公开(公告)号：US20210098279A1

公开(公告)日：2021-04-01

申请号：US17034173

申请日：2020-09-28

Applicant: SHIN-ETSU ENGINEERING CO., LTD. ,  SHIBAURA MECHATRONICS CORPORATION

Inventor： Shunya KUBOTA ,  Emi MATSUI ,  Katsuhiro YAMAZAKI ,  Yoshikazu OHTANI ,  Kyouhei TOMIOKA

IPC: H01L21/683 ,  H01L21/67

Abstract: According to one embodiment, a substrate processing apparatus and a substrate processing method that can improve the quality of substrates are provided. The substrate processing apparatus according to one embodiment includes: a table 20 configured to support a processing target W including a substrate W1, a ring W2 surrounding a surrounding of the substrate W1, and a dicing tape W3 adhered to a lower surface of the substrate W1 and a lower surface of the ring W2, and a liquid supplier 50 configured to eject a liquid which does not mix with a processing liquid for processing the substrate W1 and which has a specific gravity heavier than the processing liquid to one of an upper surface of the ring W2 of the processing target W supported by the table 20 rotating by the rotation mechanism 30, an outer circumference end portion of the substrate W1 of the processing target W supported by the table 20 rotating by the rotation mechanism 30, and between the substrate W1 and the ring W2 of the processing target W supported by the table 20 rotating by the rotation mechanism in accordance with a rotation number of the table 20 to supply the liquid between the substrate W1 and the ring W2 of the processing target W.

公开(公告)号：US20210094331A1

公开(公告)日：2021-04-01

申请号：US17026427

申请日：2020-09-21

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Azusa HIRANO ,  Hironori HAIJIMA ,  Junpei TANAKA

IPC: B41J29/393 ,  B41J3/407 ,  B41M5/00 ,  B41J13/10 ,  B41J13/08

Abstract: A tablet printing apparatus 1 includes an inspection unit 53 determining whether or not the printed tablet T is good product, a good product collecting device 43 collecting the tablet T of the good product from the carrying belt 31a, a defective product collecting device 41 collecting the tablet other than the good product from the carrying belt 31a, a discharge confirming sensor 41c detecting whether or not the tablet other than the good tablet is collected by the defective product collecting device 41, and a re-inspection product collecting device 42 collecting the tablet T other than the good product from the carrying belt 31 a when a collecting operation for collecting the tablet T other than the good product is performed by the defective product collecting device 41, and the discharge confirming sensor 41c detects that the tablet T other than the good tablet is not collected.

公开(公告)号：US20210074530A1

公开(公告)日：2021-03-11

申请号：US17009921

申请日：2020-09-02

Applicant: Shibaura Mechatronics Corporation

Inventor： Hidehito Azumano

IPC: H01J37/32

Abstract: According to one embodiment, a plasma processing apparatus includes a chamber configured to maintain an atmosphere depressurized below atmospheric pressure, a gas supply part configured to supply a gas into the chamber, a placement part provided inside the chamber, and configured to place a processed product, a depressurization part configured to depressurize inside the chamber, a window provided in the chamber, and facing the placement part, a plasma generator provided outside the chamber and on a surface of the window on an opposite side to the placement part, and configured to generate plasma inside the chamber, an optical path changing part provided inside the window and having a surface tilted to a central axis of the chamber, and a detection part provided on a side surface side of the window, and facing the surface of the optical path changing part.

公开(公告)号：US20200340117A1

公开(公告)日：2020-10-29

申请号：US16856650

申请日：2020-04-23

Applicant: Shibaura Mechatronics Corporation

Inventor： Daisuke Ono ,  Akihiko Ito

IPC: C23C16/50 ,  C23C16/452 ,  C23C16/458 ,  C23C16/24 ,  C23C16/40

Abstract: According to one embodiment, film formation apparatus includes: a carrying unit that includes a rotation table which circulates and carries a workpiece; a film formation process unit which includes a target formed of a silicon material, and a plasma producer that produces plasma of a sputter gas introduced between the target and the rotation table, and which forms a silicon film on the workpiece by sputtering; and a hydrogenation process unit which includes a process gas introducing unit that introduces a process gas containing a hydrogen gas, and a plasma producer that produces plasma of the process gas, and which performs hydrogenation on the silicon film formed on the workpiece. The carrying unit carries the workpiece so as to alternately pass through the film formation process unit and through the hydrogenation process unit.

公开(公告)号：US20200335324A1

公开(公告)日：2020-10-22

申请号：US16916288

申请日：2020-06-30

Applicant: Shibaura Mechatronics Corporation

Inventor： Masaya Kamiya ,  Kensuke Demura ,  Daisuke Matsushima ,  Haruka Nakano ,  Ivan Petrov Ganachev

IPC: H01L21/02 ,  G03F7/40 ,  G03F7/42 ,  B08B3/10 ,  B08B7/00 ,  H01L21/67 ,  H01L21/687 ,  H01L21/66

Abstract: A substrate treatment device according to an embodiment includes a placement portion on which a substrate is placed and rotated, a liquid supply portion which supplies a liquid to a surface on an opposite side to the placement portion of the substrate, a cooling portion which supplies a cooling gas to a surface on a side of the placement portion of the substrate, and a control portion which controls at least one of a rotation speed of the substrate, a supply amount of the liquid, and a flow rate of the cooling gas. The control portion brings the liquid present on a surface of the substrate into a supercooled state and causes at least a part of the liquid brought into the supercooled state to freeze.

