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公开(公告)号：US10074513B2
公开(公告)日：2018-09-11
申请号：US15414517
申请日：2017-01-24
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Alon Litman , Efim Vinnitsky , Ofir Arzouan , Igor Petrov
IPC: H01J37/244 , H01J37/28 , H01J37/20
CPC classification number: H01J37/244 , H01J37/145 , H01J37/20 , H01J37/28 , H01J2237/024 , H01J2237/032 , H01J2237/047 , H01J2237/2445 , H01J2237/24475 , H01J2237/2448
Abstract: A method for evaluating a specimen includes positioning a detector in an inserted position in which a first distance between a tip of the detector and a plane extending along a surface of the specimen is less than a distance between the plane and a tip of charged particle beam optics. While maintaining the detector at the inserted position, the surface of the specimen is scanned by a primary beam that exits from the tip of the charged particle beam optics. The detector detects x-ray photons and/or charged particles emitted or reflected from the specimen as a result of scanning the specimen with the primary beam. After completion of the scanning, the detector is positioned at a retracted position in which a second distance between the tip of the detector and the plane exceeds a distance between the tip of the charged particle beam optics and the plane.
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公开(公告)号：US20170213697A1
公开(公告)日：2017-07-27
申请号：US15005949
申请日：2016-01-25
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Alon Litman , Efim Vinnitsky
IPC: H01J37/285 , H01J37/20 , H01J37/28 , H01J37/244
CPC classification number: H01J37/244 , H01J37/20 , H01J37/28 , H01J37/285 , H01J2237/024 , H01J2237/2445 , H01J2237/2807
Abstract: A method for evaluating a specimen, the method can include positioning an energy dispersive X-ray (EDX) detector at a first position; scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture of an EDX detector tip; detecting, by the EDX detector, x-ray photons emitted from the flat surface as a result of the scanning of the flat surface with the charged particle beam; after a completion of the scanning of the flat surface, positioning the EDX detector at a second position in which a distance between the EDX detector tip and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and wherein a projection of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.
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公开(公告)号：US20210151214A1
公开(公告)日：2021-05-20
申请号：US16689567
申请日：2019-11-20
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Igor Krivts (Krayvitz) , Efim Vinnitsky , Yoram Uziel , Benzion Sender , Ron Naftali
Abstract: A method and a system. The system may include (a) evaluation units, (b) an object distribution system for receiving the objects and distributing the objects between the evaluation units, and (c) at least one controller. Each evaluation unit may include (i) a chamber housing that has an inner space, (ii) a chuck, (iii) a movement system that is configured to move the chuck, and (iv) a charged particle module that is configured to irradiate the object with a charged particle beam, and to detect particles emitted from the object. In each evaluation unit a length of the inner space is smaller than twice a length of the object, and a width of the inner space is smaller than twice a width of the object.
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公开(公告)号：US20190085968A1
公开(公告)日：2019-03-21
申请号：US15709271
申请日：2017-09-19
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Erez Admoni , Efim Vinnitsky
IPC: F16H57/04
Abstract: A method and a lubrication system for lubricating a transmission system component. The lubrication system may include a lubrication system reservoir for storing a lubrication liquid; and a distribution system. The distribution system may be configured to refill, with the lubrication liquid, a transmission system reservoir that is configured to lubricate the transmission system component. The refill occurs while the transmission system component and the lubrication system are positioned within a vacuum chamber.
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公开(公告)号：US20170213696A1
公开(公告)日：2017-07-27
申请号：US15414517
申请日：2017-01-24
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Alon Litman , Efim Vinnitsky , Ofir Arzouan , Igor Petrov
IPC: H01J37/244 , H01J37/20 , H01J37/28
CPC classification number: H01J37/244 , H01J37/145 , H01J37/20 , H01J37/28 , H01J2237/024 , H01J2237/032 , H01J2237/047 , H01J2237/2445 , H01J2237/24475 , H01J2237/2448
Abstract: A method for evaluating a specimen includes positioning a detector in an inserted position in which a first distance between a tip of the detector and a plane extending along a surface of the specimen is less than a distance between the plane and a tip of charged particle beam optics. While maintaining the detector at the inserted position, the surface of the specimen is scanned by a primary beam that exits from the tip of the charged particle beam optics. The detector detects x-ray photons and/or charged particles emitted or reflected from the specimen as a result of scanning the specimen with the primary beam. After completion of the scanning, the detector is positioned at a retracted position in which a second distance between the tip of the detector and the plane exceeds a distance between the tip of the charged particle beam optics and the plane.
