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18 条记录 (耗时 0.016 秒)

    Substrate supporting member
    12.
    发明授权
    Substrate supporting member 有权
    基板支撑构件

    公开(公告)号：US08129016B2

    公开(公告)日：2012-03-06

    申请号：US11867044

    申请日：2007-10-04

    申请人： Tetsuya Kawajiri ,  Yasufumi Aihara ,  Tomoyuki Fujii

    发明人： Tetsuya Kawajiri ,  Yasufumi Aihara ,  Tomoyuki Fujii

    IPC分类号： B32B3/26 ,  B32B15/00

    CPC分类号： H02N13/00 ,  H01L21/6833 ,  H01L21/68757 ,  Y10T428/12479 ,  Y10T428/24959 ,  Y10T428/249957 ,  Y10T428/249967 ,  Y10T428/249982 ,  Y10T428/249985 ,  Y10T428/265 ,  Y10T428/31678

    摘要： A substrate supporting member includes: a plate-shaped ceramic body having a surface serving as a substrate supporting surface; a plate-shaped composite material body which is joined to a surface of the ceramic body opposite to the substrate supporting surface with a joint material interposed therebetween and the plate-shaped composite material body made of porous ceramic with pores filled with metal, the composite material body having a porosity of more than 0% and not more than 5%; and a metallic plate which is joined to a surface of the composite material body opposite to the surface joined to the ceramic body with a joint material interposed therebetween.

    摘要翻译： 基板支撑构件包括：具有用作基板支撑表面的表面的板状陶瓷体; 一种板状复合材料体，其与陶瓷体的与基板支撑面相对的表面与介于其间的接合材料接合，并且由具有填充金属的孔的多孔陶瓷制成的板状复合材料体，复合材料 具有大于0％且不大于5％的孔隙率的本体; 以及金属板，其与所述复合材料体的与所述陶瓷体接合的表面相对的表面接合，其间插入有接合材料。

    ELECTROSTATIC CHUCK WITH HEATER
    13.
    发明申请
    ELECTROSTATIC CHUCK WITH HEATER 有权
    带加热器的静电卡盘

    公开(公告)号：US20080266745A1

    公开(公告)日：2008-10-30

    申请号：US11777318

    申请日：2007-07-13

    申请人： Kazuhiro Nobori ,  Tetsuya Kawajiri ,  Akiyoshi Hattori

    发明人： Kazuhiro Nobori ,  Tetsuya Kawajiri ,  Akiyoshi Hattori

    IPC分类号： H01L21/683

    CPC分类号： H01L21/6831 ,  H01L21/68757

    摘要： An electrostatic chuck with a heater including: a base which is composed of a sintered body containing alumina; an electrode disposed in an upper part of the base: and a resistance heating element embedded in a lower part of the base. The base includes a dielectric layer between the electrode and an upper surface of the base and a supporting member between the electrode and a lower surface of the base. The dielectric layer has a carbon content of not more than 100 ppm, and the supporting member has a carbon content of 0.03 to 0.25 wt %. Moreover, the resistance heating element is formed into a coil and mainly composed of niobium.

    摘要翻译： 一种具有加热器的静电卡盘，包括：由包含氧化铝的烧结体构成的基体; 设置在基座的上部的电极和嵌入基座的下部的电阻加热元件。 底座包括电极和基座的上表面之间的电介质层，以及在电极和底座的下表面之间的支撑构件。 电介质层的碳含量不大于100ppm，并且支撑构件的碳含量为0.03-0.25重量％。 此外，电阻加热元件形成为主要由铌构成的线圈。

    ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD THEREOF
    14.
    发明申请
    ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD THEREOF 有权
    带加热器的静电卡盘及其制造方法

