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    Circuits including micropatterns and using partial curing to adhere dies
    11.
    发明授权
    Circuits including micropatterns and using partial curing to adhere dies 有权

    公开(公告)号：US12237292B2

    公开(公告)日：2025-02-25

    申请号：US17756208

    申请日：2020-11-30

    Applicant: 3M INNOVATIVE PROPERTIES COMPANY

    Inventor： Teresa M. Goeddel ,  Ankit Mahajan ,  Mikhail L. Pekurovsky ,  Saagar A. Shah ,  Kara A. Meyers ,  Christopher G. Walker

    IPC: H01L23/00

    Abstract: A method comprises: providing a layer of curable adhesive material (4) on a substrate (2); forming a pattern of microstructures (321) on the layer of curable adhesive material (4); curing a first region (42) of the layer of curable adhesive material (4) at a first level and a second region (44) of the layer of curable adhesive material (4) at a second level greater than the first level; providing a solid circuit die (6) to directly attach to a major surface of the first region (42) of the layer of curable adhesive material (4); and further curing the first region (42) of the layer of curable adhesive material (4) to anchor the solid circuit die (6) on the first region (42) by forming an adhesive bond therebetween. The pattern of microstructures (321) may include one or more microchannels (321), the method further comprising forming one or more electrically conductive traces in the microchannels (321), in particular, by flow of a conductive particle containing liquid (8) by a capillary force and, optionally, under pressure. The at least one microchannel (321) may extend from the second region (44) to the first region (42) and have a portion beneath the solid circuit die (6). The solid circuit die (6) may have at least one edge disposed within a periphery of the first region (42) with a gap therebetween. The solid circuit die (6) may have at least one contact pad (72) on a bottom surface thereof, wherein the at least one contact pad (72) may be in direct contact with at least one of the electrically conductive traces in the microchannels (321). Forming the pattern of microstructures (321) may comprise contacting a major surface of a stamp (3) to the layer of curable adhesive material (4), the major surface having a pattern of raised features (32) thereon. The curable adhesive material (4) may be cured by an actinic light source such as an ultraviolet (UV) light source (7, 7′), wherein a mask may be provided to at least partially block the first region (42) of the layer of curable adhesive material (4) from the cure. The stamp (3) may be positioned in contact with the curable adhesive material (4) to replicate the pattern of raised features (32) to form the microstructures (321) while the curable adhesive material (4) is selectively cured by the actinic light source such as the ultraviolet (UV) light source (7). The first region (42) of the layer of curable adhesive material (4) may be cured at the first level to allow a bottom surface of the solid circuit die (6) to be fluidly-sealed by the major surface of the first region (42). The second region of the layer of curable adhesive material (4) may be cured at the second level such that the second region (44) is fully cured. The further curing may be any suitable curing such as thermal curing, radiation curing (e.g., by actinic radiation, such as ultraviolet (UV) radiation) or self-curing at room temperature without using a thermal or radiation curing source.

    Circuits Including Micropatterns and Using Partial Curing to Adhere Dies
    15.
    发明申请
    Circuits Including Micropatterns and Using Partial Curing to Adhere Dies 有权

    公开(公告)号：US20220352108A1

    公开(公告)日：2022-11-03

    申请号：US17756208

    申请日：2020-11-30

    Applicant: 3M INNOVATIVE PROPERTIES COMPANY

    Inventor： Teresa M. Goeddel ,  Ankit Mahajan ,  Mikhail L. Pekurovsky ,  Saagar A. Shah ,  Kara A. Meyers ,  Christopher G. Walker

    IPC: H01L23/00

    Abstract: A method comprises: providing a layer of curable adhesive material (4) on a substrate (2); forming a pattern of microstructures (321) on the layer of curable adhesive material (4); curing a first region (42) of the layer of curable adhesive material (4) at a first level and a second region (44) of the layer of curable adhesive material (4) at a second level greater than the first level; providing a solid circuit die (6) to directly attach to a major surface of the first region (42) of the layer of curable adhesive material (4); and further curing the first region (42) of the layer of curable adhesive material (4) to anchor the solid circuit die (6) on the first region (42) by forming an adhesive bond therebetween. The pattern of microstructures (321) may include one or more microchannels (321), the method further comprising forming one or more electrically conductive traces in the microchannels (321), in particular, by flow of a conductive particle containing liquid (8) by a capillary force and, optionally, under pressure. The at least one microchannel (321) may extend from the second region (44) to the first region (42) and have a portion beneath the solid circuit die (6). The solid circuit die (6) may have at least one edge disposed within a periphery of the first region (42) with a gap therebetween. The solid circuit die (6) may have at least one contact pad (72) on a bottom surface thereof, wherein the at least one contact pad (72) may be in direct contact with at least one of the electrically conductive traces in the microchannels (321). Forming the pattern of microstructures (321) may comprise contacting a major surface of a stamp (3) to the layer of curable adhesive material (4), the major surface having a pattern of raised features (32) thereon. The curable adhesive material (4) may be cured by an actinic light source such as an ultraviolet (UV) light source (7, 7′), wherein a mask may be provided to at least partially block the first region (42) of the layer of curable adhesive material (4) from the cure. The stamp (3) may be positioned in contact with the curable adhesive material (4) to replicate the pattern of raised features (32) to form the microstructures (321) while the curable adhesive material (4) is selectively cured by the actinic light source such as the ultraviolet (UV) light source (7). The first region (42) of the layer of curable adhesive material (4) may be cured at the first level to allow a bottom surface of the solid circuit die (6) to be fluidly-sealed by the major surface of the first region (42). The second region of the layer of curable adhesive material (4) may be cured at the second level such that the second region (44) is fully cured. The further curing may be any suitable curing such as thermal curing, radiation curing (e.g., by actinic radiation, such as ultraviolet (UV) radiation) or self-curing at room temperature without using a thermal or radiation curing source.

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