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Patent Agency Ranking
公开(公告)号：US11177048B2
公开(公告)日：2021-11-16
申请号：US16689567
申请日：2019-11-20
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Igor Krivts (Krayvitz) , Efim Vinnitsky , Yoram Uziel , Benzion Sender , Ron Naftali
Abstract: A method and a system. The system may include (a) evaluation units, (b) an object distribution system for receiving the objects and distributing the objects between the evaluation units, and (c) at least one controller. Each evaluation unit may include (i) a chamber housing that has an inner space, (ii) a chuck, (iii) a movement system that is configured to move the chuck, and (iv) a charged particle module that is configured to irradiate the object with a charged particle beam, and to detect particles emitted from the object. In each evaluation unit a length of the inner space is smaller than twice a length of the object, and a width of the inner space is smaller than twice a width of the object.
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公开(公告)号：US10211026B2
公开(公告)日：2019-02-19
申请号：US15703925
申请日：2017-09-13
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Alon Litman , Efim Vinnitsky
IPC: H01J37/244 , H01J37/20 , H01J37/285 , H01J37/28
Abstract: A method for evaluating a specimen, the method can include positioning an energy dispersive X-ray (EDX) detector at a first position; scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture of an EDX detector tip; detecting, by the EDX detector, x-ray photons emitted from the flat surface as a result of the scanning of the flat surface with the charged particle beam; after a completion of the scanning of the flat surface, positioning the EDX detector at a second position in which a distance between the EDX detector tip and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and wherein a projection of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.
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公开(公告)号：US10074512B2
公开(公告)日：2018-09-11
申请号：US14795795
申请日：2015-07-09
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Chun-Hsiang Yen , Barak Dee-Noor , Yuval Gronau , Ronen Hagai , Efim Vinnitsky , Yohanan Madmon
CPC classification number: H01J37/24 , G03F7/70875 , H01J37/20 , H01J2237/002 , H01J2237/20278 , H01L21/67248 , H01L21/68 , H01L22/12
Abstract: A system that may include a chamber, a motorized system, a chuck, a controller, multiple temperature sensors and a cooling module; wherein the chuck is configured to support an object that is positioned within the chamber; wherein the motorized system is configured to move the chuck in relation to the chamber; wherein the multiple temperature sensors are configured to sense multiple temperatures of at least one point within the chamber; wherein the cooling module is configured to cool a unit of the motorized system; and wherein the controller is configured to control the cooling module in response to the multiple temperatures.
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公开(公告)号：US20180012728A1
公开(公告)日：2018-01-11
申请号：US15703925
申请日：2017-09-13
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Alon Litman , Efim Vinnitsky
IPC: H01J37/244 , H01J37/28 , H01J37/20 , H01J37/285
CPC classification number: H01J37/244 , H01J37/20 , H01J37/28 , H01J37/285 , H01J2237/024 , H01J2237/2445 , H01J2237/2807
Abstract: A method for evaluating a specimen, the method can include positioning an energy dispersive X-ray (EDX) detector at a first position; scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture of an EDX detector tip; detecting, by the EDX detector, x-ray photons emitted from the flat surface as a result of the scanning of the flat surface with the charged particle beam; after a completion of the scanning of the flat surface, positioning the EDX detector at a second position in which a distance between the EDX detector tip and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and wherein a projection of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.
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公开(公告)号：US09817208B1
公开(公告)日：2017-11-14
申请号：US15271093
申请日：2016-09-20
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Efim Vinnitsky , Samuel Ives Nackash , Yohanan Madmon
CPC classification number: G02B7/181 , G01B5/0004 , G01B11/026 , G01B15/00 , H01J37/20 , H01J37/28 , H01J2237/2007
Abstract: A chuck interface that includes a mirror; an inner surface that is shaped and sized to match a portion of a sidewall of a chuck; wherein the inner surface is mechanically coupled to the mirror; and at least one interfacing element for assisting in attaching the chuck to the mirror; and wherein a difference between a thermal expansion coefficient of the chuck and a thermal expansion coefficient of the mirror does not exceed 0.5 micron*Kelvin per Meter.
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