中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

65 records (took 0.025 seconds)

    HEATER COMPONENT
    12.
    发明申请
    HEATER COMPONENT 审中-公开

    公开(公告)号：US20200286718A1

    公开(公告)日：2020-09-10

    申请号：US16764042

    申请日：2018-10-29

    Applicant: TOCALO CO., LTD.

    Inventor： Shikou ABUKAWA ,  Kensuke TAGUCHI ,  Yu ASAKIMORI ,  Ryutaro KAWAMURA

    IPC: H01J37/32 ,  H01L21/683 ,  H01L21/687 ,  H05B3/03 ,  H05B3/28 ,  H05B1/02

    Abstract: The heater component (1) has a substrate part (2), and a thin coating heater (4) which is equipped outside this substrate part (2) and generates heat by power supply. The thin coating heater (4) is formed of a thermal sprayed coating. The thin coating heater (4) has a heater body (10) and a heater extension part (11). The heater body (10) is arranged on a first end face (2a) of the substrate part (2). The heater extension part (11) is extended from the heater body (10) to a second end face (2b) of the substrate part (2) through a side surface (2c) of the substrate part (2). A tip part (11s) of the heater extension part (11) is a heater power supplying part (12) for supplying electric power to the heater body (10).

    Insulated bearing
    13.
    发明授权
    Insulated bearing 有权

    公开(公告)号：US10605304B2

    公开(公告)日：2020-03-31

    申请号：US16091857

    申请日：2017-04-12

    Applicant: NSK LTD. ,  TOCALO CO., LTD

    Inventor： Manabu Yamada ,  Naozumi Nakata ,  Shinichi Nishiguchi ,  Junichi Takeuchi ,  Seiki Matsuura ,  Yuji Okada

    IPC: F16C19/52 ,  F16C19/06 ,  F16C33/64 ,  F16C33/58 ,  F16C33/62 ,  F16C35/077

    Abstract: An insulated bearing includes a pair of bearing rings arranged concentrically to each other and rolling elements arranged to be rotatable between the pair of bearing rings, at least one of the bearing rings having an insulating layer formed thereon. The one of the bearing rings having the insulating layer formed thereon has an annular groove having an arc-shaped cross section formed on each of both end surfaces of the bearing ring. At least a surface from a non-raceway surface side circumferential surface to the annular groove of the bearing ring is covered by the insulating layer. The insulating layer is a ceramic thermal sprayed layer.

    Insulated bearing and bearing coating method
    16.
    发明授权
    Insulated bearing and bearing coating method 有权

    公开(公告)号：US10260562B2

    公开(公告)日：2019-04-16

    申请号：US15539461

    申请日：2015-12-24

    Applicant: TOCALO CO., LTD ,  NSK LTD.

    Inventor： Junichi Takeuchi ,  Yuji Okada ,  Masaya Nagai ,  Manabu Yamada ,  Naozumi Nakata

    IPC: C23C4/10 ,  F16C33/62 ,  F16C33/64

    Abstract: An insulated bearing includes an outer ring, an inner ring, and a plurality of rolling elements. At least one of the outer ring and an inner ring is made of metal, the plurality of rolling elements are provided between the outer ring and the inner ring, so as to be freely rolled, and at least one of the outer ring and an inner ring is coated with an insulating layer. The insulating layer is formed of a mixture in which silicon carbide and/or aluminum nitride as an additive are/is dispersed in aluminum oxide as a base matrix. The content of the additive is 1 to 40 mass % with respect to the total amount of the mixture.

    COMPONENT FOR PLASMA PROCESSING APPARATUS, AND MANUFACTURING METHOD THEREFOR
    19.
    发明申请
    COMPONENT FOR PLASMA PROCESSING APPARATUS, AND MANUFACTURING METHOD THEREFOR 审中-公开
    等离子体加工设备的组件及其制造方法

    公开(公告)号：US20160076129A1

    公开(公告)日：2016-03-17

    申请号：US14854411

    申请日：2015-09-15

    Applicant: Tokyo Electron Limited ,  Tocalo Co., Ltd.

    Inventor： Nobuyuki Nagayama ,  Koji Mitsuhashi ,  Shikou Abukawa ,  Masaya Nagai ,  Yoshinori Kanazawa ,  Tetsuya Niya

    IPC: C23C4/12 ,  C23C4/06 ,  C23C4/00 ,  C23C4/10

    CPC classification number: C23C4/134 ,  C23C4/01 ,  C23C4/02 ,  C23C4/06 ,  C23C4/11 ,  C23C4/131 ,  C23C28/042

    Abstract: Particle generation can be suppressed from a thermally sprayed film of yttrium fluoride. A component exposed to plasma in a plasma processing apparatus is provided. The component includes a base and a film. The base is made of aluminum or an aluminum alloy, and an alumite film may be formed on a surface of the base. The film is formed by thermally spraying yttrium fluoride on a surface of the base or on a surface of an underlying layer including a layer provided on the base. A porosity of the film is 4% or less, and an arithmetic mean roughness of a surface of the film is 4.5 μm or less.

    Abstract translation: 可以从氟化钇的热喷涂膜抑制粒子的产生。 提供了在等离子体处理装置中暴露于等离子体的部件。 该组件包括底座和薄膜。 基底由铝或铝合金制成，并且可以在基底的表面上形成耐酸铝膜。 该膜通过在基底的表面上或在包括设置在基底上的层的下层的表面上热喷涂氟化钇而形成。 膜的孔隙率为4％以下，膜的表面的算术平均粗糙度为4.5μm以下。

Patent Agency Ranking