公开(公告)号：US06267009B1

公开(公告)日：2001-07-31

申请号：US09505489

申请日：2000-02-16

申请人： Ulfert Drewes ,  Elke Schmidt ,  Andreas Rossberg ,  Frank Hegner ,  Thomas Velten

发明人： Ulfert Drewes ,  Elke Schmidt ,  Andreas Rossberg ,  Frank Hegner ,  Thomas Velten

IPC分类号： G01L912

CPC分类号： G01L9/0075 ,  G01L9/0044

摘要： These capacitive pressure sensor cells have joints between substrates and diaphragms being both pressure and/or tension-proof and high-vacuum-tight and long-term-stable. The sensor cell comprises a ceramic substrate (1) having a cylindrical surface (11), a major surfaces (12, 13). The major surface (12) includes a concave central area (121) merging, in the direction of and up to said cylindrical surface (11), into a convex surface (124) having a vertex line (125) and forming a planar ring surface (126) in its area. An electrode (122) is located in the concave area (121). An electrical connection (123) extends from electrode (122) through the substrate (1) to surface (13). A ceramic diaphragm (5) has a planar inner surface (51) on which an electrode (52) is located and which rests on the ring surface (126) of the substrate (1). The diaphragm (5) is joined to the substrate by an active brazing solder forming a circumferential wedge zone (91) in the area of the substrate between the ring surface (126) and the cylindrical surface (11). An electrical connection to the electrode (52) is made through the wedge zone (91). Respective differential pressure sensors can comprise a central substrate (2) and two outer diaphragms (61, 71) or a central diaphragm (8) and two outer substrates (3, 4).

摘要翻译： 这些电容式压力传感器单元在基板和隔膜之间具有接头，其压力和/或抗张力和高真空密封性和长期稳定性。 传感器单元包括具有圆柱形表面（11），主表面（12,13）的陶瓷基底（1）。 主表面（12）包括凹入的中心区域（121），其在所述圆柱形表面（11）的方向上并且与所述圆柱形表面（11）一起合并成具有顶点线（125）的凸形表面（124）并形成平面环表面 （126）。 电极（122）位于凹部（121）中。 电连接（123）从电极（122）穿过衬底（1）延伸到表面（13）。 陶瓷膜片（5）具有平面的内表面（51），电极（52）位于该平面内表面上，并且该陶瓷膜片位于衬底（1）的环表面（126）上。 膜片（5）通过在环形表面（126）和圆柱形表面（11）之间的衬底区域中形成周向楔形区域（91）的活性钎焊焊料与衬底接合。 通过楔形区域（91）制成与电极（52）的电连接。 各差压传感器可以包括中央基板（2）和两个外隔膜（61,71）或中央隔膜（8）和两个外基板（3,4）。

公开(公告)号：US06925884B2

公开(公告)日：2005-08-09

申请号：US10472766

申请日：2002-04-04

申请人： Frank Hegner ,  Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt

发明人： Frank Hegner ,  Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt

IPC分类号： G01L13/06 ,  G01L9/00 ,  G01L13/02 ,  G01L15/00

CPC分类号： G01L9/0073 ,  G01L9/0075 ,  G01L13/025

摘要： In a differential pressure sensor, the measurement value is corrected with the help of the nominal pressure NP. In this way, influences on the measurement value because of deformations of the body of the differential pressure sensor and change in the material stiffness of the membrane are decreased.

摘要翻译： 在差压传感器中，借助标称压力NP来校正测量值。 以这种方式，由于差压传感器的主体的变形和膜的材料刚度的变化，对测量值的影响减小。

公开(公告)号：US20120174681A1

公开(公告)日：2012-07-12

申请号：US13383696

申请日：2010-06-22

申请人： Ulfert Drewes ,  Thomas Uehlin ,  Elke Schmidt ,  Andreas Rossberg

发明人： Ulfert Drewes ,  Thomas Uehlin ,  Elke Schmidt ,  Andreas Rossberg

IPC分类号： G01L9/12

CPC分类号： G01L9/0075

摘要： A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between them. The measuring membrane has a first electrode facing the platform, and the platform has at least a second electrode facing the measuring membrane. The capacitance between the first and second electrodes depends on the difference between a pressure externally acting on the measuring membrane and a pressure reigning in the reference pressure chamber, wherein the joint has a thickness d, which defines an equilibrium distance between the measuring membrane and the front side of the platform. On the front side of the platform, a support layer is arranged, which comprises an inorganic insulator, wherein the support layer has a thickness of at least 0.2, and wherein the second electrode is arranged on the support layer.

