公开(公告)号：US20080182081A1

公开(公告)日：2008-07-31

申请号：US11911897

申请日：2006-11-06

申请人： Jin-Wan Jeon ,  Jun-Bo Yoon ,  Koeng Su Lim

发明人： Jin-Wan Jeon ,  Jun-Bo Yoon ,  Koeng Su Lim

IPC分类号： G03F7/30 ,  G03F7/40 ,  B32B3/00

CPC分类号： G03F7/201 ,  G03F7/70291 ,  G03F7/70308 ,  G03F7/7035 ,  G03F7/70383 ,  Y10T428/24802

摘要： A method of fabricating a polymer or resist pattern over a substrate includes coating a photosensitive polymer or resist over the substrate to form a polymer or resist layer, determining a portion of the polymer or resist layer to be exposed to light, placing a light adjusting layer in an optical path of light shone on the polymer or resist layer, and adjusting the light adjusting layer to adjust a direction or intensity of the light shone on the polymer or resist layer. Based on the method, it is easy to fabricate a polymer or resist pattern, a metal film pattern, metal pattern structure, and a polymer mold, each having three-dimensional structures with various slopes or shapes by adjusting a direction or intensity of incident light when performing a lithography process.

摘要翻译： 在衬底上制造聚合物或抗蚀剂图案的方法包括在衬底上涂覆光敏聚合物或抗蚀剂以形成聚合物或抗蚀剂层，确定要暴露于光的聚合物或抗蚀剂层的一部分，将光调节层 在光聚合物或抗蚀剂层上照射的光路中，并且调整光调节层以调节聚合物或抗蚀剂层上的光照的方向或强度。 基于该方法，通过调节入射光的方向或强度，容易制造聚合物或抗蚀剂图案，金属膜图案，金属图案结构和聚合物模具，每个具有各种斜率或形状的三维结构 当进行光刻工艺时。

公开(公告)号：US07081872B2

公开(公告)日：2006-07-25

申请号：US10105281

申请日：2002-03-26

申请人： Koeng Su Lim ,  Jun-Bo Yoon ,  Jin-Wan Jeon

发明人： Koeng Su Lim ,  Jun-Bo Yoon ,  Jin-Wan Jeon

IPC分类号： G09G3/34 ,  G02B26/00

CPC分类号： G02B26/0841 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/904

摘要： Disclosed are a micromirror device made in a simple structure using interdigitated cantilevers and having two stable rotational states, and applications thereof. The micromirror device comprises: (a) a substrate; (b) at least two protruded support posts arranged protrudedly in two columns of left and right sides on the substrate and apart by a predetermined interval from each other; (c) multiple cantilevers formed in parallel with the substrate, each having one end attached at the upper end portion of the respective protruded support posts and made in a thin strip having an elastic restoring force, wherein the cantilevers adjacent to each other are arranged to be parallel and interdigitated; (d) mirror support posts coupled to upper portions of the other ends of the cantilevers; (e) a mirror attached on upper portions of the whole mirror support posts and supported by the mirror support posts; and (f) two electrodes formed at left and right sides on the substrate, for providing an electrostatic force to the mirror, wherein the micromirror device reflects light incident into the mirror in different directions from each other by using an electrostatic force due to a voltage applied between the electrodes and the mirror, and the elastic restoring force of the cantilevers. The micromirror device can drive the mirror in two directions and adjust a rotational angle of the mirror using the electrostatic force due to a potential difference between the electrodes and the mirror for reflecting incident light, and the elastic restoring force of the cantilevers.

公开(公告)号：US20120048342A1

公开(公告)日：2012-03-01

申请号：US13217707

申请日：2011-08-25

申请人： Koeng Su Lim ,  Jin-Wan Jeon

发明人： Koeng Su Lim ,  Jin-Wan Jeon

IPC分类号： H01L31/05 ,  H01L31/18

CPC分类号： H01L31/1872 ,  H01L31/046 ,  H01L31/0465 ,  H01L31/072 ,  Y02E10/50 ,  Y02P70/521

摘要： Disclosed is an integrated thin film photovoltaic device. The integrated thin film photovoltaic device includes: a substrate including trenches formed therein; a first semiconductor material layer formed on the substrate from a first basic line within each of the trenches through one side of each of the trenches to the projected surface of the substrate, which is adjacent to the one side; a second semiconductor material layer formed on a resultant substrate from a second basic line on the first semiconductor material layer within each of the trenches through the other side of each of the trenches to the projected surface of the resultant substrate, which is adjacent to the other side, so that a portion of the first semiconductor material layer and a portion of the second semiconductor material layer are overlapped with each other within each of the trenches.

摘要翻译： 公开了一种集成薄膜光伏器件。 集成薄膜光伏器件包括：衬底，其包括形成在其中的沟槽; 第一半导体材料层，其从每个沟槽中的每个沟槽中的第一基本线通过每个沟槽的一侧到与所述一侧相邻的衬底的突出表面形成; 形成在所得基板上的第二半导体材料层，该第二基线从每个沟槽中的每个沟槽中的第一半导体材料层上的第二基线通过每个沟槽的另一侧延伸到所得衬底的与另一个相邻的投影表面 使得第一半导体材料层的一部分和第二半导体材料层的一部分在每个沟槽内彼此重叠。