公开(公告)号：US11774244B2

公开(公告)日：2023-10-03

申请号：US17515271

申请日：2021-10-29

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5712 ,  G01C19/5719

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US20210381834A1

公开(公告)日：2021-12-09

申请号：US16894717

申请日：2020-06-05

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US20160349054A1

公开(公告)日：2016-12-01

申请号：US14924078

申请日：2015-10-27

Applicant: Analog Devices, Inc.

Inventor： Eugene Oh Hwang ,  Sunil Ashok Bhave

IPC: G01C19/5719

CPC classification number: G01C19/5656 ,  G01C19/5649

Abstract: One-axis and two-axis vibratory gyroscopes include a unitary resonator structure conceptually having four beams interconnected in a cross-hatch configuration. While each beam can be considered a unitary piece of material, each beam's attachment to two cross beams conceptually divides the resonant beam into a central section between the attachment points and two tail sections aft of the attachment points. The attachment points are preferably nodal points of the beam with respect to both a drive mode shape and a sense mode shape of the beam for the resonant mode in which the resonator is configured to operate. Thus, the location where two beams intersect is preferably a nodal point for both beams. The tail sections of each beam allow the resonant mode of the resonator to be carefully configured.

Abstract translation: 单轴和双轴振动陀螺仪包括概念上具有以横舱口配置互连的四个梁的单一谐振器结构。 虽然每个光束可以被认为是一个整体的材料，但是每个光束与两个横梁的连接概念上将谐振光束分成连接点和连接点后面的两个尾部之间的中心部分。 连接点优选地相对于谐振器被配置为操作的谐振模式的光束的驱动模式形状和感测模式形状两者的波束的节点。 因此，两个光束相交的位置优选地是两个光束的节点。 每个光束的尾部部分允许仔细配置谐振器的谐振模式。

公开(公告)号：US20160349053A1

公开(公告)日：2016-12-01

申请号：US14924085

申请日：2015-10-27

Applicant: Analog Devices, Inc.

Inventor： Eugene Oh Hwang ,  Sunil Ashok Bhave

IPC: G01C19/5656

CPC classification number: G01C19/5656 ,  G01C19/5649

Abstract: A single-axis resonating beam gyroscope uses a special arrangement of support tethers that maximizes the Q (quality factor) and minimizes stress sensitivity. The tethers are located at the nodal points of the beam with respect to a predetermined drive mode and are approximately one-fourth the length of the beam. Also, the tethers do not extend above or through the nodal points of the beam, which would be difficult to produce in typical MEMS fabrication processes. Embodiments typically use electrostatic drive and sense transduction. Trim electrodes may be used to compensate for any erroneous modal coupling.

Abstract translation: 单轴谐振光束陀螺仪使用支撑系绳的特殊布置，使Q（品质因数）最大化并使应力灵敏度最小化。 系绳相对于预定的驱动模式位于梁的节点处，并且大约是梁的长度的四分之一。 此外，系绳不会在光束的节点之上或之上延伸，这在典型的MEMS制造工艺中将难以产生。 实施例通常使用静电驱动和感测传导。 修剪电极可用于补偿任何错误的模态耦合。

公开(公告)号：US20160111625A1

公开(公告)日：2016-04-21

申请号：US14515929

申请日：2014-10-16

Applicant: Analog Devices, Inc.

Inventor： Thomas Kieran Nunan ,  Eugene Oh Hwang ,  Sunil Ashok Bhave

IPC: H01L41/047 ,  H01L41/113

CPC classification number: H01L41/047 ,  G01C19/5769 ,  H01L41/0475 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/0805 ,  H01L41/113 ,  H01L41/29 ,  H01L41/332

Abstract: A single photo mask can be used to define the three critical layers for the piezoelectric MEMS device, specifically the top electrode layer, the piezoelectric material layer, and the bottom electrode layer. Using a single photo mask removes the misalignment source caused by using multiple photo masks. Furthermore, in certain exemplary embodiments, all electrical interconnects use underpass interconnect. This simplifies the process for defining the device electrodes and the process sequence for achieving self-alignment between the piezoelectric element and the top and bottom electrodes. This self-alignment is achieved by using an oxide hard mask to etch the critical region of the top electrode, the piezoelectric material, and the bottom electrode with one mask and different etch chemistries depending on the layer being etched.

Abstract translation: 可以使用单个光掩模来定义压电MEMS器件的三个关键层，特别是顶部电极层，压电材料层和底部电极层。 使用单张照片掩模可以移除使用多张照片遮罩造成的未对准光源。 此外，在某些示例性实施例中，所有电互连使用地下通道互连。 这简化了用于限定器件电极的过程和用于实现压电元件与顶部和底部电极之间的自对准的工艺顺序。 这种自对准是通过使用氧化物硬掩模通过一个掩模蚀刻顶部电极，压电材料和底部电极的关键区域而实现的，这取决于被蚀刻的层而不同的蚀刻化学物质。