摘要翻译： 一种电容式压力测量单元，包括陶瓷平台和陶瓷测量膜，它们沿接头压紧，在它们之间形成参考压力室。 测量膜具有面向平台的第一电极，并且平台具有面向测量膜的至少第二电极。 第一和第二电极之间的电容取决于外部作用在测量膜上的压力与参考压力室中的压力差之间的差异，其中接头具有厚度d，其限定了测量膜与测量膜之间的平衡距离 平台前方 在平台的前侧，布置有支撑层，其包括无机绝缘体，其中支撑层具有至少0.2的厚度，并且其中第二电极布置在支撑层上。

公开(公告)号：US20050103109A1

公开(公告)日：2005-05-19

申请号：US10498515

申请日：2002-12-18

申请人： Frank Hegner ,  Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt

发明人： Frank Hegner ,  Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt

IPC分类号： G01L19/06 ,  G01L7/00 ,  G01L9/00 ,  G01L9/12

CPC分类号： G01L9/0075

摘要： A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R—Si—X3, R1R2—Si—X2, R1R2R3—Si—X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an —OH (silanol), —X (halide, e.g. —Cl), —OR (ester, e.g. —OCH3), —NH2 (amine), or —SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes —Si—NH—Si—, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type Ry—Me—Xz, with Me=e.g. Zr, Ti.

公开(公告)号：US06675654B2

公开(公告)日：2004-01-13

申请号：US10138519

申请日：2002-05-06

申请人： Frank Hegner ,  Andreas Rossberg ,  Elke Schmidt ,  Ulfert Drewes ,  Michael Kirst ,  Bernhard Walter

发明人： Frank Hegner ,  Andreas Rossberg ,  Elke Schmidt ,  Ulfert Drewes ,  Michael Kirst ,  Bernhard Walter

IPC分类号： G01L708

CPC分类号： B01D39/2093

摘要： A chamber in the interior of a housing communicates with the environment of the housing by means of a gas esxchange path, wherein a filter element with a hydrophobic and/or hydrophobicized, nanoporous material is placed in the gas exchange path. The chamber serves, e.g. to accomodate electronic circuitry, or it is chamed as a reference pressure chamber of a relative pressure sensor. The relative pressure sensor according to the present invention for capturing a measured pressure with respect to a reference pressure comprises a reference pressure path 23 which extends between a surface which can be exposed to the reference pressure and an opening in a reference pressure chamber 22, a filter element 30 which is arranged in the reference pressure path comprising a hydrophobic or hydrophobicized, nanoporous material. The filter element allows pressure compensation on account of its permeability to N2 and O2, while water molecules are selectively blocked. The nanoporous material preferably comprises an inorganic material, in particular Al2O3, TiO2 or SiO2. The nanoporous material is preferably hydrophobic and/or can be impregnated with a hydrophobic layer, preferably a silane, in order to optimize the hydrophobic properties.

摘要翻译： 壳体内部的腔室通过气体交换路径与壳体的环境连通，其中具有疏水和/或疏水化的纳米多孔材料的过滤元件被放置在气体交换路径中。 该室供应，例如 以适应电子电路，或者将其作为相对压力传感器的参考压力室进行加工。 根据本发明的用于捕获相对于参考压力的测量压力的相对压力传感器包括在可暴露于参考压力的表面和参考压力室22中的开口之间延伸的参考压力路径23， 过滤元件30布置在参考压力路径中，包括疏水或疏水化的纳米多孔材料。 过滤元件由于其对N2和O2的渗透性而允许压力补偿，而水分子被选择性地阻挡。 纳米多孔材料优选包含无机材料，特别是Al 2 O 3，TiO 2或SiO 2。 纳米多孔材料优选是疏水性的和/或可以用疏水层，优选硅烷浸渍，以优化疏水性质。