公开(公告)号：US10804121B2

公开(公告)日：2020-10-13

申请号：US15441709

申请日：2017-02-24

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Koichi Hamada ,  Nobuo Kobayashi

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/306 ,  G02F1/13

Abstract: According to an embodiment, a substrate treatment apparatus includes, a substrate support unit supporting a substrate, a rotary unit rotating the substrate, a treatment liquid supply unit supplying treatment liquid to a surface of the substrate, and a controller performing liquid discharge treatment to change liquid discharge velocity at which the treatment liquid is discharged from the substrate, at preset predetermined timing, during substrate treatment in which the treatment liquid is supplied while the substrate is rotated, with the treatment continued.

公开(公告)号：US10709639B2

公开(公告)日：2020-07-14

申请号：US16059097

申请日：2018-08-09

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Azusa Hirano ,  Yasutsugu Tsuruoka

IPC: B65H5/22 ,  A61J3/06 ,  B41J3/407 ,  B65H7/14 ,  B65H7/20 ,  B41J2/21 ,  B41J11/00 ,  B41J21/00 ,  B41J29/387 ,  A61J3/00

Abstract: According to one embodiment, a tablet printing apparatus includes: a conveyor belt configured to convey a tablet; a print head configured to perform printing on the tablet conveyed by the conveyor belt; and a belt-position detector configured to detect the position of the conveyor belt in a direction crossing the conveying direction of the tablet in a horizontal plane. The conveyor belt includes a plurality of holes arranged in a row along the conveying direction of the tablet to hold the tablet. The belt-position detector includes an imaging device configured to capture an image of two or more of the holes; and an image processing device configured to detect the position of the conveyor belt in the crossing direction based on the image captured by the imaging device.

公开(公告)号：US10586727B2

公开(公告)日：2020-03-10

申请号：US15021516

申请日：2014-09-24

Applicant: Shibaura Mechatronics Corporation

Inventor： Emi Matsui ,  Konosuke Hayashi ,  Takahiro Kanai

IPC: H01L21/683 ,  H01L21/67 ,  H01L21/687 ,  B32B37/10 ,  B32B37/14

Abstract: A suction stage may include a mounting section configured to mount a first substrate, and an evacuation section configured to evacuate air between the first substrate and the mounting section. The mounting section includes a ring-shaped first wall part, and a ring-shaped second wall part inside the first wall part. The evacuation section includes a first control valve between the evacuation section and a first region between the first and second wall parts, a second control valve between the evacuation section and a second region inside the second wall part, and a control section configured to control the valves. The control section is configured to control the valves so that suction and non-suction of the first substrate are alternately performed in at least one of the regions. Thus, suction of the first substrate may be deactivated in one of the regions, while the suction is active in the other region.

公开(公告)号：US10460961B2

公开(公告)日：2019-10-29

申请号：US15720928

申请日：2017-09-29

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Yuji Nagashima ,  Konosuke Hayashi

IPC: H01L21/67 ,  B08B3/02 ,  B08B3/08 ,  B08B5/02 ,  F26B3/30 ,  H01L21/02 ,  H01L21/687

Abstract: According to one embodiment, a substrate processing apparatus includes a processing chamber, a support part, a heater, and an optical member. In the processing chamber, air flows from the top to the bottom. The support part is located in the processing chamber to support a substrate having a surface to be treated. The heater is arranged so as not to be above the support part and emits light for heating. The optical member is arranged in the processing chamber so as not to be above the support part to guide the light emitted by the heater and having passed above the support part to the surface to be treated of the substrate supported by the support part.

公开(公告)号：US20190217631A1

公开(公告)日：2019-07-18

申请号：US16368532

申请日：2019-03-28

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Azusa Hirano ,  Yasutsugu Tsuruoka ,  Noritsugu Tanio ,  Shinichi Ogimoto ,  Junsuke Komito

IPC: B41J3/407 ,  B41J2/145 ,  B41J2/045 ,  B41M5/00

Abstract: According to one embodiment, a tablet printing apparatus includes a conveyor, an inkjet print head, and a controller. The conveyor is configured to convey a tablet having an outer shape that does not determine the printing direction of a print pattern to be printed thereon. The print head includes a plurality of nozzles each configured to eject a liquid to print the print pattern on the tablet being conveyed. The controller is configured to control the print head to perform printing on the tablet being conveyed such that the printing direction of the print pattern is changed at predetermined intervals at least between a first direction which is parallel to or crosses the conveying direction of the tablet, and a second direction which crosses the conveying direction, and in which more nozzles are used for printing than in the first direction.