

公开(公告)日：2007-01-16

申请号：US10072607

申请日：2002-02-08

Applicant: Jimmy Vishnipolsky ,  Efim Vinnitsky ,  Eliyahu Almog

Inventor： Jimmy Vishnipolsky ,  Efim Vinnitsky ,  Eliyahu Almog

IPC: H01J37/30 ,  H01B7/00

CPC classification number: H01J37/065 ,  H01J2237/166

Abstract: Electrical lead-through systems from atmospheric into vacuum environments are presented. Electrical feed-through structures (EFTS) comprised of a multiplicity of parallel connection lines used to operate e-beam tip-array sources in high vac environments for chip lithography are disclosed. In one embodiment, an EFTS comprises a sheet of insulating material having conductive tracks extending along potions of the sheet and a vacuum seal separating one portion from another portion of the sheet so as to maintain a pressure differential among multiple portions of the sheet.

Abstract translation: 介绍了从大气到真空环境的电气导通系统。 公开了由用于在用于芯片光刻的高真空环境中操作电子束尖端阵列源的多个并联连接线组成的电气馈通结构（EFTS）。 在一个实施例中，EFTS包括具有沿着片材的一部分延伸的导电轨道的绝缘材料片和将片材的另一部分分开的真空密封件，以便保持片材的多个部分之间的压力差。

公开(公告)号：US20060243918A1

公开(公告)日：2006-11-02

申请号：US11458043

申请日：2006-07-17

Applicant: Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatan Lehman ,  Doron Meshulach ,  Ehud Tirosh

Inventor： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatan Lehman ,  Doron Meshulach ,  Ehud Tirosh

IPC: A61N5/00

CPC classification number: G03F7/70375 ,  G03F7/70275

Abstract: A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.

Abstract translation: 用于在基板上写入主图像的方法包括将主图像分割为帧矩阵，每个帧包括在主图像内的相应帧位置中限定相应帧图像的像素阵列。 当电子束在相应的帧位置上被扫描时，电子束以光栅图案扫描在衬底上，同时响应于每个帧的各个帧图像而对电子束进行成形，使得在每个帧中，电子束 同时将多个像素写入衬底。

公开(公告)号：US07098468B2

公开(公告)日：2006-08-29

申请号：US10661719

申请日：2003-09-11

Applicant: Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatah Lehman ,  Doron Meshulach ,  Ehud Tirosh

Inventor： Meir Aloni ,  Mula Friedman ,  Jimmy Vishnipolsky ,  Gilad Almogy ,  Alon Litman ,  Yonatah Lehman ,  Doron Meshulach ,  Ehud Tirosh

IPC: G21K5/10 ,  H01J37/08 ,  A61N5/00 ,  G21G5/00

CPC classification number: G03F7/70375 ,  G03F7/70275

Abstract: A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.