公开(公告)号：US06422085B1

公开(公告)日：2002-07-23

申请号：US09354628

申请日：1999-07-16

申请人： Frank Hegner ,  Andreas Rossberg ,  Ulfert Drewes ,  Elke Schmidt

发明人： Frank Hegner ,  Andreas Rossberg ,  Ulfert Drewes ,  Elke Schmidt

IPC分类号： G01L700

CPC分类号： G01L19/0654 ,  G01L19/0636

摘要： In this flush-diaphragm relative pressure sensor (1), the reference air reaches its current dew point before getting into the interior of the housing. The sensor has a capacitive, resistive, or piezoelectric sensing element (2) with a diaphragm (21) an external surface of which comes into direct contact with a medium under pressure. A housing (7) has an interior space (71) and a front portion (72) open across the interior space in the vicinity of which the diaphragm closes the interior space such that the front portion projects beyond the diaphragm. Further, the housing has a bore (721) extending through the front portion from an outer side thereof to the interior space for guiding the reference air. The bore is closed from the outer side with an open-pore, highly heat-conducting and hydrophobic filter (8), so that the filter and the diaphragm are at the same or nearly the same temperature. The filter can be made of a sintered metal, e.g. high-grade steel or bronze, or of a metallic sponge, e.g. titanium or zirconium.

摘要翻译： 在该冲洗隔膜相对压力传感器（1）中，参考空气在进入壳体内部之前达到其目前的露点。 传感器具有电容式，电阻式或压电传感元件（2），其具有隔膜（21），其外表面与压力介质直接接触。 壳体（7）具有内部空间（71）和横跨内部空间开放的前部（72），隔膜在其附近敞开内部空间，使得前部突出超过隔膜。 此外，壳体具有从其外侧延伸穿过前部到内部空间的孔（721），用于引导参考空气。 孔从外侧封闭，具有开孔，高度导热和疏水的过滤器（8），使得过滤器和隔膜处于相同或接近相同的温度。 过滤器可以由烧结金属制成，例如， 高级钢或青铜，或金属海绵，例如。 钛或锆。

公开(公告)号：US20130263670A1

公开(公告)日：2013-10-10

申请号：US13993111

申请日：2011-11-23

申请人： Peter Selders ,  Andreas Rossberg ,  Elke Schmidt ,  Andrea Berlinger

发明人： Peter Selders ,  Andreas Rossberg ,  Elke Schmidt ,  Andrea Berlinger

IPC分类号： G01L7/00 ,  B23K31/02

CPC分类号： G01L7/00 ,  B23K31/02 ,  G01L9/0044 ,  G01L9/0075

摘要： A method for manufacturing a pressure sensor, comprising: providing a ceramic platform, a ceramic measuring membrane, and an intermediate ring; providing an active braze material by means of gas phase deposition at least on a first surface section of a first surface and on a second surface section of a second surface. The first surface is a platform surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the platform by means of the active hard solder, or braze. The second surface is a measuring membrane surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the measuring membrane by means of the active hard solder, or braze. The intermediate ring is positioned between the measuring membrane and the platform; the active hard solder, or braze, is heated in a soldering, or brazing, process, wherein the intermediate ring remains essentially solid during the soldering, or brazing, process.

摘要翻译： 一种制造压力传感器的方法，包括：提供陶瓷平台，陶瓷测量膜和中间环; 通过气相沉积至少在第一表面的第一表面部分和第二表面的第二表面部分上提供活性钎焊材料。 第一表面是平台表面，其将通过活性硬焊料或钎焊或中间环的表面与中间环连接，该表面将通过活性硬的 焊接或钎焊。 第二表面是测量膜表面，其将通过活性硬焊料或钎焊或中间环的表面与中间环连接，所述中间环将与测量膜连接，借助于 活性硬焊料或钎焊。 中间环位于测量膜和平台之间; 活性硬焊料或钎焊在焊接或钎焊工艺中被加热，其中中间环在焊接或钎焊过程中保持基本上固体。

公开(公告)号：US09459169B2

公开(公告)日：2016-10-04

申请号：US13993111

申请日：2011-11-23

申请人： Peter Selders ,  Andreas Rossberg ,  Elke Schmidt ,  Andrea Berlinger

发明人： Peter Selders ,  Andreas Rossberg ,  Elke Schmidt ,  Andrea Berlinger

IPC分类号： G06K5/04 ,  G06K7/10 ,  G06K9/00 ,  G01L7/00 ,  G01L9/00 ,  B23K31/02

CPC分类号： G01L7/00 ,  B23K31/02 ,  G01L9/0044 ,  G01L9/0075

摘要： A method for manufacturing a pressure sensor, comprising: providing a ceramic platform, a ceramic measuring membrane, and an intermediate ring; providing an active braze material by means of gas phase deposition at least on a first surface section of a first surface and on a second surface section of a second surface. The first surface is a platform surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the platform by means of the active hard solder, or braze. The second surface is a measuring membrane surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the measuring membrane by means of the active hard solder, or braze. The intermediate ring is positioned between the measuring membrane and the platform; the active hard solder, or braze, is heated in a soldering, or brazing, process, wherein the intermediate ring remains essentially solid during the soldering, or brazing, process.

