Roll-to-roll digital photolithography
    11.
    发明授权
    Roll-to-roll digital photolithography 有权
    卷对卷数字光刻技术

    公开(公告)号:US09465304B2

    公开(公告)日:2016-10-11

    申请号:US13929505

    申请日:2013-06-27

    Abstract: A system for making flexible circuit films includes an inelastic conveyor, a web handling apparatus configured to pass a flexible substrate around the inelastic conveyor, an image acquisition apparatus configured to measure positions of a first set of alignment marks on the flexible substrate at a first conveyor location, an exposure apparatus configured to patternwise expose a photosensitive material on the flexible substrate at a second conveyor location, and an image processor configured to receive the measured positions of the first set of alignment marks, and to compare the measured positions with reference positions of the first set of alignment marks. The exposure apparatus is configured to patternwise expose the photosensitive material based on the comparison between the measured positions and the reference positions.

    Abstract translation: 一种用于制造柔性电路膜的系统包括非弹性输送机,配置成使柔性基板围绕非弹性输送机通过的幅材处理设备,被配置成在第一输送机上测量柔性基板上的第一组对准标记的位置的图像采集设备 位置,曝光装置被配置为在第二传送器位置以图形方式在柔性基板上曝光感光材料,以及图像处理器,被配置为接收第一组对准标记的测量位置,并将测量位置与参考位置 第一组对齐标记。 曝光装置被配置为基于测量位置和参考位置之间的比较来图案化地曝光感光材料。

    Phase-locked web position signal using web fiducials
    12.
    发明授权
    Phase-locked web position signal using web fiducials 有权
    相位锁定位置信号使用网络基准

    公开(公告)号:US09296583B2

    公开(公告)日:2016-03-29

    申请号:US14469662

    申请日:2014-08-27

    Abstract: Approaches for enhancing web position determination involve phase locking a web movement encoder signal to a sensed web fiducial signal. Fiducials disposed along a longitudinal axis of a substrate are sensed and corresponding sensor signals are generated. An estimated web position is provided by one or more encoder signals. The phase difference between the sensor signals and the encoder signals is calculated and the web position error is determined based on the phase difference. The web position error signal can be fed back to adjust the encoder signals which improves the accuracy of the web position determination.

    Abstract translation: 用于增强网络位置确定的方法包括将网络移动编码器信号相位锁定到感测到的网络基准信号。 感测沿基板的纵向轴线布置的基准,并产生相应的传感器信号。 估计的网页位置由一个或多个编码器信号提供。 计算传感器信号和编码器信号之间的相位差,并根据相位差确定卷筒纸位置误差。 纸幅位置误差信号可以反馈,以调整编码器信号,提高纸幅位置确定的精度。

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