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公开(公告)号：US11255873B2
公开(公告)日：2022-02-22
申请号：US16129755
申请日：2018-09-12
Applicant: Analog Devices, Inc.
Inventor： Xin Zhang , Gaurav Vohra , Michael Judy
IPC: G01P15/125 , G01P15/08
Abstract: Z-axis teeter-totter accelerometers with embedded movable structures are disclosed. The teeter-totter accelerometer may include an embedded mass which pivots or translates out-of-plane from the teeter-totter beam. The pivoting or translating embedded mass may be positioned to increase the sensitivity of the z-axis accelerometer by providing greater z-axis displacement than the teeter-totter beam itself exhibits.
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公开(公告)号：US20210381832A1
公开(公告)日：2021-12-09
申请号：US17340859
申请日：2021-06-07
Applicant: Analog Devices, Inc.
Inventor： Igor P. Prikhodko , Gaurav Vohra
IPC: G01C19/5712
Abstract: A MEMS device is provided comprising a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; a drive structure comprising at least one electrode and configured to drive the proof mass to move along the resonator axis; and a pivoting linkage coupled to the proof mass at first and second ends of the pivoting linkage, the first end comprising a first fixed pivot and the second end comprising a second fixed pivot, the pivoting linkage comprising: a first bar configured to pivot about the first fixed pivot and a first dynamic pivot; a second bar configured to pivot about the second fixed pivot and a second dynamic pivot; and a third bar configured to pivot about the first dynamic pivot and the second dynamic pivot, wherein the proof mass moves along the resonator axis when the pivoting linkage pivots.
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公开(公告)号：US10451454B2
公开(公告)日：2019-10-22
申请号：US16184664
申请日：2018-11-08
Applicant: Analog Devices, Inc.
Inventor： Gaurav Vohra , William A. Clark , Mehrnaz Motiee
Abstract: Various embodiments mitigate the risk of frequency-lock in systems having multiple resonators by dynamically changing the frequency at which at least one of the resonators is driven. More particularly, the drive frequency of at least one of the resonators is changed often enough that the multiple resonators do not have time to achieve frequency lock. Changes in the oscillation of the resonators may be analyzed to determine, for example, acceleration of such systems. Some embodiments implement self-test by assessing expected performance of a system with toggling drive frequencies. More particularly, some embodiments implement self-test by artificially inducing displacement of a movable member of a system.
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公开(公告)号：US20190152766A1
公开(公告)日：2019-05-23
申请号：US16254065
申请日：2019-01-22
Applicant: Analog Devices, Inc.
Inventor： Jinbo Kuang , Gaurav Vohra
Abstract: Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.
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公开(公告)号：US10239746B2
公开(公告)日：2019-03-26
申请号：US15650822
申请日：2017-07-14
Applicant: Analog Devices, Inc.
Inventor： Jinbo Kuang , Gaurav Vohra
Abstract: Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.
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Patent Agency Ranking
公开(公告)号：US10168194B2
公开(公告)日：2019-01-01
申请号：US14998168
申请日：2015-12-24
Applicant: Analog Devices, Inc.
Inventor： Gaurav Vohra , William A. Clark , Mehrnaz Motiee
Abstract: Various embodiments mitigate the risk of frequency-lock in systems having multiple resonators by dynamically changing the frequency at which at least one of the resonators is driven. More particularly, the drive frequency of at least one of the resonators is changed often enough that the multiple resonators do not have time to achieve frequency lock. Changes in the oscillation of the resonators may be analyzed to determine, for example, acceleration of such systems. Some embodiments implement self-test by assessing expected performance of a system with toggling drive frequencies. More particularly, some embodiments implement self-test by artificially inducing displacement of a movable member of a system.
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公开(公告)号：US20170184644A1
公开(公告)日：2017-06-29
申请号：US14998168
申请日：2015-12-24
Applicant: Analog Devices, Inc.
Inventor： Gaurav Vohra , William A. Clark
IPC: G01R23/02
Abstract: Various embodiments mitigate the risk of frequency-lock in systems having multiple resonators by dynamically changing the frequency at which at least one of the resonators is driven. More particularly, the drive frequency of at least one of the resonators is changed often enough that the multiple resonators do not have time to achieve frequency lock. Changes in the oscillation of the resonators may be analyzed to determine, for example, acceleration of such systems. Some embodiments implement self-test by assessing expected performance of a system with toggling drive frequencies. More particularly, some embodiments implement self-test by artificially inducing displacement of a movable member of a system.
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公开(公告)号：US20240003684A1
公开(公告)日：2024-01-04
申请号：US18300053
申请日：2023-04-13
Applicant: Analog Devices, Inc.
Inventor： Igor P. Prikhodko , Gaurav Vohra , Arthur Yurievich Savchenko , Xin Zhang
IPC: G01C19/5712
CPC classification number: G01C19/5712
Abstract: A gyroscope includes a substrate, a proof mass coupled to the substrate and configured to move in direction of an X axis and in direction of a Y axis orthogonal to the first axis, an X axis shuttle to selectively drive the proof mass along the X axis as a drive axis or sense movement of the proof mass along the X axis as a sense axis in response to the proof mass driven along the Y axis as the drive axis, and a Y axis shuttle to selectively sense movement of the proof mass along the Y axis as a sense axis in response to the proof mass driven along the X axis or drive the proof mass along the Y axis as the drive axis. The X axis shuttle is symmetric to the Y axis shuttle along a diagonal axis that is diagonal to both the X axis and the Y axis. The X and Y axis shuttles have gaps designed for a predetermined DC voltage to generate spring softening (negative cubic nonlinearity) that is equal to spring hardening (positive cubic nonlinearity), ensuring linear motion at high amplitudes (⅓ of the capacitive gap).
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公开(公告)号：US11692825B2
公开(公告)日：2023-07-04
申请号：US17341258
申请日：2021-06-07
Applicant: Analog Devices, Inc.
Inventor： Gaurav Vohra
IPC: G01C19/5712
CPC classification number: G01C19/5712
Abstract: A MEMS device is provided comprising a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis; a drive structure coupled to the mass and configured to cause the mass to move along the first axis; a sense structure coupled to the mass and configured to detect motion of the mass along the second axis; a stress relief structure coupled to one of the drive structure or the sense structure; and at least one anchor coupled to an underlying substrate of the MEMS device, wherein the stress relief structure is coupled to the at least one anchor and the at least one anchor is disposed outside of the stress relief structure.
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公开(公告)号：US11686581B2
公开(公告)日：2023-06-27
申请号：US17340859
申请日：2021-06-07
Applicant: Analog Devices, Inc.
Inventor： Igor P. Prikhodko , Gaurav Vohra
IPC: G01C19/5712
CPC classification number: G01C19/5712
Abstract: A MEMS device is provided comprising a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; a drive structure comprising at least one electrode and configured to drive the proof mass to move along the resonator axis; and a pivoting linkage coupled to the proof mass at first and second ends of the pivoting linkage, the first end comprising a first fixed pivot and the second end comprising a second fixed pivot, the pivoting linkage comprising: a first bar configured to pivot about the first fixed pivot and a first dynamic pivot; a second bar configured to pivot about the second fixed pivot and a second dynamic pivot; and a third bar configured to pivot about the first dynamic pivot and the second dynamic pivot, wherein the proof mass moves along the resonator axis when the pivoting linkage pivots.
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