摘要翻译： 一种制造压力传感器的方法，包括：提供陶瓷平台，陶瓷测量膜和中间环; 通过气相沉积至少在第一表面的第一表面部分和第二表面的第二表面部分上提供活性钎焊材料。 第一表面是平台表面，其将通过活性硬焊料或钎焊或中间环的表面与中间环连接，该表面将通过活性硬的 焊接或钎焊。 第二表面是测量膜表面，其将通过活性硬焊料或钎焊或中间环的表面与中间环连接，所述中间环将与测量膜连接，借助于 活性硬焊料或钎焊。 中间环位于测量膜和平台之间; 活性硬焊料或钎焊在焊接或钎焊工艺中被加热，其中中间环在焊接或钎焊过程中保持基本上固体。

公开(公告)号：US06715356B2

公开(公告)日：2004-04-06

申请号：US09734739

申请日：2000-12-13

申请人： Peter Gerst ,  Karlheinz Banholzer ,  Karl Flögel ,  Thomas Uehlin ,  Frank Hegner ,  Elke Schmidt ,  Ulfert Drewes ,  Rainer Martin

发明人： Peter Gerst ,  Karlheinz Banholzer ,  Karl Flögel ,  Thomas Uehlin ,  Frank Hegner ,  Elke Schmidt ,  Ulfert Drewes ,  Rainer Martin

IPC分类号： G01L708

CPC分类号： G01L9/0075

摘要： A pressure sensor that is particularly suitable for the food industry and the measuring accuracy of which is stable over a long time, having a diaphragm seal with a separating diaphragm on which a pressure to be measured acts and having a ceramic measuring cell which is connected to the diaphragm seal exclusively by inorganic materials, is provided, in which sensor the separating diaphragm and all further sensor components coming into contact during measurement with a medium of which the pressure is to be measured are metallic.

摘要翻译： 一种特别适用于食品工业的压力传感器，其测量精度长时间是稳定的，具有隔膜密封件，隔膜在其上被测量的压力作用并具有陶瓷测量单元，该陶瓷测量单元连接到 隔离膜仅由无机材料密封，其中分离膜和所有其它传感器组件在测量期间与测量压力的介质接触的传感器是金属的。

公开(公告)号：US06848318B2

公开(公告)日：2005-02-01

申请号：US10762287

申请日：2004-01-23

申请人： Peter Gerst ,  Karlheinz Banholzer ,  Karl Flögel ,  Thomas Uehlin ,  Frank Hegner ,  Elke Schmidt ,  Ulfert Drewes ,  Rainer Martin

发明人： Peter Gerst ,  Karlheinz Banholzer ,  Karl Flögel ,  Thomas Uehlin ,  Frank Hegner ,  Elke Schmidt ,  Ulfert Drewes ,  Rainer Martin

IPC分类号： G01L9/12 ,  G01L9/00 ,  G01L19/14 ,  G01L7/08

CPC分类号： G01L9/0075

摘要： A pressure sensor that is particularly suitable inter alia for the food industry and the measuring accuracy of which is stable over a long time, having a diaphragm seal (3, 45) with a separating diaphragm (7, 53) on which a pressure (P) to be measured acts and having a ceramic measuring cell (9, 57) which is connected to the diaphragm seal (3, 45) exclusively by inorganic materials, is provided, in which sensor the separating diaphragm (7, 53) and all further sensor components coming into contact during measurement with a medium of which the pressure (P) is to be measured are metallic.

摘要翻译： 一种压力传感器，特别适用于食品工业，其测量精度长期稳定，具有隔膜密封件（3,45），隔膜密封件（3,45）具有压力（P ）作用并且具有仅由无机材料连接到隔膜密封件（3,45）的陶瓷测量单元（9,57），其中分离膜（7,53）和所有其它传感器 在测量压力（P）的介质测量时，传感器组件是金属的。