公开(公告)号：US20170011882A1

公开(公告)日：2017-01-12

申请号：US14795795

申请日：2015-07-09

Applicant: Applied Materials Israel, Ltd.

Inventor： Chun-Hsiang Yen ,  Barak Dee-Noor ,  Yuval Gronau ,  Ronen Hagai ,  Efim Vinnitsky ,  Yohanan Madmon

IPC: H01J37/24 ,  H01J37/20 ,  H05K7/20

CPC classification number: H01J37/24 ,  G03F7/70875 ,  H01J37/20 ,  H01J2237/002 ,  H01J2237/20278 ,  H01L21/67248 ,  H01L21/68 ,  H01L22/12

Abstract: A system that may include a chamber, a motorized system, a chuck, a controller, multiple temperature sensors and a cooling module; wherein the chuck is configured to support an object that is positioned within the chamber; wherein the motorized system is configured to move the chuck in relation to the chamber; wherein the multiple temperature sensors are configured to sense multiple temperatures of at least one point within the chamber; wherein the cooling module is configured to cool a unit of the motorized system; and wherein the controller is configured to control the cooling module in response to the multiple temperatures.

Abstract translation: 可以包括室，电动系统，卡盘，控制器，多个温度传感器和冷却模块的系统; 其中所述卡盘被构造成支撑位于所述腔室内的物体; 其中所述电动系统被配置成相对于所述室移动所述卡盘; 其中所述多个温度传感器被配置为感测所述室内的至少一个点的多个温度; 其中所述冷却模块被配置为冷却所述电动系统的单元; 并且其中所述控制器被配置为响应于所述多个温度来控制所述冷却模块。

公开(公告)号：US10714305B2

公开(公告)日：2020-07-14

申请号：US16279538

申请日：2019-02-19

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Alon Litman ,  Efim Vinnitsky

IPC: H01J37/20 ,  H01J37/28 ,  H01J37/244 ,  H01J37/285

Abstract: A method for evaluating a specimen, the method can include positioning an energy dispersive X-ray (EDX) detector at a first position; scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture of an EDX detector tip; detecting, by the EDX detector, x-ray photons emitted from the flat surface as a result of the scanning of the flat surface with the charged particle beam; after a completion of the scanning of the flat surface, positioning the EDX detector at a second position in which a distance between the EDX detector tip and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and wherein a projection of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.

公开(公告)号：US20190189391A1

公开(公告)日：2019-06-20

申请号：US16279538

申请日：2019-02-19

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Alon Litman ,  Efim Vinnitsky

IPC: H01J37/244 ,  H01J37/20 ,  H01J37/28 ,  H01J37/285

CPC classification number: H01J37/244 ,  H01J37/20 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/024 ,  H01J2237/2445 ,  H01J2237/2807

Abstract: A method for evaluating a specimen, the method can include positioning an energy dispersive X-ray (EDX) detector at a first position; scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture of an EDX detector tip; detecting, by the EDX detector, x-ray photons emitted from the flat surface as a result of the scanning of the flat surface with the charged particle beam; after a completion of the scanning of the flat surface, positioning the EDX detector at a second position in which a distance between the EDX detector tip and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and wherein a projection of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.

公开(公告)号：US09958501B1

公开(公告)日：2018-05-01

申请号：US15060245

申请日：2016-03-03

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Amir Wachs ,  Alon Litman ,  Efim Vinnitsky

IPC: H01J37/26 ,  G01R31/305 ,  G01R1/07 ,  G01R1/18

CPC classification number: G01R31/305 ,  G01R1/07 ,  G01R1/18

Abstract: A system for electrically testing an object, the system may include a scanning electron microscope that comprises a column; and nano-probe modules that are mechanically connected to the column; wherein the column is configured to illuminate areas of the object, with a beam of charged particles; wherein nano-probes of the nano-probe modules are configured to electrically contact elements of the object, during electrical tests of the object, wherein the elements of the object are located within the areas of the object.

公开(公告)号：US09818577B2

公开(公告)日：2017-11-14

申请号：US15005949

申请日：2016-01-25

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Alon Litman ,  Efim Vinnitsky

IPC: H01J37/244 ,  H01J37/285 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/20 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/024 ,  H01J2237/2445 ,  H01J2237/2807

Abstract: A method for evaluating a specimen, the method can include positioning an energy dispersive X-ray (EDX) detector at a first position; scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture of an EDX detector tip; detecting, by the EDX detector, x-ray photons emitted from the flat surface as a result of the scanning of the flat surface with the charged particle beam; after a completion of the scanning of the flat surface, positioning the EDX detector at a second position in which a distance between the EDX detector tip and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and wherein a projection of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.

公开(公告)号：US09805906B1

公开(公告)日：2017-10-31

申请号：US15271100

申请日：2016-09-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Efim Vinnitsky ,  Samuel Ives Nackash ,  Shmuel Barak Mizrahi ,  Natan Schlimoff

IPC: H01J37/147 ,  H01J37/20 ,  G03F1/00 ,  H01J37/28

CPC classification number: H01J37/28 ,  G01B11/002 ,  G01B11/028 ,  H01J37/20 ,  H01J2237/20285 ,  H01J2237/20292

Abstract: A mirror support module having a body that includes an internal portion surrounding an inner space, an external portion, an aperture formed in the body and an intermediate region that extends between a segment of the internal portion and the aperture. When the intermediate region is subjected to a force directed in a first direction, the intermediate region can be moved in the first direction towards the aperture to reduce an area of the aperture while the external portion remains stable regardless of movement of the intermediate region.