    公开(公告)号：US20080049374A1

    公开(公告)日：2008-02-28

    申请号：US11841172

    申请日：2007-08-20

    申请人： Ikuhisa Morioka ,  Kazuhiro Nobori ,  Tetsuya Kawajiri ,  Akiyoshi Hattori

    发明人： Ikuhisa Morioka ,  Kazuhiro Nobori ,  Tetsuya Kawajiri ,  Akiyoshi Hattori

    IPC分类号： H01L21/683

    CPC分类号： H01L21/6831 ,  Y10T279/23

    摘要： An electrostatic chuck with a heater includes: a base formed of a sintered body containing alumina; an ESC electrode provided in an upper portion side in the base; and a resistance heating body embedded in a lower portion side in the base. The base is composed of a dielectric layer from the ESC electrode to an upper surface of the base, and of a support member from the ESC electrode to a lower surface of the base. In the support member, a carbon content differs between an ESC electrode neighborhood in contact with the dielectric layer and a lower region below the ESC electrode neighborhood, a carbon content in the dielectric layer is 100 wt ppm or less, the carbon content in the ESC electrode neighborhood is 0.13 wt % or less, the carbon content in the lower region is 0.03 wt % or more but 0.5 wt % or less, and the carbon content in the ESC electrode neighborhood is smaller than the carbon content in the lower region. The resistance heating body contains niobium or platinum.

    摘要翻译： 具有加热器的静电卡盘包括：由含有氧化铝的烧结体形成的基体; 设置在所述基座的上部侧的ESC电极; 以及嵌入基座的下部侧的电阻加热体。 基体由从ESC电极到基体的上表面的电介质层和从ESC电极到基底的下表面的支撑体构成。 在支撑构件中，与电介质层接触的ESC电极附近和ESC电极附近的下部区域之间的碳含量不同，电介质层中的碳含量为100重量ppm以下，ESC中的碳含量 电极附近为0.13重量％以下，下部区域的碳含量为0.03重量％以上且0.5重量％以下，ESC电极附近的碳含量低于下部区域的碳含量。 电阻加热体包含铌或铂。

    Method of fabricating substrate placing stage
    16.
    发明授权
    Method of fabricating substrate placing stage 有权
    制造基板放置台的方法

    公开(公告)号：US07353979B2

    公开(公告)日：2008-04-08

    申请号：US10945566

    申请日：2004-09-20

    申请人： Tomoyuki Fujii ,  Yasuyoshi Imai ,  Tetsuya Kawajiri

    发明人： Tomoyuki Fujii ,  Yasuyoshi Imai ,  Tetsuya Kawajiri

    IPC分类号： B23K31/02

    CPC分类号： B32B15/043 ,  B23K35/0233 ,  B23K35/0238 ,  B23K35/286 ,  B32B15/04 ,  B32B15/20 ,  B32B2307/302 ,  C04B35/645 ,  C04B37/026 ,  C04B2235/656 ,  C04B2235/6581 ,  C04B2235/963 ,  C04B2237/121 ,  C04B2237/122 ,  C04B2237/343 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/402 ,  C04B2237/403 ,  C04B2237/708 ,  C22C29/065 ,  H01L21/67109 ,  Y10T428/12535

    摘要： A method of fabricating a substrate placing stage includes the step of providing a plate-shaped ceramic base having a substrate placing surface on a side of the ceramic base. The method includes the step of providing a plate-shaped ceramic base formed of a composite material containing components of a ceramic material and an aluminum alloy. The method includes the step of inserting a joint material including an aluminum alloy layer between the ceramic base and the cooling member. The method includes the step of heating the joint material at a temperature in a range from TS ° C. to (TS-30) °C. (TS °C.: a solidus temperature of the aluminum alloy). The method includes the step of pressing substantially normally joint surfaces of the ceramic base and the cooling member, thereby joining the ceramic base and the cooling member via the joint material to obtain a joint layer including the aluminum alloy layer having a thickness in a range from 50 μm to 200 μm after joining.

    摘要翻译： 制造基板放置台的方法包括提供在陶瓷基体的一侧上具有基板放置表面的板状陶瓷基体的步骤。 该方法包括提供由含有陶瓷材料和铝合金成分的复合材料形成的板状陶瓷基底的步骤。 该方法包括在陶瓷基体和冷却部件之间插入包括铝合金层的接合材料的步骤。 该方法包括在TS℃至（TS-30）℃范围内的温度下加热接头材料的步骤。 （TS℃：铝合金的固相线温度）。 该方法包括按压陶瓷基体和冷却部件的大致正常接合面的步骤，从而通过接头材料接合陶瓷基体和冷却部件，以获得包括铝合金层的接合层，该接合层的厚度范围为 加入后50粒至200粒。